Monocrystalline silicon slice surface degumming machine

Abstract

The utility model discloses a monocrystalline silicon slice surface degumming machine, which relates to the technical field of degumming machines and comprises a degumming machine body, an L-shaped plate is mounted on the outer wall of the left side of the degumming machine body, a servo motor is arranged on the L-shaped plate, the output end of the servo motor is connected with a driving gear, and the side wall of the driving gear is meshed with a driven gear. A driving rod is installed in the middle of the inner side face of the driven gear, a fixing part for fixing a monocrystalline silicon slice is arranged at the bottom of the driving rod, a U-shaped filtering box is installed on the bottom wall of an inner cavity of the degumming machine body, a box body is arranged on the outer wall of the right side of the degumming machine body, and a recycling unit is arranged between the box body and the U-shaped filtering box; a liquid outlet cover and a plurality of groups of atomizing nozzles are mounted at the top end of the inner cavity of the degumming machine body, and the liquid outlet cover is communicated with the box body through a liquid supply assembly. The single crystal silicon slice fixed on the fixing part can rotate, so that the single crystal silicon slice can be in full contact with the degumming liquid, the surface degumming effect of the single crystal silicon slice is improved, the degumming liquid can be recycled, and the surface degumming cost of the single crystal silicon slice is saved.

Description

Technical Field

[0001] The utility model relates to the technical field of degumming machines, in particular to a degumming machine for the surface of monocrystalline silicon wafers. Background Technique

[0002] In the process of silicon wafer production, the silicon wafer needs to be fixed for cutting. After cutting, in order to facilitate subsequent processing, the glue on the surface of the silicon wafer needs to be cleaned. This is usually achieved by immersing the silicon wafer in a specific solution and then using mechanical or chemical methods to ensure the cleanliness of the silicon wafer surface and the processing quality.

[0003] The patent with the publication number CN217257394U proposes a degumming machine for the surface of monocrystalline silicon wafers. This degumming machine for the surface of monocrystalline silicon wafers combines a degumming box and a filtering box. Under the action of the filter cotton, it is convenient to intercept the particles detached from the monocrystalline silicon wafers. With the cooperation of the water pump, it is convenient to recycle and spray the solution, saving resources. The cooperation of the transparent window helps to observe the degumming status of the internal monocrystalline silicon wafers in real time. The cooperation of the spray pipe and the nozzle is used for spraying and degumming the monocrystalline silicon wafers placed in the T-shaped plate.

[0004] When degumming the surface of the monocrystalline silicon wafer in the above patent, the monocrystalline silicon wafer is directly placed in the storage tank, which is not convenient to adjust the orientation of the monocrystalline silicon wafer. The monocrystalline silicon wafer cannot fully contact with the degumming liquid, resulting in poor degumming effect on the surface of the monocrystalline silicon wafer. Therefore, we propose a degumming machine for the surface of monocrystalline silicon wafers. Content of the Utility Model

[0005] The purpose of the utility model is to provide a degumming machine for the surface of monocrystalline silicon wafers to solve the problem of poor degumming effect on the surface of monocrystalline silicon wafers caused by the inability of the monocrystalline silicon wafer to fully contact with the degumming liquid as proposed in the above background technique.

[0006] To achieve the above purpose, the utility model provides the following technical solutions:

[0007] A degumming machine for the surface of monocrystalline silicon wafers includes a degumming machine body. An L-shaped plate is installed on the left outer wall of the degumming machine body, and a servo motor is arranged on the inner side surface of the L-shaped plate. The output end of the servo motor is connected with a driving gear, and the side wall of the driving gear is meshed with a driven gear. The middle part of the inner side surface of the driven gear is provided with a driving rod, and the driving rod penetrates through the left wall of the degumming machine body. A fixing component for fixing the monocrystalline silicon wafer is arranged at the bottom of the driving rod;

[0008] A sealing door is movably connected to the front end surface of the degumming machine body. A U-shaped filter box is installed on the bottom wall of the inner cavity of the degumming machine body. A box body is arranged on the right outer wall of the degumming machine body, and a recycling unit is arranged between the box body and the U-shaped filter box;

[0009] At the top end of the inner cavity of the degumming body, a liquid outlet cover is installed. The bottom of the liquid outlet cover is connected with multiple groups of atomizing nozzles, and the liquid outlet cover is communicated with the box body through a liquid supply component.

