Protective tool

Abstract

The utility model discloses a protection tool which is installed on a crucible, a feeding channel is formed by the protection tool in a surrounding mode, the feeding channel is provided with a first end opening and a second end opening which are opposite, the protection tool comprises a blocking part and an installation part, the blocking part is arranged around the first end opening, and the blocking part covers at least part of the first end opening; and the mounting part is arranged around the second port, and the mounting part is configured to be embedded with the opening of the crucible. Through the arrangement, impurities on the feeding device can be prevented from entering the crucible to influence the production quality of silicon carbide in the feeding process of a polycrystalline silicon raw material, and meanwhile, the phenomenon that the crucible is damaged due to collision between the feeding device and the crucible is avoided.

Description

Technical Field

[0001] The present application relates to the field of crystal production equipment, and particularly to a protective tooling. Background Art

[0002] Currently, the most effective method for growing silicon carbide crystals is physical vapor transport method. The specific method is to heat silicon carbide powder to above 2000 °C. The gaseous components after the high-temperature sublimation of silicon carbide powder are transported under the action of a concentration gradient, and finally recrystallize on the surface of a silicon carbide seed crystal with a lower temperature to promote the growth of the crystal.

[0003] During the growth process of silicon carbide crystals, it is necessary to add silicon carbide powder into a graphite crucible before the silicon carbide seed crystal grows. However, the feeding device in the prior art will contact the edge of the graphite crucible during loading, which not only causes impurities on the feeding device to enter the graphite crucible and affect the production quality of silicon carbide, but also the contact between the feeding device and the graphite crucible can damage the mouth of the graphite crucible. Utility Model Content

[0004] In order to solve the deficiencies of the prior art, the purpose of the present utility model is to provide a protective tooling, which can ensure a high production quality of silicon carbide and avoid damage to the mouth of the crucible at the same time.

[0005] To achieve the above purpose, the present application adopts the following technical solutions:

[0006] The present application provides a protective tooling, which is installed on a crucible. The protective tooling surrounds to form a feeding channel. The feeding channel has opposite first and second ports. The protective tooling includes a blocking part and a mounting part. The blocking part is arranged around the first port, and the blocking part covers at least part of the first port. The mounting part is arranged around the second port, and the mounting part is configured to fit with the mouth of the crucible.

[0007] Further, the inner diameter of the feeding channel gradually decreases from the first port to the second port.

[0008] Further, a projection plane perpendicular to a set direction is defined. The set direction is parallel to the extending direction of the feeding channel. The projection of the blocking part on the projection plane along the set direction is defined as a first projection, and the projection of the feeding channel on the projection plane along the set direction is defined as a second projection. The first projection and the second projection overlap each other.

[0009] Further, the protective tooling includes a main body part located between the blocking part and the mounting part. The main body part is configured as an annular column, the blocking part is configured as an annular plate, the outer diameter of the blocking part is greater than the outer diameter of the main body part, and the inner diameter of the blocking part is less than the inner diameter of the main body part.

[0010] Further, the ratio range between the inner diameter of the blocking portion and the inner diameter of the main body portion is from 0.8 to 0.95.

[0011] Further, the inner diameter of the installation portion is smaller than the inner diameter of the main body portion to form a stepped protective layer on the inner side of the protective tooling.

[0012] Further, the inner diameter of the blocking portion is less than or equal to the inner diameter of the installation portion.

[0013] Further, when the protective tooling is connected to the crucible, the main body portion is configured to abut against the crucible along a set direction, the set direction is parallel to the extension direction of the feeding channel, and the installation portion overlaps the crucible in the radial direction of the feeding channel.

[0014] Further, the protective tooling is configured to be made of any one of the following materials: polypropylene, polytetrafluoroethylene, polyurethane.

[0015] Further, the end face of the blocking portion facing away from the installation portion is configured to be a plane.

