Valve and exposure equipment

Abstract

The utility model provides a valve and exposure equipment. The valve comprises a valve seat, a blade and a driving piece, the valve seat is of an annular structure with an inner hole. A containing cavity is formed in the valve seat, coaxially surrounds the periphery of the inner hole and further communicates with the inner hole. The blade is at least partially arranged in the accommodating cavity and is movably connected with the valve seat; the number of the blades is multiple, the multiple blades are sequentially arranged in the circumferential direction of the containing cavity, and any two blades partially coincide; the blades can enclose to form a fluid channel; the driving piece is partially arranged in the containing cavity and drives all the blades to move synchronously, and the opening degree of the fluid channel is changed. The valve has good adjustment linearity, when the valve is applied to the exposure equipment, the accuracy and repeatability of micro-overpressure adjustment in the exposure equipment can be improved, in addition, due to the fact that any two blades are partially overlapped, the thickness of a pressed area in unit area of the valve is large, and the valve can be applied to the exposure equipment. Under the condition that the thickness of the blade is not increased, the damage rate of the blade is reduced, and the service life of the valve is prolonged.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor manufacturing, and particularly relates to a valve and an exposure device. Background Art

[0002] For an exposure device, in order to prevent contamination, a slightly overpressured environment needs to be maintained inside the exposure device to prevent non-clean air from the outside from mixing in. The overpressure index is mainly achieved through the joint control of the supply air flow rate, the exhaust air flow rate, and the leakage area. Among them, the supply air flow rate being greater than the exhaust air flow rate is a prerequisite for forming overpressure. The leakage area of the exposure device has been determined at the initial design stage. Therefore, during the operation of the exposure device, the slightly overpressure is actually achieved through the adjustment of the supply air flow rate and the exhaust air flow rate.

[0003] There are two existing flow adjustment methods. One is to use filter cloth to block the supply air pipeline and the exhaust air pipeline. However, the adjustment accuracy of this scheme is poor and the error is large. The other is to use a butterfly valve to adjust the supply air volume and the exhaust air volume. However, the flow field disturbance before and after the adjustment of the butterfly valve is large, which is not conducive to maintaining the stability of the flow field. In addition, the adjustment linearity of the butterfly valve is poor, resulting in poor adjustment repeatability. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a valve and an exposure device, aiming to accurately adjust the slightly overpressured environment inside the exposure device.

[0005] To achieve the above purpose, the utility model provides a valve, including:

[0006] A valve seat, which is an annular structure with an inner hole; an annular accommodating cavity is formed on the valve seat, and the accommodating cavity coaxially surrounds the outer periphery of the inner hole and is also communicated with the inner hole;

[0007] Blades, at least partially arranged in the accommodating cavity and movably connected to the valve seat; the number of the blades is multiple, and the multiple blades are arranged in sequence along the circumferential direction of the accommodating cavity, any two of the blades partially overlap, and all the blades can enclose to form a fluid passage; and,

[0008] A driving member, partially arranged in the accommodating cavity and connected to all the blades; the driving member is configured to drive all the blades to move synchronously to change the opening degree of the fluid passage.

[0009] Optionally, the driving member includes an annular main body portion, the main body portion is arranged in the accommodating cavity and is located on the same side of all the blades; the main body portion is connected to all the blades;

[0010] The valve is configured to drive all the blades to move synchronously through the rotation of the main body portion.

[0011] Optionally, a plurality of guide grooves are provided on the cavity wall of the accommodating cavity on the side of the blade away from the main body portion. The plurality of guide grooves are arranged at intervals along the circumferential direction of the accommodating cavity, and the guide grooves extend along the radial direction of the accommodating cavity.

[0012] A plurality of connecting holes are provided on the main body portion, and the plurality of connecting holes are arranged at intervals along the circumferential direction of the main body portion.

[0013] The blade includes a blade body. A first engaging post is provided on one side of the blade body facing the main body portion, and at least a part of the first engaging post is inserted into one of the connecting holes. A second engaging post is provided on the side of the blade body away from the main body portion, and at least a part of the second engaging post is inserted into one of the guide grooves.

[0014] The valve is configured to drive the first engaging post to rotate by the rotation of the main body portion, and while driving the second engaging post to rotate, also move along the corresponding guide groove.

[0015] Optionally, the cross-section of the accommodating cavity is annular; the blade body is an arc-shaped structure and includes a first arc contour line and a second arc contour line that are opposite to each other in its own radial direction. The first arc contour line is closer to the axis of the inner hole than the second arc contour line; the diameter of the circle where the first arc contour line is located is greater than or equal to the diameter of the inner edge of the accommodating cavity; the diameter of the circle where the second arc contour line is located is less than or equal to the diameter of the outer edge of the accommodating cavity.

[0016] Optionally, the blade body has a first end and a second end that are opposite to each other in its own circumferential direction; the first engaging post is adjacent to the first end of the blade body, and the second engaging post is adjacent to the second end of the blade body.

[0017] Optionally, the valve seat includes a first housing and a second housing. The first housing and the second housing are connected to each other and define the accommodating cavity. The guide grooves are provided on the first housing.

