Air injection module and active air injection system

Abstract

The utility model discloses an air injection module and an active air injection system. The gas injection module is provided with a device body, a conveying cavity and an annular gas flow generation cavity are formed in the device body, one end of the device body is provided with a gas flow input part, the other end of the device body is provided with a gas flow output part, and the side edge of the device body extends outwards to form a gas guide-in part. The conveying cavity, the airflow input part and the airflow output part are communicated with one another, and the conveying cavity, the annular airflow generating cavity and the gas leading-in part are communicated with one another. The annular airflow generating cavity is provided with a side connecting part and a nozzle part, the side connecting part is communicated with the nozzle part, the side connecting part is connected to the gas leading-in part, the nozzle part is connected to the conveying cavity, the nozzle part is configured to be used for generating pushing airflow towards the conveying cavity in a preset path, and a preset included angle is formed between the preset path and the center axis of the device body. The air injection module and the active air injection system can replace a known pipeline heating belt, and the problem of pipeline blockage is effectively solved.

Description

Technical Field

[0001] The utility model relates to a jet module and an active jet system, in particular to a jet module and an active jet system for replacing a known pipeline heating tape and capable of generating an air flow at a specific angle. Background Art

[0002] In the particulate dust waste gas treatment system of high-tech manufacturing, fine dust needs to be collected before and after many waste gas detoxification processes. At present, in semiconductor manufacturing equipment, a wet scrubber (Local Scrubber) is used to filter fine dust, and the dust waste gas is transported through a pipeline. Since the dust waste gas is transported for a long time, the dust in the waste gas will accumulate on the pipe wall, resulting in the problem of pipeline blockage. Therefore, at present, multiple heating tapes are arranged on the pipeline in semiconductor manufacturing equipment to drive the dust accumulated on the pipe wall not to agglomerate and adhere, and be carried away with the waste gas.

[0003] However, the heating tape not only increases the manufacturing cost, but also cannot completely eliminate the need for pipeline cleaning.

[0004] Therefore, how to overcome the above defects through the improvement of structural design has become one of the important issues that this industry wants to solve. Summary of the Utility Model

[0005] The technical problem to be solved by the utility model is to provide a jet module and an active jet system in view of the deficiencies of the prior art.

[0006] To solve the above technical problems, one of the technical solutions adopted by the utility model is to provide a jet module, which has a device body. The inside of the device body has a conveying cavity and an annular air flow generating cavity. One end of the device body has an air flow input part, and the other end of the device body has an air flow output part. The side of the device body extends outward to form a gas inlet part. The conveying cavity, the air flow input part and the air flow output part communicate with each other. The conveying cavity, the annular air flow generating cavity and the gas inlet part communicate with each other. Among them, the air flow input part is configured to be connected to a first external operation device, the air flow output part is configured to be connected to a second external operation device, and the gas inlet part is configured to be connected to an external gas source device. Among them, the annular air flow generating cavity has a side connection part and at least one nozzle part. The side connection part and the at least one nozzle part communicate with each other. The side connection part is connected to the gas inlet part, and the at least one nozzle part is connected to the conveying cavity. The at least one nozzle part is configured to generate a pushing air flow towards the conveying cavity along a predetermined path, and a predetermined included angle is formed between the predetermined path and the central axis of the device body. The predetermined included angle is between 0 and 89 degrees.

[0007] To solve the above technical problems, another technical solution adopted by the present utility model is to provide an active jetting system, which includes at least one jetting module, at least one gas source supply module, and a control module. The at least one jetting module has a device body, and the interior of the device body has a conveying cavity and an annular airflow generating cavity. One end of the device body has an airflow input part, and the other end of the device body has an airflow output part. A gas introduction part extends outward from the side of the device body. The conveying cavity, the airflow input part, and the airflow output part communicate with each other. The conveying cavity, the annular airflow generating cavity, and the gas introduction part communicate with each other. The at least one gas source supply module is connected to the gas introduction part. The control module is connected to the gas source supply module, and the control module is configured to control the gas source supply module to supply driving airflow to the jetting module in a continuous manner or an intermittent manner. Among them, the airflow input part is configured to connect to a first external operating device, and the airflow output part is configured to connect to a second external operating device. Among them, the annular airflow generating cavity has a side connection part and at least one nozzle part. The side connection part and the at least one nozzle part communicate with each other. The side connection part is connected to the gas introduction part, and the at least one nozzle part is connected to the conveying cavity. The at least one nozzle part is configured to generate a pushing airflow toward the conveying cavity along a predetermined path, and a predetermined included angle exists between the predetermined path and the central axis of the device body, and the predetermined included angle is between 0 and 89 degrees.

