Air exhaust part, reaction cavity and thin film deposition equipment

Abstract

The utility model discloses an air extractor, reaction chamber and thin film deposition equipment, the air extractor includes: annular body and shoulder, shoulder, the shoulder is provided with a plurality of first air exhaust hole on the shoulder, a plurality of first air exhaust hole are distributed on the shoulder along the circumferential direction of annular body, the first air exhaust hole is provided with a plurality of second air exhaust hole, the second air exhaust hole is provided with a plurality of second air exhaust hole, and the second air exhaust hole is provided with a plurality of second air exhaust hole. The first air exhaust hole penetrates through the shoulder part in the axial direction of the annular body. According to the spray plate disclosed by the utility model, a channel for circulating the purge gas is formed through the first exhaust hole in the shoulder part, the purge gas flow on the outer circumference part of the spray plate can be exhausted through the first exhaust hole, and the purge gas and the process gas flow are mutually independent, so that the purge gas entering a reaction area is reduced, the interference on the process gas is avoided, and the influence on the process result is prevented; the deposition quality of the film is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly to an air extraction member, a reaction chamber and a thin film deposition device. Background Art

[0002] In the field of semiconductor manufacturing, especially in the process of chemical vapor deposition (CVD), the cleanliness of the chamber has a crucial impact on the quality and performance of the final thin film. To maintain the cleanliness inside the chamber, the purge air flow at the outer circumferential part of the shower plate is usually used to remove the possible accumulated impurities and particulate matters. This purge mechanism aims to remove the pollutants from the key areas through the high-speed air flow to keep the purity of the process environment. However, in actual operation, the purge air flow is often directly exhausted, which not only causes waste of gas, but also affects the stability and uniformity of the reaction gas flow. Due to the interaction between the purge air flow and the reaction gas flow, undesired turbulence or mixing effects may occur, thus having an obvious impact on the process results. For example, during the thin film deposition process, non-uniform gas flow may lead to non-uniformity of the thin film thickness, thereby affecting the performance of the device. In addition, the presence of the purge air flow may also cause a part of the process gas to enter the purge area. These gases are supposed to be used in the process, but may damage the parts inside the chamber. The parts that are eroded by the process gas for a long time may need to be replaced more frequently, thus increasing the maintenance cost and prolonging the downtime. Summary of the Utility Model

[0003] The embodiments of the utility model provide an air extraction member, a reaction chamber and a thin film deposition device, aiming to solve the problem that the purge gas in the existing reaction chamber is exhausted during the process, interfering with the normal process gas and affecting the process results.

[0004] In the first aspect, the utility model provides an air extraction member, including:

[0005] An annular body;

[0006] A shoulder, which is arranged around the outer side wall of the annular body. A plurality of first air extraction holes are formed in the shoulder. The plurality of first air extraction holes are distributed on the shoulder along the circumferential direction of the annular body, and the first air extraction holes penetrate through the shoulder along the axial direction of the annular body.

[0007] Furthermore, a plurality of second air extraction holes are formed in the annular body. The plurality of second air extraction holes are distributed on the side wall of the annular body along the circumferential direction of the annular body, and the second air extraction holes penetrate through the side wall of the annular body along the radial direction of the annular body.

[0008] Furthermore, the air extraction member has a first circumferential area close to the air extraction and a second circumferential area far from the air extraction port in its circumferential direction;

[0009] The diameter of the first air extraction hole in the first circumferential region is smaller than the diameter of the first air extraction hole in the second circumferential region; and / or,

[0010] The diameter of the second air extraction hole in the first circumferential region is smaller than the diameter of the second air extraction hole in the second circumferential region.

[0011] Furthermore, the diameter of the first air extraction hole and / or the second air extraction hole is gradually decreasing from the second circumferential region to the first circumferential region.

[0012] Furthermore, the air extraction member has a first circumferential region close to the air extraction and a second circumferential region far from the air extraction port in its circumferential direction;

[0013] The adjacent spacing of the first air extraction holes in the first circumferential region is greater than the adjacent spacing of the first air extraction holes in the second circumferential region; and / or,

[0014] The adjacent spacing of the second air extraction holes in the first circumferential region is greater than the adjacent spacing of the second air extraction holes in the second circumferential region.

[0015] Furthermore, the adjacent spacing of the first air extraction hole and / or the second air extraction hole is gradually increasing from the second circumferential region to the first circumferential region.

