Single crystal furnace bottom protection pressing plate made of diversified materials and provided with detachable electrode hole ring

Abstract

The utility model relates to the field of photovoltaic technology, in particular to a single crystal furnace bottom protection pressing plate made of diversified materials and provided with a detachable electrode hole ring, which comprises an electrode variable-diameter ring and a locking structure, the locking structure comprises a sinking rotary locking groove and a protruding locking bolt, the electrode variable-diameter ring is mounted in an electrode hole of the bottom protection pressing plate through the locking structure, and the electrode variable-diameter ring is connected with the electrode hole of the bottom protection pressing plate through the protruding locking bolt. The sinking rotation locking groove is formed in the bottom protection pressing plate body, the protruding locking bolt is arranged on the electrode reducing ring, and the protruding locking bolt is connected into the sinking rotation locking groove in a limiting and sliding mode. By changing the material, the heat conductivity coefficient and the power consumption are reduced; a reducing effect is achieved, electrode hole gaps are reduced, and a furnace bottom heat preservation effect is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of photovoltaic, in particular to a bottom pressing plate of a single crystal furnace with diversified materials and detachable electrode hole rings. Background Art

[0002] With the rapid development of the semiconductor industry and the photovoltaic industry, as one of the core basic materials, the quality and production efficiency of single crystal silicon materials are directly related to the performance and cost of downstream products. As a key device for producing single crystal silicon rods, the single crystal furnace plays a crucial role in the entire industrial chain. The precise control of the internal environment of the single crystal furnace, especially the temperature field, stress distribution and impurity control, directly determines the crystal quality, purity and production efficiency of the single crystal silicon rod. As one of the key thermal field components inside the single crystal furnace, the design, material selection and performance optimization of the bottom pressing plate have an important role in improving the quality of single crystal production. The current bottom pressing plates have the following deficiencies:

[0003] 1) The problem of ignition due to silicon leakage flowing into the electrode holes;

[0004] 2) The problem of replacing the entire bottom pressing plate due to severe corrosion of the electrode holes;

[0005] 3) Heat leakage, inability to closely fit different specifications of electrode outer diameters, and the problem of replacing the entire bottom pressing plate due to the increase or decrease of the electrode outer diameter size;

[0006] 4) The problems of high thermal conductivity of the material, high power consumption, poor heat preservation effect, graphite material and relatively large inner diameter of the electrode hole;

[0007] 5) Difficulty in disassembly and replacement. Content of the Utility Model

[0008] In order to achieve the variable diameter effect, reduce the electrode hole gap and increase the heat preservation effect at the furnace bottom, a bottom pressing plate of a single crystal furnace with diversified materials and detachable electrode hole rings is provided.

[0009] In order to achieve the purpose of the utility model, the technical solution adopted is: a bottom pressing plate of a single crystal furnace with diversified materials and detachable electrode hole rings, including an electrode variable diameter ring and a locking structure. The locking structure includes a sinking rotation locking groove and a protruding locking pin. The electrode variable diameter ring is installed in the electrode hole of the bottom pressing plate through the locking structure. The sinking rotation locking groove is arranged on the bottom pressing plate body, and the protruding locking pin is arranged on the electrode variable diameter ring. The protruding locking pin is connected in the sinking rotation locking groove in a limiting and sliding manner.

[0010] As an optimized scheme of the utility model, the sinking rotation locking groove includes a sliding groove and a positioning notch. The sliding groove is arranged along the circumferential direction of the electrode hole of the bottom pressing plate, the positioning notch is communicated with the sliding groove, and the axis of the positioning notch is perpendicular to the axis of the sliding groove.

[0011] As an optimized solution of the utility model, the protruding locking pin matches the positioning notch, and the protruding locking pin is slidably connected in the chute.

[0012] As an optimized solution of the utility model, the number of the protruding locking pins ≥ 3.

[0013] As an optimized solution of the utility model, the electrode diameter-changing ring includes a first annular frustum and a second annular frustum. The outer diameter of the first annular frustum is larger than the diameter of the electrode hole of the bottom protection pressing plate, and the outer diameter of the second annular frustum is smaller than the diameter of the electrode hole of the bottom protection pressing plate. The protruding locking pin is arranged on the outer periphery of the second annular frustum.

[0014] As an optimized solution of the utility model, the first annular frustum is a conical convex platform.

[0015] As an optimized solution of the utility model, the bottom protection pressing plate is a bottom protection pressing plate made of carbon-carbon composite material, tantalum nitride material or molybdenum carbide material.