[0018] A first sealing structure is formed between the main body portion and the first housing, and the first sealing structure is located at the outer edge of the accommodating cavity.

[0019] A second sealing structure and a third sealing structure are formed between the main body portion and the second housing. The second sealing structure is located at the outer edge of the accommodating cavity, and the third sealing structure is located at the inner edge of the accommodating cavity.

[0020] Optionally, the first sealing structure is a first labyrinth structure; and / or, the second sealing structure is a labyrinth structure; and / or, the third sealing structure is a labyrinth structure.

[0021] Optionally, a fourth sealing structure is formed between the first housing and the second housing, and the fourth sealing structure is located outside the accommodation cavity.

[0022] Optionally, the fourth sealing structure includes a sealing groove and a sealing ring. The sealing groove is provided on at least one of the first housing and the second housing, and the sealing ring is partially disposed in the sealing groove.

[0023] Optionally, a limiting groove extending along the circumferential direction of the accommodation cavity is provided on the outer surface of the valve seat; the driving member further includes an operating portion, the operating portion is connected to the outer peripheral surface of the main body portion and partially extends outside the valve seat, and the operating portion also partially penetrates through the limiting groove;

[0024] Scale marks are provided on the surface of the valve seat corresponding to the limiting groove for identifying the position of the operating portion in the limiting groove.

[0025] To achieve the above object, the present invention further provides an exposure device, including a protective housing, a gas supply pipeline, an exhaust pipeline, and a valve as described in any one of the preceding items; the protective housing is a hollow structure with an inner cavity; the gas supply pipeline and the exhaust pipe section are both connected to the protective housing and can communicate with the inner cavity; the gas supply pipeline and the exhaust pipeline are also provided with the valve.

[0026] Compared with the prior art, the valve and the exposure device of the present invention have the following advantages:

[0027] The aforementioned valve includes a valve seat, blades, and a driving member; the valve seat is an annular structure with an inner hole; a accommodation cavity is formed on the valve seat, and the accommodation cavity coaxially surrounds the outer periphery of the inner hole and is also communicated with the inner hole; the blades are at least partially disposed in the accommodation cavity and are movably connected to the valve seat; the number of the blades is multiple, and the multiple blades are arranged in sequence along the circumferential direction of the accommodation cavity, and any two of the blades partially overlap; all the blades can enclose to form a fluid passage; the driving member is partially disposed in the accommodation cavity and is connected to all the blades; the driving member is configured to drive all the blades to move synchronously to change the opening degree of the fluid passage. This valve has good adjustment linearity. When it is applied to an exposure device, it is beneficial to improve the accuracy and repeatability of micro overpressure adjustment inside the exposure device. In addition, since any two of the blades partially overlap, the thickness of the pressure-bearing area per unit area of the valve is relatively large, which can reduce the damage rate of the blades and improve the service life of the valve without increasing the thickness of a single blade. Description of the Drawings

[0028] The accompanying drawings are used to better understand the present utility model and do not constitute an undue limitation to the present utility model. Among them:

[0029] Figure 1 is an overall schematic diagram of the valve provided by the present utility model according to an embodiment;

[0030] Figure 2 is an exploded schematic diagram of the valve provided by the present utility model according to an embodiment;

[0031] Figure 3 is a partial cross-sectional view of the valve provided by the present utility model according to an embodiment;

[0032] Figure 4 is a schematic diagram of the application state of the valve provided by the present utility model according to an embodiment;

[0033] Figure 5 is a schematic diagram of the application state of the valve provided by the present utility model according to an embodiment, Figure 5 in which the opening degree of the fluid passage is smaller than Figure 4 the opening degree of the fluid passage in;

[0034] Figure 6 is a schematic diagram of the structure of the first housing of the valve provided by the present utility model according to an embodiment;

[0035] Figure 7 is a schematic diagram of the structure of the second housing of the valve provided by the present utility model according to an embodiment;

[0036] Figure 8 is a schematic diagram of the structure of the driving member of the valve provided by the present utility model according to an embodiment;

[0037] Figure 9 is a schematic diagram of the structure of the driving member of the valve provided by the present utility model according to an embodiment, Figure 8 and Figure 7 have different viewing orientations, and the second recess is not shown in the figure;

[0038] Figure 10 is a schematic diagram of the structure of the blade of the valve provided by the present utility model according to an embodiment;

[0039] Figure 11 is a static simulation schematic diagram of the valve provided by the present utility model according to an embodiment when the opening degree of its fluid passage is 70%, and the stress received by the valve is shown in the figure;

[0040] Figure 12 is a static simulation schematic diagram of the valve provided by the present utility model according to an embodiment when the opening degree of its fluid passage is 70%, and the deformation schematic diagram of the valve is shown in the figure;

[0041] Figure 13 This is a static simulation schematic diagram of the valve provided by the present utility model according to an embodiment when the opening degree of its fluid passage is 50%, and the stress received by the valve is shown in the figure;

[0042] Figure 14 This is a static simulation schematic diagram of the valve provided by the present utility model according to an embodiment when the opening degree of its fluid passage is 50%, and the deformation schematic diagram of the valve is shown in the figure;

[0043] Figure 15 This is a schematic diagram of the flow resistance characteristic curve of the valve provided by the present utility model according to an embodiment;

[0044] Figure 16 This is a schematic structural diagram of the exposure device provided by the present utility model according to an embodiment.

