Device for preparing electronic-grade hydrogen chloride by recovering and treating tail gas in chlor-alkali industry
By performing multi-stage treatment of the chlor-alkali plant exhaust gas, including dehydration, pressurization and distillation, the problem of waste of exhaust gas treatment resources in the chlor-alkali plant has been solved, and the recycling and reuse of high-purity hydrogen chloride is achieved, which is suitable for semiconductor manufacturing.
Patent Information
- Application Number
- CN202420988650.0
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-05-08
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-05-08
AI Technical Summary
The prior art cannot effectively handle the exhaust gas of chlor-alkali plant, resulting in waste of resources and environmental and health risks, and cannot recover high-purity electronic grade hydrogen chloride.
The chlor-alkali plant exhaust gas is dehydrated, pressurized, heavy-component and light-component treatment by using a prepurifier, compressor, deweight system and delight-component treatment, and electronic grade hydrogen chloride is obtained through multi-stage distillation.
It realizes the safe and low-cost conversion of chlor-alkali industrial exhaust gas into valuable resources, obtains high-purity electronic-grade hydrogen chloride, which is suitable for semiconductor manufacturing, ensuring product stability and reliability.
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Figure CN223082541U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the technical field of tail gas treatment, and particularly to a device for recovering and treating tail gas of chlor-alkali industry to prepare electronic-grade hydrogen chloride. Background Art
[0002] The tail gas of chlor-alkali plants refers to the waste gas generated during the production of chlor-alkali, mainly including chlorine gas, hydrogen chloride gas, etc., and these substances have strong corrosivity. The tail gas may also contain toxic and harmful substances such as mercury and vinyl chloride, which pose potential hazards to the human body and the environment. Therefore, chlor-alkali plants must adopt corresponding waste gas treatment technologies to reduce their impact on the environment and the human body, and many plants have taken corresponding waste gas treatment measures. However, the existing technologies can only purify the tail gas of chlor-alkali plants, thus wasting raw materials. Therefore, there is an urgent need for a device that can treat the tail gas of chlor-alkali plants and recover hydrogen chloride for reuse. Summary of the Utility Model
[0003] In view of this, this application proposes a device for recovering and treating tail gas of chlor-alkali industry to prepare electronic-grade hydrogen chloride, which can recover hydrogen chloride from the tail gas of chlor-alkali plants.
[0004] According to one aspect of this application, there is provided a device for recovering and treating tail gas of chlor-alkali industry to prepare electronic-grade hydrogen chloride, including: a pre-purifier, a compressor, a heavy component removal system, and a light component removal system;
[0005] The pre-purifier is suitable for connecting to the recovery pipeline of a chlor-alkali plant and dehydrating the hydrogen chloride tail gas inside the recovery pipeline;
[0006] The compressor is connected to the pre-purifier and pressurizes the dehydrated hydrogen chloride tail gas;
[0007] The heavy component removal system is connected to the compressor and performs heavy component treatment on the pressurized hydrogen chloride tail gas;
[0008] The light component removal system is connected to the heavy component removal system and performs light component treatment on the hydrogen chloride after heavy component treatment to obtain rectified hydrogen chloride.
[0009] In a possible implementation manner, molecular sieves are provided inside the pre-purifier.
[0010] In a possible implementation manner, the compressor is a diaphragm compressor.
[0011] In a possible implementation manner, the heavy component removal system includes: a heavy component removal tower, a first reboiler, and a first condenser;
[0012] The middle position of the heavy component removal tower is connected to the compressor;
[0013] The gas inlet end of the primary reboiler is connected to the bottom of the de - heavy tower, and the gas outlet end is connected to the middle part of the de - heavy tower.
[0014] The gas inlet end of the primary condenser is connected to the top of the de - heavy tower, and the gas outlet end is connected to the middle part of the de - heavy tower and the de - light system respectively.
[0015] In a possible implementation manner, the de - light system includes: a de - light tower, a secondary reboiler, and a secondary condenser;
[0016] The middle position of the de - light tower is connected to the de - heavy system;
[0017] The gas inlet end of the secondary condenser is connected to the top of the de - light tower, and the gas outlet end is connected to the middle part of the de - light tower;
[0018] The gas inlet end of the secondary reboiler is connected to the bottom of the de - light tower, and the gas outlet end is connected to the middle part of the de - light tower, and a liquid outlet is provided at the bottom of the de - light tower.
