Silicon wafer receiving device with deviation rectifying function

Abstract

The utility model discloses a silicon wafer receiving device with a deviation rectifying function, which comprises a rack, a working table arranged on the rack, a first conveying mechanism arranged on the working table, a second conveying mechanism arranged at one end of the first conveying mechanism, a deviation rectifying mechanism arranged on the second conveying mechanism, a flower basket arranged at one end of the deviation rectifying mechanism, and a silicon wafer receiving mechanism arranged on the flower basket. The flower basket is mounted on the flower basket fixing mechanism, the flower basket fixing mechanism is mounted on the lifting mechanism, and the lifting mechanism is mounted on the rack; the deviation rectifying mechanism is arranged, the supporting plate is driven by the air cylinder to move, and the movable plate and the deviation rectifying wheels also move along with the supporting plate, so that the two rows of deviation rectifying wheels are close to each other to extrude a silicon wafer to rectify the silicon wafer, the silicon wafer is located on the center line of the second conveying mechanism, and the position deviation of the silicon wafer on the second conveying mechanism is reduced. The silicon wafers can be smoothly inserted into the flower basket, and the silicon wafers are prevented from deviating in the conveying process, colliding with the flower basket in the material receiving process and being broken or not entering the flower basket.

Description

Technical Field

[0001] The utility model relates to the technical field of silicon wafer production, and particularly relates to a silicon wafer receiving device with a deviation rectification function. Background Art

[0002] In the existing silicon wafer sorter, after the silicon wafers are detected and sorted, they are classified and received into a flower basket for packaging. However, in some subsequent manufacturing processes of the silicon wafers, it is sometimes necessary to insert the silicon wafers into the flower basket. At this time, it is necessary to be transported to the corresponding flower basket through a conveying device and stacked in the corresponding flower basket to realize the collection of the silicon wafers. However, in the process of transporting the silicon wafers by the existing silicon wafer receiving device, the silicon wafers are prone to deviation, so that when the silicon wafers enter the flower basket, they are easy to collide with the flower basket, resulting in the phenomenon that the silicon wafers are broken or cannot enter the flower basket. In view of the above defects, it is necessary to design a silicon wafer receiving device with a deviation rectification function. Summary of the Utility Model

[0003] The purpose of the utility model is to provide a silicon wafer receiving device with a deviation rectification function to solve the problems put forward in the above background art.

[0004] To achieve the above purpose, the utility model provides the following technical solution: A silicon wafer receiving device with a deviation rectification function includes a frame, on which a workbench is installed, on which a first conveying mechanism is installed, at one end of the first conveying mechanism, a second conveying mechanism is arranged, on which a deviation rectification mechanism is arranged, at one end of the deviation rectification mechanism, a flower basket is arranged, the flower basket is installed on a flower basket fixing mechanism, the flower basket fixing mechanism is installed on a lifting mechanism, and the lifting mechanism is installed on the frame.

[0005] Preferably, the first conveying mechanism includes a conveyor belt and a first motor for driving the conveyor belt to move. The conveyor belt is wound around a driving roller and a driven roller. The driving roller is rotatably installed at one end of a bracket, and a transmission belt pulley is installed at the shaft end of the driving roller. The transmission belt pulley is in transmission connection with a driving belt pulley through a transmission belt. The driving belt pulley is installed at the output end of the first motor. The first motor is installed on the bracket through a motor mounting plate. The driven roller is rotatably installed at the other end of the bracket.

[0006] Preferably, the second conveying mechanism includes a plurality of rollers arranged in sequence along the conveying direction and a second motor for driving the rollers to rotate. A rubber strip is wound around the rollers. The plurality of rollers are rotatably installed on a roller bracket. The plurality of rollers are arranged parallel to each other and are all arranged in the horizontal direction. Two first belt pulleys are installed at the shaft end of each roller. A first belt is wound around the first belt pulleys. Adjacent rollers are in transmission connection through the first belt. One of the first belt pulleys is in transmission connection with a second belt pulley through a second belt. The second belt pulley is installed at the output end of the second motor.