[0045] [Description of the attached drawing reference numerals is as follows]:

[0046] 10 - Valve, 100 - Valve seat, 101 - Inner hole, 102 - Accommodating cavity, 103 - Guide groove, 104 - Limit groove, 105 - Scale mark, 110 - First housing, 111 - First base body, 112 - First retaining ring, 113 - First convex portion, 114 - First concave portion, 120 - Second housing, 121 - Second base body, 122 - Second retaining ring, 123 - Limiting portion, 124 - Fourth convex portion, 125 - Fourth concave portion, 126 - Fifth convex portion, 200 - Blade, 210 - Blade body, 211 - First arc contour line, 212 - Second arc contour line, 220 - First engaging post, 230 - Second engaging post, 300 - Driving member, 310 - Main body portion, 311 - Connecting hole, 312 - Second convex portion, 313 - Second concave portion, 314 - Third convex portion, 315 - Third concave portion, 316 - Fifth concave portion, 320 - Operating portion, 321 - Connecting block, 322 - Operating rod, 11 - Fluid passage, 12 - First sealing structure, 13 - Second sealing structure, 14 - Third sealing structure, 15 - Fifth sealing structure, 20 - Protective shell, 30 - Air supply pipeline, 40 - Exhaust pipeline. Detailed implementation manners

[0047] The following describes the implementation modes of the present utility model through specific examples. Those skilled in the art can easily understand the other advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can also be implemented or applied through other different specific implementation modes. Various details in this specification can also be modified or changed based on different viewpoints and applications without departing from the spirit of the present utility model. It should be noted that the illustrations provided in this embodiment only schematically illustrate the basic concept of the present utility model. Therefore, only the components related to the present utility model are shown in the drawings, rather than being drawn according to the number, shape, and size of the components in actual implementation. The type, quantity, and ratio of each component in actual implementation can be arbitrarily changed, and the layout type of its components may also be more complex.

[0048] In addition, each of the following embodiments of the description content has one or more technical features. However, this does not mean that those using the present utility model must simultaneously implement all the technical features in any one embodiment, or can only separately implement some or all of the technical features in different embodiments. In other words, on the premise that implementation is possible, those skilled in the art can, according to the disclosure content of the present utility model and depending on design specifications or implementation requirements, selectively implement some or all of the technical features in any one embodiment, or selectively implement the combination of some or all of the technical features in multiple embodiments, thereby increasing the flexibility when implementing the present utility model.

[0049] As used in this specification, the singular forms "a", "an", and "the" include plural objects, and the plural form "a plurality of" includes more than two objects, unless the content clearly indicates otherwise. As used in this specification, the term "or" is generally used in the sense of including "and / or", unless the content clearly indicates otherwise, and the terms "install", "connect", and "couple" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two components or the interaction relationship between two components. The relational terms such as "first", "second", etc. are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any such actual relationship or order between these entities or operations, nor indicate or imply relative importance or implicitly specify the quantity of the indicated technical features. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0050] The purpose of the present utility model is to provide a valve, which has the advantages of high adjustment accuracy, good linearity, and long service life, and can be applied to exposure equipment.

[0051] To make the objectives, advantages and features of the present utility model clearer, the present utility model will be further described in detail below with reference to the accompanying drawings. It should be noted that the drawings are all in very simplified forms and use non-precise scales, only for conveniently and clearly assisting in explaining the objectives of the embodiments of the present utility model. The same or similar reference numerals in the drawings represent the same or similar components.

[0052] Figure 1 Fig. 5 shows an overall schematic diagram of a valve 10 provided by an embodiment of the present utility model. Figure 2 Fig. 7 is an exploded schematic diagram of the valve 10. Figure 3 Fig. 9 is a partial cross-sectional view of the valve 10. Figure 4 and Figure 5 Fig. 13 is a schematic diagram of the application state of the valve 10.

[0053] As Figures 1 to 5 shown, the valve 10 includes a valve seat 100, vanes 200 and a driving member 300. Among them, the valve seat 100 is an annular structure having an inner hole 101, and an annular accommodating cavity 102 is further formed on the valve seat 100. The annular accommodating cavity 102 coaxially surrounds the outer periphery of the inner hole 101, and the accommodating cavity 102 is also communicated with the inner hole 101. The number of the vanes 200 is multiple, and each vane 200 is at least partially disposed in the accommodating cavity 102. All the vanes 200 are arranged in sequence along the circumferential direction of the accommodating cavity 102, and any two vanes 200 partially overlap. All the vanes 200 can enclose to form a fluid passage 11. The driving member 300 is partially disposed in the accommodating cavity 102 and is connected to all the vanes 200. The driving member 300 is configured to drive all the vanes 200 to move synchronously to change the opening degree of the fluid passage 11. It should be understood that the fluid passage 11 is within the range of the inner hole 101.

