Heat dissipation structure and vacuum pump

Abstract

The utility model relates to the technical field of heat dissipation, and discloses a heat dissipation structure and a vacuum pump. The heat dissipation structure comprises a stator, a rotor and a cold air generator. The stator is configured with a first cooling channel. The first cooling channel has a first exhaust port formed in the inner circumferential surface of the stator. The first cooling channel has a first intake port formed in an outer peripheral surface or a side surface of the stator. The rotor is rotatably installed in the stator. The rotor is configured with a second cooling channel extending in its axial direction. And the second cooling channel is provided with a second air inlet and a second air outlet which are arranged at intervals on the outer peripheral surface of the rotor. And the second air inlet is communicated with the first air outlet. The cool air generator has an air delivery pipe. The air delivery pipe is communicated with the first air inlet. Therefore, cold air can cool the rotor through the second cooling channel, the rotor is prevented from expanding due to too high heat, and the phenomenon that the pump is stuck due to the fact that the gap between the rotor and the stator is reduced is avoided.

Description

Technical Field

[0001] This application relates to the technical field of heat dissipation, and particularly to a heat dissipation structure and a vacuum pump. Background Art

[0002] In the related art, based on the high-speed rotation of the internal rotor of the vacuum pump, air is compressed and heat is generated, causing the stator and the rotor to expand due to heat. Since the stator is exposed to the air, the heat of the stator can be directly discharged to the surrounding air to achieve heat dissipation. The rotor is located inside the vacuum pump, and its heat cannot be discharged, making it difficult to dissipate heat. As a result, the degrees of thermal expansion and deformation of the stator and the rotor are different, causing the gap between the stator and the rotor to become smaller, resulting in pump jamming. Summary of the Utility Model

[0003] This application aims to provide a heat dissipation structure and a vacuum pump, which generate cold air through a cold air generator and transmit the cold air along a passage to the second cooling channel of the rotor, thereby taking away the heat of the rotor. Thus, the degree of deformation of the rotor due to heat expansion can be improved, and pump jamming caused by the reduction of the gap between the stator and the rotor can be prevented.

[0004] An embodiment of this application provides a heat dissipation structure, including:

[0005] A stator, configured with a first cooling channel, the first cooling channel having a first exhaust port formed on the inner circumferential surface of the stator, and the first cooling channel having a first intake port formed on the outer circumferential surface or side surface of the stator;

[0006] A rotor, rotatably installed inside the stator, the rotor configured with a second cooling channel extending along its axial direction, the second cooling channel having a second intake port and a second exhaust port spaced apart from each other formed on the outer circumferential surface of the rotor, wherein the second intake port is communicated with the first exhaust port;

[0007] A cold air generator, having an air delivery pipe, the air delivery pipe being communicated with the first intake port.

[0008] In some embodiments, the first exhaust port is arranged in a ring shape, and the orthographic projection of the first exhaust port on the rotor covers the second intake port;

[0009] And / or, the second intake port is arranged in a ring shape, and the orthographic projection of the second intake port on the stator covers the first exhaust port.

[0010] In some embodiments, the first exhaust port is arranged as at least two, and is circumferentially spaced along the inner circumferential surface of the stator;

[0011] And / or, the second intake port is arranged as at least two, and is circumferentially spaced along the outer circumferential surface of the rotor.

[0012] In some embodiments, the second exhaust ports are provided with at least two, and are axially spaced along the outer peripheral surface of the rotor;

[0013] And / or, the second exhaust ports are provided with at least two, and are circumferentially spaced along the outer peripheral surface of the rotor.

[0014] In some embodiments, the aperture of the second exhaust port is smaller than the aperture of the second cooling channel.

[0015] In some embodiments, the first cooling channel extends axially along the stator, or, the first cooling channel extends circumferentially along the stator, or, the first cooling channel is arranged in a spiral shape within the stator.

[0016] In some embodiments, the heat dissipation structure further includes:

[0017] A shaft seal, provided between the stator and the rotor, the shaft seal being configured with a gas guiding channel, and two ends of the gas guiding channel are respectively communicated with the second air inlet and the first exhaust port.

[0018] The embodiment of the present application further provides a vacuum pump, including the heat dissipation structure as described above.