[0008] One beneficial effect of the present utility model is that the jetting module and the active jetting system provided by the present utility model can replace the known pipeline heating tape through the above technical solution and effectively solve the pipeline blockage problem.

[0009] To further understand the features and technical content of the present utility model, please refer to the following detailed description and drawings of the present utility model. However, the provided drawings are only for reference and illustration and are not used to limit the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0010] Figure 1 It is a schematic structural diagram of the active jetting system according to the first embodiment of the present utility model.

[0011] Figure 2 It is a functional block diagram of the active jetting system according to the first embodiment of the present utility model.

[0012] Figure 3 It is a first cross-sectional schematic diagram of the jetting module according to the first embodiment of the present utility model.

[0013] Figure 4 It is a second cross-sectional schematic diagram of the jetting module according to the first embodiment of the present utility model.

[0014] Figure 5 Schematic diagram of the active jet system according to the second embodiment of the present utility model.

[0015] Figure 6 Functional block diagram of the active jet system according to the second embodiment of the present utility model.

[0016] The accompanying drawings are described as follows:

[0017] Z: Active jet system

[0018] M, M1, M2, M3: Jet module

[0019] M1: Device body

[0020] M10: Conveying cavity

[0021] M11: Annular air flow generating cavity

[0022] M110: Side connection part

[0023] M111: Nozzle part

[0024] M112: Main cavity part

[0025] M112a: Feather covering area

[0026] M112b: Shoulder area

[0027] M2: Gas input part

[0028] M3: Gas output part

[0029] M4: Air flow guiding part

[0030] 1: Gas source supply module

[0031] 10: Connecting pipe

[0032] 2: Control module

[0033] U1: First external operation device

[0034] U2: Second external operation device

[0035] U3: External gas source device

[0036] CA: Central axis

[0037] DA: Driving air flow

[0038] MP: Process gas

[0039] PA: Pushing air flow

[0040] PG: Predetermined angle

[0041] PR: Predetermined Path

[0042] TG: Predetermined Tilt Angle

[0043] EP: External Pipeline Detailed Implementation Manner

[0044] The following is to illustrate the implementation manner of the "jet module and active jet system" disclosed by the present utility model through specific specific embodiments. Those skilled in the art can understand the advantages and effects of the present utility model from the content disclosed in this specification. The present utility model can be implemented or applied through other different specific embodiments, and various details in this specification can also be modified and changed based on different viewpoints and applications without departing from the concept of the present utility model. In addition, the drawings of the present utility model are only for simple schematic illustration and are not drawn according to actual dimensions. This is stated in advance. The following implementation manner will further detail the related technical content of the present utility model, but the disclosed content is not intended to limit the protection scope of the present utility model.

[0045] It should be understood that although terms such as "first", "second", "third", etc. may be used herein to describe various elements or signals, these elements or signals should not be limited by these terms. These terms are mainly used to distinguish one element from another element, or one signal from another signal. In addition, the term "or" used herein should, depending on the actual situation, possibly include any one or a combination of more of the associated listed items.

[0046] [First Embodiment]

[0047] Please refer to Figures 1 to 4 , which are respectively the structural schematic diagram of the active jet system of the first embodiment of the present utility model, the functional block diagram of the active jet system, the first cross-sectional schematic diagram of the jet module, and the second cross-sectional schematic diagram of the jet module. As shown in the above diagrams, the first embodiment of the present utility model provides an active jet system Z, which may include at least one jet module M, at least one gas source supply module 1, and a control module 2.

