Novel diffusion furnace for solar cell processing

Abstract

The utility model relates to the technical field of diffusion furnaces, in particular to a novel diffusion furnace for solar cell processing, which comprises a diffusion furnace body, a processing hearth is arranged in the center of the inside of the diffusion furnace body, a mounting hearth seat is arranged on the end face of one side of the processing hearth, and an assembly groove is arranged on the end face of one side of the diffusion furnace body. One side of the mounting chamber seat is communicated with the assembling groove, a sealing assembly is arranged on the outer side of the assembling groove, a sealing furnace door is arranged on the inner side of the sealing assembly, a gas conveying pipe is installed in the center of the end face of the sealing furnace door in an inserted mode, and a protection assembly is arranged on the end face of the outer side of the sealing furnace door and connected with the gas conveying pipe; the novel diffusion furnace for solar cell processing is simple in overall structure and convenient to move, and the use position of equipment is convenient to adjust; when in use, the gas conveying pipe can be well supported, hung, covered and protected, so that the service life of the gas conveying pipe is effectively prolonged.

Description

Technical Field

[0001] The utility model relates to the technical field of diffusion furnaces, in particular to a new type of diffusion furnace for solar cell processing. Background Technique

[0002] The new type of diffusion furnace is the core process equipment in the front process of the solar cell production line, mainly used for doping silicon wafers to change and control the type, concentration and distribution of impurities in the silicon wafers; the new type of diffusion furnace plays a crucial role in the field of solar cell manufacturing; during the diffusion process, it is necessary to heat the atmospheric pressure diffusion furnace to a high temperature of about 840 degrees Celsius, and at the same time spray phosphorus trichloride liquid into the furnace body through nitrogen carrier.

[0003] In the prior art, the publication number is: CN 206666682 U discloses a diffusion furnace for manufacturing solar cell wafers, including a furnace body, the inner cavity of the furnace body is respectively connected with an air inlet pipe and an air outlet pipe, the air outlet pipe is connected with a vacuum pump, and the material conveying port of the furnace body has a vacuum sealing door. By using the diffusion furnace of the utility model, after introducing the process gas, the inside of the furnace body is pumped into a vacuum state by the vacuum pump, so that the usage amounts of the process gas and nitrogen are greatly reduced, the production capacity is greatly improved, and at the same time the product quality is effectively improved;

[0004] For the diffusion furnace structure in the above patent, the protection effect on the air inlet pipe is poor. After long-term air intake use, it is easy to cause fractures and damages at the connection position between the air inlet pipe and the furnace door, thus affecting the air intake effect; therefore, a new type of diffusion furnace for solar cell processing is proposed to solve the above problems. Content of the Utility Model

[0005] The problem solved by the utility model is to provide a new type of diffusion furnace for solar cell processing, with a simple overall structure, convenient movement, and easy to adjust the use position of the equipment; during use, it can have good support, hanging and covering protection effects on the gas transmission pipe, thereby effectively extending the service life of the gas transmission pipe.

[0006] In order to achieve the above purpose, the utility model adopts the following technical solutions:

[0007] A new diffusion furnace for solar cell processing, including a diffusion furnace body. A processing furnace chamber is arranged in the center of the diffusion furnace body, and an installation furnace seat is arranged on one end face of the processing furnace chamber. An assembly groove is opened on one end face of the diffusion furnace body, and one side of the installation furnace seat is communicated with the assembly groove. A sealing component is arranged outside the assembly groove, and a sealing furnace door is arranged inside the sealing component. A gas delivery pipe is inserted and installed in the center of the end face of the sealing furnace door. A protection component is arranged on the outer end face of the sealing furnace door, and the protection component is connected with the gas delivery pipe; through the sealing component, it is convenient to fixedly install the sealing furnace door on one side of the assembly groove, and through the gas delivery pipe, it is convenient to spray the processing material into the interior of the processing furnace chamber, so that the processing furnace chamber and the installation furnace seat inside the diffusion furnace body are convenient for diffusing and processing silicon wafers; by setting the protection component, it can have a good supporting, hanging and covering protection effect on the gas delivery pipe, thereby effectively prolonging the service life of the gas delivery pipe.