[0007] Preferably, two rectifying mechanisms are provided. The two rectifying mechanisms are symmetrically arranged at both ends of the bottom plate. A sensor bracket is installed in the middle of the bottom plate, and a sensor is installed on the sensor bracket. The rectifying mechanism includes rectifying wheels. There are multiple rectifying wheels, and the multiple rectifying wheels are arranged at longitudinal intervals. The rectifying wheels are rotatably installed on the rectifying wheel seats, and the rectifying wheel seats are installed on the moving plate. The moving plate is installed on the supporting plate, and the supporting plate is fixedly connected to the piston rod of the cylinder. The cylinder is installed on the bottom plate.

[0008] Preferably, the flower basket includes an upper substrate and a lower substrate. Four support plates are arranged between the upper substrate and the lower substrate. A plurality of wafer placement racks for carrying wafers are arranged on each of the four support plates. The multiple wafer placement racks are arranged at uniform intervals. A positioning rod is also arranged between the upper substrate and the lower substrate.

[0009] Preferably, the flower basket fixing mechanism includes a flower basket fixing plate. A receiving groove is formed in the middle of the flower basket fixing plate. Two fixing blocks are installed at both ends of the flower basket fixing plate. A limiting rod is slidably arranged in the middle of the fixing block. A limiting block is installed at one end of the limiting rod. A tension spring is sleeved on the limiting block. One end of the tension spring is fixedly connected to the fixing block, and the other end of the tension spring is fixedly connected to the limiting block.

[0010] Preferably, the lifting mechanism includes a lifting plate. A flower basket fixing plate is installed on the lifting plate. Four guide rods are installed at the bottom of the lifting plate. Guide sleeves are sleeved on the guide rods. The guide sleeves are installed on the top plate. The top plate is installed on the frame. The bottom of the guide rod is installed on the connecting plate.

[0011] Preferably, a connecting rod is installed at the bottom of the top plate. The connecting rod is fixedly connected to the mounting plate. A motor mounting bracket is installed at the bottom of the mounting plate. A third motor is installed on the motor mounting bracket. The output end of the third motor is fixedly connected to the lead screw. A lead screw nut is sleeved on the lead screw. The lead screw nut is fixed on the connecting plate.

[0012] Compared with the prior art, the technical solution provided by the present invention has at least the following technical effects or advantages:

[0013] First, the present invention is provided with a rectifying mechanism. The cylinder drives the supporting plate to move, and the moving plate and the rectifying wheels also move accordingly, so that the two rows of rectifying wheels approach and squeeze the wafers to rectify the wafers, ensuring that the wafers are located on the center line of the second conveying mechanism, which is beneficial to reducing the position deviation of the wafers on the second conveying mechanism, enabling the wafers to be smoothly inserted into the flower basket, and preventing the wafers from shifting during the conveying process, resulting in the wafers colliding with the flower basket during the material receiving process, causing the wafers to break or fail to enter the flower basket;

[0014] Second, the present invention is provided with a flower basket fixing mechanism. The lower substrate of the flower basket is fixed by pressing the limiting rod against the lower substrate of the flower basket, preventing the flower basket from tilting and shaking, which is beneficial to improving the stability of the flower basket for supporting the wafers;

[0015] 3. The utility model is provided with a lifting mechanism. The third motor drives the lead screw to rotate, and the rotation of the lead screw drives the lead screw nut to move up and down. The connecting plate, the guide rod and the lifting plate also move up and down accordingly, so as to drive the flower basket to lift. Cooperating with the first conveying mechanism, the second conveying mechanism and the deviation rectifying mechanism, the silicon wafers can be sequentially and orderly arranged and collected in the vertical direction, meeting the needs of processing and use. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] The drawings are used to provide a further understanding of the utility model, and constitute a part of the specification. Together with the embodiments of the utility model, they are used to explain the utility model, and do not constitute a limitation to the utility model. In the drawings:

