Electric heater for cleaning semiconductor

By designing a protective case and support mechanism to protect the electric heating wire shell, the collision damage problem of the electric heater when not in use is solved, the life of the electric heater is extended and the heating wire is prevented from being wound, and the reliability of the equipment is improved.

CN223080156UActive Publication Date: 2025-07-08WUXI AODUOER AUTOMATION CO LTD
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Patent Information

Application Number
CN202422191518.X
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-07
Publication Date
2025-07-08
Estimated Expiration
2034-09-07

AI Technical Summary

Technical Problem

Existing electric heaters for semiconductor cleaning are susceptible to collision damage when not in use, and lack protection measures, resulting in a shortened service life.

Method used

An electric heater including a protective case and a support mechanism is designed to protect the electric heating wire shell through the protective case, a partition is provided to prevent the heating wire from wrapping, and the convenient installation and disassembly of the protective case is achieved through sliders, limiting components and engaging mechanisms.

Benefits of technology

Effectively protect the electric heating wire shell and heating wire, avoid collision damage, improve the service life of the electric heater, and prevent local burnout caused by winding of the heating wire.

✦ Generated by Eureka AI based on patent content.

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    Figure CN223080156U_ABST
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Abstract

The utility model discloses an electric heater for cleaning a semiconductor, which belongs to the technical field of electric heaters and comprises a top plate and a plurality of electric heating wire shells mounted at the bottom of the top plate, the electric heating wire shells are mounted inside the electric heating wire shells, partition plates are mounted on the electric heating wire shells, and a protective shell is mounted on the top plate in a sliding manner. A supporting mechanism is installed on the protective shell, and a limiting assembly is installed on the supporting mechanism. According to the utility model, through the arrangement of the protective shells and the mutual cooperation of the two protective shells, the electric heating wire shell can be protected, the electric heating wire shell and the heating wire can be prevented from being collided and damaged when not in use, the service life of the heater can be effectively prolonged, and through the arrangement of the partition plate, local burnout caused by winding of the heating wire can be prevented.
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Description

Technical Field

[0001] The utility model relates to an electric heater, in particular to an electric heater for semiconductor cleaning, belonging to the technical field of electric heaters. Background Art

[0002] When semiconductor cleaning is carried out, a cleaning machine is needed. During cleaning, an electric heater is required to heat the cleaning water, and then the semiconductor is cleaned.

[0003] However, for the existing electric heater for semiconductor cleaning, during actual use, the electric heater cannot be protected, resulting in the electric heater being easily damaged by collision when not in use, and the electric heater cannot be used. Summary of the Utility Model

[0004] The main purpose of the utility model is to solve the problem that the electric heater cannot be protected, and to provide an electric heater for semiconductor cleaning.

[0005] The purpose of the utility model can be achieved by adopting the following technical solutions:

[0006] An electric heater for semiconductor cleaning includes a top plate and a heating wire housing installed at the bottom of the top plate. A plurality of heating wire housings are installed inside the heating wire housing. A partition is installed on the heating wire housing. A protective shell is slidably installed on the top plate. A support mechanism is installed on the protective shell, and a limiting component is installed on the support mechanism.

[0007] Preferably, mounting brackets are installed on both sides of the top plate, and bolts are installed on the mounting brackets.

[0008] Preferably, the support mechanism includes a support plate, a first connecting rod and a connecting plate. Support plates are installed on both sides of the protective shell. A first connecting rod is installed on the support plate. The top of the first connecting rod is installed with a connecting plate, and the connecting plate is slidably connected with the top plate.

[0009] Preferably, a slider is installed at the bottom of the connecting plate, and a chute matching with the slider is opened on the top plate.

[0010] Preferably, the slider is a T-shaped slider, and the chute is a T-shaped chute.

[0011] Preferably, the limiting component includes a second connecting rod, a limiting plate and a plug rod. A second connecting rod is installed on the connecting plate. A limiting plate is slidably installed on the second connecting rod. A plug rod is installed at the bottom of the limiting plate, and a slot matching with the plug rod is opened on the top plate.

[0012] Preferably, an installation block is installed on the limiting plate, an installation groove matching with the installation block is formed on the second connecting rod, a clamping mechanism is installed on the installation block, a handle is installed on the limiting plate, and an anti-slip pad is installed on the handle.

[0013] Preferably, the clamping mechanism includes a cavity, a spring and a clamping ball. A cavity is formed in the installation block, a spring is installed inside the cavity, a clamping ball is installed at one end of the spring, and a clamping groove matching with the clamping ball is formed on the second connecting rod.

[0014] The beneficial technical effects of the present utility model are as follows:

[0015] 1. According to the electric heater for semiconductor cleaning of the present utility model, by providing the protective shell, the two protective shells cooperate with each other to protect the electric heating wire housing, avoid collision damage to the electric heating wire housing and the heating wire when not in use, and effectively improve the service life of the heater.