[0008] The protection component includes a protection back plate. The protection back plate is fixedly installed in the center of the end face of the sealing furnace door. A positioning end head is inserted and installed in the center of the other end of the protection back plate, and one end of the gas delivery pipe is fixedly installed in the center of the end face of the positioning end head. Two mounting brackets are fixedly installed at one end of the protection back plate, and a mounting slide rod is inserted and installed between the two mounting brackets. A plurality of first guiding and clamping frames are sleeved on the outer side of the mounting slide rod, and the bottom side of the first guiding and clamping frame is clamped with the outer wall of the gas delivery pipe. A protection end cover is arranged outside the protection back plate. A second guiding and clamping frame is arranged on one side of the end face of the protection end cover, and one side of the second guiding and clamping frame is clamped with the outer wall of the gas delivery pipe; through the positioning end head, the gas delivery pipe can be installed and fixed on the outside of the protection back plate. Through a plurality of first guiding and clamping frames, the gas delivery pipe can be hung. By sliding the first guiding and clamping frame on the outer part of the mounting slide rod between the two mounting brackets, it is convenient to adjust the position of the gas delivery pipe, and through the second guiding and clamping frame, it is convenient to hang the gas delivery pipe.

[0009] Furthermore, an electric base is fixedly installed at the bottom side of one end of the protection back plate, and an electric cylinder is fixedly installed in the center of the end face of the electric base. A piston push rod is installed in the center of the top end of the electric cylinder. A supporting bracket is fixedly installed in the center of the top end of the piston push rod, and the top end face of the supporting bracket is in fit connection with the bottom of the outer wall of the gas delivery pipe; when the electric cylinder on the end face of the electric base works, the height of the supporting bracket can be adjusted through the piston push rod, so that the supporting bracket can jack up and support the gas delivery pipe, thereby effectively improving the structural stability of the gas delivery pipe.

[0010] Furthermore, guide frames are fixedly installed on the top and bottom of the protective back plate, and the protective end cover is plugged and installed between the two guide frames, stop seats are fixedly installed on the top and bottom of one end of the protective end cover, and a second locking screw is installed in the center of the end surface of the stop seat through a threaded connection, and a second locking screw hole is opened at the other end of the guide frame, and the second locking screw is threadedly fixedly connected to the second locking screw hole; as the protective end cover slides between the two guide frames, the protective end cover can be easily covered on the outer side of the protective back plate until the stop seat moves to the outside of the second locking screw hole, and then the second locking screw is tightened so that the second locking screw passes through the stop seat and is threadedly fixedly connected to the second locking screw hole, thereby fixing the position of the protective end cover.

[0011] Furthermore, a track groove is provided on the other side of the end face of the protective end cover, and a plurality of fiber rubber strips are fixedly installed on the inner wall end face of the track groove, an adjustment groove is provided on the top of the other side of the end face of the protective end cover, and an electric guide rail is fixedly installed on the center of the inner end face of the adjustment groove, a guide rail slide is connected and installed on the outer side of the electric guide rail, a mounting rotating rod is fixedly installed on the center of the outer end face of the guide rail slide, and a second guide bracket is rotatably installed on the outer side of the mounting rotating rod; in the process of sliding of the protective end cover, the air pipe squeezes the fiber rubber strip inside the track groove, and the position of the air pipe is adjusted by the deformation of the fiber rubber strip, and at the same time, when the electric guide rail inside the adjusting groove is working, the guide rail slide slides on the outside of the electric guide rail, thereby adjusting the outer side of the second guide bracket, and the second guide bracket is rotated on the outside of the mounting rotating rod, so that the second guide bracket is clamped and installed on the outer side of the air pipe, thereby supporting and limiting one end of the air pipe.