[0048] Cooperate with Figures 1 to 4As shown, the jet module M may have a device body M1. Inside the device body M1, there may be a conveying cavity M10 and an annular air flow generating cavity M11. One end of the device body M1 may have an air flow input part M2, and the other end of the device body M1 may have an air flow output part M3. The side of the device body M1 may extend outward to form a gas introduction part M4. The conveying cavity M10, the air flow input part M2, and the air flow output part M3 may communicate with each other. The conveying cavity M10, the annular air flow generating cavity M11, and the gas introduction part M4 may communicate with each other. Among them, the air flow input part M2 may be configured to connect to a first external operation device U1, and the air flow output part M3 may be configured to connect to a second external operation device U2. Among them, the annular air flow generating cavity M11 may have a side connection part M110 and at least one nozzle part M111. The side connection part M110 and the nozzle part M111 may communicate with each other. The side connection part M110 is connected to the gas introduction part M4, and the nozzle part M111 is connected to the conveying cavity M10. The nozzle part M111 may be configured to generate a pushing air flow PA toward the conveying cavity M10 along a predetermined path PR. There may be a predetermined angle PG between the predetermined path PR and the central axis CA of the device body M1, and the predetermined angle PG may be between 0 and 89 degrees.

[0049] For example, the outer shape of the device body M1 may be a geometric shape, such as a square or a rounded trapezoid, but not limited thereto. The conveying cavity M10 may be located at the center of the device body M1, and the annular air flow generating cavity M11 surrounds the conveying cavity M10; among them, the conveying cavity M10 may be a hollow structure. One end of the device body M1 may extend outward to form the air flow input part M2, and the other end of the device body M1 may extend outward to form the air flow output part M3. The air flow input part M2, the air flow output part M3, and the gas introduction part M4 may be hollow tubular structures. The air flow input part M2 may communicate with the air flow output part M3 through the conveying cavity M10, and the gas introduction part M4 may communicate with the conveying cavity M10 through the annular air flow generating cavity M11. The diameter or aperture of the nozzle part M111 may be between 0.01 and 3 mm, preferably 0.1 mm. And, the predetermined angle PG is preferably between 0 and 10 degrees, and most preferably 0 degrees. Among them, the first external operation device U1 and the second external operation device U2 may be a turbo pump, a dry pump, a local scrubber, a combustion type waste gas removal device, a plasma type waste gas removal device, or a central processing device (such as a wet scrubber tower) in a semiconductor device, but not limited thereto; the air flow input part M2 may be connected to the first external operation device U1 by connecting an external pipeline EP, and the air flow output part M3 may be connected to the second external operation device U2 by connecting an external pipeline EP.

[0050] Furthermore, the cross-section of the annular airflow generating cavity M11 can be wing-shaped, and the annular airflow generating cavity M11 can be a ring-shaped hollow structure; the annular airflow generating cavity M11 can also have a main cavity portion M112, and the main cavity portion M112 can have a feather covering area M112a and a shoulder area M112b. The feather covering area M112a can connect the side connection portion M110 and the shoulder area M112b, and the shoulder area M112b can connect at least one nozzle portion M111. Among them, the cross-section of the feather covering area M112a can be conical, and the cross-section of the shoulder area M112b can be C-shaped or hook-shaped, but not limited thereto. And, the device body M1 can have a predetermined inclination angle TG between the inner wall surface of the feather covering area M112a adjacent to the conveying cavity M10 and the central axis CA, and the predetermined inclination angle TG can be between 5 and 30 degrees, preferably 8 degrees, 16 degrees (such as Figure 4 shown), 19 degrees, 26.5 degrees, 30 degrees (such as Figure 3 shown), but not limited thereto.

[0051] Next, with reference to Figure 1 and Figure 2 shown, at least one gas source supply module 1 is connected to the gas introduction portion M4. For example, the gas source supply module 1 can be a gas supply device in a semiconductor device, which can provide general air or special gas (such as inert gas, but not limited thereto), and the gas source supply module 1 can have a connecting pipe 10, and the connecting pipe 10 is connected to the gas introduction portion M4.