[0016] By providing the blocking portion and the installation portion, and arranging the blocking portion around the first port of the protective tooling and covering at least a part of the first port, and fitting the installation portion with the mouth of the crucible, the above-mentioned protective tooling can prevent the sundries on the feeding device from entering the crucible during the feeding process of the polysilicon raw material, thereby affecting the production quality of silicon carbide, and at the same time avoid the crucible being damaged due to the collision between the feeding device and the crucible. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is an assembly schematic diagram of the protective tooling and the crucible in the embodiment of the present application;

[0018] Figure 2 is a structural schematic diagram of the protective tooling in the embodiment of the present application;

[0019] Figure 3 is a dimensional schematic diagram of the protective tooling in the embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0020] In order to enable those skilled in the art to better understand the solution of the present application, the technical solutions in the specific embodiments of the present application will be clearly and completely described below in conjunction with the drawings in the embodiments of the present application.

[0021] As Figure 1 shown, the present application provides a protective tooling 100, the protective tooling 100 is installed on the crucible 200, and during the process of adding polysilicon raw material into the crucible 200 by the feeding device, the protective tooling 100 can prevent the feeding device from colliding with the crucible 200.

[0022] As Figure 2 and Figure 3As shown, a feeding channel 11 through which polysilicon raw materials can pass is formed around the protective tooling 100, and the feeding channel 11 communicates with the inside of the crucible 200. The feeding channel 11 includes a first port 111 and a second port 112, and the first port 111 and the second port 112 are arranged opposite to each other. In the embodiment of the present application, the polysilicon raw materials pass through the feeding channel 11 from the first port 111 to the second port 112. The protective tooling 100 further includes a blocking portion 12 and a mounting portion 13. The blocking portion 12 is close to the first port 111 and is arranged around the first port 111, and the blocking portion 12 also covers at least part of the first port 111.

[0023] Specifically, a projection plane perpendicular to the set direction is defined. The set direction is parallel to the extension direction of the feeding channel 11. The projection of the blocking portion 12 on the projection plane along the set direction is defined as the first projection, and the projection of the feeding channel 11 on the projection plane along the set direction is defined as the second projection, where the first projection and the second projection overlap each other. Through the above settings, the polysilicon raw materials can directly pass through the feeding channel 11 and enter the crucible 200 during the feeding process, thereby avoiding the polysilicon raw materials from contacting the inner wall of the feeding channel 11 and remaining on the inner wall, and thus avoiding the pollution at the port of the crucible 200.

[0024] In the embodiment of the present application, the feeding channel 11 extends in the height direction, thereby avoiding the polysilicon raw materials from contacting the inner wall of the feeding channel 11 when entering the crucible 200.

[0025] The mounting portion 13 is arranged around the second port 112, and the mounting portion 13 is configured to be able to fit with the mouth of the crucible 200, thereby improving the connection stability between the protective tooling 100 and the crucible 200. Through the above settings, it can be avoided that sundries carried on the outer wall of the feeding device enter the crucible 200 due to the direct contact between the feeding device and the crucible 200 during the feeding process, thereby improving the production quality of polysilicon. In addition, the above settings can also avoid the crucible 200 from being damaged due to the collision between the feeding device and the crucible 200.

[0026] Furthermore, the end face of the blocking portion 12 facing away from the mounting portion 13 is configured to be a plane, so that the blocking portion 12 can carry the feeding device and fit with the feeding device, thereby improving the stability of the feeding device during the feeding process.

[0027] In some embodiments, the protective tooling 100 is configured to be any one of the following materials: polypropylene, polytetrafluoroethylene, polyurethane, etc. Since the above materials all have the characteristics of preventing metal pollution, the protective tooling 100 made of the above materials can avoid metal pollution caused by the contact between the polysilicon raw materials and the protective tooling 100 when entering the crucible 200.