[0012] Furthermore, the sealing component includes a rotating ear seat, the two rotating ear seats are respectively fixedly mounted on the top and bottom of one end of the inner side of the assembly groove, a rotating shaft is fixedly mounted on the other side of the sealed furnace door, and the top and bottom of the rotating shaft are respectively plugged and mounted on the center of the end faces of the two rotating ear seats, a positioning screw seat is fixedly mounted on the center of the end face of one side of the sealed furnace door, and a first locking screw is installed on the center of the end face of the positioning screw seat through a threaded connection, a first locking screw hole is opened in the center of the other end of the inner side of the assembly groove, and one end of the first locking screw passes through the positioning screw seat and is fixedly connected to the first locking screw hole; the sealed furnace door is moved so that the sealed furnace door drives the rotating shaft to rotate between the two rotating ear seats until the positioning screw seat on one side of the sealed furnace door rotates to the outside of the first locking screw hole, and the first locking screw is tightened so that the first locking screw passes through the positioning screw seat and is threadedly fixedly connected to the first locking screw hole, thereby covering the sealed furnace door on the outside of the assembly groove.

[0013] Further, a heat insulation wall seat is fixedly installed at the center of the inner end face of the sealed furnace door, and the outer end face of the heat insulation wall seat is in fitting connection with the inner wall of the installation chamber seat. One end of the air delivery pipe passes through the heat insulation wall seat and communicates with the interior of the processing furnace chamber. When the sealed furnace door covers the outside of the assembly groove, at this time, the outer wall of the heat insulation wall seat is in fitting connection with the inner wall of the installation chamber seat, thereby hermetically sealing the processing furnace chamber.

[0014] Further, movable rollers are fixedly installed around the bottom end face of the diffusion furnace body through bolts, and the movable rollers are of a universal self-locking wheel structure. Through the movable rollers, it can have a good moving function, which is convenient for adjusting the use position of the diffusion furnace body.

[0015] The beneficial effects of the present utility model are as follows: The novel diffusion furnace for solar cell processing has a simple overall structure, is convenient to move, and is convenient for adjusting the use position of the equipment. When in use, by arranging a protective component on the outside of the sealed furnace door, it can have a good supporting, hanging and covering protection effect on the air delivery pipe. By arranging a first guiding bracket and a second guiding bracket, different positions of the air delivery pipe can be hung, and through the supporting bracket, the top of the outer wall of the air delivery pipe can be jacked and supported, and a fiber rubber strip is arranged to facilitate the limiting of the outer wall of the air delivery pipe, effectively improving the protection effect on the air delivery pipe, thereby effectively prolonging the service life of the air delivery pipe. Description of the Drawings

[0016] Figure 1 It is the first overall structure schematic diagram of the present utility model;

[0017] Figure 2 It is the second overall structure schematic diagram of the present utility model;

[0018] Figure 3 It is the overall rear view of the present utility model;

[0019] Figure 4 It is the overall side view of the present utility model;

[0020] Figure 5 It is the overall structure schematic diagram of the protective component of the present utility model;

[0021] Figure 6 It is the partial structure schematic diagram of the protective component of the present utility model.

[0022] Legend: 1. Diffusion furnace body; 2. Assembly groove; 3. Processing furnace chamber; 4. Installation hearth seat; 5. Sealing assembly; 6. Sealing furnace door; 7. Heat insulation wall seat; 8. Gas delivery pipe; 9. Protection assembly; 10. Moving roller; 51. Rotating ear seat; 52. Rotating shaft; 53. Positioning screw seat; 54. First locking screw; 55. First locking screw hole; 91. Protection back plate; 92. Installation rack; 93. Installation slide bar; 94. First guiding bracket; 95. Electric base; 96. Electric cylinder; 97. Piston push rod; 98. Support bracket; 99. Positioning end; 910. Guiding frame; 911. Protection end cover; 912. Stopping seat; 913. Second locking screw; 914. Second locking screw hole; 915. Trajectory groove; 916. Fiber rubber strip; 917. Adjusting groove; 918. Electric guide rail; 919. Guide rail slider; 920. Installation rotating rod; 921. Second guiding bracket. Detailed implementation manners

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.

[0024] The following gives specific embodiments.