[0017] Figure 1 is a schematic structural diagram of the utility model;

[0018] Figure 2 is Figure 1 a schematic structural diagram of part A in

[0019] Figure 3 is a schematic structural diagram of the deviation rectifying mechanism in the utility model;

[0020] Figure 4 is Figure 1 a schematic structural diagram of part B in

[0021] In the drawings:

[0022] 1. Frame; 2. Workbench; 3. First conveying mechanism; 31. Conveyor belt; 32. First motor; 33. Driving roller; 34. Driven roller; 35. Bracket; 36. Transmission belt pulley; 37. Transmission belt; 38. Driving belt pulley; 4. Second conveying mechanism; 41. Roller; 42. Second motor; 43. First belt pulley; 44. First belt; 45. Second belt; 46. Second belt pulley; 5. Deviation rectifying mechanism; 51. Deviation rectifying wheel; 52. Deviation rectifying wheel seat; 53. Moving plate; 54. Support plate; 55. Cylinder; 6. Flower basket; 61. Upper substrate; 62. Lower substrate; 63. Support plate; 64. Wafer placing rack; 65. Positioning clamping rod; 7. Flower basket fixing mechanism; 71. Flower basket fixing plate; 72. Accommodating groove; 73. Fixed block; 74. Limiting rod; 75. Limiting block; 76. Tension spring; 8. Lifting mechanism; 81. Lifting plate; 82. Guide rod; 83. Top plate; 84. Connecting plate; 85. Connecting rod; 86. Mounting plate; 87. Third motor; 88. Lead screw; 89. Lead screw nut; 9. Sensor. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0023] Next, the technical solutions in the embodiments of the present invention will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

[0024] Please refer to Figures 1-4 As shown in the figure, the present invention provides a technical solution: a silicon wafer receiving device with a deviation correction function, which includes a frame 1, a workbench 2 is installed on the frame 1, a first conveying mechanism 3 is installed on the workbench 2, a second conveying mechanism 4 is arranged at one end of the first conveying mechanism 3, a deviation correction mechanism 5 is arranged on the second conveying mechanism 4, a basket 6 is arranged at one end of the deviation correction mechanism 5, the basket 6 is installed on a basket fixing mechanism 7, the basket fixing mechanism 7 is installed on a lifting mechanism 8, and the lifting mechanism 8 is installed on the frame 1.

[0025] The first conveying mechanism 3 in this embodiment includes a conveyor belt 31 and a first motor 32 for driving the conveyor belt 31 to move. The conveyor belt 31 is wound around a driving roller 33 and a driven roller 34. The driving roller 33 is rotatably installed at one end of a bracket 35. A transmission belt pulley 36 is installed at the shaft end of the driving roller 33. The transmission belt pulley 36 is in transmission connection with a driving belt pulley 38 through a transmission belt 37. The driving belt pulley 38 is installed at the output end of the first motor 32. The first motor 32 is installed on the bracket 35 through a motor mounting plate. The driven roller 34 is rotatably installed at the other end of the bracket 35.

[0026] The second conveying mechanism 4 in this embodiment includes a plurality of rollers 41 arranged in sequence along the conveying direction and a second motor 42 for driving the rollers 41 to rotate. A rubber strip is wound around the rollers 41. The plurality of rollers 41 are rotatably installed on a roller bracket. The plurality of rollers 41 are arranged parallel to each other and are all arranged in the horizontal direction. Two first belt pulleys 43 are installed at the shaft end of each roller 41. A first belt 44 is wound around the first belt pulleys 43. Adjacent rollers 41 are in transmission connection through the first belt 44. One of the first belt pulleys 43 is in transmission connection with a second belt pulley 46 through a second belt 45. The second belt pulley 46 is installed at the output end of the second motor 42.