[0016] 2. By providing the partition plate, it can prevent the heating wire from winding and causing local burnout. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic diagram of the overall structure of the present utility model;

[0018] Figure 2 is a schematic diagram of the slider structure of the present utility model;

[0019] Figure 3 is a schematic diagram of the slot structure of the present utility model;

[0020] Figure 4 is a schematic diagram of the protective shell structure of the present utility model;

[0021] Figure 5 is a schematic diagram of the installation block structure of the present utility model;

[0022] Figure 6 is a schematic diagram of the clamping ball structure of the present utility model.

[0023] In the figure: 1. Protective shell; 2. Support plate; 3. First connecting rod; 4. Connecting plate; 5. Installation frame; 6. Bolt; 7. Second connecting rod; 8. Slider; 9. Limiting plate; 10. Insert rod; 11. Handle; 12. Electric heating wire housing; 13. Top plate; 14. Partition plate; 15. Heating wire; 16. Installation block; 17. Clamping ball; 18. Spring; 19. Cavity; 20. Slot. DETAILED DESCRIPTION OF THE INVENTION

[0024] To make the technical solution of the present utility model clearer and more definite to those skilled in the art, the present utility model will be further described in detail below in conjunction with embodiments and the accompanying drawings. However, the implementation manners of the present utility model are not limited thereto.

[0025] As Figures 1-6 shown, the electric heater for semiconductor cleaning provided in this embodiment includes a top plate 13 and a heating wire housing 12 installed at the bottom of the top plate 13. A plurality of heating wire housings 12 are installed inside the heating wire housing 12. A partition 14 is installed on the heating wire housing 12. A protective shell 1 is slidably installed on the top plate 13. A support mechanism is installed on the protective shell 1, and a limiting component is installed on the support mechanism. By setting the protective shell 1, the two protective shells 1 cooperate with each other to protect the heating wire housing 12, and can prevent the heating wire housing 12 and the heating wire 15 from being damaged by collision when not in use, effectively improving the service life of the heater. By setting the partition 14, it can prevent the heating wire 15 from winding and causing local burnout.

[0026] In this embodiment, as Figure 1 , Figure 2 and Figure 4 shown, mounting brackets 5 are installed on both sides of the top plate 13, and bolts 6 are installed on the mounting brackets 5. By setting the mounting brackets 5 and the bolts 6 to cooperate with each other, it is convenient to install the electric heater on the cleaning machine. The support mechanism includes a support plate 2, a first connecting rod 3 and a connecting plate 4. Support plates 2 are installed on both sides of the protective shell 1. A first connecting rod 3 is installed on the support plate 2, and a connecting plate 4 is installed at the top of the first connecting rod 3. The connecting plate 4 is slidably connected to the top plate 13. By setting the support plate 2, the first connecting rod 3 and the connecting plate 4 to cooperate with each other, the protective shell 1 can be supported. A slider 8 is installed at the bottom of the connecting plate 4, and a chute matching the slider 8 is opened on the top plate 13. By setting the slider 8 to be slidably connected to the chute, pulling the protective shell 1, the slider 8 slides in the chute, and the protective shell 1 can be removed from the top plate 13, which is convenient for disassembling the protective shell 1 to expose the heating wire housing 12 to the outside, enabling the heating wire housing 12 and the heating wire 15 to heat the water in the cleaning machine. The slider 8 is a T-shaped slider, and the chute is a T-shaped chute. By setting the slider 8 as a T-shaped slider to cooperate with the T-shaped chute, the protective shell 1 can be guided and limited.

[0027] In this embodiment, as Figure 1 , Figure 2 , Figure 4 , Figure 5 and Figure 6As shown, the limiting component includes a second connecting rod 7, a limiting plate 9 and a plug rod 10. The second connecting rod 7 is installed on the connecting plate 4. The limiting plate 9 is slidably installed on the second connecting rod 7. The plug rod 10 is installed at the bottom of the limiting plate 9. A slot 20 that cooperates with the plug rod 10 is provided on the top plate 13. By setting the plug rod 10 to be snap-connected with the slot 20 and sliding the limiting plate 9 to insert the plug rod 10 into the slot, the installed protective shell 1 can be limited. An installation block 16 is installed on the limiting plate 9. An installation groove that cooperates with the installation block 16 is provided on the second connecting rod 7. A latching mechanism is installed on the installation block 16. A handle 11 is installed on the limiting plate 9. An anti-slip pad is installed on the handle 11. By setting the installation block 16 to cooperate with the installation groove and sliding the limiting plate 9, the installation block 16 slides in the installation groove, and inserting the plug rod 10 into the slot 20 can limit the installed protective shell 1. By setting the handle 11, it is convenient to pull the plug rod 10. By setting the anti-slip pad, it is convenient to increase the friction of the handle 11. The latching mechanism includes a cavity 19, a spring 18 and a locking ball 17. A cavity 19 is provided on the installation block 16. The spring 18 is installed inside the cavity 19. One end of the spring 18 is installed with the locking ball 17. A slot that cooperates with the locking ball 17 is provided on the second connecting rod 7. By setting the locking ball 17 to be snap-connected with the slot, the slid plug rod 10 can be limited, and further the installed protective shell 1 can be limited.