[0054] In this embodiment, when the blade 200 moves under the drive of the driving member 300, so that the portion of the blade 200 located within the inner hole 101 increases and the portion of the blade 200 located within the accommodating cavity 102 decreases, the opening degree of the fluid passage 11 decreases; conversely, when the blade 200 moves under the drive of the driving member 300, so that the portion of the blade 200 located within the inner hole 101 decreases and the portion of the blade 200 located within the accommodating cavity 102 increases, the opening degree of the fluid passage 11 increases. That is to say, the valve 100 is a valve based on the iris diaphragm principle, which has the advantages of good adjustment linearity and high repeatability. Moreover, since any two blades 200 partially overlap with each other, a plurality of the blades 200 are partially stacked and arranged in the axial direction of the valve 10. This can improve the pressure-bearing capacity of all the blades 200 without increasing the thickness of a single blade 200, so that the blade 200 is not easily damaged under a large pressure and has a long service life.

[0055] Next, the specific configuration of the valve 10 will be described in detail. It can be understood that only the optional structures of the valve 10 are described below, which are not the only structures of the valve 10 and should not unduly limit the present invention.

[0056] Please continue to refer to Figures 1 to 3 , the valve seat 100 includes a first housing 110 and a second housing 120, and the first housing 110 and the second housing 120 are connected to each other and define the accommodating cavity 102.

[0057] Please continue to refer to Figure 3 and in combination with Figure 6 , the first housing 110 includes an annular first base body 111, and the first base body 111 has an inner edge and an outer edge that are opposite to each other in the radial direction of the valve 10. The radial direction of the valve 10 refers to the extending direction of a straight line that is perpendicular to the axis of the inner hole 101 and intersects the axis of the inner hole 101. The inner edge of the first base body 111 is the edge of the first base body 111 close to the axis of the inner hole 101, and the outer edge of the first base body 111 is the edge of the first base body 111 away from the inner hole 101. The inner edge of the first base body 111 is circular, and the outer edge of the first base body 111 can be of any suitable shape, but is preferably circular. An annular first retaining ring 112 is formed at the outer edge of the first base body 111, and the first retaining ring 112 is perpendicular to the first base body 111.

[0058] Please continue to refer to Figure 3 and in combination with Figure 7, the second housing 120 includes an annular second base body 121. The second base body 121 has an inner edge and an outer edge that are opposite to each other in its radial direction. The inner edge of the second base body 121 refers to the edge of the second base body 121 that is close to the axis of the inner hole 101, and the outer edge of the second base body 121 refers to the edge of the second base body 121 that is far from the axis of the inner hole 101. The inner edge of the second base body 121 is circular, and the outer edge of the base body 121 can be of any suitable shape, but is preferably circular. An annular second retaining ring 122 is formed at the outer edge of the second base body 121, and the second retaining ring 122 is perpendicular to the second base body 121.

[0059] When assembling the valve seat 100, the first retaining ring 112 and the second retaining ring 122 are arranged face to face and are in contact with each other, and are connected by any suitable means such as screw connection. Thus, the inner edges of the first base body 111 and the second base body 121 jointly define the inner hole 101, and the part of the first housing 110 close to its inner edge, the part of the second housing 120 close to its inner edge, the first retaining ring 112, and the second retaining ring 122 jointly define the accommodating cavity 102. That is, the area in the valve seat 100 that is outside the inner hole 101 and inside the first base body 112 and the second base body 122 forms the accommodating cavity 102.

[0060] Please refer to Figure 8 and Figure 9 , the driving member 300 includes an annular main body portion 310. The main body portion 310 is disposed in the accommodating cavity 102. Generally, the main body portion 310 is coaxially arranged with the inner hole 101. The main body portion 310 is located on the same side of all the vanes 200 and is connected to all the vanes 200. In the embodiment of the present invention, when the main body portion 310 rotates self - sufficiently, the main body portion 310 drives all the vanes 200 to move synchronously, so as to achieve the purpose of changing the opening degree of the fluid passage 11.

[0061] Either the first housing 110 or the second housing 120 is connected to the vane 200. Hereinafter, taking the connection between the first housing 110 and the vane 200 as an example for illustration. Those skilled in the art can modify the following description to adapt to the case where the second housing 120 is connected to the vane 200.

[0062] When the first housing 110 is connected to the vane 200, the main body portion 310 is located on the side of the vane 110 that is far from the first housing 110.

