Vapor deposition tool

Abstract

The utility model relates to a vapor deposition tool. Comprising a tool shell; the air guide assembly comprises a plurality of air guide plates and air guide pipes which are arranged in the tool shell at intervals, each air guide plate is provided with a plurality of vent holes, a deposition cavity is formed between every two adjacent air guide plates, the air guide pipes penetrate through at least one air guide plate from the bottom of the tool shell, and the tool shell is divided into a bottom deposition chamber and a top deposition chamber. The gas guide plate is used for diffusing the carbon source gas, and the gas guide pipe is used for guiding the carbon source gas, so that the carbon source gas can be fully dispersed, the effective utilization rate of the carbon source gas is further improved, meanwhile, the phenomenon of local accumulation caused by blocking of the carbon source gas can be avoided, the uniformity of a gas flow field is improved, and the service life of the gas flow field is prolonged. And the vapor deposition effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of carbon-carbon composite material preparation, and particularly relates to a gas deposition tooling. Background Art

[0002] Carbon-carbon composite materials are all-carbon composite materials made of carbon fibers and their fabrics as reinforcing materials and carbon as the matrix through processing and carbonization treatments. They have a series of excellent properties such as low density, small coefficient of thermal expansion, high temperature resistance, corrosion resistance, good thermal shock performance, acid resistance, alkali resistance, salt resistance, and wear resistance, and are widely used in the fields of aerospace, military, automotive, and civil photovoltaic industries. As an important consumable in the photovoltaic crystal pulling process, the thermal field is currently undergoing the process of replacing isostatic graphite with carbon-carbon composite materials, and benefiting from the substantial expansion of silicon wafer enterprises and the transformation to large size and N-type, the industry is growing rapidly.

[0003] In the prior art, carbon-carbon composite materials are often obtained by chemical vapor deposition. Chemical vapor deposition is to heat the product to the decomposition temperature of the carbon source gas, mix the carbon source gas and the dilution gas in a certain proportion, introduce them into the furnace, pyrolyze the carbon-hydrogen gas, deposit carbon in the preform, and play a role in densifying around and in the voids of the carbon fibers.

[0004] However, in the process of the inventors of the present application implementing the technical solution of the utility model in the embodiments of the present application, it is found that the above-mentioned technology has at least the following technical problems:

[0005] In the gas deposition densification process, when the carbon source gas is directly introduced into the gas deposition furnace, due to the actual temperature of the carbon source gas being lower than its pyrolysis temperature and the residence time of the gas in the furnace being too short, the decomposition time of the carbon source gas entering the furnace is shortened, resulting in the carbon source gas being discharged out of the furnace without being decomposed in time, affecting the effective utilization rate of the carbon source gas. And in the gas deposition densification process, due to the carbon source gas and the dilution gas being mixed and encountering the carbon-carbon composite materials of the photovoltaic thermal field with various shapes when entering the gas deposition furnace, the uniformity of the air flow is correspondingly disturbed, easily leading to the non-uniformity of the air flow field. Summary of the Utility Model

[0006] In view of the problems existing in the prior art, an embodiment of the present application provides a gas deposition tooling, including: a tooling housing; a gas guiding assembly, including a plurality of gas guiding plates and gas guiding pipes spaced apart in the tooling housing, each gas guiding plate is provided with a plurality of ventilation holes, a deposition cavity is formed between two adjacent gas guiding plates, and the gas guiding pipe penetrates through at least one gas guiding plate from the bottom of the tooling housing, dividing the tooling housing into a bottom deposition chamber and a top deposition chamber.

[0007] Preferably, the tooling housing includes: a cover plate; a base, with the gas guide pipe vertically installed in the middle of the base; a plurality of barrel walls, with a gas guide plate installed between adjacent two barrel walls, and a deposition chamber formed between each barrel wall and the adjacent two gas guide plates. The barrel walls are stacked in sequence and vertically installed along the outer edge of the base.

[0008] Preferably, the barrel wall includes: splicing pieces, and a plurality of the splicing pieces are connected end to end to form the barrel wall, and adjacent two splicing pieces are fixed by bolts.

[0009] Preferably, the splicing piece includes: an arc plate, and two arc plates are provided, and the two arc plates are staggered and fitted to form the splicing piece, so that installation grooves are formed at both ends where the splicing piece is connected end to end.

[0010] Preferably, the cover plate includes a first cover plate, a second cover plate and a third cover plate. Storage grooves adapted to the shape of the third cover plate are formed on both the first cover plate and the second cover plate. The third cover plate is placed on the storage grooves and forms the cover plate together with the first cover plate and the second cover plate.

[0011] Preferably, the first cover plate, the second cover plate and the third cover plate are fixed by bolts.