[0019] In some embodiments, the stator is provided with at least two, and every two adjacent stators are communicated through a conduction pipe, and each stator is provided with a rotor, wherein, the stator far from the cold air generator is communicated with an exhaust pipe, and the cold air generator has at least two air delivery pipes, and each air delivery pipe corresponds to and is connected to a stator.

[0020] In some embodiments, each stator is provided with a temperature sensor, the temperature sensor is used to obtain the temperature of the stator, each air delivery pipe is provided with an electromagnetic valve, the temperature sensor is electrically connected to the corresponding electromagnetic valve, and the temperature sensor is used to send an electrical signal to the electromagnetic valve to drive the electromagnetic valve to open and close.

[0021] For the heat dissipation structure and the vacuum pump provided by the embodiment of the present application, cold air is generated by a cold air generator, and the cold air can be delivered to the second cooling channel along the direction of the first air inlet - the first cooling channel - the first exhaust port - the second air inlet. Based on the fact that the second cooling channel extends axially along the rotor, the cold air can cool a certain length area in the axial direction inside the rotor to prevent the rotor from expanding due to excessive heat, and avoid the occurrence of pump jamming due to the reduction of the gap between the rotor and the stator. Description of the Drawings

[0022] The following will, by combining the drawings and through a detailed description of the specific embodiments of the present application, make the technical solutions and other beneficial effects of the present application obvious.

[0023] Figure 1 This is a schematic structural diagram of the vacuum pump provided by the embodiment of the present application.

[0024] Figure 2 This is a gas circuit block diagram of the vacuum pump provided by the embodiment of the present application.

[0025] Figure 3 This is a schematic structural diagram of the rotor provided by the embodiment of the present application.

[0026] Figure 4 This is a side view of the rotor provided by the embodiment of the present application.

[0027] Figure 5 It is Figure 4 a cross-sectional view of the A-A section in

[0028] Reference numerals:

[0029] 10 - stator, 20 - rotor, 210 - second cooling channel, 220 - second air inlet, 230 - second exhaust port, 30 - cold air generator, 310 - gas transmission pipe, 410 - conduction pipe, 420 - exhaust pipe, 430 - temperature sensor, 440 - solenoid valve. Detailed implementation manners

[0030] Next, the technical solutions in the embodiments of the present application will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those skilled in the art without creative efforts shall fall within the protection scope of the present application.

[0031] In the description of the present application, it should be understood that the orientation or positional relationship indicated by the terms "center", "longitudinal", "transverse", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", etc. is based on the orientation or positional relationship shown in the accompanying drawings, and is only for the convenience of describing the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus cannot be understood as a limitation to the present application. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of the described features. In the description of the present application, "a plurality" means two or more, unless otherwise specifically defined.

[0032] In the description of the present application, it should be noted that unless otherwise clearly specified and defined, the terms "installed", "connected", and "coupled" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection, an electrical connection, or a connection that allows mutual communication; it can be directly connected, or indirectly connected through an intermediate medium, and can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present application can be understood according to specific circumstances.

[0033] In the present application, unless otherwise clearly specified and defined, the first feature being "on" or "under" the second feature may include the direct contact between the first and second features, or may include the situation where the first and second features are not in direct contact but in contact through other features between them. Moreover, the first feature being "above", "over", and "on top of" the second feature includes that the first feature is directly above and obliquely above the second feature, or simply means that the horizontal height of the first feature is higher than that of the second feature. The first feature being "under", "below", and "beneath" the second feature includes that the first feature is directly below and obliquely below the second feature, or simply means that the horizontal height of the first feature is lower than that of the second feature.

[0034] The following disclosure provides many different embodiments or examples for implementing different structures of the present application. To simplify the disclosure of the present application, the components and settings of specific examples are described below. Of course, they are only examples and are not intended to limit the present application. In addition, the present application may repeat reference numerals and / or reference letters in different examples. This repetition is for the purpose of simplification and clarity, and does not itself indicate the relationship between the various embodiments and / or settings discussed. In addition, the present application provides examples of various specific processes and materials, but those of ordinary skill in the art can be aware of the application of other processes and / or the use of other materials.