[0063] Continue to refer to Figure 2 and in combination with Figure 6, a plurality of guide grooves 103 are formed on the surface of the first housing 110 facing the blade 200. The plurality of guide grooves 103 are located within the accommodation cavity 102 (that is, the accommodation cavity 102 is formed with the guide grooves 103 on the cavity wall on the side of the blade 200 away from the main body portion 310). The plurality of guide grooves 103 are arranged at intervals along the circumferential direction of the accommodation cavity 102. Each of the guide grooves 103 extends along the radial direction of the accommodation cavity 102. Please refer to Figure 8 and Figure 9 , a plurality of connection holes 311 are provided on the main body portion 310. The number of the connection holes 311 is the same as the number of the guide grooves 103. The plurality of connection holes 311 are arranged at intervals along the circumferential direction of the main body portion 310. As Figure 10 shown, the blade 200 includes a blade body 210, a first engaging post 220, and a second engaging post 230. The first engaging post 220 is disposed on the side of the blade body 210 facing the main body portion 310, and at least a part of the first engaging post 220 is inserted into one of the connection holes 311. The second engaging post 230 is disposed on the side of the blade body 210 away from the main body portion 310, and at least a part of the second engaging post 230 is inserted into one of the guide grooves 103. Therefore, when the main body portion 310 rotates self - rotatably, the main body portion 310 drives the first engaging post 220 to rotate self - rotatably, and also drives the second engaging post 230 to rotate self - rotatably, and drives the second engaging post 230 to move along the corresponding guide groove 103.

[0064] It can be understood that based on the structure of the blade 200, in fact, the blade bodies 210 of all the blades 200 enclose to form the fluid passage 11. Moreover, when the second engaging post 230 moves along the corresponding guide groove 103 in the direction close to the axis of the inner hole 101, the part of the blade body 210 located within the inner hole 101 increases and the part located within the accommodation cavity 102 decreases, so that the fluid passage 11 decreases; when the second engaging post 230 moves along the corresponding guide groove 103 in the direction away from the axis of the inner hole 101, the part of the blade body 210 located within the inner hole 101 decreases and the part located within the accommodation cavity 102 increases, so that the fluid passage 11 increases. Thus, the area of the blade body 210 between the first engaging post 220 and the second engaging post 230 is the main pressure - bearing area.

[0065] In practice, it is desired that the pressure-bearing area of the blade body 210 is relatively large. Optionally, the blade body 210 has an arc-shaped structure. For convenience of description, the two opposite ends of the blade body 210 in its own circumferential direction are respectively referred to as the first end and the second end. The first engaging post 220 is preferably disposed at a position adjacent to the first end of the blade body 210, and the second engaging post 230 is preferably disposed at a position connecting the second end of the blade body 210. The advantage of such a setting is that the blade body 210 can have a relatively large pressure-bearing area.

[0066] In addition, the accommodating cavity 102 has an inner edge and an outer edge that are opposite to each other in the radial direction of the inner hole. The inner edge of the accommodating cavity 102 refers to the edge of the accommodating cavity 102 close to the axis of the inner hole 101, and the outer edge of the accommodating cavity 102 refers to the edge of the accommodating cavity 102 far from the inner hole 101. Both the inner edge and the outer edge of the accommodating cavity 102 are circular. The blade body 210 has a first circular arc contour line 211 and a second circular arc contour line 212 that are opposite to each other in its own radial direction. The first circular arc contour line 211 is closer to the axis of the inner hole 101 than the second circular arc contour line 212. The diameter of the circle where the first circular arc contour line 211 is located is equal to the diameter of the inner edge of the accommodating cavity 102, and the diameter of the circle where the second circular arc contour line 212 is located is less than or equal to the diameter of the outer edge of the accommodating cavity 102. In this way, the blade 200 can be completely located within the accommodating cavity 102. It should be understood that when the blade 200 is completely located within the accommodating cavity 102, the opening degree of the fluid passage 11 is the largest, and the fluid flow area of the fluid passage 11 is equal to the cross-sectional area of the inner hole 101.

[0067] Alternatively, the diameter of the circle where the first circular arc contour line 211 is located may also be greater than the diameter of the inner edge of the accommodating cavity 102. However, it can be understood that in this case, limited by the size of the inner hole 101, the maximum value of the fluid flow area of the fluid passage 11 formed by enclosing all the blades 200 is still equal to the cross-sectional area of the inner hole 101.

[0068] The embodiment of the present utility model does not particularly limit the number of the blades 200, and the number thereof can be set according to the specific size of the valve 10. In practice, the number of the blades 200 is at least five.

[0069] Preferably, a limiting groove 104 extending along the circumferential direction of the accommodating cavity 102 is further provided on the outer surface of the valve seat 100. An avoidance groove (not shown in the figure) communicating with the accommodating cavity 102 and extending along the circumferential direction of the accommodating cavity 102 is provided on the valve seat 100. As Figure 8As shown, the driving member 300 further includes an operating portion 320. The operating portion 320 is connected to the outer peripheral surface of the main body portion 310, partially passes through the avoidance groove, and extends to the outside of the valve seat 100. The operator 320 is used to receive an external force and drive the main body portion 310 to rotate self - sufficiently under the action of the external force. The operating portion 320 also partially passes through the limiting groove 104. Further, a scale mark 105 is provided on the outer surface of the valve seat 100 corresponding to the position of the limiting groove 104. The scale mark is used to identify the position of the operating portion 320 in the limiting groove 104, so as to quantitatively control the self - rotation angle of the main body portion 310. On the one hand, it makes the opening adjustment of the fluid passage 11 more accurate. On the other hand, it can realize the repeated adjustment of the same self - rotation angle of the main body portion 310.

