Novel constant-temperature heating device of silicon carbide annealing furnace

Abstract

The utility model discloses a novel constant-temperature heating device of a silicon carbide annealing furnace, which belongs to the technical field of silicon carbide processing, and comprises a furnace tube, the rear side of the furnace tube is fixedly connected with a suction tube, one side of the suction tube is provided with a vacuum pump, and the other side of the suction tube is provided with a vacuum pump. Flange plates are fixedly connected to the two ends of the furnace tube, a containing disc is fixedly connected to the center of the inner side of one of the two flange plates, and an oxygen pipe is arranged in the center of the inner side of the other flange plate in a penetrating mode. And the cleaning assembly is arranged, so that dust and impurities adhering to the surface of the filter part can be cleaned during vacuumizing treatment, the problem of blockage of the filter part is solved, normal operation of air exhaust work is guaranteed, and the replacement frequency of the filter part is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon carbide processing, and more specifically, to a constant temperature heating device for a new type of silicon carbide annealing furnace. Background Art

[0002] Silicon carbide is a compound semiconductor material composed of carbon and silicon elements, and has advantages such as high hardness, high thermal conductivity, and good thermal stability. Therefore, it has broad application prospects in the semiconductor field. However, silicon carbide may have problems such as lattice defects during the process. Annealing processing through an annealing furnace can solve these problems and achieve purposes such as metal alloying, impurity activation, and lattice repair. Among them, the constant temperature heating device is the main component of the annealing furnace, and it is responsible for heating and annealing silicon carbide.

[0003] Based on the above, the inventor found that: before each use of the existing constant temperature heating device, vacuum gas washing treatment needs to be carried out to ensure the cleanliness inside the device. The gas washing work is mainly completed by a vacuum pump. However, when the air inside the device is pumped out by the vacuum pump, impurities in the air will accumulate on the surface of the filter element. Therefore, the filter element needs to be replaced to ensure smooth air extraction. The high-frequency replacement of the filter element increases the workload of the processing personnel and affects the annealing efficiency at the same time. Therefore, in view of this, the existing structure is studied and improved, and a constant temperature heating device for a new type of silicon carbide annealing furnace is provided, in order to achieve a more practical purpose. Summary of the Utility Model

[0004] 1. Technical Problems to be Solved

[0005] Aiming at the problems existing in the prior art, the purpose of the utility model is to provide a constant temperature heating device for a new type of silicon carbide annealing furnace. This scheme is provided with a rotating clamping component, which can quickly close and adjust the installation position of the filter element, improve the replacement efficiency of the filter element, and is provided with a cleaning component, which can clean the dust and impurities adhering to the surface of the filter element during vacuum pumping, reduce the problem of filter element blockage, ensure the normal progress of the air extraction work, and reduce the replacement frequency of the filter element.

[0006] 2. Technical Solutions

[0007] To solve the above problems, the utility model adopts the following technical solutions.

[0008] A constant temperature heating device for a new type of silicon carbide annealing furnace, including a furnace tube. A suction tube is fixedly connected to the rear side of the furnace tube. A vacuum pump is arranged on one side of the suction tube. Flange plates are fixedly connected to both ends of the furnace tube. A placement plate is fixedly connected to the center of the inner side of one of the two flange plates, and an oxygen pipe penetrates through the center of the inner side of the other flange plate. A gas pipe is fixedly connected to the bottom of the furnace tube. An extension sleeve penetrates through one end face of the suction tube, and a filter element is threadedly connected to the inner side of one end of the suction tube. A cleaning mechanism is arranged on one side of the filter element. The two ends of the extension sleeve are respectively fixedly connected with a clamping joint and a threaded head;

[0009] The cleaning mechanism includes a support frame. A movable shaft penetrates through the middle of the support frame, and a driving motor is arranged above the support frame. A transmission belt is sleeved on one end of the movable shaft, and a group of cleaning rods are fixedly connected to the other end of the movable shaft.

[0010] Further, an oxygen tank is fixedly connected to the outer end of the oxygen pipe, and a gas tank is fixedly connected to the outer end of the gas pipe.

[0011] Further, the clamping joint is located outside the suction tube, and the clamping joint is clamped with one end of the vacuum pump.

[0012] Further, the threaded head is located inside the suction tube, and the threaded head is threadedly connected with the suction tube.

[0013] Further, the support frame is fixedly connected to the inside of the suction tube, and the driving motor is fixedly connected to the top of the suction tube.

[0014] Further, the upper end of the transmission belt penetrates through the suction tube and is sleeved on the outside of the output end of the driving motor.

[0015] Further, the cleaning rods are located on one side of the filter element, and one side of the cleaning rods is attached to the filter element.