[0035] Specifically, please refer to Figures 1 to 5 , an embodiment of the present application provides a heat dissipation structure. The heat dissipation structure includes a stator 10, a rotor 20, and a cold air generator 30. The stator 10 is configured with a first cooling channel. The first cooling channel forms a first exhaust port on the inner peripheral surface of the stator 10. The first cooling channel forms a first intake port on the outer peripheral surface or side surface of the stator 10. The rotor 20 is rotatably installed within the stator 10. The rotor 20 is configured with a second cooling channel 210 extending along its axial direction. The second cooling channel 210 forms spaced second intake ports 220 and second exhaust ports 230 on the outer peripheral surface of the rotor 20. Among them, the second intake port 220 is in communication with the first exhaust port. The cold air generator 30 has an air delivery pipe 310. The air delivery pipe 310 is in communication with the first intake port.

[0036] In some embodiments, cold air is generated by the cold air generator 30. The cold air can be conveyed along the direction of the first air inlet - the first cooling channel - the first air outlet - the second air inlet 220 to the second cooling channel 210. Based on the fact that the second cooling channel 210 extends axially along the rotor 20, the cold air can cool a certain length region in the axial direction inside the rotor 20 to prevent the rotor 20 from expanding due to excessive heat and avoid pump jamming caused by the reduction of the gap between the rotor 20 and the stator 10.

[0037] It can be understood that the first air outlet is arranged on the inner circumferential surface of the stator 10, and the second air inlet 220 is arranged on the outer circumferential surface of the rotor 20. As the rotor 20 rotates, when the positions of the first air outlet and the second air inlet 220 coincide, the first air outlet and the second air inlet 220 are in a conducting state. At this time, the cold air can be transmitted into the second cooling channel 210 of the rotor 20 to cool the rotor 20.

[0038] In some embodiments, the first air inlet is formed on the side surface of the stator 10. Then, the air delivery pipe 310 of the cold air generator 30 conveys the cold air from the first air inlet on the side surface of the stator 10 into the first cooling channel.

[0039] In some embodiments, the first air inlet is formed on the outer circumferential surface of the stator 10. Then, the air delivery pipe 310 of the cold air generator 30 conveys the cold air from the first air inlet on the outer circumferential surface of the stator 10 into the first cooling channel.

[0040] Among them, on the one hand, the first cooling channel in the stator 10 can play the role of conveying cold air to transfer the cold air to the rotor 20 and achieve heat dissipation of the rotor 20. On the other hand, the stator 10 can also dissipate heat through the first cooling channel, so that the thermal expansion amounts of the stator 10 and the rotor 20 are basically the same. Thus, it further prevents the change of the gap between the stator 10 and the rotor 20 from causing pump jamming.

[0041] The second air outlet is used to discharge the cooled gas to ensure the normal intake and exhaust of the cooling pipeline.

[0042] In some embodiments, the first air outlet is arranged in a ring shape, and the orthographic projection of the first air outlet on the rotor 20 covers the second air inlet 220.

[0043] It can be understood that based on the fact that the first air outlet is arranged in a ring shape and its orthographic projection covers the second air inlet 220. Then, no matter what position the rotor 20 rotates to, the cold air flowing out from the first air outlet can flow into the second cooling channel 210 from the second air inlet 220 to achieve continuous cooling of the rotor 20.

[0044] For example, an annular groove is formed on the inner circumferential surface of the stator 10. The notch of the annular groove can serve as the first exhaust port. The bottom surface of the annular groove can communicate with the first cooling channel. Thus, after the cold air enters the first cooling channel from the first air inlet, it can be discharged from the first exhaust port after passing through the annular groove and enter the second cooling channel 210 from the second air inlet 220, so as to cool the rotor 20.

[0045] In some embodiments, the first exhaust port is provided with at least two, and is circumferentially spaced along the inner circumferential surface of the stator 10.

[0046] It can be understood that, based on the fact that the first exhaust port is circumferentially spaced along the inner surface of the stator 10 and is at least two, when the rotor 20 rotates one circle, the first exhaust port can coincide with at least two second air inlets 220 respectively. Thus, the first exhaust port and the second air inlet 220 can have at least two mutually conducting states.