[0052] Next, with reference to Figure 2 shown, the control module 2 can be electrically connected to the gas source supply module 1, and the control module 2 can be configured to control the gas source supply module 1 to supply the driving airflow DA to the jet module M in a continuous manner or an intermittent manner. For example, the control module 2 can be a central control device or a computer device. In other preferred embodiments, the control module 2 can also be connected to the first external operation device U1 and the second external operation device U2, and receive information (such as relevant signals of gas delivery parameters) provided by the first external operation device U1, the second external operation device U2, or both of them.

[0053] Therefore, when the gas introduction part M4 receives the driving air current DA provided by the gas source supply module 1, and the air current input part M2 receives the process gas MP provided by the first external working device U1, the annular air current generating cavity M11 can generate a pushing air current PA towards the conveying cavity M10 through at least one nozzle part M111, so that the pushing air current PA drives the process gas MP to flow towards the air current output part M3. Among them, when the gas introduction part M4 receives the driving air current DA provided by the gas source supply module 1, the annular air current generating cavity M11 can introduce the driving air current DA into the feather covering area M112a through the side connection part M110; among them, the driving air current DA can flow through the feather covering area M112a and the shoulder area M112b in sequence, and flow towards the conveying cavity M10 from at least one nozzle part M111 along a predetermined path PR and form a pushing air current PA.

[0054] For example, as shown in Figures 1 to 4 The active jetting system Z of the present utility model can be applied to semiconductor manufacturing equipment and replace the pipeline heating belt in the existing semiconductor manufacturing equipment. Therefore, when the active jetting system Z of the present utility model is operating, it can receive the process gas MP (such as harmful gas (such as waste gas) with fine dust, but not limited thereto) provided by the first external working device U1 through the jetting module M. Then, the control module 2 can control the gas source supply module 1 to supply the driving air current DA (such as the air current of inert gas, but not limited thereto) to the jetting module M; at this time, after the driving air current DA enters the annular air current generating cavity M11 from the gas introduction part M4, it can flow through the feather covering area M112a and the shoulder area M112b in sequence, and generate a swirl in the annular air current generating cavity M11 (that is, flow in the annular air current generating cavity M11 in a vortex manner), and then be sprayed into the conveying cavity M10 by the nozzle part M111. Among them, the nozzle part M111 can spray the driving air current DA towards the conveying cavity M10 along a predetermined path PR (that is, a specific spraying direction, a predetermined spraying direction), so that the driving air current DA forms a pushing air current PA; among them, the pushing air current PA can be an annular air current.

[0055] Next, when the pushing air current PA is sprayed into the interior of the conveying cavity M10, the pushing air current PA will flow towards the air current output part M3 along the predetermined path PR (that is, the predetermined spraying direction); at the same time, the pushing air current PA will entrain and inhale the process gas MP introduced by the air current input part M2 into it, and combine with the process gas MP to form a strong and stable air current and flow towards the air current output part M3. Finally, the process gas MP is completely pushed and driven into the second external working device U2 by the pushing air current PA, so that the dust in the process gas MP does not remain in the external pipeline EP.

[0056] It is worth mentioning that the control module 2 of the present utility model can, according to the built-in program or manual operation, control the gas source supply module 1 to continuously supply the driving air flow DA to the jet module M, or control the gas source supply module 1 to supply the driving air flow DA to the jet module M in an intermittent gas supply manner (for example, supplying gas every 5 seconds, but not limited thereto). Moreover, the flow rate range of the propelling air flow PA generated by the jet module M can be between 1 and 600 SLM.

[0057] Thus, through the above technical solution, the active jet system Z of the present utility model can provide an active annular air flow by arranging the jet module M, the gas source supply module 1, and the control module 2 between the first external operation device U1 and the second external operation device U2, and drive the process gas MP to completely flow to the second external operation device U2 by providing the propelling air flow PA through the jet module M, thereby preventing the dust in the process gas MP from remaining in the external pipeline EP; at the same time, it can also replace the method of using a heating belt to heat the pipeline in the existing semiconductor process to solve the pipeline blockage problem, thereby greatly reducing the manufacturing cost and equipment maintenance cost.