[0012] Preferably, the gas guide plate includes a first gas plate, a second gas plate and a third gas plate. Protrusions adapted to the shape of the third gas plate are formed on both the first gas plate and the second gas plate. The third gas plate is placed on the protrusions and forms the gas guide plate together with the first gas plate and the second gas plate.

[0013] Preferably, the first gas plate, the second gas plate and the third gas plate are fixed by bolts.

[0014] Preferably, the diameter of the ventilation hole is 18 mm, and the diameter range of the gas guide plate is 120 - 160 mm.

[0015] Preferably, the bolt is made of carbon-carbon composite material.

[0016] One or more technical solutions provided in the embodiments of the present application have at least the following technical effects or advantages:

[0017] By using the gas guide plate to diffuse the carbon source gas and using the gas guide pipe to drain the carbon source gas, it is ensured that the carbon source gas can be fully dispersed, thereby improving the effective utilization rate of the carbon source gas. At the same time, it can avoid the occurrence of local accumulation caused by the blockage of the carbon source gas, thereby improving the uniformity of the gas flow field and enhancing the gas phase deposition effect. Description of the Drawings

[0018] The accompanying drawings here are incorporated into the specification and form a part of this specification, showing embodiments consistent with this application and, together with the specification, are used to explain the principles of the present invention.

[0019] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for use in the description of the embodiments or the prior art. Obviously, for those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on these drawings.

[0020] Figure 1 Shows a schematic structural diagram of a vapor deposition tooling in an embodiment of the present application;

[0021] Figure 2 Shows a partial schematic structural diagram of a base in an embodiment of the present application;

[0022] Figure 3 Shows a schematic overall structural diagram of a cover plate in an embodiment of the present application;

[0023] Figure 4 Shows a schematic structural diagram of a third cover plate in an embodiment of the present application;

[0024] Figure 5 Shows a schematic structural diagram of a first cover plate and a second cover plate in an embodiment of the present application;

[0025] Figure 6 Shows a schematic structural diagram of a splicing piece in an embodiment of the present application;

[0026] Figure 7 Shows a schematic structural diagram of a first air plate and a second air plate in an embodiment of the present application;

[0027] Figure 8 Shows a schematic structural diagram of a third air plate in an embodiment of the present application;

[0028] In the figure, 100, tooling housing; 110, cover plate; 111, first cover plate; 112, second cover plate; 113, third cover plate; 114, storage groove; 120, base; 130, barrel wall; 131, splicing piece; 132, arc plate; 133, installation groove; 200, air guiding assembly; 210, air guiding plate; 211, ventilation hole; 212, first air plate; 213, second air plate; 214, third air plate; 215, protruding part; 220, air guiding pipe; 230, deposition chamber. Detailed implementation manners

[0029] To make the objectives, technical solutions, and advantages of the embodiments of the present disclosure clearer, the technical solutions of the embodiments of the present disclosure will be clearly and completely described below with reference to the accompanying drawings of the embodiments of the present disclosure. Obviously, the described embodiments are only a part rather than all of the embodiments of the present disclosure. All other embodiments obtained by those of ordinary skill in the art based on the described embodiments of the present disclosure without creative efforts shall fall within the scope of protection of the present disclosure.

[0030] Unless otherwise defined, the technical terms or scientific terms used in the present disclosure shall have the ordinary meanings understood by those of ordinary skill in the art to which the present disclosure pertains. The terms "first", "second", and similar terms used in the present disclosure do not denote any order, quantity, or importance, but are only used to distinguish different components. Words such as "including" or "comprising" mean that the elements or items appearing before the word cover the elements or items listed after the word and their equivalents, without excluding other elements or items. Terms such as "upper", "lower", "left", "right", etc. are only used to represent relative positional relationships, and when the absolute position of the object being described changes, the relative positional relationship may also change accordingly.

[0031] Please refer to Figure 1 , the present utility model provides a vapor deposition tooling, including: a tooling housing 100; a gas guiding assembly 200, including a plurality of gas guiding plates 210 and gas guiding pipes 220 spaced apart in the tooling housing 100, each gas guiding plate 210 is provided with a plurality of ventilation holes 211, a deposition chamber 230 is formed between two adjacent gas guiding plates 210, and the gas guiding pipe 220 penetrates at least one gas guiding plate 210 from the bottom of the tooling housing 100, dividing the tooling housing 100 into a bottom deposition chamber and a top deposition chamber.

