Electronic expansion valve mounting bracket applied to CVD (Chemical Vapor Deposition)

Abstract

The utility model relates to the technical field of electronic expansion valve supports, and discloses an electronic expansion valve mounting support applied to CVD. The electronic expansion valve mounting support comprises a bottom plate and semicircular hoops, the semicircular hoops are arranged on one side of the top of the bottom plate, an electronic expansion valve is fixed between the semicircular hoops, a lifting block is arranged at one end of a lifting plate, guide plates are arranged on the two sides of the lifting block, and the guide plates are connected with the lifting plate. The angle of the connecting plate relative to the lifting plate can be adjusted by unscrewing the locking bolt, so that the angle of the electronic expansion valve can be adjusted, the angle of the electronic expansion valve can be adjusted, the angle of the electronic expansion valve can be adjusted, and the angle of the electronic expansion valve can be adjusted. When the electronic expansion valve is connected with the cooling pipeline, the position of the electronic expansion valve can be adjusted according to the position of the pipeline, it is guaranteed that the electronic expansion valve is stably installed, meanwhile, torsional force cannot be generated between the electronic expansion valve and the pipeline, normal and stable operation of the electronic expansion valve is guaranteed, and therefore normal operation of a CVD temperature control system is guaranteed.

Description

Technical Field

[0001] The utility model relates to the technical field of electronic expansion valve brackets, and specifically to an electronic expansion valve mounting bracket applied to CVD. Background Technique

[0002] CVD is the abbreviation of Chemical Vapor Deposition, which is a technology for depositing thin films on the surface of materials. CVD technology is widely used in the manufacturing processes of semiconductors, solar panels, optical coatings, and various high-performance materials. The temperature control system in the CVD system is very important. During the Chemical Vapor Deposition (CVD) process, temperature control is one of the key factors to ensure the quality and uniformity of the thin film. And the electronic expansion valve is a precision control component, which can precisely adjust the refrigerant flow rate to control the superheat at the outlet of the evaporator.

[0003] However, after the existing bracket of the electronic expansion valve is connected and installed with the electronic expansion valve, it is difficult to adjust the position of the electronic expansion valve. During the docking and installation process between the electronic expansion valve and the pipeline, it is easy to be misaligned with the pipeline interface, increasing the installation difficulty. At the same time, this may cause additional stress or torque acting on the valve, thereby affecting the sealing performance and service life of the valve. Content of the Utility Model

[0004] The purpose of the utility model is to provide an electronic expansion valve mounting bracket applied to CVD to solve the problems raised in the above background technique.

[0005] To achieve the above purpose, the utility model provides the following technical solution: An electronic expansion valve mounting bracket applied to CVD, including a bottom plate and a semi-circular hoop. A semi-circular hoop is provided on one side of the top of the bottom plate, and the electronic expansion valve is fixed between the semi-circular hoops. A connecting plate is provided on one side of the bottom plate, a lifting plate is provided at the bottom of the connecting plate, a locking bolt is provided between the connecting plate and the lifting plate, a lifting block is provided at one end of the lifting plate, guide plates are provided on both sides of the lifting block, limit plates are provided at both ends of the guide plates, a lead screw is rotatably provided between the limit plates, and the lead screw is connected to the lifting block through a lead screw nut. A fixing plate is provided on the outer side of the guide plate.

[0006] Further, there are two semi-circular hoops. One end of the two semi-circular hoops is connected to the bottom plate through a shaft, and the two semi-circular hoops are locked through bolts.

[0007] Further, guide strips are provided on both sides of the lifting block, and guide grooves matching with the guide strips are provided on one side of the guide plate.

[0008] Further, a hexagonal head is provided at the top of the lead screw, and a locking nut is provided on the outer side of the lead screw. The locking nut is located above the top limit plate.

[0009] Further, through holes for installation are provided on the fixing plate.

[0010] Further, a through hole for the electronic expansion valve to pass through is provided in the center of the bottom plate.