[0027] In this embodiment, two rectifying mechanisms 5 are provided. The two rectifying mechanisms 5 are symmetrically arranged at both ends of the bottom plate. A sensor bracket is installed in the middle of the bottom plate, and a sensor 9 is installed on the sensor bracket. The sensor 9 is used to detect whether there is a silicon wafer on the roller 41. The sensor 9 is electrically connected to the controller, and the controller is respectively electrically connected to the first motor 32, the second motor 42, the air cylinder 55, and the third motor 87. The rectifying mechanism 5 includes rectifying wheels 51. A plurality of rectifying wheels 51 are provided, and the plurality of rectifying wheels 51 are arranged at longitudinal intervals. The rectifying wheels 51 are rotatably installed on the rectifying wheel seats 52, and the rectifying wheel seats 52 are installed on the moving plate 53. The moving plate 53 is installed on the supporting plate 54, and the supporting plate 54 is fixedly connected to the piston rod of the air cylinder 55. The air cylinder 55 is installed on the bottom plate. The silicon wafer is rectified by the rectifying mechanism 5, so that the silicon wafer can be smoothly inserted into the flower basket 6, preventing the silicon wafer from shifting during transportation, resulting in the silicon wafer colliding with the flower basket during material collection, causing the silicon wafer to break or fail to enter the flower basket.

[0028] The flower basket 6 in this embodiment includes an upper substrate 61 and a lower substrate 62. Four supporting plates 63 are arranged between the upper substrate 61 and the lower substrate 62. A plurality of wafer placing racks 64 for carrying silicon wafers are arranged on the four supporting plates 63. The plurality of wafer placing racks 64 are arranged at uniform intervals. A positioning clamping rod 65 is also arranged between the upper substrate 61 and the lower substrate 62.

[0029] The flower basket fixing mechanism 7 in this embodiment includes a flower basket fixing plate 71. A receiving groove 72 is formed in the middle of the flower basket fixing plate 71. Two fixing blocks 73 are installed at both ends of the flower basket fixing plate 71. A limiting rod 74 is slidably arranged in the middle of the fixing block 73. A limiting block 75 is installed at one end of the limiting rod 74. A tension spring 76 is sleeved on the limiting block 75. One end of the tension spring 76 is fixedly connected to the fixing block 73, and the other end of the tension spring 76 is fixedly connected to the limiting block 75. The flower basket is fixed by the flower basket fixing mechanism 7 to prevent the flower basket 6 from tilting and shaking.

[0030] The lifting mechanism 8 in this embodiment includes a lifting plate 81. A flower basket fixing plate 71 is installed on the lifting plate 81. Four guide rods 82 are installed at the bottom of the lifting plate 81. Guide sleeves are sleeved on the guide rods 82. The guide sleeves are installed on the top plate 83. The top plate 83 is installed on the frame 1. The bottom of the guide rod 82 is installed on the connecting plate 84. A connecting rod 85 is installed at the bottom of the top plate 83. The connecting rod 85 is fixedly connected to the mounting plate 86. A motor mounting bracket is installed at the bottom of the mounting plate 86. A third motor 87 is installed on the motor mounting bracket. The output end of the third motor 87 is fixedly connected to the lead screw 88. A lead screw nut 89 is sleeved on the lead screw 88. The lead screw nut 89 is fixed on the connecting plate 84. The flower basket 6 is driven to lift by the lifting mechanism 8, facilitating the silicon wafers to be sequentially and orderly arranged for material collection in the vertical direction.