[0016] Furthermore, the diameters of adjacent first air extraction holes and second air extraction holes are in a fixed ratio.

[0017] Furthermore, the air extraction member further includes a mounting boss, and the mounting boss is disposed around the outer sidewall of the annular body.

[0018] The present utility model further provides a reaction chamber, including: a cavity, a spray plate, and an air extraction member. The air extraction member is the above-mentioned air extraction member. The spray plate is disposed in the cavity. The air extraction member is disposed below the spray plate. The first air extraction holes on the shoulder of the air extraction member are aligned with the edge of the spray plate.

[0019] The present utility model further provides a thin film deposition device, including the above-mentioned reaction chamber.

[0020] The present utility model provides an air extraction component, a reaction chamber and a thin film deposition device. The reaction chamber includes: a cavity body, a spray plate and an air extraction component. The air extraction component includes: an annular body and a shoulder. A plurality of first air extraction holes are formed in the shoulder and distributed along the circumferential direction of the annular body. The first air extraction holes penetrate through the shoulder along the axial direction of the annular body, so that a channel for the purge gas to flow through is formed on the shoulder. The air extraction component is installed below the spray plate, and the first air extraction holes on the shoulder are aligned with the edge of the spray plate, so that the purge gas flow on the outer circumferential part of the spray plate can be extracted through the first air extraction holes. The two gas flows of the purge gas and the process gas are independent of each other, reducing the entry of the purge gas into the reaction area, avoiding interference with the process gas, preventing the process result from being affected, and improving the deposition quality of the thin film. Description of the Drawings

[0021] In order to more clearly illustrate the technical solutions of the embodiments of the present utility model, the drawings required for the description of the embodiments will be briefly introduced below. Obviously, the drawings in the following description are some embodiments of the present utility model. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 Shows a schematic diagram of the air extraction component of the embodiment of the present utility model;

[0023] Figure 2 Shows a cross-sectional schematic diagram of the air extraction component of the embodiment of the present utility model;

[0024] Figure 3 Shows a schematic diagram of the reaction chamber of the embodiment of the present utility model;

[0025] Figure 4 Shows Figure 3 a partial enlarged schematic diagram of;

[0026] Figure 5A Shows a gas pressure simulation diagram of the existing air extraction component;

[0027] Figure 5a Shows a gas flow velocity simulation diagram of the existing air extraction component;

[0028] Figure 5B Shows a gas pressure simulation diagram of the air extraction component of the embodiment of the present utility model;

[0029] Figure 5b Shows a gas flow velocity simulation diagram of the air extraction component of the embodiment of the present utility model;

[0030] Figure 5C Shows a gas pressure simulation diagram of the air extraction component of the embodiment of the present utility model after increasing the distance between the spray plate and the heating plate;

[0031] Figure 5cShows the gas flow velocity simulation diagram after increasing the distance between the air extraction part's spray plate and the heating plate in the embodiment of the present utility model;

[0032] Reference numerals:

[0033] 1. Air extraction part; 11. Annular body; 111. Second air extraction hole; 12. Shoulder; 121. First air extraction hole; 13. Mounting boss; 2. Air extraction port; 3. Spray plate; 4. Heating plate; 5. Cavity. Detailed implementation manners

[0034] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of the embodiments. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present utility model.

[0035] The directional terms mentioned in the present utility model, such as "upper", "lower", "front", "rear", "left", "right", "inner", "outer", "side", etc., are only references to the directions in the attached drawings. Therefore, the directional terms used are for explaining and understanding the present utility model, rather than for limiting the present utility model. In addition, in the drawings, structures that are similar or the same are denoted by the same reference numerals.

[0036] In order to maintain a high cleanliness inside the cavity, a purging operation is usually performed on the outer circumferential part of the spray plate. The purpose is to form a barrier with a directional airflow to prevent external particulate matter or other impurities from invading the inside of the cavity, thereby protecting the sensitive process environment from contamination. However, it is found in actual applications that the purging airflow is often directly sucked away, not only failing to fully play its cleaning role, but also unexpectedly disturbing the reaction gas, thus affecting the process result.