[0010] Furthermore: The fixing component includes two side plates. The left side plate is connected with the driving rod in the middle of the inner side of the driven gear, and the right side plate is rotatably connected with the right inner wall of the degumming body through a bearing. Connecting rods are installed at the top and bottom of the two side plates, a screw rod is connected between the upper and lower adjacent connecting rods, and two hollow clamping plates are slidably connected to the screw rod. Two nuts are threadedly connected to each screw rod.

[0011] Furthermore: The inner wall of the U-shaped filter box is sequentially connected with a filter net and filter cotton from top to bottom.

[0012] Furthermore: The liquid supply component includes a water pump. The liquid inlet of the water pump is communicated with the box body through a pipeline, the liquid outlet of the water pump is connected with a liquid outlet pipe, and the other end of the liquid outlet pipe is communicated with the liquid outlet cover.

[0013] Furthermore: The recycling unit includes a reflux pump. The liquid inlet of the reflux pump is provided with a recycling pipe, and the other end of the recycling pipe is communicated with the U-shaped filter box. The liquid outlet of the reflux pump is connected with a connecting pipe, and the other end of the connecting pipe is communicated with the box body.

[0014] Furthermore: A transparent porthole is provided on the sealing door, and an anti-slip bottom plate is connected to the bottom of the degumming body.

[0015] Compared with the prior art, the beneficial effects of the present utility model are:

[0016] In the present utility model, two hollow clamping plates on the fixing component can fix the monocrystalline silicon slice. The operation of the servo motor drives the driving gear to rotate. Since the driving gear is meshed and connected with the driven gear, the driving rod in the middle of the inner side of the driven gear drives the fixing component to rotate, enabling the monocrystalline silicon slice to fully contact the degumming liquid sprayed by the atomizing nozzles. The monocrystalline silicon slice contacts the degumming liquid more fully, improving the degumming effect on the surface of the monocrystalline silicon slice; The filter net and filter cotton in the U-shaped filter box can filter impurities in the liquid after degumming, and the reflux pump recycles the filtered liquid into the box body, enabling the degumming liquid to be recycled and saving the cost of degumming the surface of the monocrystalline silicon slice. BRIEF DESCRIPTION OF THE DRAWINGS

[0017] Figure 1 is a schematic structural diagram of the present utility model;

[0018] Figure 2 is a front structural sectional view of the present utility model;

[0019] Figure 3 is a schematic structural diagram of the fixing component of the present utility model.

[0020] In the figure: 1. Degumming body; 2. Sealing door; 3. L-shaped plate; 4. Servo motor; 5. Driving gear; 6. Driven gear; 7. Box body; 8. Recirculation pump; 9. Recovery pipe; 10. Connecting pipe; 11. Water pump; 12. Liquid outlet pipe; 13. Liquid outlet cover; 14. Atomizing nozzle; 15. Fixing part; 150. Side plate; 151. Link rod; 152. Screw rod; 153. Hollow clamping plate; 154. Nut; 16. U-shaped filter box; 17. Filter screen; 18. Filter cotton. Specific implementation mode

[0021] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0022] Embodiment 1:

[0023] Please refer to Figures 1 - 3 , the present invention provides a technical solution: a degumming machine for the surface of single crystal silicon slices, including a degumming body 1. An L-shaped plate 3 is installed on the left outer wall of the degumming body 1, and a servo motor 4 is provided on the inner side surface of the L-shaped plate 3. The output end of the servo motor 4 is connected to a driving gear 5. The side wall of the driving gear 5 is meshed with a driven gear 6. The middle part of the inner side surface of the driven gear 6 is provided with a driving rod, and the driving rod penetrates through the left side wall of the degumming body 1. A fixing part 15 for fixing the single crystal silicon slice is provided at the bottom of the driving rod; before use, the electrical ends of each electrical device are electrically connected to the external power supply and the electrical end of the controller. After opening the sealing door 2, place the single crystal silicon slice between the two hollow clamping plates 153 of the fixing part 15 to fix the position of the single crystal silicon slice. The L-shaped plate 3 is fixedly connected to the outer wall of the degumming body 1. When the servo motor 4 works, it can drive the driving gear 5 to rotate. Since the driving gear 5 is meshed with the driven gear 6, the driving rod is driven to rotate, and the fixing part 15 at the bottom of the driving rod can rotate, thereby driving the single crystal silicon slice between the adjacent hollow clamping plates 153 to rotate and adjust the orientation;

[0024] The front end face of the degumming body 1 is movably connected with a sealing door 2. The inner cavity bottom wall of the degumming body 1 is provided with a U-shaped filter box 16. A box body 7 is provided on the right outer wall of the degumming body 1, and a recovery unit is provided between the box body 7 and the U-shaped filter box 16;

[0025] At the top of the inner cavity of the degumming machine body 1, a liquid outlet cover 13 is installed. A plurality of atomizing nozzles 14 are connected to the bottom of the liquid outlet cover 13, and the liquid outlet cover 13 is communicated with the box body 7 through a liquid supply assembly; there is degumming liquid in the box body 7, and the degumming liquid can be transported to the plurality of atomizing nozzles 14 at the bottom of the liquid outlet cover 13 through the liquid supply assembly. The degumming liquid sprayed by the atomizing nozzles 14 can contact the monocrystalline silicon slice on the rotating fixing member 15, and the monocrystalline silicon slice contacts the degumming liquid more fully, improving the degumming effect on the surface of the monocrystalline silicon slice. The waste liquid after the degumming liquid contacts the monocrystalline silicon slice flows into the U-shaped filter box 16. The filter screen 17 and filter cotton 18 in the U-shaped filter box 16 can filter the impurities in the degumming liquid. The recycling unit recovers the filtered liquid into the box body 7, and the degumming liquid can be recycled, saving the cost of degumming the surface of the monocrystalline silicon slice.

[0026] Among them, preferably, the fixing member 15 includes two side plates 150. The left side plate 150 is connected to the driving rod in the middle of the inner side of the driven gear 6, and the right side plate 150 is rotatably connected to the right inner wall of the degumming machine body 1 through a bearing. Connecting rods 151 are installed at the top and bottom of the two side plates 150. A screw rod 152 is connected between the adjacent upper and lower connecting rods 151, and two hollow clamping plates 153 are slidably connected to the screw rod 152. Two nuts 154 are threadedly connected to each screw rod 152;

[0027] The two hollow clamping plates 153 can vertically slide and adjust the distance on the two screw rods 152. When fixing the monocrystalline silicon slice, place it between the adjacent hollow clamping plates 153. After determining the position, rotate the nut 154 threadedly connected to the screw rod 152 to fix the two hollow clamping plates 153, that is, fix the position of the monocrystalline silicon slice.

[0028] Preferably, the inner wall of the U-shaped filter box 16 is sequentially connected with a filter screen 17 and a filter cotton 18 from top to bottom.

[0029] Preferably, the liquid supply assembly includes a water pump 11. The liquid inlet of the water pump 11 is communicated with the box body 7 through a pipeline. The liquid outlet of the water pump 11 is connected with a liquid outlet pipe 12, and the other end of the liquid outlet pipe 12 is communicated with the liquid outlet cover 13; when the water pump 11 works, the degumming liquid in the box body 7 can be transported to the liquid outlet cover 13 and a plurality of atomizing nozzles 14.

[0030] Preferably, the recycling unit includes a reflux pump 8. The liquid inlet of the reflux pump 8 is provided with a recovery pipe 9, and the other end of the recovery pipe 9 is communicated with the U-shaped filter box 16. The liquid outlet of the reflux pump 8 is connected with a connecting pipe 10, and the other end of the connecting pipe 10 is communicated with the box body 7; when the reflux pump 8 works, it generates suction in the recovery pipe 9 to recover the filtered degumming liquid in the U-shaped filter box 16 into the box body 7 for recycling.