[0025] See Figures 1 to 6 , a new type of diffusion furnace for solar cell processing, including a diffusion furnace body 1. A processing furnace chamber 3 is provided in the center of the diffusion furnace body 1. An installation hearth seat 4 is provided on one end face of the processing furnace chamber 3. An assembly groove 2 is opened on one end face of the diffusion furnace body 1. One side of the installation hearth seat 4 communicates with the assembly groove 2. A sealing assembly 5 is provided outside the assembly groove 2. A sealing furnace door 6 is provided inside the sealing assembly 5. A gas delivery pipe 8 is inserted and installed in the center of the end face of the sealing furnace door 6. A protection assembly 9 is provided on the outer end face of the sealing furnace door 6. The protection assembly 9 is connected to the gas delivery pipe 8; through the sealing assembly 5, it is convenient to fixedly install the sealing furnace door 6 on one side of the assembly groove 2. Through the gas delivery pipe 8, it is convenient to spray the processing material into the interior of the processing furnace chamber 3, so that the processing furnace chamber 3 and the installation hearth seat 4 inside the diffusion furnace body 1 are convenient for diffusing and processing silicon wafers; setting the protection assembly 9 can have a good support, hanging and covering protection effect on the gas delivery pipe 8, thereby effectively extending the service life of the gas delivery pipe 8;

[0026] The protective back plate 91, the protective component 9 includes the protective back plate 91, the protective back plate 91 is fixedly installed at the center of the end face of the sealed furnace door 6, a positioning end 99 is inserted and installed at the center of the other end of the protective back plate 91, and one end of the gas delivery pipe 8 is fixedly installed at the center of the end face of the positioning end 99. Two mounting brackets 92 are fixedly installed at one end of the protective back plate 91, and a mounting slide rod 93 is inserted and installed between the two mounting brackets 92. A number of first guiding and clamping frames 94 are sleeved on the outer side of the mounting slide rod 93, and the bottom side of the first guiding and clamping frame 94 is clamped with the outer wall of the gas delivery pipe 8. A protective end cover 911 is arranged on the outer side of the protective back plate 91. A second guiding and clamping frame 921 is arranged on one side of the end face of the protective end cover 911, and one side of the second guiding and clamping frame 921 is clamped with the outer wall of the gas delivery pipe 8; through the positioning end 99, the gas delivery pipe 8 can be installed and fixed on the outer side of the protective back plate 91. Through a number of first guiding and clamping frames 94, the gas delivery pipe 8 can be hooked. The first guiding and clamping frame 94 slides on the outside of the mounting slide rod 93 between the two mounting brackets 92, so as to facilitate the adjustment of the position of the gas delivery pipe 8. And through the second guiding and clamping frame 921, the gas delivery pipe 8 can be easily hooked, and it can have a good supporting, hooking and covering protection effect on the gas delivery pipe 8, so as to effectively extend the service life of the gas delivery pipe 8.

[0027] An electric base 95 is fixedly installed at the bottom side of one end of the protective back plate 91, and an electric cylinder 96 is fixedly installed at the center of the end face of the electric base 95. A piston push rod 97 is installed at the center of the top end of the electric cylinder 96. A supporting bracket 98 is fixedly installed at the center of the top end of the piston push rod 97, and the top end face of the supporting bracket 98 is in fit connection with the bottom of the outer wall of the gas delivery pipe 8; when the electric cylinder 96 on the end face of the electric base 95 works, the height of the supporting bracket 98 can be adjusted through the piston push rod 97, so that the supporting bracket 98 can jack up and support the gas delivery pipe 8, thereby effectively improving the structural stability of the gas delivery pipe 8.

[0028] Guide frames 910 are fixedly installed at both the top and bottom of the protective back plate 91, and the protective end cover 911 is inserted and installed between the two guide frames 910. Stop seats 912 are fixedly installed at both the top and bottom of one end of the protective end cover 911, and a second locking screw 913 is installed at the center of the end face of the stop seat 912 through threaded connection. A second locking screw hole 914 is opened at the other end of the guide frame 910, and the second locking screw 913 is threadedly fixed to the second locking screw hole 914; as the protective end cover 911 slides between the two guide frames 910, it can facilitate the covering of the protective end cover 911 on the outer side of the protective back plate 91. Until the stop seat 912 moves to the outside of the second locking screw hole 914, by tightening the second locking screw 913, the second locking screw 913 passes through the stop seat 912 and is threadedly fixed to the second locking screw hole 914, thereby fixing the position of the protective end cover 911.