[0037] For this reason, the embodiments of the present utility model propose an air extraction part, a reaction chamber and a thin film deposition device, which solve the problem that the purging gas is sucked away during the process in the existing reaction chamber, interfering with the normal process gas and affecting the process result. By opening a first air extraction hole on the shoulder of the air extraction part to form a channel for the purging gas to flow through, separating the purging and reaction areas, making the two airflows of the purging gas and the process gas independent of each other, thereby avoiding interference with the process gas in the reaction area.

[0038] In order to better understand the above technical solutions, the above technical solutions will be described in detail below in conjunction with the accompanying drawings of the specification and specific implementation manners.

[0039] Please refer to Figure 1- Figure 5 shows an embodiment of the present utility model, which discloses an air extraction member 1, comprising: an annular body 11 and a shoulder 12. The shoulder 12 is disposed around the outer sidewall of the annular body 11. A plurality of first air extraction holes 121 are formed in the shoulder 12. The plurality of first air extraction holes 121 are distributed on the shoulder 12 along the circumferential direction of the annular body 11. The first air extraction holes 121 penetrate through the shoulder 12 along the axial direction of the annular body 11.

[0040] Referring to Figure 1 , specifically, the annular body 11 is in a circular ring structure. A circle of shoulders 12 is further provided on the outer peripheral sidewall of the annular body 11, and the shoulders 12 have a certain width. A plurality of first air extraction holes 121 are formed in the shoulders 12. The first air extraction holes 121 can be circular or other shapes, which are not limited herein. The plurality of first air extraction holes 121 are distributed around the annular body 11. The first air extraction holes 121 can be evenly distributed at equal intervals or irregularly distributed at unequal intervals, which are not limited herein. The first air extraction holes 121 penetrate through the shoulders 12 in the axial direction of the annular body 11, that is, the first air extraction holes 121 are vertical through holes. The diameter of the air extraction member 1 is slightly larger than the diameter of the spray plate 3. The air extraction member 1 and the spray plate 3 are concentrically arranged in the cavity 5, so that the shoulders 12 of the air extraction member 1 correspond to the edges of the spray plate 3. During purging, the purging gas at the outer circumferential part of the spray plate 3 is purged downward, and the first air extraction holes 121 on the shoulders are vertical through holes. Therefore, the purging air flow can flow downward through the first air extraction holes 121, making the first air extraction holes 121 become channels for the purging gas to flow through. Thus, the purging gas and the process gas can be separated independently and flow separately, reducing the interference of the purging gas on the process gas.

[0041] In addition, some process gases enter the purging area, affecting the parts in this area and resulting in an increased frequency of part replacement. However, in this embodiment, since the first air extraction holes 121 are formed in the shoulders 12, the purging air flow can be drawn away through the first air extraction holes 121. Then, by increasing the flow rate of the purging gas, the flow rate of the process gas entering the purging area can be reduced, the impact on the parts can be decreased, and the maintenance cycle can be extended.

[0042] Through this embodiment, the first air extraction holes 121 are formed in the shoulders 12 of the air extraction member 1 to form channels for the purging gas to flow through. The purging air flow at the outer circumferential part of the spray plate 3 can be drawn away through the first air extraction holes 121. The two air flows of the purging gas and the process gas are independent of each other, reducing the entry of the purging gas into the reaction area, avoiding interfering with the process gas, preventing the impact on the process result, and improving the deposition quality of the thin film.

[0043] Continuing to refer to Figure 1, in one embodiment, a plurality of second air extraction holes 111 are formed in the annular body 11. The plurality of second air extraction holes 111 are distributed on the side wall of the annular body 11 along the circumferential direction of the annular body 11. The second air extraction holes 111 penetrate the side wall of the annular body 11 along the radial direction of the annular body 11. Specifically, the second air extraction holes 111 are formed in the side wall of the annular body 11. The second air extraction holes 111 can be circular or other shapes, which are not limited herein. The second air extraction holes 111 penetrate the side wall of the annular body 11 in the radial direction, that is, the second air extraction holes 111 are transverse through holes. The plurality of second air extraction holes 111 are spaced apart along the circumferential direction of the annular body 11. The second air extraction holes 111 can be evenly distributed at equal intervals or irregularly distributed at unequal intervals, which are not limited herein. The height of the second air extraction holes 111 is lower than that of the shoulder 12. The second air extraction holes 111 are mainly used for extracting process gas. The position of the air extraction member 1 in the cavity 5 is below the spray plate 3 and surrounds the outer periphery of the heating plate 4. The process gas flows out from the lower side of the spray plate 3. The process gas flows horizontally along the gap between the spray plate 3 and the heating plate 4, then flows downward along the inner wall of the annular body 11, and finally flows out horizontally from the second air extraction holes 111. By forming the second air extraction holes 111 to extract the process gas, the pressure in the cavity 5 is controlled to ensure the vacuum degree and improve the uniformity and quality of the thin film deposition.