[0031] Working principle of the utility model: Pull the limit block 75, drive the limit rod 74 to move and the tension spring 76 is stretched, so that the limit rod 74 moves away from the receiving groove 72. Place the lower substrate 62 of the flower basket 6 in the receiving groove 72 of the flower basket fixing plate 71. Release the limit block 75, and drive the limit rod 74 to move under the action of the tension spring 76, so that the limit rod 74 moves above the lower substrate 62. The limit rod 74 presses against the lower substrate 62 of the flower basket 6 to fix the lower substrate 62, preventing the flower basket 6 from tilting and shaking. Place the silicon wafer on the conveyor belt 31. The first motor 32 works to drive the driving pulley 38 to rotate. Under the action of the transmission belt 37, drive the driven pulley 36 and the driving roller 33 to rotate, thereby driving the conveyor belt 31 and the silicon wafer to move, and convey the silicon wafer to the roller 41 of the second conveying mechanism 4. The second motor 42 works to drive the second belt pulley 46 to rotate. Under the transmission action of the second belt 45, drive the first belt pulley 43 and the roller 41 to rotate, thereby driving the silicon wafer on the roller 41 to move. When the sensor 9 detects the silicon wafer, the sensor 9 sends the detected signal to the controller. The controller controls the two cylinders 55 to work. The cylinders 55 drive the tray 54 to move, and the moving plate 53 and the deviation correction wheels 51 also move accordingly, so that the two rows of deviation correction wheels 51 approach each other and squeeze the silicon wafer to correct the deviation of the silicon wafer, so as to ensure that the silicon wafer is located on the center line of the second conveying mechanism 4, which is beneficial to reducing the position deviation of the silicon wafer on the second conveying mechanism 4, enabling the silicon wafer to be smoothly inserted into the flower basket 6, and preventing the silicon wafer from deviating during the conveying process, resulting in the silicon wafer colliding with the flower basket during the material receiving process, causing the silicon wafer to be broken or unable to enter the flower basket. The roller 41 conveys the deviation-corrected silicon wafer to the wafer placing rack 64 of the flower basket 6.

[0032] The utility model is provided with a lifting mechanism 8. The third motor 87 drives the lead screw 88 to rotate. The rotation of the lead screw 88 drives the lead screw nut 89 to move up and down. The connecting plate 84, the guide rod 82 and the lifting plate 81 also move up and down accordingly, thereby driving the flower basket 6 to lift. Cooperating with the first conveying mechanism 3, the second conveying mechanism 4 and the deviation correction mechanism 5, the silicon wafers can be arranged and collected in sequence along the vertical direction, meeting the needs of processing and use.

[0033] Although the embodiments of the utility model have been shown and described, for those of ordinary skill in the art, it can be understood that various changes, modifications, substitutions and variations can be made to these embodiments without departing from the principle and spirit of the utility model. The scope of the utility model is defined by the appended claims and their equivalents.

Claims

1. A silicon wafer receiving device with a deviation correction function, characterized in that: It includes a frame (1), on which a workbench (2) is installed. On the workbench (2), a first conveying mechanism (3) is installed. At one end of the first conveying mechanism (3), a second conveying mechanism (4) is provided. On the second conveying mechanism (4), a deviation rectifying mechanism (5) is provided. At one end of the deviation rectifying mechanism (5), a basket (6) is provided. The basket (6) is installed on a basket fixing mechanism (7), and the basket fixing mechanism (7) is installed on a lifting mechanism (8), and the lifting mechanism (8) is installed on the frame (1).

2. The silicon wafer receiving device with a deviation correction function according to claim 1, wherein: The first conveying mechanism (3) includes a conveyor belt (31) and a first motor (32) for driving the conveyor belt (31) to move. The conveyor belt (31) is wound around a driving roller (33) and a driven roller (34). The driving roller (33) is rotatably installed at one end of a bracket (35). A transmission belt pulley (36) is installed at the shaft end of the driving roller (33). The transmission belt pulley (36) is in transmission connection with a driving belt pulley (38) through a transmission belt (37). The driving belt pulley (38) is installed at the output end of the first motor (32). The first motor (32) is installed on the bracket (35) through a motor mounting plate. The driven roller (34) is rotatably installed at the other end of the bracket (35).