[0070] In an alternative embodiment, the limiting groove 104 is provided on the second housing 120. Specifically, the second housing 120 includes a limiting portion 123. The limiting portion 123 is connected to the outer edge of the second base body 121, and the limiting portion 123 and the outer peripheral surface of the second retaining ring 122 enclose to form the limiting groove 104. The scale mark 105 is provided on the surface of the limiting portion 124 away from the second base body 121.

[0071] As Figure 8 shown, the operating portion 320 includes a connecting block 321 and an operating rod 322. The connecting block 321 is connected to the outer peripheral surface of the main body portion 310 and partially passes through the avoidance groove. The operating rod 322 is connected to the connecting block 321 and partially passes through the limiting groove 104.

[0072] The valve 10 is applied to a fluid pipeline to control the flow rate of the fluid in the fluid pipeline. To prevent fluid leakage between the first housing 110 and the main body portion 310, a sealing structure (not marked in the figure) should be provided between the main body portion 310 and the first housing 110. Similarly, to prevent fluid leakage between the second housing 120 and the main body portion 310, a sealing structure (not marked in the figure) should also be provided between the main body portion 320 and the second housing 110.

[0073] Please refer to Figure 3 , in this embodiment, a first sealing structure 12 is provided between the main body portion 310 and the first housing 110, and the first sealing structure 12 is adjacent to the outer edge of the accommodating cavity 102.

[0074] The first sealing structure 12 is a labyrinth structure. Specifically, please continue to refer to Figure 3, the first sealing structure 12 includes a first convex portion 113 and a first concave portion 114 provided on the surface of the first housing 110 facing the main body portion 310. Both the first convex portion 112 and the first concave portion 114 are located within the accommodation cavity 102. Both the first convex portion 113 and the first concave portion 114 extend 360° along the circumferential direction of the accommodation cavity 102, and the first convex portion 113 and the first concave portion 114 are arranged in the radially outward direction of the accommodation cavity 102. The first sealing structure 12 further includes a second convex portion 312 and a second concave portion 313 provided on the surface of the main body portion 310 facing the first housing 110. Both the second convex portion 312 and the second concave portion 313 extend 360° along the circumferential direction of the accommodation cavity 102, and the second convex portion 312 and the second concave portion 313 are arranged in the radially inward direction of the accommodation cavity 102, so that the second convex portion 312 corresponds to the first concave portion 113, and the second concave portion 313 corresponds to the first convex portion 114. When assembling the valve 10, at least a part of the second convex portion 312 is inserted into the first concave portion 114, and at least a part of the first convex portion 113 is inserted into the second concave portion 313.

[0075] In this embodiment, the first concave portion 114 is located between the first retaining ring 112 and the first convex portion 113. In an alternative embodiment, the first convex portion 113 and the first concave portion 114 are arranged in the radially inward direction of the accommodation cavity 102. Thus, the second convex portion 312 and the second concave portion 313 are arranged in the radially outward direction of the accommodation cavity 102.

[0076] Continue to refer to Figure 3 , there are two sealing structures between the main body portion 310 and the second housing 120, namely the second sealing structure 13 and the third sealing structure 14. The third sealing structure 13 is adjacent to the outer edge of the accommodation cavity 102, and the fourth sealing structure 14 is adjacent to the inner edge of the accommodation cavity 102.

[0077] Optionally, the second sealing structure 13 is a labyrinth structure. Specifically, as Figure 3As shown, the second sealing structure 13 includes a third convex portion 314 and a third concave portion 315 provided on the surface of the main body portion 310 facing the second housing 120. Both the third convex portion 314 and the third concave portion 315 extend 360° along the circumferential direction of the accommodation cavity 102, and the third convex portion 314 and the third concave portion 315 are arranged radially inward along the accommodation cavity 102. The second sealing structure 13 further includes a fourth convex portion 124 and a fourth concave portion 125 provided on the surface of the second housing 120 facing the main body portion 310. Both the fourth convex portion 124 and the fourth concave portion 125 are located within the accommodation cavity 102 and extend 360° along the circumferential direction of the accommodation cavity 103. The fourth convex portion 124 and the fourth concave portion 125 are arranged in the radially inward direction along the accommodation cavity 102. When assembling the second housing 120 and the main body portion 310, at least a part of the fourth convex portion 124 is inserted into the third concave portion 315, and at least a part of the third convex portion 314 is inserted into the fourth concave portion 125.

[0078] Preferably, the third convex portion 314 and the first sealing structure 12 at least partially overlap in the radial direction of the accommodation cavity 102 to reduce the radial dimension of the valve 10.