[0016] The utility model has positive effects:

[0017] 1) By changing the material, the utility model reduces the thermal conductivity and power consumption;

[0018] 2) The utility model is easy to carry. It is a small-sized disassembly and cleaning device with low manufacturing cost and easy to carry;

[0019] 3) Through the rotary locking structure, the utility model has a fast replacement and disassembly speed, improving the working efficiency;

[0020] 4) The utility model has strong adaptability: the bottom protection pressing plate can cooperate with electrodes of various outer diameter sizes, with strong adaptability;

[0021] 5) The utility model can prevent the silicon liquid from flowing into the electrode hole when silicon leaks. By setting a conical convex platform, it can prevent the silicon liquid from flowing into the electrode hole and causing sparking;

[0022] 6) The utility model is easy to operate. Through simple operation steps, the replacement can be completed;

[0023] 7) The electrode diameter-changing ring of the utility model can achieve the diameter-changing effect, reduce the electrode hole gap, and increase the bottom furnace heat preservation effect. BRIEF DESCRIPTION OF THE DRAWINGS

[0024] The following further describes the utility model in detail with reference to the drawings and specific embodiments.

[0025] Figure 1 is the overall schematic diagram of the utility model;

[0026] Figure 2 is the top view of the electrode diameter-changing ring of the utility model;

[0027] Figure 3 is the front view of the electrode diameter-changing ring of the present utility model;

[0028] Figure 4 is the structural schematic diagram of the sinking rotary locking groove of the present utility model;

[0029] Figure 5 is the structural schematic diagram of the protruding locking pin of the present utility model;

[0030] Figure 6 is the structural schematic diagram of the bottom pressing plate body of the present utility model;

[0031] Wherein: 1. Electrode diameter-changing ring, 2. Sinking rotary locking groove, 3. Protruding locking pin, 4. Electrode hole of the bottom pressing plate for protection, 5. Bottom pressing plate body for protection, 6. Electrode, 21. Sliding groove, 22. Positioning notch, 11. First annular round table, 12. Second annular round table. Specific embodiments

[0032] To make the purposes, technical solutions and advantages of the embodiments of this patent clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model.

[0033] The following description of at least one exemplary embodiment is merely illustrative in nature and in no way limits the present utility model or its application or use. Based on the embodiments in the present utility model, all other embodiments obtained by those skilled in the art without creative efforts fall within the scope of protection of the present utility model.

[0034] It should be noted that the terms used herein are only for describing specific embodiments and are not intended to limit the exemplary embodiments of the present utility model.

[0035] Unless otherwise specifically stated, the relative arrangements, numerical expressions and values of the components and steps set forth in these embodiments do not limit the scope of the present utility model. At the same time, it should be clear that, for the sake of convenience of description, the dimensions of the various parts shown in the drawings are not drawn according to actual proportional relationships. For technologies, methods and devices known to those skilled in the art, they may not be discussed in detail. In all the examples shown and discussed here, any specific value should be construed as merely exemplary and not as a limitation. Therefore, other example values of the exemplary embodiments may have different values.

[0036] Such as Figure 1As shown in the figure, the utility model discloses a single crystal furnace bottom pressing plate with diversified materials and detachable electrode hole rings, which includes an electrode diameter-changing ring 1 and a locking structure. The locking structure includes a sunken rotary locking groove 2 and a protruding locking pin 3. The electrode diameter-changing ring 1 is installed in the electrode hole 4 of the bottom pressing plate through the locking structure. The sunken rotary locking groove 2 is arranged on the bottom pressing plate body 5, and the protruding locking pin 3 is arranged on the electrode diameter-changing ring 1. The protruding locking pin 3 is connected with the sunken rotary locking groove 2 in a limited sliding manner.

[0037] As Figures 2-3 shown in the figure, by setting the replaceable, lockable / splittable electrode diameter-changing ring 1, the problem of inability to closely fit electrodes with different outer diameter sizes is solved. At the same time, the problem of frequently replacing the bottom pressing plate due to different electrode outer diameter sizes is also solved, reducing the replacement time and cost, improving the overall work efficiency and reducing the maintenance cost. Place the protruding locking pin 3 in the sunken rotary locking groove 2 and complete the locking or splitting and replacement by rotation.

[0038] As Figure 4 shown in the figure, the sunken rotary locking groove 2 includes a sliding groove 21 and a positioning notch 22. The sliding groove 21 is arranged along the circumference of the electrode hole 4 of the bottom pressing plate, and the positioning notch 22 is communicated with the sliding groove 21. The axis of the positioning notch 22 is perpendicular to the axis of the sliding groove 21.

[0039] As Figure 5 shown in the figure, the protruding locking pin 3 matches the positioning notch 22, and the protruding locking pin 3 is slidably connected in the sliding groove 21. The number of the protruding locking pins 3 ≥ 3, and the number of the sunken rotary locking grooves 2 is the same as the number of the protruding locking pins 3. During installation, first align the protruding locking pin 3 with the positioning notch 22 and move it down into the sliding groove 21 to install and fix the electrode diameter-changing ring 1 in the electrode hole 4 of the bottom pressing plate.