[0032] In this embodiment, after the carbon source gas and the dilution gas are mixed, a part of them enters the bottom deposition chamber layer by layer, and the other part enters the top deposition chamber through the gas guiding pipe 220. The ventilation holes 211 are evenly distributed in a ring around the center of the gas guiding plate 210 and serve as channels for the gas to flow into the upper deposition chamber 230. The gas guiding cylinder serves as a fast channel for the gas to flow into the top deposition chamber. Optionally, the effective diameter of each deposition chamber 230 is not less than 1300 mm, and the effective height is not less than 600 mm, providing a certain volume of heating space for the gas and increasing the cracking temperature of the gas. By using the gas guiding plate 210 to diffuse the gas and using the gas guiding pipe 220 to divert the gas, it is ensured that the gas can be fully dispersed, thereby improving the effective utilization rate of the gas. At the same time, it is possible to avoid the occurrence of local accumulation phenomena caused by the gas being blocked, thereby improving the uniformity of the gas flow field and enhancing the vapor deposition effect.

[0033] Please refer to Figure 1 and Figure 2, the tooling housing 100 includes: a cover plate 110; a base 120, with a gas guide pipe 220 vertically installed in the middle of the base 120; a barrel wall 130, provided in multiple numbers, and a gas guide plate 210 is installed between two adjacent barrel walls 130. A deposition chamber 230 is formed between each barrel wall 130 and the two adjacent gas guide plates 210. The barrel walls 130 are stacked in sequence and vertically installed along the outer edge of the base 120.

[0034] In this embodiment, the cover plate 110, the base 120 and the barrel wall 130 form the tooling housing 100. On the one hand, the cover plate 110 mainly plays a role of sealing to avoid gas leakage. On the other hand, the cover plate 110 is used to deposit the gas that has not been completely decomposed. The base 120 is formed by splicing multiple arc-shaped pieces, mainly used to support the barrel wall 130 and the gas guide pipe 220. The barrel wall 130 and the gas guide plate 210 form multiple deposition chambers 230, providing a heating space for the gas and increasing the cracking temperature of the gas entering the deposition chamber 230.

[0035] Please refer to Figures 1-3 , the barrel wall 130 includes: splicing pieces 131, and multiple splicing pieces 131 are connected end to end to form the barrel wall 130. Two adjacent splicing pieces 131 are fixed by bolts.

[0036] In this embodiment, the splicing piece 131 is arc-shaped, and multiple splicing pieces 131 are connected end to end to form the barrel wall 130, which is convenient for assembly and replacement. By adjusting the number of splicing pieces 131, the height of the barrel wall 130 can be changed to meet different deposition requirements. The splicing pieces 131 are fixed by bolts, ensuring the stability of the connection between the splicing pieces 131.

[0037] Please refer to Figure 3 , the splicing piece 131 includes: arc-shaped plates 132, and two arc-shaped plates 132 are provided. The two arc-shaped plates 132 are staggered and fitted to form the splicing piece 131, so that mounting grooves 133 are formed at both ends where the splicing piece 131 is connected end to end.

[0038] In this embodiment, the arc-shaped plates 132 are staggered and fitted to form the splicing piece 131, so that mounting grooves 133 are formed on three sides of the splicing piece 131. The splicing pieces 131 are connected end to end through the mounting grooves 133 and fixed by bolts to form the barrel wall 130. The gas guide plate 210 is fixed between two barrel walls 130 through the mounting grooves 133, ensuring the stability of the installation of the barrel wall 130 and the gas guide plate 210. Specifically, the arc-shaped plates 132 are connected by means of pasting or bolting.

[0039] Please refer to Figures 4-6, the cover plate 110 includes a first cover plate 111, a second cover plate 112 and a third cover plate 113. Object placing grooves 114 adapted to the shape of the third cover plate 113 are formed on both the first cover plate 111 and the second cover plate 112. The third cover plate 113 is placed on the object placing grooves 114 and forms the cover plate 110 together with the first cover plate 111 and the second cover plate 112.

[0040] In this embodiment, the third cover plate 113 is placed on the object placing grooves 114 of the first cover plate 111 and the second cover plate 112. The first cover plate 111, the second cover plate 112 and the third cover plate 113 are spliced to form the cover plate 110, improving the utilization rate of materials when manufacturing the cover plate 110.

[0041] In some embodiments, the first cover plate 111, the second cover plate 112 and the third cover plate 113 are fixed by bolts, ensuring the stability of the cover plate 110.

[0042] Figure 5 The structural schematic diagram of the air guiding plate 210 provided by the embodiment of the present application is shown. As Figure 5 shown, the air guiding plate 210 includes a first air plate 212, a second air plate 213 and a third air plate 214. Protrusions 215 adapted to the shape of the third air plate 214 are formed on both the first air plate 212 and the second air plate 213. The third air plate 214 is placed on the protrusions 215 and forms the air guiding plate 210 together with the first air plate 212 and the second air plate 213.

[0043] Please refer to Figures 7-8 , both the first air plate 212 and the second air plate 213 are fixed between two cylinder walls 130. The third air plate 214 is placed between the first air plate 212 and the second air plate 213 through the protrusions 215 and forms the air guiding plate 210 together with the first air plate 212 and the second air plate 213, improving the utilization rate of materials when manufacturing the air guiding plate 210.