[0058] In addition, according to the above content, in cooperation with Figures 1 to 4 As shown, the present utility model further provides a jet module M, which may have a device body M1. The interior of the device body M1 may have a conveying cavity M10 and an annular air flow generating cavity M11. One end of the device body M1 may have an air flow input part M2, and the other end of the device body M1 may have an air flow output part M3. The side of the device body M1 may extend outward to form a gas introduction part M4. The conveying cavity M10, the air flow input part M2, and the air flow output part M3 may communicate with each other. The conveying cavity M10, the annular air flow generating cavity M11, and the gas introduction part M4 may communicate with each other. Among them, the air flow input part M2 may be configured to connect to the first external operation device U1, the air flow output part M3 may be configured to connect to the second external operation device U2, and the gas introduction part M4 may be configured to connect to an external gas source device U3 (which may be the same as the gas source supply module 1, such as a gas supply device in a semiconductor device, and can supply general air or special gas (such as inert gas, but not limited thereto)). Among them, the annular air flow generating cavity M11 may have a side connection part M110 and at least one nozzle part M111. The side connection part M110 and the at least one nozzle part M111 communicate with each other. The side connection part M110 may be connected to the gas introduction part M4, the at least one nozzle part M111 may be connected to the conveying cavity M10, and the at least one nozzle part M111 may be configured to generate a propelling air flow PA toward the conveying cavity M10 along a predetermined path PR. A predetermined angle PG may exist between the predetermined path PR and the central axis CA of the device body M1, and the predetermined angle PG may be between 0 and 89 degrees.

[0059] However, the examples given above are only one feasible embodiment and are not intended to limit the present utility model.

[0060] [Second Embodiment]

[0061] Please refer to Figure 5 and Figure 6 , which are respectively the structural schematic diagram of the active jet system and the functional block diagram of the active jet system according to the second embodiment of the present utility model, and please also refer to Figures 1 to 4 . As shown in the figure, the active jet system Z of this embodiment is substantially similar to the active jet system Z of the above embodiment. Therefore, the setting or actuation of the same components will not be described herein again. The difference between this embodiment and the above first embodiment is that in this embodiment, the active jet system Z may further include a plurality of jet modules M. The air flow input part M2 of one jet module M can be connected to the first external operation device U1, the air flow output part M3 of one jet module M can be connected to the air flow input part M2 of another jet module M, the air flow output part M3 of another jet module M can be connected to the second external operation device U2, and the gas introduction parts M4 of the plurality of jet modules M can be connected to at least one gas source supply module 1.

[0062] For example, as shown in Figures 3 to 6 , a plurality of jet modules M1, M2, M3 can be arranged at equal or unequal intervals between the first external operation device U1 and the second external operation device U2 in the active jet system Z; and each of the jet modules M1, M2, M3 can be individually connected to a gas source supply module 1, or a plurality of jet modules M1, M2, M3 can be connected to the same gas source supply module 1. Therefore, when the distance between the first external operation device U1 and the second external operation device U2 is too long (i.e., the length of the external pipeline EP is long), or the external pipeline EP between the first external operation device U1 and the second external operation device U2 is not a straight pipeline, but is composed of a straight pipeline and a bent pipeline, then a jet module M can be arranged at different positions on the pipeline path of the external pipeline EP. Then, the control module 2 is used to control the mode (such as continuous or intermittent) of the gas source supply module 1 to supply the driving air flow DA, so as to drive the plurality of jet modules M1, M2, M3 to drive the process gas MP to be completely transported from the first external operation device U1 to the second external operation device U2 in a relay manner.