[0047] For example, the first exhaust port is circumferentially arranged to be 8 along the inner circumferential surface of the stator 10. The second air inlet 220 on the outer circumferential surface of the rotor 20 is provided with 1. As the rotor 20 rotates one circle, the 1 second air inlet 220 can be respectively conducted with the 8 first exhaust ports. Thus, the cold air can be output to the second cooling channel 210 at 8 conducting positions, so as to dissipate heat for the rotor 20.

[0048] In some embodiments, the second air inlet 220 is arranged in a ring shape, and the orthographic projection of the second air inlet 220 on the stator 10 covers the first exhaust port.

[0049] It can be understood that, based on the fact that the second air inlet 220 is arranged in a ring shape and its orthographic projection covers the first exhaust port. No matter where the rotor 20 rotates to, the cold air flowing out from the first exhaust port can flow into the second cooling channel 210 from the second air inlet 220, so as to continuously cool the rotor 20.

[0050] For example, an annular groove is formed on the inner circumferential surface of the rotor 20. The notch of the annular groove can serve as the second air inlet 220. The bottom surface of the annular groove can communicate with the second cooling channel 210. Thus, after the cold air flows out of the first cooling channel from the first exhaust port, it can enter the second cooling channel 210 through the second air inlet 220 and the annular groove, so as to cool the rotor 20.

[0051] In some embodiments, the second air inlet 220 is provided with at least two, and is circumferentially spaced along the outer circumferential surface of the rotor 20.

[0052] It can be understood that, based on the circumferential spacing of the second air inlet 220 along the outer surface of the rotor 20 being set to at least two, when the rotor 20 rotates one circle, at least two first exhaust ports can respectively coincide with the second air inlet 220. Thus, the first exhaust port and the second air inlet 220 can have at least two mutually conducting states.

[0053] For example, the circumferential spacing of the second air inlet 220 along the circumferential surface of the rotor 20 is set to 6. The first exhaust port on the inner circumferential surface of the stator 10 is set to 1. As the rotor 20 rotates one circle, this 1 first exhaust port can respectively conduct with 6 second air inlets 220. Thus, cold air can be output to the second cooling channel 210 at 6 conducting positions, achieving heat dissipation for the rotor 20.

[0054] In some embodiments, the first exhaust ports are circumferentially spaced along the inner surface of the stator 10 by at least two, and the second air inlets 220 are circumferentially spaced along the outer surface of the rotor 20 by at least two. Thus, the first exhaust port and the second air inlet 220 can have more conducting states, which is more conducive to the transmission of cold air.

[0055] Such as Figure 4 and Figure 5 As shown, in some embodiments, the second exhaust ports 230 are set to at least two and are axially spaced along the outer peripheral surface of the rotor 20.

[0056] It can be understood that, based on setting the second exhaust ports 230 to at least two, the cooled gas can be quickly discharged. At the same time, when the gas is blown into the stator 10, it can also clean the cavity inside the stator 10. Since at least two second exhaust ports 230 are axially spaced, the cleaning range is increased.

[0057] Such as Figure 3 As shown, in some embodiments, the second exhaust ports 230 are set to at least two and are circumferentially spaced along the outer peripheral surface of the rotor 20.

[0058] It can be understood that, based on setting the second exhaust ports 230 to at least two, the cooled gas can be quickly discharged. At the same time, when the gas is blown into the stator 10, it can also clean the cavity inside the stator 10. Since at least two second exhaust ports 230 are circumferentially spaced, the cleaning range is increased.

[0059] Such as Figure 5 As shown, in some embodiments, the aperture of the second exhaust port 230 is smaller than the aperture of the second cooling channel 210.

[0060] Based on making the aperture of the second exhaust hole smaller than the aperture of the second cooling channel 210, the cold air can be blown out at a relatively fast flow rate and a certain pressure. The cold air is blown into the stator 10 at a relatively fast flow rate. On the one hand, it can take away the heat inside the casing to achieve the overall cooling of the vacuum pump; on the other hand, it can purge the inside of the stator 10 to take away the products generated inside the stator 10, reduce the adhesion of the products, and ensure the cleanliness of the inside of the stator 10.