[0011] Compared with the prior art, the beneficial effects of the present utility model are as follows:

[0012] By providing the semi-circular hoop, the guide plate and the limit plate, when the electronic expansion valve mounting bracket applied to CVD is used, during the installation of the electronic expansion valve, first fix the electronic expansion valve on the bottom plate through the semi-circular hoop, then loosen the locking nut, manually rotate the lead screw, and convert the rotational movement of the lead screw through the lead screw nut, in cooperation with the guidance of the guide groove, into the lifting movement of the lifting block, thereby driving the lifting of the lifting plate and the connecting plate, so as to adjust the height of the electronic expansion valve. By loosening the locking bolt, the angle of the connecting plate relative to the lifting plate can be adjusted, thereby adjusting the angle of the electronic expansion valve. When the electronic expansion valve is connected to the cooling pipeline, the position of the electronic expansion valve can be adjusted according to the position of the pipeline, ensuring the stable installation of the electronic expansion valve while not generating torsional force with the pipeline, ensuring the normal and stable operation of the electronic expansion valve, and thus ensuring the normal operation of the CVD temperature control system. Description of the Drawings

[0013] Figure 1 is a perspective view of the electronic expansion valve mounting bracket applied to CVD of the present utility model;

[0014] Figure 2 is a perspective view of the electronic expansion valve mounting bracket applied to CVD of the present utility model;

[0015] Figure 3 is a perspective view of the electronic expansion valve mounting bracket applied to CVD of the present utility model;

[0016] Figure 4 is a front view of the electronic expansion valve mounting bracket applied to CVD of the present utility model.

[0017] In the figure: 1. bottom plate; 2. semi-circular hoop; 3. connecting plate; 4. locking bolt; 5. lifting plate; 6. lifting block; 7. guide plate; 8. guide groove; 9. lead screw; 10. hexagonal head; 11. locking nut; 12. fixing plate; 13. limit plate. Detailed Embodiments

[0018] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all of the embodiments.

[0019] Please refer to Figures 1 - 4, the present utility model provides a technical solution: an electronic expansion valve mounting bracket applied to CVD, including a bottom plate 1 and a semi-circular hoop 2. A semi-circular hoop 2 is provided on one side of the top of the bottom plate 1, and the electronic expansion valve is fixed between the semi-circular hoops 2. A connecting plate 3 is provided on one side of the bottom plate 1, a lifting plate 5 is provided at the bottom of the connecting plate 3, a locking bolt 4 is provided between the connecting plate 3 and the lifting plate 5, a lifting block 6 is provided at one end of the lifting plate 5, guide plates 7 are provided on both sides of the lifting block 6, limit plates 13 are provided at both ends of the guide plates 7, a lead screw 9 is rotatably provided between the limit plates 13, and the lead screw 9 and the lifting block 6 are connected by a lead screw nut. A fixing plate 12 is provided on the outer side of the guide plate 7. When installing the electronic expansion valve, first fix the electronic expansion valve on the bottom plate 1 through the semi-circular hoop 2, then loosen the locking nut 11, manually rotate the lead screw 9, and convert the rotational movement of the lead screw 9 through the lead screw nut, and cooperate with the guiding of the guide groove 8 to become the lifting movement of the lifting block 6, thereby driving the lifting of the lifting plate 5 and the connecting plate 3, so as to adjust the height of the electronic expansion valve. By loosening the locking bolt 4, the angle of the connecting plate 3 relative to the lifting plate 5 can be adjusted, thereby adjusting the angle of the electronic expansion valve. When connecting the electronic expansion valve to the cooling pipeline, the position of the electronic expansion valve can be adjusted according to the position of the pipeline, ensuring the stable installation of the electronic expansion valve and no torsional force is generated between the pipeline and the valve, ensuring the normal and stable operation of the electronic expansion valve, and thus ensuring the normal operation of the CVD temperature control system.

[0020] There are two semi-circular hoops 2. One end of the two semi-circular hoops 2 is connected to the bottom plate 1 through a shaft, and the two semi-circular hoops 2 are locked by bolts. In this way, only the disassembly and installation of the bolts are required to facilitate the disassembly and assembly of the electronic expansion valve.