[0040] As Figure 3 shown in the figure, the electrode diameter-changing ring 1 includes a first annular frustum 11 and a second annular frustum 12. The outer diameter of the first annular frustum 11 is larger than the diameter of the electrode hole 4 of the bottom pressing plate, and the outer diameter of the second annular frustum 12 is smaller than the diameter of the electrode hole 4 of the bottom pressing plate. The protruding locking pin 3 is arranged on the outer circumference of the second annular frustum 12. The first annular frustum 11 is a conical boss. The conical boss is provided to prevent silicon liquid from flowing into the electrode hole when silicon leaks, that is, to prevent silicon liquid from flowing into the electrode hole and causing arcing.

[0041] As Figure 6 shown in the figure, by replacing the material of the bottom pressing plate body 5, the bottom pressing plate body 5 is made of carbon-carbon composite material, tantalum nitride material or molybdenum carbide material. It is made of a material with a lower thermal conductivity than isostatic graphite, so as to achieve the effect of reducing energy consumption.

[0042] Furthermore, for the carbon-carbon composite material: Since the thermal conductivity of traditional isostatic graphite is 140 - 160 (w / m·k), the thermal conductivity of the carbon-carbon composite material is much lower than that of isostatic graphite, being (100 - 120 w / m·k). After using the carbon-carbon material bottom protection pressing plate, the heat preservation performance can be increased, and the power consumption can be reduced by about 1 KW.

[0043] Furthermore, for the tantalum nitride material: The thermal conductivity of the tantalum nitride material is 9.54 (w / m·k), which is much lower than that of isostatic graphite. Moreover, this material can withstand high temperatures up to 3000 °C, which is on a par with isostatic graphite. After replacement, the power consumption can be reduced by about 2 KW.

[0044] Furthermore, for the molybdenum carbide material: The thermal conductivity of the molybdenum carbide material is 22 (w / m·k), which is much lower than that of isostatic graphite. It can withstand high temperatures up to 2600 °C. After replacement, the power consumption can be reduced by about 1.7 KW.

[0045] During implementation, place the bottom protection pressing plate body 5 on the upper layer of the furnace bottom insulation. Align the 3 protruding locking pins 3 of the electrode diameter-changing ring 1 with the positioning notch 22 of the sinking and rotating locking groove 2. After sinking, rotate clockwise to lock and complete the installation. After assembly, install the electrode 6 into the electrode diameter-changing ring 1; during disassembly, rotate counterclockwise and pull out to complete the disassembly.

[0046] The specific embodiments described above have further elaborated on the purpose, technical solutions, and beneficial effects of the present utility model. It should be understood that the above are only specific embodiments of the present utility model and are not used to limit the present utility model. Any modifications, equivalent replacements, improvements, etc. made within the spirit and principles of the present utility model shall be included within the protection scope of the present utility model.

Claims

1. A single crystal furnace bottom pressing plate with diversified materials and detachable electrode hole rings, characterized in that: It includes an electrode diameter-changing ring (1) and a locking structure. The locking structure includes a sunken rotary locking groove (2) and a protruding locking pin (3). The electrode diameter-changing ring (1) is installed in the electrode hole of the bottom protection pressing plate (4) through the locking structure. The sunken rotary locking groove (2) is arranged on the bottom protection pressing plate body (5), and the protruding locking pin (3) is arranged on the electrode diameter-changing ring (1). The protruding locking pin (3) is in limit sliding connection in the sunken rotary locking groove (2).

2. The single crystal furnace bottom pressing plate with a diversified material and a detachable electrode hole ring according to claim 1, wherein: The sunken rotary locking groove (2) includes a sliding groove (21) and a positioning notch (22). The sliding groove (21) is arranged along the circumferential direction of the electrode hole of the bottom protection pressing plate (4), and the positioning notch (22) is communicated with the sliding groove (21). The axis of the positioning notch (22) is perpendicular to the axis of the sliding groove (21).

3. The single crystal furnace bottom pressing plate with diversified materials and detachable electrode hole rings according to claim 2, characterized in that: The protruding locking pin (3) is matched with the positioning notch (22), and the protruding locking pin (3) is slidingly connected in the sliding groove (21).

4. A single crystal furnace bottom pressing plate with a diversified material and a detachable electrode hole ring according to claim 3, characterized in that: The number of the protruding locking pins (3) ≥ 3.

5. A single crystal furnace bottom pressing plate with a diversified material and a detachable electrode hole ring according to claim 1, characterized in that: The electrode diameter-changing ring (1) includes a first annular frustum (11) and a second annular frustum (12). The outer diameter of the first annular frustum (11) is larger than the diameter of the electrode hole of the bottom protection pressing plate (4), and the outer diameter of the second annular frustum (12) is smaller than the diameter of the electrode hole of the bottom protection pressing plate (4). The protruding locking pin (3) is arranged on the outer circumference of the second annular frustum (12).

6. The single crystal furnace bottom pressing plate with a diversified material and a detachable electrode hole ring according to claim 5, characterized in that: The first annular frustum (11) is a conical boss.

7. A single crystal furnace bottom pressing plate with a diversified material and a detachable electrode hole ring according to claim 1, characterized in that: The material of the bottom protection pressing plate body (5) is carbon-carbon composite material, tantalum nitride material or molybdenum carbide material.

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