[0061] For example, the aperture of the second cooling channel 210 is set to 4 mm. The aperture of the second exhaust hole is set to 0.2 mm.

[0062] In some embodiments, the first cooling channel extends along the axial direction of the stator 10. Based on the first cooling channel extending along the axial direction of the stator 10, the cold air can flow along the axial direction of the stator 10 in the first cooling channel, so as to dissipate heat from the stator 10 along the axial direction, reduce the temperature of the stator 10, and make the thermal expansion amounts of the stator 10 and the rotor 20 basically the same. Thus, it further prevents the gap between the stator 10 and the rotor 20 from changing and causing pump jamming.

[0063] In some embodiments, the first cooling channel extends along the circumferential direction of the stator 10. Based on the first cooling channel extending along the circumferential direction of the stator 10, the cold air can flow along the circumferential direction of the stator 10 in the first cooling channel, so as to dissipate heat from the stator 10 along the circumferential direction, reduce the temperature of the stator 10, and make the thermal expansion amounts of the stator 10 and the rotor 20 basically the same. Thus, it further prevents the gap between the stator 10 and the rotor 20 from changing and causing pump jamming.

[0064] In some embodiments, the first cooling channel is arranged in a spiral shape inside the stator 10. Based on the first cooling channel being arranged in a spiral shape, the cold air can basically cover all positions in the axial and radial directions of the stator 10 after flowing through the first cooling channel, so as to dissipate heat from various positions of the stator 10, reduce the temperature of the stator 10, and make the thermal expansion amounts of the stator 10 and the rotor 20 basically the same. Thus, it further prevents the gap between the stator 10 and the rotor 20 from changing and causing pump jamming.

[0065] In some embodiments, the heat dissipation structure further includes a shaft seal. The shaft seal is arranged between the stator 10 and the rotor 20, and the shaft seal is configured with a gas guiding channel, and both ends of the gas guiding channel are respectively communicated with the second air inlet 220 and the first exhaust port.

[0066] The cold air can flow in the direction of the first air inlet - the first cooling channel - the first exhaust port - the gas guiding channel - the second air inlet 220 - the second cooling channel 210 - the second exhaust port 230 to achieve heat dissipation for the rotor 20.

[0067] It is understandable that the shaft seal is used to achieve a gas seal between the stator 10 and the rotor 20. The shaft seal is sleeved on the shaft of the rotor 20, and the shaft seal is installed on the inner surface of the stator 10. The shaft seal can achieve the seal of the rotor 20 through its lip edge. When the rotor 20 rotates, the rotor 20 can rub the lip edge of the shaft seal to prevent gas leakage.

[0068] The shaft seal is usually set in an annular shape. Multiple air guiding channels can be arranged on the shaft seal. Correspondingly, multiple first exhaust ports are arranged on the inner circumferential surface of the stator 10, and multiple second air inlet ports 220 are arranged on the outer circumferential surface of the rotor 20.

[0069] In some embodiments, a through hole communicating with the first exhaust port can be formed on the outer surface of the shaft seal, and an annular hole is formed on the inner surface of the shaft seal. The annular hole communicates with the through hole through a channel formed inside the shaft seal. Thus, no matter where the rotor 20 rotates to, the cold air can flow from the shaft seal into the second cooling channel 210 to continuously cool the rotor 20.

[0070] In some embodiments, the cold air generator 30 includes a liquid nitrogen mechanism.

[0071] It is understandable that the vaporization of liquid nitrogen can form low-temperature nitrogen, so as to use the low-temperature nitrogen to cool the rotor 20. At the same time, the cooled gas can be directly discharged into the atmosphere without causing air pollution.

[0072] Based on the fact that the cold air generator 30 is a liquid nitrogen mechanism, the liquid nitrogen is transported in the air delivery pipe 310. When the liquid nitrogen flows into the first cooling channel and the second cooling channel 210, due to the heat generated by the stator 10 and the rotor 20 during operation, this part of the heat drives the liquid nitrogen to vaporize and form nitrogen to cool the stator 10 and the rotor 20.

