Portable photomask box opener

Abstract

The utility model discloses a portable photomask box opener which comprises a base and a control unit, and a limiting mechanism, a positioning mechanism and a locking mechanism are arranged on the base. The limiting mechanism is used for limiting the photomask box when the photomask box is placed; the positioning mechanism is used for positioning the photomask box, so that the photomask box can be matched with the locking mechanism in position; the locking mechanism is used for locking the bottom of the photomask box placed on the base; the control unit is electrically connected with the positioning mechanism and the locking mechanism. According to the utility model, the portable box opening of the photomask box can be realized, after the photomask box is placed on the base, the locking mechanism is manually controlled to lock the bottom of the photomask box, and then the outer cover of the photomask box can be manually taken up, so that the portable box opening is realized.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductors, and particularly relates to a portable photomask box opener. Background Art

[0002] A wafer cassette / photomask box is a container used to protect, transport, and store wafers / photomasks in the semiconductor manufacturing process. Currently, 12-inch and 8-inch wafer / photomask boxes are commonly used.

[0003] In the prior art, for example, Chinese invention patent application CN202310554515.5 discloses a pod wafer transfer box opening device and its wafer scanning operation method, which can automatically open the wafer cassette in the vertical direction and can scan the wafer state. This kind of box opening device is suitable for scenarios with high automation requirements and has a high cost.

[0004] In the actual application process, for example, in the laboratory stage, manual opening can meet the requirements. At this time, since the photomask box / wafer cassette needs to be unlocked from the bottom, it is inconvenient to open manually. Therefore, a portable box opener that can be applied to the above scenarios is needed. Summary of the Utility Model

[0005] To achieve the above object, the utility model provides a portable photomask box opener, which includes a base and a control unit. A limiting mechanism, a positioning mechanism, and a locking mechanism are arranged on the base;

[0006] The limiting mechanism is used to limit the photomask box when it is placed;

[0007] The positioning mechanism is used to position the photomask box so that it can cooperate with the position of the locking mechanism;

[0008] The locking mechanism is used to lock the bottom of the photomask box placed on the base;

[0009] The control unit is electrically connected to the positioning mechanism and the locking mechanism respectively.

[0010] Preferably, it further includes a locking button, an unlocking button, a reset button, a warning light module, a communication module, and a heat dissipation module;

[0011] The locking button, the unlocking button, and the reset button are electrically connected to the locking mechanism respectively;

[0012] The control unit is electrically connected to the warning light module, the communication module, and the heat dissipation module respectively.

[0013] Preferably, the locking mechanism includes a locking motor. The locking button, the unlocking button, and the reset button are electrically connected to the locking motor respectively, and the locking motor is also electrically connected to the control unit.

[0014] Preferably, a heat dissipation bottom plate is provided at the bottom of the base.

[0015] Preferably, the positioning mechanism includes a pressure sensor, and the control unit is electrically connected to the pressure sensor.

[0016] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0017] The present utility model can realize the portable opening of the photomask box. After placing the photomask box on the base, the bottom of the photomask box is locked by manually controlling the locking mechanism, and then the outer cover of the photomask box can be manually picked up to realize the portable opening of the box. Description of the Drawings

[0018] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0019] Figure 1 and Figure 2 is a schematic structural diagram of the portable photomask box opener disclosed in the embodiments of the present utility model;

[0020] Figure 3 is a schematic internal structural diagram of the portable photomask box opener disclosed in the embodiments of the present utility model;

[0021] Figure 4 is an electrical connection block diagram of the control unit of the portable photomask box opener disclosed in the embodiments of the present utility model.

[0022] In the figure: base 100, heat dissipation bottom plate 110, control unit 200, locking button 210, unlocking button 220, reset button 230, warning light module 240, communication module 250, heat dissipation module 260, limiting mechanism 300, positioning mechanism 400, pressure sensor 410, locking mechanism 500, locking motor 510. Detailed Embodiments

[0023] The following will clearly and completely describe the technical solutions in the embodiments of the present utility model with reference to the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only some embodiments of the present utility model, rather than all embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0024] Figure 1And Figure 2 Fig. Figure 2 shows a portable photomask box opener disclosed in an embodiment of the present invention, which includes a base 100 and a control unit 200. A limiting mechanism 300, a positioning mechanism 400 and a locking mechanism 500 are arranged on the base 100, wherein:

[0025] The limiting mechanism 300 is used to limit the photomask box when it is placed. Preferably, the limiting mechanism 300 is arranged at the four corners of the surface of the base 100, and it also has an inwardly inclined slope-like structure to guide the photomask box to move into the limiting area.