[0019] In a possible implementation manner, it further includes: a tertiary condenser;
[0020] The tertiary condenser is connected to the liquid outlet, and liquefies the rectified hydrogen chloride.
[0021] In a possible implementation manner, it further includes: a storage tank;
[0022] The storage tank is connected to the tertiary condenser;
[0023] The storage tank is made of stainless steel.
[0024] In a possible implementation manner, it further includes: a metering pump;
[0025] The metering pump is arranged at the liquid outlet hole of the storage tank.
[0026] The beneficial effects of the device for recycling and treating the tail gas of the chlor - alkali industry to prepare electronic - grade hydrogen chloride in the embodiments of the present application: Compared with the traditional treatment method for the source of the tail gas of the chlor - alkali industry, the method adopted in the present application is safer and has lower costs, and can turn the waste of the tail gas of the chlor - alkali industry into a useful resource and be reused. Specifically, by sequentially performing purification treatment, pressurization treatment, primary rectification treatment, and secondary rectification treatment on the tail gas of the chlor - alkali industry, the tail gas of the chlor - alkali industry is purified and refined, and the original waste gas of the chlor - alkali industry is refined into electronic - grade hydrogen chloride, and the obtained hydrogen chloride can also be reused. In this way, while treating the tail gas of the chlor - alkali plant, electronic - grade hydrogen chloride can be obtained.
[0027] According to the following detailed description of the exemplary embodiments with reference to the accompanying drawings, other features and aspects of the present application will become clear. Description of the Drawings
[0028] The drawings included in and forming a part of the specification, together with the specification, illustrate exemplary embodiments, features, and aspects of the present application and are used to explain the principles of the present application.
[0029] Figure 1 Schematic diagram of a device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry, showing an embodiment of the present application. Detailed Description of the Invention
[0030] Various exemplary embodiments, features, and aspects of the present application will be described in detail below with reference to the drawings. Like reference numerals in the drawings denote elements having the same or similar functions. Although various aspects of the embodiments are shown in the drawings, the drawings are not necessarily drawn to scale unless otherwise specified.
[0031] It should be understood that the terms "center", "longitudinal", "transverse", "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", "clockwise", "counterclockwise", "axial", "radial", "circumferential", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, and are only for the convenience of describing the present invention or simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as a limitation of the present invention.
[0032] In addition, the terms "first" and "second" are only used for descriptive purposes and should not be construed as indicating or implying relative importance or implicitly indicating the number of the indicated technical features. Thus, the features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present invention, "a plurality" means two or more unless otherwise specifically defined.
[0033] The word "exemplary" used herein means "serving as an example, embodiment, or illustration". Any embodiment described herein as "exemplary" should not be construed as being superior to or better than other embodiments.
[0034] In addition, for a better description of the present application, numerous specific details are given in the following detailed description. Those skilled in the art should understand that the present application can be implemented without some specific details. In some instances, methods, means, elements, and circuits well known to those skilled in the art are not described in detail so as to highlight the gist of the present application.
[0035] Refer to Figure 1, the device for recovering and treating tail gas of chlor-alkali industry to prepare electronic-grade hydrogen chloride according to the embodiments of the present application includes: a pre-purifier 100, a compressor 200, a heavy component removal system and a light component removal system. The pre-purifier is used to connect to the recovery pipeline of the chlor-alkali plant and dehydrate the hydrogen chloride tail gas inside the recovery pipeline. The compressor 200 is connected to the pre-purifier to pressurize the dehydrated hydrogen chloride tail gas. The heavy component removal system is connected to the compressor 200 to perform heavy component treatment on the pressurized hydrogen chloride tail gas. The light component removal system is connected to the heavy component removal system. After performing light component treatment on the hydrogen chloride after heavy component treatment, refined hydrogen chloride is obtained.