[0073] In some embodiments, the cold air generator 30 can also adopt a blower, a carbon dioxide generator, etc. At the same time, to ensure the cold quantity of the gas, a refrigeration mechanism can also be sleeved outside the air delivery pipe 310. For example, an ice bag is sleeved outside the air delivery pipe 310.

[0074] As Figure 1 shown, the embodiment of the present application also provides a vacuum pump. The vacuum pump includes the heat dissipation structure as described in the foregoing embodiments.

[0075] The cold air is generated by the cold air generator 30. The cold air can be transported to the second cooling channel 210 along the direction of the first air inlet - the first cooling channel - the first exhaust port - the second air inlet port 220. Based on the fact that the second cooling channel 210 extends along the axial direction of the rotor 20, the cold air can cool a certain length area in the axial direction inside the rotor 20 to prevent the rotor 20 from expanding due to excessive heat, and avoid the occurrence of pump jamming due to the reduction of the gap between the rotor 20 and the stator 10.

[0076] This vacuum pump directly uses the stator 10 as the external housing, so that the stator 10 can be exposed to the air, facilitating the direct discharge of the heat of the stator into the surrounding air and being conducive to the rapid heat dissipation of the stator 10.

[0077] As Figure 1 and Figure 2 shown, in some embodiments, at least two stators 10 are provided. Every two adjacent stators 10 are connected through a conduction pipe 410. A rotor 20 is provided in each stator 10. Among them, the stator 10 far from the cold air generator 30 is connected with an exhaust pipe 420. The cold air generator 30 has at least two air delivery pipes 310, and each air delivery pipe 310 is correspondingly connected to a stator 10.

[0078] Based on the setting of multiple stators 10 and the use of the conduction pipe 410 to achieve the connection of multiple stators 10, the heat dissipation structure can thus be adapted to different models of vacuum pumps. The rotors 20 in each stator 10 are independently cooled to prevent mutual influence. The stator 10 far from the cold air generator 30 is connected with an exhaust pipe 420 for discharging the cooled gas and the products generated during the operation of the vacuum pump.

[0079] Among them, every two adjacent stators 10 are connected through a conduction pipe 410. When the rotor 20 in the stator 10 on the front side of the gas flow direction is cooled, the cooled gas can flow through the conduction pipe 410 into the next-stage stator 10. At this time, the remaining cold in the gas can cool the next-stage stator 10, thereby reducing the temperature inside the cavity.

[0080] In some embodiments, the conduction pipe 410 is a flange.

[0081] For example, two stators 10 are provided. One set of the stator 10 and the rotor 20 can be a DP (differential pressure) stator and a DP rotor respectively. As Figure 3 shown is the DP rotor. The other set of the stator 10 and the rotor 20 can be an MB (millibar) stator and an MB rotor respectively. As Figure 4 and Figure 5 shown is the MB rotor.

[0082] Please continue to refer to Figure 1 and Figure 2 , in some embodiments, each stator 10 is provided with a temperature sensor 430. The temperature sensor 430 is used to obtain the temperature of the stator 10. An electromagnetic valve 440 is provided on each air delivery pipe 310. The temperature sensor 430 is electrically connected to the corresponding electromagnetic valve 440. The temperature sensor 430 is used to send an electrical signal to the electromagnetic valve 440 to drive the opening and closing of the electromagnetic valve 440.

[0083] It is understandable that the temperature sensor 430 can monitor the temperature of the stator 10, and determine whether the rotor 20 needs to be cooled based on the temperature of the stator 10. When the corresponding rotor 20 needs to be cooled, the corresponding solenoid valve 440 is opened to ensure that the corresponding gas pipe 310 is connected. In this way, the cooling of at least two stators 10 can be achieved separately, and the solenoid valve 440 is opened only when the rotor 20 in the stator 10 has a heat dissipation requirement, thereby preventing waste of resources.

[0084] For example, the number of stators 10 is 4, namely, stator No. 1, stator No. 2, stator No. 3, and stator No. 4. When the temperature sensor 430 of the stator No. 1 detects that the temperature of the stator 10 inside it is too high, the solenoid valve 440 corresponding to the stator No. 1 is opened to cool down the rotor 20 inside it. When the temperature sensors 430 of the stators No. 3 and No. 4 detect that the temperature of the stators 10 inside them is too high, the solenoid valves 440 corresponding to the stators No. 3 and No. 4 are opened to cool down the rotor 20 inside them.