[0031] Example 2:

[0032] Refer toFigure 1 , what is different from the first embodiment in this embodiment is that: a transparent porthole is provided on the sealing door 2, and an anti-slip bottom plate is connected to the bottom of the degumming body 1; the transparent porthole facilitates observing the degumming effect of the internal monocrystalline silicon slices, and the anti-slip bottom plate increases the friction with the workbench surface, improving the stability of the entire degumming machine during use.

[0033] Although the embodiments of the present invention have been shown and described, those of ordinary skill in the art can understand that various changes, modifications, substitutions, and variations can be made to these embodiments without departing from the principle and spirit of the present invention. The scope of the present invention is defined by the appended claims and their equivalents.

Claims

1. A single-crystal silicon wafer surface degumming machine, comprising a degumming machine body (1), characterized in that: On the left outer wall of the degumming machine body (1), an L-shaped plate (3) is installed, and a servo motor (4) is provided on the inner side surface of the L-shaped plate (3). The output end of the servo motor (4) is connected to a driving gear (5). The side wall of the driving gear (5) is meshed with a driven gear (6). In the middle of the inner side surface of the driven gear (6), a driving rod is installed, and the driving rod penetrates through the left side wall of the degumming machine body (1). At the bottom of the driving rod, there is a fixing component (15) for fixing the monocrystalline silicon slice. On the front end face of the degumming machine body (1), a sealing door (2) is movably connected. On the bottom wall of the inner cavity of the degumming machine body (1), a U-shaped filter box (16) is installed. On the right outer wall of the degumming machine body (1), a box body (7) is provided, and there is a recovery unit between the box body (7) and the U-shaped filter box (16). At the top end of the inner cavity of the degumming machine body (1), a liquid outlet cover (13) is installed. The bottom of the liquid outlet cover (13) is connected with a plurality of atomizing nozzles (14), and the liquid outlet cover (13) is communicated with the box body (7) through a liquid supply component.

2. The surface degumming machine for single crystal silicon slices according to claim 1, wherein: The fixing component (15) includes two side plates (150). The left side plate (150) is connected to the driving rod in the middle of the inner side surface of the driven gear (6), and the right side plate (150) is rotatably connected to the right inner wall of the degumming machine body (1) through a bearing.

3. The surface degumming machine for single crystal silicon slices according to claim 2, wherein: At the top and bottom of the two side plates (150), connecting rods (151) are installed. Between the adjacent upper and lower connecting rods (151), a screw rod (152) is connected. And two hollow clamping plates (153) are slidably connected to the screw rod (152). On each screw rod (152), two nuts (154) are threadedly connected.

4. A monocrystalline silicon wafer surface degumming machine according to claim 1, characterized in that: On the inner wall of the U-shaped filter box (16), a filter net (17) and a filter cotton (18) are connected in sequence from top to bottom.

5. A monocrystalline silicon wafer surface degumming machine according to claim 1, characterized in that: The liquid supply component includes a water pump (11). The liquid inlet of the water pump (11) is communicated with the box body (7) through a pipeline. The liquid outlet of the water pump (11) is connected with a liquid outlet pipe (12), and the other end of the liquid outlet pipe (12) is communicated with the liquid outlet cover (13).

6. The surface degumming machine for single crystal silicon slices according to claim 1, characterized in that: The recovery unit includes a reflux pump (8). The liquid inlet of the reflux pump (8) is provided with a recovery pipe (9), and the other end of the recovery pipe (9) is communicated with the U-shaped filter box (16). The liquid outlet of the reflux pump (8) is connected with a connecting pipe (10), and the other end of the connecting pipe (10) is communicated with the box body (7).

7. A single-crystal silicon wafer surface degumming machine according to claim 1, characterized in that: On the sealing door (2), a transparent porthole is provided. The bottom of the degumming machine body (1) is connected with an anti-slip bottom plate.

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