[0028] Such as Figure 2As shown, as an implementation, the feed channel 11 is frustum-shaped, and the inner diameter of the feed channel 11 gradually decreases from the first port 111 to the second port 112, so that the polysilicon raw material can be transported to a fixed point and enter the crucible 200. In addition, the above setting can also reduce the speed of the polysilicon raw material entering the crucible 200, thereby avoiding dust generation of the polysilicon raw material and causing crystal wrapping of the polysilicon raw material, which affects the production quality of the crucible 200.

[0029] As Figure 2 and Figure 3 shown, as an implementation, the protective tooling 100 further includes a main body portion 14. The main body portion 14 is located between the blocking portion 12 and the mounting portion 13, and the main body portion 14 is integrally formed with the blocking portion 12 and the mounting portion 13. The main body portion 14 is configured as an annular column, the blocking portion 12 is configured as an annular plate, and the outer diameter R1 of the blocking portion 12 is greater than the inner diameter R2 of the main body portion 14, and the inner diameter R3 of the blocking portion 12 is less than the inner diameter R2 of the main body portion 14.

[0030] Optionally, if the inner diameter of the feed channel 11 gradually decreases from the first port 111 to the second port 112, then the outer diameter R1 of the blocking portion 12 is greater than the maximum value of the inner diameter of the main body portion 14, and the inner diameter R3 of the blocking portion 12 is less than the minimum value of the inner diameter of the main body portion 14.

[0031] Specifically, the inner diameter R2 of the main body portion 14 is the inner diameter of the feed channel 11. The blocking portion 12 is formed with a feed port 121 for the single-crystalline silicon raw material to pass through. The feed port 121 is communicated with the feed channel 11, and the inner diameter of the feed port 121 is the inner diameter R3 of the blocking portion 12. The inner diameter of the feed port 121 is smaller than the inner diameter of the feed channel 11. Thus, during the process of adding the polysilicon raw material into the crucible 200 by the feeding device, the polysilicon raw material can directly pass through the feed channel 11 and the mouth of the crucible 200 and enter the crucible 200 directly, thereby avoiding the contact between the polysilicon raw material and the mouth of the crucible 200 and preventing the mouth of the crucible 200 from being contaminated by the polysilicon raw material.

[0032] As an implementation, the ratio range between the inner diameter R3 of the blocking portion 12 and the inner diameter R2 of the main body portion 14 is from 0.8 to 0.95. Further, the ratio range between the inner diameter R3 of the blocking portion 12 and the inner diameter R2 of the main body portion 14 is from 0.85 to 0.9. More preferably, the ratio of the inner diameter R3 of the blocking portion 12 to the inner diameter R2 of the main body portion 14 is 0.87. When the ratio between the inner diameter R3 of the blocking portion 12 and the inner diameter R2 of the main body portion 14 is too large, the inner diameter R3 of the blocking portion 12 is basically the same as the inner diameter R2 of the main body portion 14. As a result, during the feeding process of the crucible 200, the polysilicon raw material is likely to come into contact with the inner wall of the feeding channel 11 and remain on the inner wall of the feeding channel 11. When the ratio between the inner diameter R3 of the blocking portion 12 and the inner diameter R2 of the main body portion 14 is too small, the inner diameter of the feeding port 121 is small. Therefore, during the feeding process of the crucible 200, the polysilicon raw material is likely to remain on the upper surface of the blocking portion 12. Through the above settings, while preventing the polysilicon raw material from remaining on the inner wall of the feeding channel 11, it can also prevent the polysilicon raw material from remaining on the upper surface of the blocking portion 12.

[0033] Further, the inner diameter R4 of the mounting portion 13 is smaller than the inner diameter R2 of the main body portion 14, so that a stepped protective layer 15 can be formed inside the protective tooling 100. Specifically, the protective layer 15 is annular, and the protective layer 15 protrudes radially inward along the feeding channel 11 and can cover the mouth of the crucible 200. As a result, the protective layer 15 can prevent the polysilicon raw material from coming into contact with the mouth of the crucible 200 during the feeding process, thereby preventing the mouth of the crucible 200 from being contaminated by the polysilicon raw material.