[0029] A track groove 915 is provided on the other side of the end surface of the protective end cover 911, and a plurality of fiber rubber strips 916 are fixedly installed on the inner wall end surface of the track groove 915. An adjustment groove 917 is provided on the top of the other side of the end surface of the protective end cover 911, and an electric guide rail 918 is fixedly installed in the center of the inner end surface of the adjustment groove 917. A guide rail slide 919 is connected and installed on the outer side of the electric guide rail 918. A mounting rotating rod 920 is fixedly installed in the center of the outer end surface of the guide rail slide 919, and a second guide bracket 921 is rotatably installed on the outer side of the mounting rotating rod 920. During the sliding process, the gas delivery pipe 8 squeezes the fiber rubber strip 916 inside the track groove 915, and the position of the gas delivery pipe 8 is adjusted by the deformation of the fiber rubber strip 916. At the same time, when the electric guide rail 918 inside the adjustment groove 917 works, the guide rail slide 919 slides outside the electric guide rail 918, thereby adjusting the outer side of the second guide bracket 921. The second guide bracket 921 rotates outside the mounting rotating rod 920, so that the second guide bracket 921 is clamped and installed on the outer side of the gas delivery pipe 8, thereby supporting and limiting one end of the gas delivery pipe 8.

[0030] The sealing component 5 includes a rotating ear seat 51, and the two rotating ear seats 51 are respectively fixedly installed at the top and bottom of one end of the inner side of the assembly groove 2. A rotating shaft 52 is fixedly installed on the other side of the sealed furnace door 6, and the top and bottom of the rotating shaft 52 are respectively plugged and installed in the center of the end faces of the two rotating ear seats 51. A positioning screw seat 53 is fixedly installed in the center of one end face of the sealed furnace door 6, and a first locking screw 54 is installed in the center of the end face of the positioning screw seat 53 through a threaded connection. The center of the other end of the inner side of the assembly groove 2 is provided with a first locking screw The sealing furnace door 6 is moved so that the sealing furnace door 6 drives the rotating shaft 52 to rotate between the two rotating ear seats 51, until the positioning screw seat 53 on one side of the sealing furnace door 6 rotates to the outside of the first locking screw hole 55, and the first locking screw 54 is tightened so that the first locking screw 54 passes through the positioning screw seat 53 and is threadedly fixedly connected to the first locking screw hole 55, thereby covering the sealing furnace door 6 on the outside of the assembly groove 2.

[0031] An insulating wall seat 7 is fixedly installed in the center of the inner end face of the sealed furnace door 6, and the outer end face of the insulating wall seat 7 is fitted and connected to the inner wall of the mounting chamber seat 4, and one end of the gas pipe 8 passes through the insulating wall seat 7 and is connected to the interior of the processing furnace 3; when the sealed furnace door 6 is covered on the outer side of the assembly groove 2, the outer wall of the insulating wall seat 7 is fitted and connected to the inner wall of the mounting chamber seat 4, thereby sealing the processing furnace 3.

[0032] The bottom end face of the diffusion furnace body 1 is fixedly installed with moving rollers 10 around it through bolts, and the moving rollers 10 are of a universal self-locking wheel structure; through the moving rollers 10, it can have a good moving function, which is convenient for adjusting the use position of the diffusion furnace body 1.

[0033] The above is only a preferred specific embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present invention, according to the technical solution of the present invention and its inventive concept, makes equivalent substitutions or changes, and should be covered within the protection scope of the present invention.

Claims

1. A novel diffusion furnace for solar cell processing, characterized in that, Including: A diffusion furnace body (1), a processing furnace chamber (3) is arranged in the center of the diffusion furnace body (1), and an installation hearth seat (4) is arranged on one end face of the processing furnace chamber (3). An assembly groove (2) is opened on one end face of the diffusion furnace body (1), and one side of the installation hearth seat (4) communicates with the assembly groove (2). A sealing assembly (5) is arranged on the outer side of the assembly groove (2), and a sealing furnace door (6) is arranged on the inner side of the sealing assembly (5). A gas delivery pipe (8) is inserted and installed in the center of the end face of the sealing furnace door (6). A protection assembly (9) is arranged on the outer end face of the sealing furnace door (6), and the protection assembly (9) is connected to the gas delivery pipe (8). A protection back plate (91), the protection assembly (9) includes the protection back plate (91), the protection back plate (91) is fixedly installed in the center of the end face of the sealing furnace door (6). A positioning end head (99) is inserted and installed in the center of the other end of the protection back plate (91), and one end of the gas delivery pipe (8) is fixedly installed in the center of the end face of the positioning end head (99). Two installation frames (92) are fixedly installed at one end of the protection back plate (91), and an installation sliding rod (93) is inserted and installed between the two installation frames (92). A plurality of first guiding and clamping frames (94) are sleeved on the outer side of the installation sliding rod (93), and the bottom side of the first guiding and clamping frame (94) is clamped with the outer wall of the gas delivery pipe (8). A protection end cover (911) is arranged on the outer side of the protection back plate (91). A second guiding and clamping frame (921) is arranged on one side of the end face of the protection end cover (911), and one side of the second guiding and clamping frame (921) is clamped with the outer wall of the gas delivery pipe (8).