[0044] During the process, the uniformity of the air pressure and gas flow rate inside the reaction chamber is crucial for ensuring the quality of the deposited thin film. However, in the existing design, the air extraction port 2 is usually arranged on the side of the cavity 5. Due to its inherent asymmetry, this side air extraction method often leads to uneven air pressure distribution and inconsistent gas flow rate in the cavity 5. Specifically, in the area near the air extraction port 2, the gas flow speed significantly increases, forming a local low-pressure area, while in the area far from the air extraction port 2, the flow rate is relatively slow and the air pressure is high, forming a local high-pressure area. This air pressure difference not only affects the uniform distribution of the gas in the entire cavity 5, but also causes changes in the gas flow pattern, resulting in differences in the deposition rate and thin film thickness of the reactants in different areas, thereby affecting the quality and consistency of the final product. For this reason, several preferred solutions are proposed in this embodiment, as follows.

[0045] Refer to Figure 2, in one embodiment, the air extraction member 1 has a first circumferential region close to the air extraction port and a second circumferential region far from the air extraction port 2 in its circumferential direction; the diameter of the first air extraction hole 121 in the first circumferential region is smaller than the diameter of the first air extraction hole 121 in the second circumferential region; the diameter of the second air extraction hole 111 in the first circumferential region is smaller than the diameter of the second air extraction hole 111 in the second circumferential region. Specifically, the first circumferential region is the part of the air extraction member 1 close to the air extraction port 2, and the air pressure near the first circumferential region is relatively low and the flow rate is relatively fast. The second circumferential region is the part of the air extraction member 1 far from the air extraction port 2, and the air pressure near the second circumferential region is relatively high and the flow rate is relatively slow. Specifically, the first circumferential region and the second circumferential region can be two halves of the air extraction member 1, that is, the first circumferential region is a semi-circle and the second circumferential region is also a semi-circle; or the first circumferential region can be one-third of a circle and the second circumferential region can be two-thirds of a circle; or the width of the first circumferential region can be equivalent to the width of the air extraction port 2, and the second circumferential region is the other part except the first circumferential region. Of course, it can be understood that there can also be other distribution methods, which can be set by those skilled in the art according to actual needs and are not limited herein. The sizes of the first air extraction holes 121 in the first circumferential region and the second circumferential region are different. As Figure 2 can be seen from the two partial enlarged views of Figure 2 , the diameter of the first air extraction hole 121 in the first circumferential region (left partial enlarged view) is smaller than the diameter of the first air extraction hole 121 in the second circumferential region (right partial enlarged view), that is, the first air extraction hole 121 in the first circumferential region is a small hole, and the first air extraction hole 121 in the second circumferential region is a large hole. The gas flow rate that can pass through the small hole is relatively small, and the gas flow rate that can pass through the large hole is relatively large. Then, by opening small holes in the first circumferential region close to the air extraction port 2, the gas flow rate in the first circumferential region can be reduced, thereby increasing the air pressure in this region; by opening large holes in the second circumferential region far from the air extraction port 2, the gas flow rate in the second circumferential region can be increased, thereby reducing the air pressure in this region, so that the air pressures in the first circumferential region and the second circumferential region reach equilibrium. Therefore, by changing the sizes of the first air extraction holes 121 in the first circumferential region and the second circumferential region, the air pressures at the two regions reach equilibrium, avoiding local high pressure or local low pressure, ensuring the uniformity of the film deposition thickness, and improving the deposition quality. Similarly, the distribution of the second air extraction holes 111 is the same as that of the first air extraction holes 121, which will not be elaborated herein.