[0016] 3. Beneficial effects

[0017] Compared with the prior art, the advantages of the present utility model are as follows:

[0018] (1) In this solution, by rotating the extension sleeve, since the threaded head is threadedly connected with the suction tube, the clamping joint is driven to separate from the vacuum pump, so that the end of the suction tube close to the filter element is exposed. Then, the filter element can be rotated for replacement work, and then the extension sleeve is rotated in the reverse direction to make the clamping joint be clamped with one end of the vacuum pump again. Compared with the prior art, a rotating clamping component is provided, which can quickly perform closing adjustment on the installation position of the filter element and improve the replacement efficiency of the filter element.

[0019] (2) By setting up a cleaning mechanism, the filter element filters impurities from the extracted air. At the same time, the driving motor is started. Under the action of the transmission belt, the movable shaft rotates. The support frame ensures the rotational stability of the movable shaft. The movable shaft drives the cleaning rod to rotate, and the cleaning rod sweeps the dust and impurities accumulated on the surface of the filter element. Compared with the prior art, setting up a cleaning component can clean the dust and impurities adhering to the surface of the filter element during the vacuum pumping process, reduce the problem of filter element blockage, ensure the normal progress of the air extraction work, and reduce the replacement frequency of the filter element. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] Figure 1 is a schematic diagram of the overall structure of the present invention;

[0021] Figure 2 is a schematic diagram of the internal structure of the furnace tube of the present invention;

[0022] Figure 3 is a partial sectional view of the extraction tube of the present invention;

[0023] Figure 4 is a schematic diagram of the structure of the extension sleeve of the present invention;

[0024] Figure 5 is a schematic diagram of the structure of the cleaning mechanism of the present invention.

[0025] Explanation of the reference numerals in the drawings: 1. Furnace tube; 2. Vacuum pump; 3. Flange; 4. Placing plate; 5. Oxygen pipe; 6. Gas pipe; 7. Extraction tube; 8. Extension sleeve; 9. Filter element; 10. Cleaning mechanism; 11. Clamping joint; 12. Support frame; 13. Movable shaft; 14. Transmission belt; 15. Cleaning rod; 16. Driving motor; 17. Threaded head. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0026] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention; obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all of the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0027] Embodiment:

[0028] Please refer to Figures 1-5, A constant-temperature heating device for a new type of silicon carbide annealing furnace, including a furnace tube 1. A pumping tube 7 is fixedly connected to the rear side of the furnace tube 1. A vacuum pump 2 is arranged on one side of the pumping tube 7. Flange plates 3 are fixedly connected to both ends of the furnace tube 1. A placing plate 4 is fixedly connected to the center of the inner side of one of the two flange plates 3, and an oxygen tube 5 penetrates through the center of the inner side of the other flange plate 3. A gas supply tube 6 is fixedly connected to the bottom of the furnace tube 1. An extension sleeve 8 penetrates through one end face of the pumping tube 7, and a filter element 9 is threadedly connected to the inner side of one end of the pumping tube 7. A cleaning mechanism 10 is arranged on one side of the filter element 9. The two ends of the extension sleeve 8 are respectively fixedly connected with a clamping joint 11 and a threaded head 17;

[0029] The cleaning mechanism 10 includes a support frame 12. A movable shaft 13 penetrates through the middle of the support frame 12, and a driving motor 16 is arranged above the support frame 12. A transmission belt 14 is sleeved on one end of the movable shaft 13, and a group of cleaning rods 15 are fixedly connected to the other end of the movable shaft 13. In order to clean the filtered dust and avoid the problem of blockage caused by it, the cleaning mechanism 10 is provided.

[0030] Refer to Figure 1 , One end of the oxygen tube 5 close to the outside is fixedly connected with an oxygen tank, and one end of the gas supply tube 6 close to the outside is fixedly connected with a gas tank. Combustion medium is transported into the furnace tube 1 through the oxygen tube 5 and the gas supply tube 6 to anneal the silicon carbide inside the placing plate 4.

[0031] Refer to Figure 4 , The clamping joint 11 is located outside the pumping tube 7, and the clamping joint 11 is clamped with one end of the vacuum pump 2. After the clamping joint 11 is clamped with one end of the vacuum pump 2, the vacuum pump 2 can then evacuate the inside of the furnace tube 1 through the pumping tube 7, and the extracted air is filtered for impurities through the filter element 9.

[0032] Refer to Figure 4 , The threaded head 17 is located inside the pumping tube 7, and the threaded head 17 is threadedly connected with the pumping tube 7. Rotate the extension sleeve 8, and drive the clamping joint 11 to move through the threaded connection between the threaded head 17 and the pumping tube 7.

[0033] Refer to Figure 3 , The support frame 12 is fixedly connected to the inside of the pumping tube 7, and the driving motor 16 is fixedly connected to the top of the pumping tube 7. The rotation stability of the movable shaft 13 is ensured through the support frame 12.