[0021] Guide strips are provided on both sides of the lifting block 6, and a guide groove 8 that cooperates with the guide strips is provided on one side of the guide plate 7 for guiding the lifting of the lifting block 6. The lifting block 6 is fixedly connected to the outer wall of the lead screw nut. With the cooperation of the guide strips and the guide groove 8, the stable lifting of the lifting block 6 can be ensured, and the lifting block 6 is prevented from rotating along with the rotation of the lead screw.

[0022] A hexagonal head 10 is provided at the top of the lead screw 9, and a locking nut 11 is provided on the outer side of the lead screw 9. The locking nut 11 is located above the top limit plate 13. The locking nut 11 is used to fix the rotation angle of the lead screw 9. When the locking nut 11 abuts against the top limit plate 11, the lead screw 9 is difficult to rotate, thereby determining the height of the electronic expansion valve.

[0023] Through holes for installation are provided on the fixing plate 12 for connecting the bracket to other components of the cooling system.

[0024] A through hole for the electronic expansion valve to pass through is provided in the center of the bottom plate 1 for the connection and fixation of the electronic expansion valve by the hoop.

[0025] When the electronic expansion valve mounting bracket applied to CVD is in use, during the installation of the electronic expansion valve, first fix the electronic expansion valve on the bottom plate 1 through the semi-circular hoop 2. Then loosen the lock nut 11 and manually rotate the lead screw 9. Through the lead screw nut, the rotational motion of the lead screw 9 is converted into the lifting motion of the lifting block 6 in cooperation with the guiding of the guide groove 8, thereby driving the lifting of the lifting plate 5 and the connecting plate 3, so as to adjust the height of the electronic expansion valve. By loosening the lock bolt 4, the angle of the connecting plate 3 relative to the lifting plate 5 can be adjusted, thereby adjusting the angle of the electronic expansion valve. When the electronic expansion valve is connected to the cooling pipeline, the position of the electronic expansion valve can be adjusted according to the position of the pipeline, ensuring that the electronic expansion valve is firmly installed and there is no torsional force between the electronic expansion valve and the pipeline, guaranteeing the normal and stable operation of the electronic expansion valve, and thus ensuring the normal operation of the CVD temperature control system.

[0026] Based on the embodiments in the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the scope of protection of the present invention.

Claims

1. The electronic expansion valve mounting bracket applied to CVD includes a bottom plate (1) and a semi-circular hoop (2), and is characterized in that: On one side of the top of the bottom plate (1), there is a semi-circular hoop (2), and the electronic expansion valve is fixed between the semi-circular hoops (2). On one side of the bottom plate (1), there is a connecting plate (3). At the bottom of the connecting plate (3), there is a lifting plate (5). A locking bolt (4) is provided between the connecting plate (3) and the lifting plate (5). At one end of the lifting plate (5), there is a lifting block (6). On both sides of the lifting block (6), there are guide plates (7). At both ends of the guide plates (7), there are limit plates (13). A lead screw (9) is rotatably provided between the limit plates (13). The lead screw (9) is connected to the lifting block (6) through a lead screw nut. On the outer side of the outer surface of the guide plate (7), there is a fixing plate (12).

2. The electronic expansion valve mounting bracket applied to CVD according to claim 1, wherein: There are two semi-circular hoops (2). One end of the two semi-circular hoops (2) is connected to the bottom plate (1) through a shaft, and the two semi-circular hoops (2) are locked through bolts.

3. The electronic expansion valve mounting bracket applied to CVD according to claim 1, wherein: On both sides of the lifting block (6), there are guide strips, and on one side of the guide plate (7), there is a guide groove (8) that cooperates with the guide strips.

4. The electronic expansion valve mounting bracket applied to CVD according to claim 1, characterized in that: At the top of the lead screw (9), there is a hexagonal head (10). On the outer side of the lead screw (9), there is a locking nut (11), and the locking nut (11) is located above the top limit plate (13).

5. The electronic expansion valve mounting bracket applied to CVD according to claim 1, wherein: Through holes for installation are provided on the fixing plate (12).

6. The electronic expansion valve mounting bracket applied to CVD according to claim 1, characterized in that: A through hole for the electronic expansion valve to pass through is provided in the center of the bottom plate (1).

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