[0046] In this embodiment, the diameters of the first air extraction holes 121 and / or the second air extraction holes 111 are gradually decreasing from the second circumferential region to the first circumferential region. Specifically, in order to further improve the uniformity of air extraction, the diameter of the first air extraction hole 121 is gradually changing, that is, it gradually becomes smaller from the second circumferential region to the first circumferential region. The diameter of the first air extraction hole 121 farthest from the air extraction port 2 is the largest. Starting from the first air extraction hole 121 with the largest diameter, along the clockwise and counterclockwise directions towards the air extraction port 2, the diameters of the first air extraction holes 121 are distributed in a gradually decreasing manner one by one until the diameter of the first air extraction hole 121 closest to the air extraction port 2 reaches the minimum. Similarly, the second air extraction holes 111 are the same as the first air extraction holes 121 and are also distributed in a gradually decreasing diameter manner. In this way, the change in air pressure difference at adjacent first air extraction holes 121 and adjacent second air extraction holes 111 is relatively gentle, which can further improve the uniformity of air extraction, ensure a high pressure in the center and a low pressure at the edge of the air extraction member 1, improve the concentricity of the air extraction member 1, and improve the uniformity of the thin film deposition thickness.

[0047] Refer to Figure 2, in one embodiment, the air extraction member 1 has a first circumferential region close to the air extraction and a second circumferential region away from the air extraction port 2 in its circumferential direction; the adjacent spacing of the first air extraction holes 121 in the first circumferential region is greater than the adjacent spacing of the first air extraction holes 121 in the second circumferential region; the adjacent spacing of the second air extraction holes 111 in the first circumferential region is greater than the adjacent spacing of the second air extraction holes 111 in the second circumferential region. Specifically, the first circumferential region and the second circumferential region have been described in detail above. For the sake of brevity of the specification, they will not be elaborated here. The density of the first air extraction holes 121 in the first circumferential region and the second circumferential region is different, and the density is characterized by the adjacent spacing of the first air extraction holes 121. The adjacent spacing of the first air extraction holes 121 is also the spacing between two adjacent first air extraction holes 121. The adjacent spacing of the first air extraction holes 121 in the first circumferential region is smaller than that in the second circumferential region, that is, the first air extraction holes 121 in the first circumferential region are sparser, and the first air extraction holes 121 in the second circumferential region are denser. The sparser the first air extraction holes 121 are, the smaller the gas flow rate that can pass through, and the denser the first air extraction holes 121 are, the greater the gas flow rate that can pass through. Then, the first air extraction holes 121 in the first circumferential region close to the air extraction port 2 are sparsely distributed, so that the gas flow rate in the first circumferential region can be reduced, thereby increasing the air pressure in this region; the first air extraction holes 121 in the second circumferential region away from the air extraction port 2 are densely distributed, so that the gas flow rate in the second circumferential region can be increased, thereby reducing the air pressure in this region, so that the air pressures in the first circumferential region and the second circumferential region reach equilibrium. Therefore, by changing the density of the first air extraction holes 121 in the first circumferential region and the second circumferential region, the air pressures at the two regions reach equilibrium, avoiding local high pressure or local low pressure, ensuring the uniformity of the film deposition thickness, and improving the deposition quality. Similarly, the distribution of the second air extraction holes 111 is the same as that of the first air extraction holes 121, and will not be elaborated here.

[0048] In this embodiment, the adjacent spacing between the first air extraction holes 121 and / or the second air extraction holes 111 is gradually increased from the second circumferential region to the first circumferential region. Specifically, in order to further improve the uniformity of air extraction, the adjacent spacing of the first air extraction holes 121 is gradually changed, that is, it gradually increases from the second circumferential region to the first circumferential region. The adjacent spacing of the two first air extraction holes 121 farthest from the air extraction port 2 is the smallest. Starting from the first air extraction hole 121 with the smallest adjacent spacing, along the clockwise and counterclockwise directions towards the air extraction port 2, the adjacent spacing of the first air extraction holes 121 is gradually increased one by one until the adjacent spacing of the two first air extraction holes 121 closest to the air extraction port 2 reaches the maximum. Similarly, the second air extraction holes 111 are the same as the first air extraction holes 121 and are also distributed in a manner where the adjacent spacing gradually increases. In this way, the change in air pressure difference at adjacent first air extraction holes 121 and adjacent second air extraction holes 111 is relatively gentle, which can further improve the uniformity of air extraction, ensure a high pressure in the center and a low pressure at the edge of the air extraction member 1, improve the concentricity of the air extraction member 1, and improve the uniformity of the film deposition thickness.

[0049] It should be noted that to improve the air extraction uniformity by changing the diameter size and density of the air extraction holes, only one solution can be selected for implementation, or a combination can be used for implementation. Those skilled in the art can set it according to actual needs.