3. The silicon wafer receiving device with a deviation rectification function according to claim 1, characterized in that: The second conveying mechanism (4) includes a plurality of rollers (41) arranged in sequence along the conveying direction and a second motor (42) for driving the rollers (41) to rotate. A rubber strip is wound around the rollers (41). The plurality of rollers (41) are rotatably installed on a roller bracket. The plurality of rollers (41) are arranged in parallel with each other and are all arranged in the horizontal direction. Two first belt pulleys (43) are installed at the shaft end of each roller (41). A first belt (44) is wound around the first belt pulleys (43). Adjacent rollers (41) are in transmission connection through the first belt (44). One of the first belt pulleys (43) is in transmission connection with a second belt pulley (46) through a second belt (45). The second belt pulley (46) is installed at the output end of the second motor (42).

4. A silicon wafer receiving device with a deviation correction function according to claim 1, characterized in that: There are two deviation rectifying mechanisms (5), and the two deviation rectifying mechanisms (5) are symmetrically arranged at both ends of the bottom plate. A sensor bracket is installed in the middle of the bottom plate, and a sensor (9) is installed on the sensor bracket. The deviation rectifying mechanism (5) includes deviation rectifying wheels (51). There are a plurality of deviation rectifying wheels (51), and the plurality of deviation rectifying wheels (51) are arranged at longitudinal intervals. The deviation rectifying wheels (51) are rotatably installed on a deviation rectifying wheel seat (52). The deviation rectifying wheel seat (52) is installed on a moving plate (53). The moving plate (53) is installed on a support plate (54). The support plate (54) is fixedly connected to the piston rod of a cylinder (55), and the cylinder (55) is installed on the bottom plate.

5. A silicon wafer receiving device with a deviation correction function according to claim 1, characterized in that: The basket (6) includes an upper substrate (61) and a lower substrate (62). Between the upper substrate (61) and the lower substrate (62), four support plates (63) are provided. On the four support plates (63), a plurality of wafer placing racks (64) for carrying silicon wafers are provided. The plurality of wafer placing racks (64) are arranged at uniform intervals. A positioning clamping rod (65) is also provided between the upper substrate (61) and the lower substrate (62).

6. The silicon wafer receiving device with a deviation correction function according to claim 1, characterized in that: The basket fixing mechanism (7) includes a basket fixing plate (71). A receiving groove (72) is formed in the middle of the basket fixing plate (71). Two fixing blocks (73) are installed at both ends of the basket fixing plate (71). A limiting rod (74) is slidably arranged in the middle of the fixing block (73). A limiting block (75) is installed at one end of the limiting rod (74). A tension spring (76) is sleeved on the limiting block (75). One end of the tension spring (76) is fixedly connected to the fixing block (73), and the other end of the tension spring (76) is fixedly connected to the limiting block (75).

7. A silicon wafer receiving device with a deviation correction function according to claim 1, characterized in that: The lifting mechanism (8) includes a lifting plate (81). A basket fixing plate (71) is installed on the lifting plate (81). Four guide rods (82) are installed at the bottom of the lifting plate (81). Guide sleeves are sleeved on the guide rods (82), and the guide sleeves are installed on the top plate (83). The top plate (83) is installed on the frame (1), and the bottom of the guide rod (82) is installed on the connecting plate (84).

8. A silicon wafer receiving device with a deviation correction function according to claim 7, characterized in that: A connecting rod (85) is installed at the bottom of the top plate (83). The connecting rod (85) is fixedly connected to the mounting plate (86). A motor mounting bracket is installed at the bottom of the mounting plate (86). A third motor (87) is installed on the motor mounting bracket. The output end of the third motor (87) is fixedly connected to the lead screw (88). A lead screw nut (89) is sleeved on the lead screw (88), and the lead screw nut (89) is fixed on the connecting plate (84).

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