2. A novel diffusion furnace for solar cell processing according to claim 1, characterized in that, An electric base (95) is fixedly installed at the bottom side of one end of the protection back plate (91), and an electric cylinder (96) is fixedly installed in the center of the end face of the electric base (95). A piston push rod (97) is installed in the center of the top end of the electric cylinder (96). A supporting bracket (98) is fixedly installed in the center of the top end of the piston push rod (97), and the top end face of the supporting bracket (98) is in fit connection with the bottom of the outer wall of the gas delivery pipe (8).

3. A novel diffusion furnace for solar cell processing according to claim 1, characterized in that, Guide frames (910) are fixedly installed at the top and bottom of the protection back plate (91), and the protection end cover (911) is inserted and installed between the two guide frames (910). Stop seats (912) are fixedly installed at the top and bottom of one end of the protection end cover (911), and a second locking screw (913) is installed in the center of the end face of the stop seat (912) through thread connection. A second locking screw hole (914) is opened at the other end of the guide frame (910), and the second locking screw (913) is in threaded fixed connection with the second locking screw hole (914).

4. A novel diffusion furnace for solar cell processing according to claim 3, characterized in that, On the other side of the end face of the protective end cover (911), a track groove (915) is provided, and a plurality of fiber adhesive strips (916) are fixedly installed on the inner wall end face of the track groove (915). On the top of the other side of the end face of the protective end cover (911), an adjustment groove (917) is provided, and an electric guide rail (918) is fixedly installed at the center of the inner end face of the adjustment groove (917). The outer side of the electric guide rail (918) is connected and installed with a guide rail sliding table (919). The center of the outer end face of the guide rail sliding table (919) is fixedly installed with a mounting rotating rod (920), and the second guiding bracket (921) is rotatably installed on the outer side of the mounting rotating rod (920).

5. A novel diffusion furnace for solar cell processing according to claim 4, characterized in that, The sealing assembly (5) includes rotating ear seats (51). The two rotating ear seats (51) are respectively fixedly installed at the top and bottom of one end of the inner side of the assembly groove (2). The other side of the sealed furnace door (6) is fixedly installed with a rotating shaft (52), and the top and bottom of the rotating shaft (52) are respectively inserted and installed at the center of the end faces of the two rotating ear seats (51). The center of one side end face of the sealed furnace door (6) is fixedly installed with a positioning screw base (53), and a first locking screw (54) is threadedly connected and installed at the center of the end face of the positioning screw base (53). A first locking screw hole (55) is provided at the center of the other end of the inner side of the assembly groove (2), and one end of the first locking screw (54) passes through the positioning screw base (53) and is fixedly connected to the first locking screw hole (55).

6. A novel diffusion furnace for solar cell processing according to claim 5, characterized in that, The center of the inner end face of the sealed furnace door (6) is fixedly installed with a heat insulation wall seat (7), and the outer end face of the heat insulation wall seat (7) is in fit connection with the inner wall of the installation chamber seat (4). One end of the air delivery pipe (8) passes through the heat insulation wall seat (7) and is communicated with the inside of the processing furnace chamber (3).

7. A novel diffusion furnace for solar cell processing according to claim 6, characterized in that, The bottom end face of the diffusion furnace body (1) is fixedly installed with moving rollers (10) through bolts around, and the moving rollers (10) are of a universal self-locking wheel structure.

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