[0034] Even further, the inner diameter R3 of the blocking portion 12 is also less than or equal to the inner diameter R4 of the mounting portion 13, that is, the inner diameter of the feeding port 121 is less than or equal to the inner diameter R4 of the mounting portion 13, so that the polysilicon raw material can pass through the space surrounded by the protective layer 15 and enter the crucible during the feeding process, thereby preventing the polysilicon raw material from remaining above the protective layer 15.

[0035] As Figure 2 shown, as an implementation, when the protective tooling 100 is connected to the crucible 200, the main body portion 14 is configured to abut against the crucible 200 in a set direction, the set direction is parallel to the extending direction of the feeding channel 11, and the mounting portion 13 also overlaps with the crucible 200 in the radial direction of the feeding channel 11.

[0036] Specifically, when the protective tooling 100 is connected to the crucible 200, the main body portion 14 abuts against the crucible 200 in the height direction. The installation portion 13 is annular. When the protective tooling 100 is connected to the crucible 200, the installation portion 13 is located in the space formed by surrounding the mouth of the crucible 200, so that the installation portion 13 can limit the protective tooling 100 in the horizontal direction, thereby improving the connection stability between the protective tooling 100 and the crucible 200. In addition, the above setting can also prevent the polysilicon raw material from contacting the mouth of the crucible 200 during the feeding process, causing the mouth of the crucible 200 to be contaminated.

[0037] It should be understood that for those of ordinary skill in the art, improvements or transformations can be made according to the above description, and all such improvements and transformations should fall within the protection scope of the appended claims of this application.

Claims

1. A protective tooling, the protective tooling being installed on a crucible, characterized in that: The protective tooling is formed around a feed channel, and the feed channel has a first port and a second port opposite to each other. The protective tooling includes a blocking portion and a mounting portion. The blocking portion is arranged around the first port and covers at least a portion of the first port. The mounting portion is arranged around the second port and is configured to be engaged with the pot mouth of the crucible.

2. The protective tooling according to claim 1, characterized in that: The inner diameter of the feed channel gradually decreases from the first port to the second port.

3. The protective tooling according to claim 1, characterized in that: A projection plane perpendicular to a set direction is defined, wherein the set direction is parallel to an extension direction of the feed channel, a projection of the blocking portion along the set direction on the projection plane is defined as a first projection, a projection of the feed channel along the set direction on the projection plane is defined as a second projection, and the first projection and the second projection overlap with each other.

4. The protective tooling according to claim 1, characterized in that: The protective tooling includes a main body portion located between the blocking portion and the mounting portion, the main body portion is configured as an annular column, the blocking portion is configured as an annular plate, the outer diameter of the blocking portion is larger than the inner diameter of the main body portion, and the inner diameter of the blocking portion is smaller than the inner diameter of the main body portion.

5. The protective tooling according to claim 4, characterized in that: The ratio of the inner diameter of the blocking portion to the inner diameter of the main body portion is in a range of 0.8 to 0.

95.

6. The protective tooling according to claim 4, characterized in that: The inner diameter of the mounting portion is smaller than the inner diameter of the main body portion, so as to form a stepped protective layer on the inner side of the protective tooling.

7. The protective tooling according to claim 4, characterized in that: The inner diameter of the blocking portion is smaller than or equal to the inner diameter of the mounting portion.

8. The protective tooling according to claim 4, characterized in that: When the protective tooling is connected to the crucible, the main body is configured to abut against the crucible along a set direction, the set direction is parallel to the extension direction of the feed channel, and the mounting portion overlaps with the crucible in the radial direction of the feed channel.

9. The protective tooling according to claim 1, characterized in that: The protective workwear is configured to be made of any one of the following materials: polypropylene, polytetrafluoroethylene, and polyurethane.

10. The protective tooling according to claim 1, characterized in that: An end surface of the blocking portion facing away from the mounting portion is configured to be a plane.

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