Cutter placing rack for chemical vapor deposition

Abstract

The utility model discloses a cutter placing rack for chemical vapor deposition, which comprises a placing plate, the top of the placing plate is provided with a plurality of groups of placing holes with different sizes, the inner walls of the placing holes are provided with a plurality of annularly distributed elastic clamping pieces, and the elastic clamping pieces wrap and clamp cutters inserted in the placing holes. A base is arranged below the placing plate, a plurality of guide columns are arranged at the top of the base, the guide columns are inserted into through holes formed in the four corners of the placing plate, limiting blocks for preventing the placing plate from falling are arranged on the guide columns, ejector rods are arranged at the top of the base, and the ejector rods correspond to the placing holes in a one-to-one mode. According to the cutter placement frame for chemical vapor deposition, the annularly distributed elastic clamping pieces are arranged in the placement holes to clamp and fix cutters, so that the placement frame can adapt to the cutters with different sizes.

Description

Technical Field

[0001] The utility model relates to the technical field of tool processing, and specifically relates to a tool placement rack for chemical vapor deposition. Background Technique

[0002] Chemical Vapor Deposition (CVD for short) is an important process for manufacturing thin films and coatings. In this process, gaseous precursor substances are converted into solid deposits through chemical reactions on the surface of the substrate. CVD technology has extensive applications in fields such as semiconductors, nanotechnology, photovoltaics, hard materials, and lubricating materials.

[0003] When coating a tool by chemical vapor deposition, the tool needs to be placed and fixed in a tool rack. Generally, the tool placement rack cannot adapt to different models of tools because the shapes of different models of tools are different, resulting in different placement postures of the tools and different coating effects of the tools. Content of the Utility Model

[0004] The purpose of the utility model is to provide a tool placement rack for chemical vapor deposition to solve the problem that the tool rack cannot adapt to different models of tools proposed in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: A tool placement rack for chemical vapor deposition, including a placement plate. Multiple placement holes of different sizes are opened at the top of the placement plate. Multiple annularly distributed elastic clamping pieces are arranged on the inner wall of the placement hole. The elastic clamping pieces wrap and clamp the tool inserted in the placement hole. A base is arranged below the placement plate. Multiple guide posts are arranged on the top of the base, and the guide posts are inserted into through holes arranged at the four corners of the placement plate. A limiting block for preventing the placement plate from falling is arranged on the guide post. A top rod is arranged on the top of the base, and the top rod corresponds to the placement hole one by one.

[0006] Preferably, multiple slots are arranged on the inner wall of the placement hole, and the elastic clamping pieces are fixedly inserted into the slots. The elastic clamping pieces are in an arched shape, and anti-sliding blocks are arranged at the contact ends of the elastic clamping pieces and the tool.

[0007] Preferably, the limiting block is a limiting nut. A section of thread is arranged on the guide post, and the limiting nut is screwed on the threaded part.

[0008] Preferably, the top rod is cylindrical, and its radius is smaller than the radius of the circle formed by the elastic clamping pieces.

[0009] Compared with the prior art, the beneficial effects of the utility model are as follows:

[0010] A tool placement rack for chemical vapor deposition according to the present utility model clamps and fixes the tool by arranging elastic clamping pieces distributed in a ring shape in the placement holes, so that the placement rack can adapt to tools of different sizes, and the tool placement rack facilitates the removal of the clamped tool. Description of the Drawings

[0011] Figure 1 It is a schematic diagram of the overall structure of the present utility model;

[0012] Figure 2 It is a schematic diagram of the structure of the placement plate in the present utility model;

[0013] Figure 3 It is a schematic diagram of the installation structure of the elastic clamping piece in the present utility model;

[0014] Figure 4 It is a schematic diagram of the structure of the elastic clamping piece in the present utility model.