[0063] Furthermore, the control module 2 can control the gas source supply module 1 corresponding to the jet module M1 to supply the driving air flow DA to the jet module M1 first, while the gas source supply modules 1 corresponding to the jet modules M2 and M3 do not supply the driving air flow DA temporarily. Then, after an interval of time (for example, after an interval of 5 seconds, but not limited thereto), the control module 2 controls the gas source supply module 1 corresponding to the jet module M2 to supply the driving air flow DA to the jet module M2 first. At the same time, it controls the gas source supply modules 1 corresponding to the jet modules M1 and M3 not to supply the driving air flow DA temporarily. At this time, the process gas MP has been driven by the driving air flow PA generated by the jet module M1 to the jet module M2, and then driven by the driving air flow PA generated by the jet module M2 to the jet module M3. Next, after another interval of time (for example, after an interval of 5 seconds, but not limited thereto), the control module 2 controls the gas source supply module 1 corresponding to the jet module M3 to supply the driving air flow DA to the jet module M3. At the same time, it controls the gas source supply modules 1 corresponding to the jet modules M1 and M2 not to supply the driving air flow DA temporarily. At this time, the process gas MP has been driven by the driving air flow PA generated by the jet module M2 to the jet module M3, and then driven by the driving air flow PA generated by the jet module M3 to the second external working device U2.

[0064] However, the control module 2 can control the gas source supply modules 1 corresponding to the jet modules M1, M2, and M3 to continuously supply the driving air flow DA to the jet modules M1, M2, and M3 together, so as to drive the jet modules M1, M2, and M3 to generate the driving air flow PA together, and drive the process gas MP provided by the first external working device U1 to the second external working device U2.

[0065] It is worth mentioning that the flow rate range of the driving air flow PA generated by M1, M2, and M3 of the active jet system Z of the present utility model can be between 1 and 600 SLM.

[0066] However, the above examples are only one feasible embodiment and are not intended to limit the present utility model.

[0067] [Advantages of the embodiment]

[0068] One of the beneficial effects of the present utility model is that the jet module M and the active jet system Z provided by the present utility model can replace the known pipeline heating tape through the above technical solutions and effectively solve the problem of pipeline blockage.

[0069] Furthermore, the active jetting system Z of the present utility model can, through the above technical solutions, provide an active annular air flow by arranging a jetting module M, an air source supply module 1, and a control module 2 between a first external operation device U1 and a second external operation device U2, and drive the process gas MP to completely flow to the second external operation device U2 by providing a pushing air flow PA in a specific direction (i.e., a predetermined path PR) through the jetting module M, so as to avoid dust in the process gas MP from remaining in the external pipeline EP, solve the problem of pipeline blockage in the semiconductor industry, and do not require additional power supply; at the same time, it can also replace the existing method of using a heating tape to heat the pipeline to solve pipeline blockage in the semiconductor manufacturing process. In the future, the pipeline does not require a heating tape, thereby greatly reducing the manufacturing cost and equipment maintenance cost.

[0070] The content disclosed above is only a preferred and feasible embodiment of the present utility model, and does not limit the protection scope of the claims of the present utility model. Therefore, all equivalent technical changes made by using the content of the specification and drawings of the present utility model are included in the protection scope of the claims of the present utility model.

Claims

1. A jet module, characterized in that, It has a device body, inside which there is a conveying cavity and an annular air flow generating cavity. One end of the device body has an air flow input part, the other end has an air flow output part, and the side of the device body extends outward to form a gas introduction part. The conveying cavity, the air flow input part and the air flow output part communicate with each other, and the conveying cavity, the annular air flow generating cavity and the gas introduction part communicate with each other; Among them, the air flow input part is configured to be connected to a first external working device, the air flow output part is configured to be connected to a second external working device, and the gas introduction part is configured to be connected to an external gas source device; Among them, the annular air flow generating cavity has a side connection part and at least one nozzle part. The side connection part and the at least one nozzle part communicate with each other. The side connection part is connected to the gas introduction part, and the at least one nozzle part is connected to the conveying cavity. The at least one nozzle part is configured to generate a driving air flow toward the conveying cavity along a predetermined path, and there is a predetermined angle between the predetermined path and the central axis of the device body, and the predetermined angle is between 0 and 89 degrees.

2. The jet module according to claim 1, characterized in that, When the gas introduction part receives the driving air flow provided by the external gas source device, and the air flow input part receives the process gas provided by the first external working device, the annular air flow generating cavity generates the driving air flow toward the conveying cavity through the at least one nozzle part, so that the driving air flow drives the process gas to flow toward the air flow output part; among them, the driving air flow is an annular air flow.