[0034] Refer to Figure 5 , The upper end of the transmission belt 14 penetrates through the pumping tube 7 and is sleeved outside the output end of the driving motor 16. Start the driving motor 16, and under the action of the transmission belt 14, the movable shaft 13 rotates.

[0035] Refer to Figure 5, the cleaning rod 15 is located on one side of the filter element 9, and one side of the cleaning rod 15 is in contact with the filter element 9. The movable shaft 13 drives the cleaning rod 15 to rotate, and the cleaning rod 15 cleans the dust and impurities accumulated on the surface of the filter element 9.

[0036] During use: First, place the silicon carbide principle inside the placement tray 4, then fixedly connect the corresponding flange 3 to one end of the furnace tube 1, and then start the vacuum pump 2. The inside of the furnace tube 1 can be evacuated through the extraction pipe 7, and the extracted air is filtered for impurities through the filter element 9. At the same time, start the drive motor 16. Under the action of the transmission belt 14, the movable shaft 13 rotates. The rotation stability of the movable shaft 13 is ensured by the support frame 12. The movable shaft 13 drives the cleaning rod 15 to rotate, and the cleaning rod 15 cleans the dust and impurities accumulated on the surface of the filter element 9, reducing the problem of blockage of the filter element 9. Then, oxygen is supplied into the furnace tube 1 through the oxygen pipe 5 in cooperation with the oxygen tank. After repeating several times, the gas washing treatment of the inside of the furnace tube 1 is completed. Then, a combustion medium can be supplied into the furnace tube 1 through the oxygen pipe 5 and the gas pipe 6 to anneal the silicon carbide inside the placement tray 4. When the filter element 9 needs to be replaced, rotate the extension sleeve 8. The threaded head 17 is threadedly connected to the extraction pipe 7, driving the clamping joint 11 to move, separating it from the vacuum pump 2, and exposing the end of the extraction pipe 7 close to the filter element 9. Then, the filter element 9 can be rotated for replacement work.

[0037] Finally, it should be noted that: In the description of the present invention, it should be noted that the orientation or positional relationship indicated by the terms "vertical", "upper", "lower", "horizontal", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present invention and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present invention.

[0038] In the description of the present invention, it should also be noted that unless otherwise clearly specified and limited, the terms "set", "installed", "connected", "connected" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected, or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present invention can be understood according to specific circumstances.

[0039] The above is only the preferred specific embodiment of the present invention; however, the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its improved concept, makes equivalent substitutions or changes, and should be covered by the protection scope of the present invention.

Claims

1. A constant temperature heating device for a new type of silicon carbide annealing furnace, comprising a furnace tube (1), a pumping tube (7) is fixedly connected to the rear side of the furnace tube (1), and a vacuum pump (2) is arranged on one side of the pumping tube (7), characterized in that: Both ends of the furnace tube (1) are fixedly connected with flange plates (3). A placement plate (4) is fixedly connected in the middle of the inner side of one of the two flange plates (3), and an oxygen pipe (5) is centrally penetrated through the inner side of the other flange plate (3). A gas pipe (6) is fixedly connected to the bottom of the furnace tube (1). One end face of the extraction pipe (7) is penetrated through an extension sleeve (8), and a filter element (9) is screwed to the inner side of one end of the extraction pipe (7). A cleaning mechanism (10) is arranged on one side of the filter element (9). The two ends of the extension sleeve (8) are respectively fixedly connected with a clamping joint (11) and a threaded head (17); The cleaning mechanism (10) includes a support frame (12). A movable shaft (13) is penetrated through the middle of the support frame (12), and a driving motor (16) is arranged above the support frame (12). One end of the movable shaft (13) is sleeved with a transmission belt (14), and a group of cleaning rods (15) are fixedly connected to the other end of the movable shaft (13).

2. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: One end of the oxygen pipe (5) close to the outside is fixedly connected with an oxygen tank, and one end of the gas pipe (6) close to the outside is fixedly connected with a gas tank.

3. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: The clamping joint (11) is located outside the extraction pipe (7), and the clamping joint (11) is clamped with one end of the vacuum pump (2).

4. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: The threaded head (17) is located inside the extraction pipe (7), and the threaded head (17) is threadedly connected with the extraction pipe (7).

5. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: The support frame (12) is fixedly connected to the inside of the extraction pipe (7), and the driving motor (16) is fixedly connected to the top of the extraction pipe (7).

6. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: The upper end of the transmission belt (14) penetrates through the extraction pipe (7) and is sleeved outside the output end of the driving motor (16).

7. The constant temperature heating device of a novel silicon carbide annealing furnace according to claim 1, characterized in that: The cleaning rod (15) is located on one side of the filter element (9), and one side of the cleaning rod (15) is attached to the filter element (9).

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