Feeding device of wafer box cleaning machine

Abstract

The utility model relates to the field of feeding devices, in particular to a feeding device of a wafer box cleaning machine, which comprises a base, a feeding table is connected onto the base in a sliding manner, a driving device used for driving the feeding table to slide is mounted in the base, a plurality of positioning columns matched with positioning grooves in the bottom of a wafer box are arranged at the top of the feeding table, and the positioning columns are connected with the feeding table in a sliding manner. According to the feeding device of the wafer cassette cleaning machine, the positioning columns are matched with the positioning grooves in the bottoms of the wafer cassettes, and accurate positioning of the wafer cassettes on the feeding table is achieved. The feeding table is used for supporting the wafer box; by means of the combination of the air cylinder and the locking plate, the device can quickly and accurately fix the wafer box. The locking plate driven by the air cylinder can be flexibly embedded into the locking groove in the bottom of the wafer box, a powerful fixing effect is provided, and safety and efficiency in the conveying and cleaning process are ensured.

Description

Technical Field

[0001] The utility model relates to the field of feeding devices, in particular to a feeding device for a wafer cassette cleaning machine. Background Art

[0002] In the process of chip processing, wafers are usually placed in wafer cassettes for storage and transfer. Since wafers are very fragile, even a slight bump may cause damage, seriously affecting the quality of wafers. Therefore, in order to ensure the safe transportation of wafers, wafer cassettes usually adopt an automatic feeding method. However, the feeding devices on the market at present have certain deficiencies in positioning and fixing wafer cassettes, which may lead to unstable situations during transmission and increase the risk of wafer damage.

[0003] Therefore, it is necessary to provide a feeding device for a wafer cassette cleaning machine to solve the above technical problems. Summary of the Utility Model

[0004] To solve the above technical problems, the utility model provides a feeding device for a wafer cassette cleaning machine.

[0005] A feeding device for a wafer cassette cleaning machine provided by the utility model includes a base. A feeding table is slidably connected to the base. A driving device for driving the sliding of the feeding table is installed inside the base. A plurality of positioning columns matching with the bottom positioning grooves of the wafer cassette are arranged on the top of the feeding table. Mounting seats are symmetrically and fixedly arranged on the inner wall of the top of the feeding table. A cylinder is hinged to the mounting seat. Connecting seats are symmetrically and fixedly arranged on the inner wall of the top of the feeding table. The end of the piston rod of the cylinder is hinged with a locking plate matching with the bottom locking groove of the wafer cassette. The middle part of the locking plate is hinged with the locking plate through a hinge shaft. An avoidance hole is arranged on the base. The locking plate is arranged in the avoidance hole.

[0006] Preferably, a chamfer is arranged at the end of the positioning column.

[0007] Preferably, the driving device includes a motor fixed inside the base. The output shaft of the motor is fixedly connected with a lead screw through a coupling. One end of the lead screw is rotatably connected with the base. A threaded sleeve is fixed at the bottom of the feeding table, and the threaded sleeve is in threaded connection with the lead screw.

[0008] Preferably, sliding rails are symmetrically fixed at the bottom of the feeding table. Guide rails are symmetrically arranged inside the base, and the guide rails are slidably connected with the sliding rails.

[0009] Preferably, mounting plates are fixed at the bottom and side walls of the base.

[0010] Compared with the related technology, the utility model provided has the following beneficial effects:

[0011] By matching the positioning posts with the positioning grooves at the bottom of the wafer cassette, the precise positioning of the wafer cassette on the loading platform is achieved. The loading platform supports the wafer cassette; with the combination of the air cylinder and the locking plate, the device can quickly and accurately fix the wafer cassette. The locking plate driven by the air cylinder can flexibly embed into the locking groove at the bottom of the wafer cassette, providing a strong fixing effect and ensuring the safety and efficiency during the transmission of the wafer cassette. BRIEF DESCRIPTION OF THE DRAWINGS

[0012] Figure 1 It is a schematic diagram of the overall structure of the present utility model;

[0013] Figure 2 It is a schematic diagram of the structure of the locking plate of the present utility model;

[0014] Figure 3 It is a schematic diagram of the structure of the driving device of the present utility model;

[0015] Figure 4 It is a schematic diagram of the wafer cassette structure of the present utility model.

[0016] Reference numerals in the figures: 1, base; 2, loading platform; 3, positioning post; 4, mounting seat; 5, air cylinder; 6, connecting seat; 7, locking plate; 8, hinge shaft; 9, motor; 10, lead screw; 11, threaded sleeve; 12, slide rail; 13, guide rail; 14, mounting plate; 15, chamfer; 16, avoidance hole; 17, locking groove; 18, wafer cassette; 19, positioning groove. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0017] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0018] Please refer to Figures 1 to 4 , a loading device of a wafer cassette cleaning machine, the core structure of which includes a base 1. A slidable loading platform 2 is configured on this base 1, and it can slide under the action of a driving device installed inside the base 1. It is particularly worth mentioning that several positioning posts 3 are specially designed on the top of the loading platform 2, and these positioning posts 3 are perfectly matched with the positioning grooves 19 at the bottom of the wafer cassette 18, providing stable support and positioning for the wafer cassette 18.