[0036] In this embodiment, compared with the traditional treatment method for the source of tail gas in the chlor-alkali industry, the method adopted in the present application is safer and has lower costs, and can turn the waste of the tail gas in the chlor-alkali industry into treasures and be reused. Specifically, by sequentially performing purification treatment, pressurization treatment, primary rectification treatment and secondary rectification treatment on the tail gas of the chlor-alkali industry, the tail gas of the chlor-alkali industry is purified and refined, and the original waste gas of the chlor-alkali industry is refined into electronic-grade hydrogen chloride. The obtained hydrogen chloride can also be reused. In this way, while treating the tail gas of the chlor-alkali plant, electronic-grade hydrogen chloride can also be obtained.
[0037] It should be noted that electronic-grade hydrogen chloride is a high-purity hydrogen chloride gas. Its main characteristics include high purity, stability and consistency. High purity ensures that no impurities are introduced during the semiconductor manufacturing process, which may affect the device performance and yield. Stability ensures that no unnecessary reactions occur during storage and use, which may affect its use effect. Consistency ensures the repeatability and reliability of the semiconductor manufacturing process.
[0038] In a specific embodiment, the overall process flow is as follows:
[0039] S100. Pre-purification section: The hydrogen chloride in the tail gas of the chlor-alkali plant enters the pre-purifier 100 of the first-stage filter through the recovery pipeline for dehydration treatment. Molecular sieve dehydration is used for pre-purification to reduce the moisture content in the raw material to 1 ppm. However, after the molecular sieve is used for a period of time, the adsorption efficiency decreases and activation treatment is required.
[0040] S200. Compression section: The low-pressure hydrogen chloride gas after pre-dehydration enters the diaphragm compressor 200 of the second-stage filter, and after boosting, it passes through the third-stage filter rectification column.
[0041] S300. Rectification section: The dehydrated and pressurized hydrogen chloride gas enters the de-heavy tower 310 for rectification operation. All heavy components are discharged at the bottom of the de-heavy tower 310, and the hydrogen chloride gas at the top of the de-heavy tower 310 enters the de-light tower 410 for rectification operation. All light components are discharged at the top of the de-light tower 410, and the bottom discharge of the de-light tower 410 is 6.4N of electronic-grade hydrogen chloride.
[0042] S400. Finished Product Filling Section: The electronic-grade hydrogen chloride from the rectification outlet passes through three condensers 500 of the four-stage filter and then enters the storage tank 600. The filling is carried out by a metering pump 700 into the interior of the transport tank 800.
[0043] In a specific embodiment, molecular sieves are provided inside the pre-purifier 100. The molecular sieves are used to remove moisture from the chlor-alkali tail gas because molecular sieves are often used as desiccants and can adsorb up to 22% of their own weight in moisture.
[0044] In a specific embodiment, the compressor 200 is a diaphragm compressor 200. Its working principle is to compress and transport gas through the reciprocating motion of the diaphragm in the cylinder. The dehydrated hydrogen chloride is in a negative pressure state, and the compressor 200 is used to boost the pressure of the hydrogen chloride in the negative pressure state.
[0045] In a specific embodiment, the heavy component removal system includes: a heavy component removal tower 310, a first reboiler 330, and a first condenser 320. The middle position of the heavy component removal tower 310 is connected to the compressor 200. The gas inlet end of the first reboiler 330 is connected to the bottom of the heavy component removal tower 310, and the gas outlet end is connected to the middle of the heavy component removal tower 310. The gas inlet end of the first condenser 320 is connected to the top of the heavy component removal tower 310, and the gas outlet end is connected to the middle of the heavy component removal tower 310 and the light component removal system respectively. After the pressurized hydrogen chloride enters the heavy component removal tower 310, the first reboiler 330 is arranged at the bottom of the heavy component removal tower 310 to provide heat for the heavy component removal tower 310, discharge all the heavy components, and vaporize the liquid hydrogen chloride again to the top of the heavy component removal tower 310. After condensation, it is discharged into the interior of the light component removal tower 410.