[0050] In one embodiment, the diameters of adjacent first air extraction holes 121 and the diameters of the second air extraction holes 111 are in a fixed ratio. Specifically, in the height direction of the air extraction member 1, the adjacent first air extraction holes 121 and the second air extraction holes 111 above and below form a group, and the diameters of the first air extraction holes 121 and the second air extraction holes 111 are in a fixed ratio, that is, the size ratio of each group of air holes is fixed. For example, the ratio of the diameter size of the first air extraction hole 121 to the second air extraction hole 111 in the same group is 1:1.2. Assuming there are 100 groups of air holes, the diameter size ratio of these 100 groups of air holes is 1:1.2. In this way, since the diameters of each group of air holes are in a fixed ratio, when the first air extraction holes 121 and the second air extraction holes 111 are distributed according to different diameter sizes and densities, the changes in the adjacent first air extraction holes 121 and the second air extraction holes 111 above and below are corresponding and will not be mismatched, further improving the concentricity of the air extraction member 1 and the uniformity of the film deposition thickness.

[0051] Refer to Figure 1 , in one embodiment, the air extraction member 1 further includes a mounting boss 13, and the mounting boss 13 is disposed around the outer sidewall of the annular body 11. Specifically, the structure of the mounting boss 13 is similar to that of the shoulder 12 and is also arranged around the annular body 11, protruding relative to the outer sidewall of the annular body 11 to facilitate assembly with other structures of the cavity 5.

[0052] Refer toFigure 3 and Figure 4 Moreover, an embodiment of the present utility model further provides a reaction chamber, including: a cavity 5, a shower plate 3, and an air extraction member 1. The air extraction member 1 is the air extraction member 1 in the above embodiment. The shower plate 3 is disposed in the cavity 5. The air extraction member 1 is disposed below the shower plate 3. The first air extraction hole 121 on the shoulder 12 of the air extraction member 1 is aligned with the edge of the shower plate 3. Specifically, the air extraction member 1 has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be repeated here.

[0053] Specifically, the air extraction member 1 is disposed around the outer periphery of the heating plate 4 and below the shower plate 3. The inner side of the air extraction member 1 is the reaction area of the process gas, and the outer side of the air extraction member 1 is the purging area of the purging gas. A shoulder 12 is formed on the outer side of the air extraction member 1, and a first air extraction hole 121 is formed on the shoulder 12. The outer circumferential portion of the shower plate 3 corresponds to the shoulder 12 of the air extraction member 1 in the vertical direction, and the edge of the shower plate 3 is aligned with the first air extraction hole 121 on the shoulder 12. It should be noted that the alignment here may be an alignment with a certain offset and does not necessarily need to be completely opposite. As long as the purging air flow can maintain a vertically downward purging. On the outer side of the air extraction member 1, the purging gas is purged vertically downward through the first air extraction hole 121. On the inner side of the air extraction member 1, the process gas first flows horizontally through the gap between the shower plate 3 and the heating plate 4, and then flows downward along the inner wall of the air extraction member 1, and finally flows out horizontally from the second air extraction hole 111. In this way, in the reaction chamber, the gas flow is always in a controlled state, the purging gas and the process gas flow separately, reducing the mutual interference between the two, avoiding the purging gas entering the reaction area and affecting the process result, and avoiding the process gas entering the purging area and affecting the service life of the parts.

[0054] Moreover, through this embodiment, the concentricity of the process gas is improved, and the concentricity can still be maintained after a large change in the distance between the heating plate 4 and the shower plate 3. As Figure 5A - Figure 5c shown, the left side of the figure is close to the air extraction port 2, where Figure 5A and Figure 5a are the air pressure simulation diagram and the flow velocity simulation diagram of the existing air extraction ring, Figure 5B and Figure 5b are the air pressure simulation diagram and the flow velocity simulation diagram of the air extraction member 1 in this embodiment, Figure 5C and Figure 5c are the air pressure simulation diagram and the flow velocity simulation diagram of the air extraction member 1 in this embodiment after a large change in the distance between the shower plate 3 and the heating plate 4. From Figure 5A and Figure 5a it can be seen that there is a local high pressure and a low flow velocity in the area of the existing air extraction member 1 far from the air extraction port 2. After adopting the air extraction member 1 of this embodiment, from Figure 5B and Figure 5bIt can be seen that whether in the area close to the air extraction port 2 or the area far from the air extraction port 2, the air pressure remains uniform, with a high pressure in the middle and a low pressure around, improving the concentricity. After the distance between the spray plate 3 and the heating plate 4 changes significantly, from Figure 5C and Figure 5c it can be seen that the pressure is still high in the middle and low around, and its concentricity can still be maintained. The adjustable distance range between the spray plate 3 and the heating plate 4 is large.