[0085] The vacuum pump may be provided with a temperature threshold, and when the temperature value detected by the temperature sensor 430 exceeds the temperature threshold, the solenoid valve 440 is activated. After cooling for a period of time, when the temperature value detected by the temperature sensor 430 is lower than the temperature threshold, the solenoid valve 440 is closed.

[0086] In the above embodiments, the description of each embodiment has its own emphasis. For parts that are not described in detail in a certain embodiment, reference can be made to the relevant descriptions of other embodiments.

[0087] The above is a detailed introduction to a heat dissipation structure and a vacuum pump provided in the embodiments of the present application. Specific examples are used in this article to illustrate the principles and implementation methods of the present application. The description of the above embodiments is only used to help understand the technical solution and its core idea of ​​the present application. Ordinary technicians in this field should understand that they can still modify the technical solutions recorded in the aforementioned embodiments, or replace some of the technical features therein with equivalents; and these modifications or replacements do not make the essence of the corresponding technical solutions deviate from the scope of the technical solutions of the embodiments of the present application.

Claims

1. A heat dissipation structure, characterized in that, Comprising: A stator configured with a first cooling channel, the first cooling channel having a first exhaust port formed on an inner circumferential surface of the stator, and the first cooling channel having a first air inlet formed on an outer circumferential surface or a side surface of the stator; A rotor rotatably mounted within the stator, the rotor configured with a second cooling channel extending along its axial direction, the second cooling channel having a second air inlet and a second exhaust port spaced apart from each other formed on an outer circumferential surface of the rotor, wherein the second air inlet communicates with the first exhaust port; A cold air generator having an air delivery pipe, the air delivery pipe communicating with the first air inlet.

2. The heat dissipation structure according to claim 1, characterized in that, The first exhaust port is arranged in a ring shape, and a positive projection of the first exhaust port on the rotor covers the second air inlet; And / or, the second air inlet is arranged in a ring shape, and a positive projection of the second air inlet on the stator covers the first exhaust port.

3. The heat dissipation structure according to claim 1, wherein The first exhaust port is arranged to be at least two and is circumferentially spaced along the inner circumferential surface of the stator; And / or, the second air inlet is arranged to be at least two and is circumferentially spaced along the outer circumferential surface of the rotor.

4. The heat dissipation structure according to claim 1, characterized in that The second exhaust port is arranged to be at least two and is axially spaced along the outer circumferential surface of the rotor; And / or, the second exhaust port is arranged to be at least two and is circumferentially spaced along the outer circumferential surface of the rotor.

5. The heat dissipation structure according to claim 1, wherein A pore diameter of the second exhaust port is smaller than a pore diameter of the second cooling channel.

6. The heat dissipation structure according to any one of claims 1-5, characterized in that, The first cooling channel extends along an axial direction of the stator, or, the first cooling channel extends along a circumferential direction of the stator, or, the first cooling channel is arranged in a spiral shape within the stator.

7. The heat dissipation structure according to any one of claims 1-5, characterized in that, The heat dissipation structure further comprises: A shaft seal provided between the stator and the rotor, the shaft seal configured with a gas guiding channel, two ends of the gas guiding channel respectively communicating with the second air inlet and the first exhaust port.

8. A vacuum pump, characterized in that, Comprising the heat dissipation structure according to any one of claims 1-7.

9. The vacuum pump according to claim 8, wherein, The stator is arranged to be at least two, each adjacent pair of the stators being communicated through a conduction pipe, and each stator is provided with a rotor therein. Among them, the stator away from the cold air generator is communicated with an exhaust pipe, and the cold air generator has at least two air delivery pipes, each air delivery pipe correspondingly connecting to one stator.

10. The vacuum pump according to claim 9, characterized in that, Each stator is provided with a temperature sensor for obtaining a temperature of the stator, each air delivery pipe is provided with an electromagnetic valve, the temperature sensor is electrically connected to the corresponding electromagnetic valve, and the temperature sensor is configured to send an electrical signal to the electromagnetic valve to drive the electromagnetic valve to open and close.

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