[0028] In this embodiment, as Figures 1-6 shown, the working process of an electric heater for semiconductor cleaning provided in this embodiment is as follows:

[0029] Step 1: Pull the limiting plate 9. The installation block 16 slides in the installation groove, and the locking ball 17 slides out of the slot. Pull out the plug rod 10 from the slot 20. Pull the protective shell 1, and the slider 8 slides in the chute to disassemble the protective shell 1 and expose the heating wire housing 12 to the outside.

[0030] Step 2: Install the heating wire housing 12 in the cleaning machine through the bolt 6.

[0031] In summary, in this embodiment, for the electric heater for semiconductor cleaning according to this embodiment, by providing the protective shell 1, the two protective shells 1 cooperate with each other to protect the heating wire housing 12, and can prevent the heating wire housing 12 and the heating wire 15 from being damaged by collision when not in use, effectively improving the service life of the heater. By providing the partition plate 14, it can prevent the heating wire 15 from winding and causing local burnout. By providing the mounting bracket 5 and the bolt 6 to cooperate with each other, it is convenient to install the electric heater on the cleaning machine. By providing the support plate 2, the first connecting rod 3 and the connecting plate 4 to cooperate with each other, the protective shell 1 can be supported. By providing the slider 8 slidably connected to the chute, pulling the protective shell 1, the slider 8 slides in the chute, and the protective shell 1 can be removed from the top plate 13, which is convenient for disassembling the protective shell 1 to expose the heating wire housing 12 to the outside, enabling the heating wire housing 12 and the heating wire 15 to heat the water in the cleaning machine. By providing the slider 8 as a T-shaped slider to cooperate with the T-shaped chute, the protective shell 1 can be guided and limited. By providing the insertion rod 10 snap-fitted with the slot 20 and sliding the limiting plate 9, inserting the insertion rod 10 into the slot can limit the installed protective shell 1. By providing the mounting block 16 to cooperate with the mounting groove and sliding the limiting plate 9, the mounting block 16 slides in the mounting groove, and inserting the insertion rod 10 into the slot 20 can limit the installed protective shell 1. By providing the handle 11, it is convenient to pull the insertion rod 10. By providing the anti-slip pad, it is convenient to increase the friction of the handle 11. By providing the ball 17 snap-fitted with the card slot, the inserted insertion rod 10 after sliding can be limited, and further the installed protective shell 1 can be limited.

[0032] The above is only a further embodiment of the present invention, but the protection scope of the present invention is not limited thereto. Any person skilled in the art within the scope disclosed by the present invention, according to the technical solution and its concept of the present invention, makes equivalent replacements or changes, all belong to the protection scope of the present invention.

Claims

1. A semiconductor cleaning electric heater, characterized in that, It includes a top plate (13) and a heating wire housing (12) installed at the bottom of the top plate (13). A plurality of heating wire housings (12) are installed inside the heating wire housing (12). A partition plate (14) is installed on the heating wire housing (12). A protective shell (1) is slidably installed on the top plate (13). A support mechanism is installed on the protective shell (1), and a limiting component is installed on the support mechanism.

2. The electric heater for semiconductor cleaning according to claim 1, wherein, Mounting brackets (5) are installed on both sides of the top plate (13), and bolts (6) are installed on the mounting brackets (5).

3. The electric heater for semiconductor cleaning according to claim 1, characterized in that, The support mechanism includes a support plate (2), a first connecting rod (3) and a connecting plate (4). Support plates (2) are installed on both sides of the protective shell (1). The first connecting rod (3) is installed on the support plate (2). The connecting plate (4) is installed at the top of the first connecting rod (3), and the connecting plate (4) is slidably connected to the top plate (13).

4. The electric heater for semiconductor cleaning according to claim 3, wherein, A slider (8) is installed at the bottom of the connecting plate (4), and a chute that cooperates with the slider (8) is provided on the top plate (13).

5. A semiconductor cleaning electric heater according to claim 4, characterized in that, The slider (8) is a T-shaped slider, and the chute is a T-shaped chute.

6. A semiconductor cleaning electric heater according to claim 3, characterized in that, The limiting component includes a second connecting rod (7), a limiting plate (9) and a plug rod (10). The second connecting rod (7) is installed on the connecting plate (4). The limiting plate (9) is slidably installed on the second connecting rod (7). The plug rod (10) is installed at the bottom of the limiting plate (9), and a slot (20) that cooperates with the plug rod (10) is provided on the top plate (13).

7. A semiconductor cleaning electric heater according to claim 6, characterized in that, An installation block (16) is installed on the limiting plate (9). An installation groove that cooperates with the installation block (16) is provided on the second connecting rod (7). A clamping mechanism is installed on the installation block (16). A handle (11) is installed on the limiting plate (9), and an anti-slip pad is installed on the handle (11).

8. A semiconductor cleaning electric heater according to claim 7, characterized in that, The clamping mechanism includes a cavity (19), a spring (18) and a clamping ball (17). A cavity (19) is provided on the installation block (16). The spring (18) is installed inside the cavity (19). The clamping ball (17) is installed at one end of the spring (18), and a clamping groove that cooperates with the clamping ball (17) is provided on the second connecting rod (7).