[0079] Optionally, the third sealing structure 14 is also a labyrinth structure. Continuing to refer to Figure 3 , the third sealing structure 14 includes a fifth concave portion 316 provided on the surface of the main body portion 310 facing the second housing 120, and a fifth convex portion 126 provided on the surface of the second housing 120 facing the main body portion 310. The distance from the fifth convex portion 126 to the inner edge of the second housing 120 is greater than zero. When assembling the second housing 120 and the main body portion 310, at least a part of the fifth convex portion 126 is inserted into the fifth concave portion 316.

[0080] In addition, the labyrinth-type first sealing structure 12, the labyrinth-type second sealing structure 13, and the labyrinth-type third sealing structure 14 can also guide the rotation of the main body portion 310 to improve the reliability of the rotation of the main body portion 310.

[0081] In addition, both the first sealing structure 12 and the third sealing structure 14 are located inside the accommodation cavity 102. Therefore, they can isolate the accommodation cavity 102 from the relief groove to prevent fluid from leaking from the relief groove.

[0082] Furthermore, as Figure 3As shown, a fourth sealing structure 15 is further provided between the first housing 110 and the second housing 120, and the fourth sealing structure 15 is located outside the accommodation cavity 102. Optionally, the fourth sealing structure 15 includes a sealing groove 127 provided on the surface of the second retaining ring 122 facing the first housing 110 (as Figure 7 shown), and the fourth sealing structure 15 further includes a sealing ring 151 (as Figure 3 shown). The sealing ring 151 is partially disposed in the sealing groove 127 and is pressed by the first retaining ring 112 and the second retaining ring 122.

[0083] Next, taking the valve 10 including 11 blades 200 as an example, the properties of the valve 10 will be introduced.

[0084] When the valve 10 is applied to a gas pipeline, the gas flow rate that the valve 10 can withstand can reach 1500 m 3 / h or more.

[0085] In the case where all components of the valve 10 are made of 304 stainless steel, static analysis calculations are performed on the valve 10 for the following two working conditions. The first working condition is: the opening degree of the fluid passage 11 is 70%, the air flow rate is 5300 m 3 / h, and the pressure difference between the two axial ends of the valve 10 is 490 Pa; the second working condition is: the opening degree of the fluid flow passage 11 is 50%, the gas flow rate is 5300 m 3 / h, and the pressure difference between the two axial ends of the valve 10 is 1770 Pa. The static analysis calculation results of the valve 10 under the first working condition are as Figure 11 and Figure 12 shown, and the static analysis calculation results of the valve 10 under the second working condition are as Figure 13 and Figure 14 shown.

[0086] It can be seen from Figure 11 that under the first working condition, the maximum stress of the blade body 210 is 4.95 MPa. It can be seen from Figure 12 that the maximum deformation of the blade body 210 is 32 μm. It can be seen from Figure 13 that under the second working condition, the maximum stress of the blade body 210 is 25.99 MPa. It can be seen from Figure 14It can be seen that the maximum deformation of the blade body 210 is 305 μm. The yield strength of 304 stainless steel is 205 MPa. Therefore, under the first working condition, the safety factor of the valve 10 is 41.4, and under the second working condition, the safety factor of the blade body 210 is 7.9. Those skilled in the art know that when the safety factor of the valve 10 reaches 2, it can be considered that the valve 10 meets the strength requirements. That is, the valve 10 provided in this embodiment meets the strength requirements under the first working condition and the second working condition.

[0087] Figure 15 When the opening degree of the fluid passage 11 of the valve 10 provided in the embodiment of the present invention is greater than 22%, at different gas flow rates ( Figure 15 The flow rates shown are 200, 400, 600, 800, and 1000 respectively), the relationship curve between the pressure loss of the gas when passing through the valve 10 and the opening degree of the fluid passage 11. From Figure 15 It can be seen that the relationship curve between the pressure loss of the gas flowing through the valve 10 and the fluid passage 11 is approximately a smooth curve without obvious inflection points. Combining the pre-calibrated relationship between the rotation angle of the main body 310 and the opening degree of the fluid passage 11, it can be determined that there is approximately a linear relationship between the pressure loss of the gas when flowing through the valve 10 and the rotation angle of the main body 310. This shows that the valve 10 provided in the embodiment of the present invention has good adjustment linearity. It should be noted that Figure 15 The gas flow rate in

[0088] In addition, in the valve 10 provided in the embodiment of the present invention, when the thickness of the main body 310, the thickness of the first housing 110, and the thickness of the second housing 120 are determined, the axial length of the valve 10 is only related to the number of the blades 200 and the thickness of the blade body 210 of a single blade 200, and has nothing to do with the gas flow area. Therefore, the valve 10 provided in the embodiment of the present invention can have a relatively small axial length and is more suitable for use scenarios with limited length.

[0089] Furthermore, the present invention also provides an exposure device, such as Figure 16As shown, the exposure device includes a protective housing 20, a gas supply pipe 30, an exhaust pipe 40, and the valve 10 as described above. The protective housing 20 is a hollow structure with an inner cavity, and various functional components are accommodated in the inner cavity. The valves 10 are respectively provided on the gas supply pipe 30 and the exhaust pipe 40. When the opening degree of the fluid passage 11 of the valve 10 provided on the gas supply pipe 30 is greater than zero, the inner cavity communicates with the outside through the gas supply pipe 30; when the opening degree of the fluid passage 11 of the valve 10 provided on the exhaust pipe 40 is greater than zero, the inner cavity communicates with the outside through the exhaust pipe 40.