[0015] In the figure: 1, placement plate; 2, placement hole; 3, elastic clamping piece; 4, guide post; 5, limit block; 6, base; 7, ejector rod; 8, slot; 9, anti-slip block; 10, tool. Detailed Implementation Manner

[0016] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present utility model.

[0017] Please refer to Figures 1-4 , a tool placement rack for chemical vapor deposition, including a placement plate 1. A plurality of placement holes 2 of different sizes are opened at the top of the placement plate 1. A plurality of elastic clamping pieces 3 distributed in a ring shape are arranged on the inner wall of the placement hole 2. The elastic clamping pieces 3 wrap and insert the tool 10 inserted in the placement hole 2 and clamp it. The tool 10 is placed in a placement hole 2 of a suitable size. Although the tool 10 does not exactly match the size of the placement hole 2, the elastic clamping pieces 3 can clamp and fix it, so that the tool 10 can perform chemical vapor deposition coating well.

[0018] Specifically, a plurality of slots 8 are arranged on the inner wall of the placement hole 2. The elastic clamping pieces 3 are fixedly inserted into the slots 8. The elastic clamping pieces 3 are arranged in an arc shape, and an anti-slip block 9 is arranged at the contact end between the elastic clamping pieces 3 and the tool 10. The anti-slip block 9 can increase the resistance between the tool 10 and the elastic clamping pieces 3, so as to better clamp the tool 10.

[0019] A base 6 is provided below the placement plate 1. A plurality of guide posts 4 are provided on the top of the base 6, and the guide posts 4 are inserted into through holes provided at the four corners of the placement plate 1. A limiting block 5 for preventing the placement plate 1 from falling is provided on the guide posts 4. A push rod 7 is provided on the top of the base 6, and the push rod 7 corresponds to the placement holes 2 one by one. Preferably, the push rod 7 is cylindrical, and its radius is smaller than the radius of the circle formed by the elastic clamping pieces 3.

[0020] After the tool 10 finishes plating, take out the device, loosen the limiting block 5 and press down the placement plate 1, and the tool 10 in the placement plate 1 is ejected from the elastic clamping pieces 3 by the push rod 7.

[0021] The limiting block 5 is a limiting nut. A section of thread is provided on the guide post 4, and the limiting nut is screwed on the threaded part. Loosen the limiting nut so that the placement plate 1 can move up and down, and tighten the limiting nut to limit the fall of the placement plate 1.

[0022] Although the embodiments of the present invention have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A tool placement rack for chemical vapor deposition, comprising a placement plate (1), characterized in that: A plurality of placement holes (2) of different sizes are formed in the top of the placement plate (1). A plurality of annularly distributed elastic clamping pieces (3) are arranged on the inner wall of the placement hole (2). The elastic clamping pieces (3) wrap and plug the cutting tool (10) inserted in the placement hole (2) and clamp it. A base (6) is arranged below the placement plate (1). A plurality of guide posts (4) are arranged on the top of the base (6), and the guide posts (4) are inserted into through holes arranged at four corners of the placement plate (1). A limiting block (5) for preventing the placement plate (1) from falling is arranged on the guide post (4). A push rod (7) is arranged on the top of the base (6), and the push rod (7) corresponds to the placement hole (2) one by one.

2. The tool rack for chemical vapor deposition according to claim 1, wherein: A plurality of slots (8) are arranged on the inner wall of the placement hole (2). The elastic clamping pieces (3) are fixedly inserted into the slots (8). The elastic clamping pieces (3) are bow-shaped, and anti-slip blocks (9) are arranged at the contact ends of the elastic clamping pieces (3) and the cutting tool (10).

3. The tool placement rack for chemical vapor deposition according to claim 1, characterized in that: The limiting block (5) is a limiting nut. A section of thread is arranged on the guide post (4), and the limiting nut is screwed on the threaded part.

4. The tool placement rack for chemical vapor deposition according to claim 1, wherein: The push rod (7) is cylindrical, and its radius is smaller than the radius of the circle formed by the elastic clamping pieces (3).

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