[0046] In a specific embodiment, the light component removal system includes: a light component removal tower 410, a second reboiler 430, and a second condenser 420. The middle position of the light component removal tower 410 is connected to the top of the heavy component removal tower 310. The gas inlet end of the second condenser 420 is connected to the top of the light component removal tower 410, and the gas outlet end is connected to the middle of the light component removal tower 410. The gas inlet end of the second reboiler 430 is connected to the bottom of the light component removal tower 410, and the gas outlet end is connected to the middle of the light component removal tower 410. And a liquid outlet is provided at the bottom of the light component removal tower 410. The liquid hydrogen chloride is vaporized by the second reboiler 430 at the bottom of the light component removal tower 410, undergoes rectification operation at the top of the light component removal tower 410, and is discharged from the bottom of the light component removal tower 410.
[0047] In a specific embodiment, it further includes: a third condenser 500. The third condenser 500 is a product hydrogen chloride condenser. The third condenser 500 is connected to the liquid outlet of the light component removal tower 410 to liquefy the rectified hydrogen chloride.
[0048] In a specific embodiment, it further includes: a storage tank 600, which is made of stainless steel and is connected to the three-stage condensation, and can be used to store the rectified liquid hydrogen chloride.
[0049] In a specific embodiment, it further includes: a metering pump 700, which is arranged at the liquid outlet of the storage tank 600 and is used in the process of accurately measuring and transporting liquids, and can transport precise hydrogen chloride into the transport tank 800.
[0050] The embodiments of the present application have been described above. The above description is exemplary and not exhaustive, and is not limited to the disclosed embodiments. Many modifications and changes are obvious to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The choice of terms used herein is intended to best explain the principles of the embodiments, practical applications, or improvements to the technology in the market, or to enable other ordinary skill in the art to understand the embodiments disclosed herein.
Claims
1. An apparatus for recycling and treating the tail gas in the chlor-alkali industry to prepare electronic-grade hydrogen chloride, characterized in that, Including: A pre-purifier, a compressor, a heavy component removal system, and a light component removal system; The pre-purifier is adapted to be connected to the recovery pipeline of a chlor-alkali plant to dehydrate the hydrogen chloride tail gas inside the recovery pipeline; The compressor is connected to the pre-purifier to boost the pressure of the dehydrated hydrogen chloride tail gas; The heavy component removal system is connected to the compressor to process the heavy components of the pressurized hydrogen chloride tail gas; The light component removal system is connected to the heavy component removal system to process the light components of the hydrogen chloride and obtain the rectified hydrogen chloride.
2. The electronic grade hydrogen chloride device for recovering and treating the tail gas of the chlor-alkali industry according to claim 1, wherein Molecular sieves are provided inside the pre-purifier.
3. The device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry according to claim 1, wherein The compressor is a diaphragm compressor.
4. The device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry according to any one of claims 1-3, wherein The heavy component removal system includes: a heavy component removal tower, a first reboiler, and a first condenser; The middle position of the heavy component removal tower is connected to the compressor; The gas inlet end of the first reboiler is connected to the bottom of the heavy component removal tower, and the gas outlet end is connected to the middle of the heavy component removal tower; The gas inlet end of the first condenser is connected to the top of the heavy component removal tower, and the gas outlet end is respectively connected to the middle of the heavy component removal tower and the light component removal system.
5. The device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry according to any one of claims 1-3, characterized in that, The light component removal system includes: a light component removal tower, a second reboiler, and a second condenser; The middle position of the light component removal tower is connected to the heavy component removal system; The gas inlet end of the second condenser is connected to the top of the light component removal tower, and the gas outlet end is connected to the middle of the light component removal tower; The gas inlet end of the second reboiler is connected to the bottom of the light component removal tower, and the gas outlet end is connected to the middle of the light component removal tower, and a liquid outlet is provided at the bottom of the light component removal tower.
6. The device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry according to claim 5, wherein, It also includes: A third condenser; The third condenser is connected to the liquid outlet to liquefy the rectified hydrogen chloride.
7. The hydrogen chloride preparation device for electronic grade by recycling and treating the tail gas of chlor-alkali industry according to claim 6, characterized in that, It also includes: A storage tank; The storage tank is connected to the third condenser; The storage tank is made of stainless steel.
8. The device for preparing electronic-grade hydrogen chloride by recycling and treating the tail gas of the chlor-alkali industry according to claim 7, wherein, It also includes: A metering pump; The metering pump is arranged at the liquid outlet hole of the storage tank.