[0019] To better fix the wafer cassette 18, mounting seats 4 are fixed on both sides of the inner wall of the top of the loading platform 2, and an air cylinder 5 is equipped on each mounting seat 4. At the same time, a connecting seat 6 is fixed on the inner wall of the top of the loading platform 2 to enhance the structural stability. The end of the piston rod of the air cylinder 5 is cleverly connected to a locking plate 7, and this locking plate 7 can just embed into the locking groove 17 at the bottom of the wafer cassette 18. The middle of the locking plate 7 is connected through a hinge shaft 8, enabling the locking plate 7 to rotate flexibly. To facilitate the movement of the locking plate 7, an avoidance hole 16 is specially opened on the base 1.

[0020] When placing the wafer cassette 18, the operator only needs to align the positioning post 3 with the positioning groove 19 at the bottom of the wafer cassette 18, and then start the cylinder 5. The cylinder 5 will drive the locking plate 7 to rotate flexibly along the hinge shaft 8 until the locking plate 7 is tightly stuck in the locking groove, thus ensuring that the wafer cassette 18 is stably placed on the loading table 2.

[0021] It is worth mentioning that a chamfer 15 is specially designed at the end of the positioning post 3, and this detail greatly facilitates the process of inserting the positioning post 3 into the positioning groove 19.

[0022] As for the driving device, it is composed of a motor 9 fixed inside the base 1. When the motor 9 is started, its output shaft will drive the lead screw 10 to rotate through a coupling. One end of this lead screw 10 is rotatably connected to the base 1, and a threaded sleeve 11 is fixed at the bottom of the loading table 2. This threaded sleeve 11 is tightly connected to the lead screw 10 through threads. Therefore, when the motor 9 drives the lead screw 10 to rotate, the loading table 2 will slide relative to the base 1, thereby realizing the automatic conveying of the wafer cassette 18.

[0023] In order to further ensure the smoothness of the sliding of the loading table 2, two slide rails 12 are symmetrically fixed at its bottom. At the same time, two guide rails 13 are correspondingly arranged inside the base 1, and these two guide rails 13 are slidably connected to the slide rails 12. Such a design not only ensures the stability and accuracy of the loading table 2 during the sliding process, but also greatly improves the working efficiency and reliability of the entire loading device.

[0024] Mounting plates 14 are fixed to both the bottom and the side wall of the base 1, which is convenient for installation on the cleaning machine frame.

[0025] The above description is only an embodiment of the present invention, and does not limit the patent scope of the present invention. Any equivalent structure or equivalent process transformation made by using the content of the specification and drawings of the present invention, or directly or indirectly applied in other related technical fields, shall be equally included in the patent protection scope of the present invention.

Claims

1. A loading device for a wafer cassette cleaning machine, characterized in that, It includes a base (1), on which a loading table (2) is slidably connected. A driving device for driving the sliding of the loading table (2) is installed inside the base (1). A plurality of positioning posts (3) matching the bottom positioning grooves of the wafer cassette are provided on the top of the loading table (2). Mounting seats (4) are symmetrically fixed on the inner wall of the top of the loading table (2). A cylinder (5) is hinged on the mounting seat (4). Connecting seats (6) are symmetrically fixed on the inner wall of the top of the loading table (2). The end of the piston rod of the cylinder (5) is hinged with a locking plate (7) matching the bottom locking groove of the wafer cassette. The middle of the locking plate (7) is hinged with the locking plate (7) through a hinge shaft (8). An avoidance hole (16) is provided on the base (1), and the locking plate (7) is arranged in the avoidance hole (16).

2. The feeding device of a wafer cassette cleaning machine according to claim 1, characterized in that, A chamfer (15) is provided at the end of the positioning post (3).

3. The feeding device of a wafer cassette cleaning machine according to claim 1, wherein, The driving device includes a motor (9) fixed inside the base (1). The output shaft of the motor (9) is fixedly connected with a lead screw (10) through a coupling. One end of the lead screw (10) is rotatably connected with the base (1). A threaded sleeve (11) is fixed at the bottom of the loading table (2), and the threaded sleeve (11) is threadedly connected with the lead screw (10).

4. The feeding device of a wafer cassette cleaning machine according to claim 1, wherein, Sliding rails (12) are symmetrically fixed at the bottom of the loading table (2). Guide rails (13) are symmetrically arranged inside the base (1), and the guide rails (13) are slidably connected with the sliding rails (12).

5. The feeding device of a wafer cassette cleaning machine according to claim 1, characterized in that, Mounting plates (14) are fixed on both the bottom and the side wall of the base (1).

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