[0026] The positioning mechanism 400 is used to position the photomask box. After the photomask box enters the limiting area through the limiting mechanism 300, it will fall on the positioning mechanism 400. Preferably, the positioning mechanism 400 includes positioning posts and a pressure sensor 410. There is a mechanism at the bottom of the photomask box that can cooperate with the positioning posts for positioning. And after the photomask box is positioned in cooperation with the positioning posts, the pressure sensor 410 can transmit a trigger signal to the control unit 200, and the control unit 200 will allow the operator to start operating the locking mechanism 500.

[0027] The locking mechanism 500 is used to lock the bottom of the photomask box placed on the base 100. As Figure 3 shown, the locking mechanism 500 realizes the locking of the bottom of the photomask box through a locking motor 510. After the photomask box is positioned, the locking mechanism 500 is controlled by the provided locking button 210, unlocking button 220 and reset button 230. The locking button 210 can realize the locking state of the locking mechanism 500, the unlocking button 220 can realize the unlocking state of the locking mechanism 500, and the reset button 230 can realize the reset of the locking mechanism 500.

[0028] It should be noted that the above-mentioned limiting mechanism 300, positioning mechanism 400 and locking mechanism 500 are specific common technical means for those skilled in the art to realize limiting, positioning and locking, and will not be elaborated here.

[0029] A portable photomask box opener disclosed in an embodiment of the present invention also includes a warning light module 240, a communication module 250 and a heat dissipation module 260. Since the state of the locking mechanism 500 cannot be directly observed after the photomask box is placed, the warning light module 240 is needed to prompt different states of the locking mechanism 500; the communication module 250 can transmit some data of the portable photomask box opener to analysis devices such as computers, which is beneficial to the collection and analysis of device data, and is also beneficial to the optimization and improvement of the device; the heat dissipation module 260 is used to dissipate heat from the entire device.

[0030] As Figure 4As shown, the control unit 200 is used to control the entire device. When the control unit 200 receives the trigger signal from the pressure sensor 410, the control unit 200 allows the locking motor 500 to operate and receives the status of the locking 500, and realizes status indication through the warning light module 240. The control unit 200 is also electrically connected to the communication module 250 and the heat dissipation module 260 to realize data transmission of the communication module 250 and the opening and closing of the heat dissipation module 260.

[0031] For better heat dissipation, as Figure 3 shown, a heat dissipation bottom plate 110 is provided at the bottom of the base 100, which can enable the entire device to achieve better heat dissipation.

[0032] The present utility model can realize the portable opening of the photomask box. After placing the photomask box on the base 100, manually control the locking mechanism 500 to lock the bottom of the photomask box, and then the outer cover of the photomask box can be manually picked up to realize portable opening of the box.

[0033] In this specification, each embodiment is described in a progressive manner. The key point of each embodiment is to illustrate the differences from other embodiments. For the same and similar parts among the embodiments, reference can be made to each other.

[0034] The above description of the disclosed embodiments enables those skilled in the art to implement or use the present utility model. Various modifications to these embodiments will be obvious to those skilled in the art. The general principles defined herein can be implemented in other embodiments without departing from the spirit or scope of the present utility model. Therefore, the present utility model will not be limited to these embodiments shown herein, but will conform to the widest scope consistent with the principles and novel features disclosed herein.

Claims

1. A portable photomask box opener, characterized in that, It includes a base (100) and a control unit (200). A limiting mechanism (300), a positioning mechanism (400) and a locking mechanism (500) are arranged on the base (100). The limiting mechanism (300) is used to limit the photomask box when it is placed. The positioning mechanism (400) is used to position the photomask box so that it can cooperate with the position of the locking mechanism (500). The locking mechanism (500) is used to lock the bottom of the photomask box placed on the base (100). The control unit (200) is electrically connected to the positioning mechanism (400) and the locking mechanism (500) respectively.

2. The portable photomask cassette opener according to claim 1, wherein It further includes a locking button (210), an unlocking button (220), a reset button (230), a warning light module (240), a communication module (250) and a heat dissipation module (260). The locking button (210), the unlocking button (220) and the reset button (230) are electrically connected to the locking mechanism (500) respectively. The control unit (200) is electrically connected to the warning light module (240), the communication module (250) and the heat dissipation module (260) respectively.

3. The portable photomask cassette opener according to claim 2, wherein The locking mechanism (500) includes a locking motor (510). The locking button (210), the unlocking button (220) and the reset button (230) are electrically connected to the locking motor (510) respectively, and the locking motor (510) is also electrically connected to the control unit (200).

4. The portable mask box opener according to claim 1, wherein A heat dissipation bottom plate (110) is arranged at the bottom of the base (100).

5. The portable photomask cassette opener according to claim 1, wherein The positioning mechanism (400) includes a pressure sensor (410). The control unit (200) is electrically connected to the pressure sensor (410).

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