[0044] In some embodiments, the first air plate 212, the second air plate 213 and the third air plate 214 are fixed by bolts. Using bolts for fixation ensures the stability of the air guiding plate 210.

[0045] In some embodiments, the diameter of the ventilation hole 211 is 18 mm, and the diameter range of the air guiding plate 210 is 120 - 160 mm.

[0046] In some embodiments, the bolts are made of carbon-carbon composite material, having the advantages of high temperature resistance and corrosion resistance.

[0047] It should be noted that the components between the embodiments of the present disclosure can be interchanged as long as they can play corresponding roles.

[0048] There are several points that need to be explained:

[0049] (1) Unless otherwise defined, in the embodiments of the present disclosure and the accompanying drawings, the same reference numerals represent the same meanings.

[0050] (2) In the accompanying drawings of the embodiments of the present disclosure, only the structures related to the embodiments of the present disclosure are involved, and other structures can refer to the general design.

[0051] (3) For clarity, in the accompanying drawings used to describe the embodiments of the present disclosure, components or regions are enlarged. It can be understood that when an element is referred to as being "on" or "under" another element, the element can be "directly" on or under the other element, or there can be intermediate elements.

[0052] As described above, the above are only the specific embodiments of the present disclosure, but the protection scope of the present disclosure is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present disclosure can easily think of changes or substitutions, which should be covered within the protection scope of the present disclosure. Therefore, the protection scope of the present disclosure should be subject to the protection scope of the claims.

Claims

1. A gas-phase deposition tooling, characterized in that, Comprising: A tooling housing (100); An air guiding assembly (200), including a plurality of air guiding plates (210) and air guiding pipes (220) spaced apart within the tooling housing (100). A plurality of ventilation holes (211) are formed in each air guiding plate (210). A deposition chamber (230) is formed between two adjacent air guiding plates (210). The air guiding pipe (220) penetrates at least one air guiding plate (210) from the bottom of the tooling housing (100), dividing the tooling housing (100) into a bottom deposition chamber and a top deposition chamber.

2. The vapor deposition tooling according to claim 1, wherein The tooling housing (100) includes: A cover plate (110); A base (120), with the air guiding pipe (220) vertically installed in the middle of the base (120); A cylindrical wall (130), provided in plurality. The air guiding plates (210) are installed between two adjacent cylindrical walls (130). The deposition chamber (230) is formed between each cylindrical wall (130) and two adjacent air guiding plates (210). The cylindrical walls (130) are stacked in sequence and vertically installed along the outer edge of the base (120).

3. The vapor deposition tooling according to claim 2, characterized in that, The cylindrical wall (130) includes: A splicing piece (131), and a plurality of splicing pieces (131) are connected end to end to form the cylindrical wall (130). Adjacent two splicing pieces (131) are fixed by bolts.

4. The vapor deposition tooling according to claim 3, wherein The splicing piece (131) includes: An arc-shaped plate (132), provided with two arc-shaped plates (132). The two arc-shaped plates (132) are staggeredly fitted to form the splicing piece (131), and mounting grooves (133) are formed at both ends where the splicing piece (131) is connected end to end.

5. The vapor deposition tooling according to claim 4, wherein The cover plate (110) includes a first cover plate (111), a second cover plate (112) and a third cover plate (113). Object placing grooves (114) adapted to the shape of the third cover plate (113) are formed on both the first cover plate (111) and the second cover plate (112). The third cover plate (113) is placed in the object placing groove (114) and forms the cover plate (110) together with the first cover plate (111) and the second cover plate (112).

6. The vapor deposition tooling according to claim 5, wherein, The first cover plate (111), the second cover plate (112) and the third cover plate (113) are fixed by the bolts.

7. The vapor deposition tooling according to claim 6, characterized in that, The air guiding plate (210) includes a first air plate (212), a second air plate (213) and a third air plate (214). Protrusions (215) adapted to the shape of the third air plate (214) are formed on both the first air plate (212) and the second air plate (213). The third air plate (214) is placed on the protrusions (215) and forms the air guiding plate (210) together with the first air plate (212) and the second air plate (213).

8. The vapor deposition tooling according to claim 7, wherein The first air plate (212), the second air plate (213) and the third air plate (214) are fixed by the bolts.

9. The vapor deposition tooling according to any one of claims 1-4, 6 or 8, characterized in that, The diameter of the ventilation hole (211) is 18 mm, and the diameter range of the air guiding plate (210) is 120 - 160 mm.

10. The vapor deposition tooling according to claim 8, characterized in that, The bolt is made of carbon-carbon composite material.

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