[0055] Through this embodiment, by opening the first air extraction hole 121 on the shoulder 12 of the air extraction member 1, the air extraction channels for the purge gas to flow through are increased, enabling the two airflows in the reaction chamber to flow separately, avoiding the purge gas from affecting the process results. Moreover, by changing the diameter size and density of the air holes, the problem of the air extraction being skewed towards the air extraction port 2 direction is solved, improving the concentricity of the process gas. At the same time, the problem of the small adjustable distance range between the spray plate 3 and the heating plate 4 is also solved.

[0056] The embodiment of the present utility model also provides a thin film deposition device, including the reaction chamber of the above embodiment. Specifically, the reaction chamber has been described in detail in the above embodiment. For the sake of simplicity of the specification, it will not be elaborated here.

[0057] By adopting the reaction chamber of this embodiment, the two airflows in the reaction chamber flow separately, avoiding the purge gas from affecting the process results, improving the uniformity and quality of the deposition thickness of the thin film, while reducing the flow rate of the process gas entering the purge area, reducing the impact on parts, and extending the maintenance cycle.

[0058] As mentioned above, the above are only the specific implementation manners of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model can easily think of various equivalent modifications or substitutions, and these modifications or substitutions should all be covered within the protection scope of the present utility model. Therefore, the protection scope of the present utility model shall be subject to the protection scope of the claims.

Claims

1. An air extraction component, characterized in that, Comprising: Annular body; Shoulder, provided around the outer side wall of the annular body, a plurality of first air extraction holes are formed in the shoulder, the plurality of first air extraction holes are distributed on the shoulder along the circumferential direction of the annular body, and the first air extraction holes penetrate through the shoulder along the axial direction of the annular body.

2. The air extraction member according to claim 1, wherein A plurality of second air extraction holes are formed in the annular body, the plurality of second air extraction holes are distributed on the side wall of the annular body along the circumferential direction of the annular body, and the second air extraction holes penetrate through the side wall of the annular body along the radial direction of the annular body.

3. The air extraction member according to claim 2, characterized in that, The air extraction member has a first circumferential region close to the air extraction port and a second circumferential region far from the air extraction port in its circumferential direction; The diameter of the first air extraction hole in the first circumferential region is smaller than the diameter of the first air extraction hole in the second circumferential region; And / or, The diameter of the second air extraction hole in the first circumferential region is smaller than the diameter of the second air extraction hole in the second circumferential region.

4. The air extraction member according to claim 3, characterized in that, The diameter of the first air extraction hole and / or the second air extraction hole is gradually decreased from the second circumferential region to the first circumferential region.

5. The air extraction member according to claim 2, wherein, The air extraction member has a first circumferential region close to the air extraction port and a second circumferential region far from the air extraction port in its circumferential direction; The adjacent spacing of the first air extraction holes in the first circumferential region is greater than the adjacent spacing of the first air extraction holes in the second circumferential region; And / or, The adjacent spacing of the second air extraction holes in the first circumferential region is greater than the adjacent spacing of the second air extraction holes in the second circumferential region.

6. The air extraction member according to claim 5, wherein, The adjacent spacing of the first air extraction hole and / or the second air extraction hole is gradually increased from the second circumferential region to the first circumferential region.

7. The air extraction member according to any one of claims 2-6, characterized in that, The diameters of adjacent first air extraction holes and the second air extraction holes are in a fixed ratio.

8. The air extraction member according to claim 1, wherein Further comprising a mounting boss, which is provided around the outer side wall of the annular body.

9. A reaction chamber, characterized in that, Comprising: A cavity, a spray plate and an air extraction member, the air extraction member is the air extraction member according to any one of claims 1-8, the spray plate is arranged in the cavity, the air extraction member is arranged below the spray plate, and the first air extraction holes on the shoulder of the air extraction member are aligned with the edge of the spray plate.

10. A thin film deposition device, characterized in that, Comprising a reaction chamber as claimed in claim 9.

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