[0090] Although the present utility model is disclosed as above, it is not limited thereto. Those skilled in the art can make various changes and modifications to the present utility model without departing from the spirit and scope of the present utility model. Thus, if these modifications and variations of the present utility model fall within the scope of the claims of the present utility model and its equivalent technologies, the present utility model also intends to include these modifications and variations.

Claims

1. A valve, characterized in that, Comprising: A valve seat, which is an annular structure with an inner hole; an annular accommodation cavity is formed on the valve seat, and the accommodation cavity coaxially surrounds the outer periphery of the inner hole and is also communicated with the inner hole; Blades, at least partially arranged in the accommodation cavity and movably connected to the valve seat; the number of the blades is multiple, and the multiple blades are arranged in sequence along the circumferential direction of the accommodation cavity, any two of the blades partially overlap, and all the blades can enclose to form a fluid passage; And, A driving member, partially arranged in the accommodation cavity and connected to all the blades; the driving member is configured to drive all the blades to move synchronously to change the opening degree of the fluid passage.

2. The valve according to claim 1, wherein The driving member includes an annular main body portion, the main body portion is arranged in the accommodation cavity and is located on the same side of all the blades; the main body portion is connected to all the blades; The valve is configured to drive all the blades to move synchronously through the rotation of the main body portion.

3. The valve according to claim 2, characterized in that, A plurality of guide grooves are provided on the cavity wall of the accommodation cavity on the side where the blades are away from the main body portion, the plurality of guide grooves are arranged at intervals along the circumferential direction of the accommodation cavity, and the guide grooves extend along the radial direction of the accommodation cavity; A plurality of connection holes are provided on the main body portion, and the plurality of connection holes are arranged at intervals along the circumferential direction of the main body portion; The blade includes a blade body, a first engaging post is provided on the side of the blade body facing the main body portion, the first engaging post is at least partially inserted into one of the connection holes, a second engaging post is provided on the side of the blade body away from the main body portion, and the second engaging post is at least partially inserted into one of the guide grooves; The valve is configured to drive the first engaging post to rotate through the rotation of the main body portion, and while driving the second engaging post to rotate, it also moves along the corresponding guide groove.

4. The valve according to claim 3, characterized in that, The cross-section of the accommodation cavity is annular; the blade body is an arc-shaped structure and includes a first arc contour line and a second arc contour line that are opposite to each other in its own radial direction, and the first arc contour line is closer to the axis of the inner hole than the second arc contour line; the diameter of the circle where the first arc contour line is located is greater than or equal to the diameter of the inner edge of the accommodation cavity; the diameter of the circle where the second arc contour line is located is less than or equal to the diameter of the outer edge of the accommodation cavity.

5. The valve according to claim 4, characterized in that, The blade body has a first end and a second end that are opposite to each other in its own circumferential direction; the first engaging post is adjacent to the first end of the blade body, and the second engaging post is adjacent to the second end of the blade body.

6. The valve according to claim 3, characterized in that, The valve seat includes a first housing and a second housing, the first housing is connected to the second housing and defines the accommodation cavity, and the guide grooves are provided on the first housing; A first sealing structure is formed between the main body portion and the first housing, and the first sealing structure is located at the outer edge of the accommodation cavity; A second sealing structure and a third sealing structure are formed between the main body portion and the second housing, the second sealing structure is located at the outer edge of the accommodation cavity, and the third sealing structure is located at the inner edge of the accommodation cavity.

7. The valve according to claim 6, characterized in that, The first sealing structure is a first labyrinth structure; and / or, the second sealing structure is a labyrinth structure; and / or, the third sealing structure is a labyrinth structure.

8. The valve according to claim 6, characterized in that, A fourth sealing structure is formed between the first housing and the second housing, and the fourth sealing structure is located outside the accommodating cavity.

9. The valve according to claim 8, characterized in that, The fourth sealing structure includes a sealing groove and a sealing ring. The sealing groove is provided on at least one of the first housing and the second housing, and the sealing ring is partially disposed in the sealing groove.

10. The valve according to claim 2, wherein A limiting groove extending along the circumference of the accommodating cavity is provided on the outer surface of the valve seat; the driving member further includes an operating portion, the operating portion is connected to the outer circumferential surface of the main body portion and partially extends to the outside of the valve seat, and the operating portion also partially passes through the limiting groove. A scale mark is provided on the surface of the valve seat corresponding to the limiting groove for identifying the position of the operating portion in the limiting groove.

11. An exposure apparatus, characterized in that, It includes a protective shell, a gas supply pipe, an exhaust pipe, and a valve according to any one of claims 1-10; the protective shell is a hollow structure with an inner cavity; the gas supply pipe and the exhaust pipe are both connected to the protective shell and can communicate with the inner cavity; the gas supply pipe and the exhaust pipe are also provided with the valve.

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