3. The jet module according to claim 1, characterized in that, The predetermined angle is between 0 and 10 degrees; among them, the conveying cavity is located at the center of the device body, and the annular air flow generating cavity surrounds the conveying cavity; among them, the flow rate range of the driving air flow generated by the jet module is between 1 and 600 SLM.

4. The jet module according to claim 1, characterized in that The cross-section of the annular air flow generating cavity is in the shape of a wing; the annular air flow generating cavity also has a main cavity part, the main cavity part has a feather covering area and a shoulder area, the feather covering area connects the side connection part and the shoulder area, the shoulder area connects the at least one nozzle part, the cross-section of the feather covering area is in a conical shape, and the cross-section of the shoulder area is in a C shape or a hook shape.

5. The jet module according to claim 4, wherein When the gas introduction part receives the driving air flow provided by the external gas source device, the annular air flow generating cavity introduces the driving air flow into the feather covering area through the side connection part; among them, the driving air flow sequentially flows through the feather covering area and the shoulder area, and flows from the at least one nozzle part along the predetermined path toward the conveying cavity and forms the driving air flow.

6. An active jet system, characterized in that, Including: At least one jet module, which has a device body. Inside the device body, there is a conveying cavity and an annular air flow generating cavity. One end of the device body has an air flow input part, and the other end of the device body has an air flow output part. The side of the device body extends outward to form a gas introduction part. The conveying cavity, the air flow input part and the air flow output part communicate with each other. The conveying cavity, the annular air flow generating cavity and the gas introduction part communicate with each other; At least one air source supply module, which is connected to the gas introduction part; And A control module, which is connected to the air source supply module. The control module is configured to control the air source supply module to supply driving air flow to the jet module in a continuous manner or an intermittent manner; Wherein, the air flow input part is configured to be connected to a first external operation device, and the air flow output part is configured to be connected to a second external operation device; Wherein, the annular air flow generating cavity has a side connection part and at least one nozzle part. The side connection part and the at least one nozzle part communicate with each other. The side connection part is connected to the gas introduction part, and the at least one nozzle part is connected to the conveying cavity. The at least one nozzle part is configured to generate a pushing air flow towards the conveying cavity along a predetermined path. There is a predetermined angle between the predetermined path and the central axis of the device body, and the predetermined angle is between 0 and 89 degrees.

7. The active jet system according to claim 6, wherein There are further multiple jet modules. The air flow input part of one jet module is connected to the first external operation device. The air flow output part of one jet module is connected to the air flow input part of another jet module. The air flow output part of another jet module is connected to the second external operation device. The gas introduction parts of the multiple jet modules are connected to the at least one air source supply module.

8. The active jet system according to claim 6, characterized in that, When the gas introduction part receives the driving air flow provided by the at least one air source supply module, and the air flow input part receives the process gas provided by the first external operation device, the annular air flow generating cavity generates the pushing air flow towards the conveying cavity through the at least one nozzle part, so that the pushing air flow drives the process gas to flow towards the air flow output part; wherein, the pushing air flow is an annular air flow; wherein, the flow rate range of the pushing air flow generated by the jet module is between 1 and 600 SLM.

9. The active jet system according to claim 6, wherein The predetermined angle is between 0 and 10 degrees; wherein, the conveying cavity is located at the center of the device body, and the annular air flow generating cavity surrounds the conveying cavity; wherein, the cross section of the annular air flow generating cavity is in the shape of a wing; the annular air flow generating cavity also has a main cavity part, the main cavity part has a feather covering area and a shoulder area. The feather covering area connects the side connection part and the shoulder area, and the shoulder area connects the at least one nozzle part. The cross section of the feather covering area is in a conical shape, and the cross section of the shoulder area is in a C shape or a hook shape.

10. The active jet system according to claim 9, wherein When the gas introduction part receives the driving air flow provided by the at least one gas source supply module, the annular air flow generating cavity introduces the driving air flow into the overlying feather area through the side connection part; wherein, the driving air flow sequentially flows through the overlying feather area and the shoulder area, and flows toward the conveying cavity from the at least one nozzle part along the predetermined path to form the pushing air flow.

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