Mask with protective film structure

Abstract

The utility model provides a mask plate with a protective film structure, which comprises a mask substrate, a mask pattern layer and the protective film structure, the surface of the mask substrate is provided with an annular groove, and the mask pattern layer is positioned on one side, provided with the groove, of the mask substrate; the protective film structure comprises an annular frame and a protective film, the top of the frame is connected with the protective film, the bottom of the frame is embedded into the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds the protective mask pattern layer. According to the utility model, the mask plate can be prevented from being polluted by using an organic adhesive, the protective film structure is convenient to disassemble, and the condition that the mask plate is damaged due to cleaning of residual adhesive in the disassembly process is avoided.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a mask plate with a protective film structure. Background Art

[0002] In order to prevent the pattern area of the mask plate from being contaminated by particles in the environment during use and storage, thereby affecting the quality of the mask plate, a protective film structure is installed on the surface of the mask substrate to block the influence of the external environment on the pattern area of the mask plate. The protective film structure includes an annular frame on the surface of the mask substrate and a protective film on the upper surface of the frame. With the protection of the protective film, particles can only fall on one side of the mask substrate or on the protective film, and thus will not be imaged on the wafer.

[0003] Currently, the installation method of the protective film structure is usually to bond the frame to the surface of the mask substrate through an organic adhesive. This bonding method has the following disadvantages: the organic adhesive is prone to embrittlement and generate some particles after being exposed, which will enter the inner side of the protective film or adhere to the mask pattern, affecting the quality and service life of the mask plate; and during the use of the mask plate, regular maintenance and cleaning are required. Therefore, the protective film structure needs to be removed. When removing the protective film structure, residual glue will remain on the mask substrate, and it is very likely to damage or contaminate the mask plate during the process of removing the residual glue. Summary of the Utility Model

[0004] The purpose of the utility model is to provide a mask plate with a protective film structure, which can avoid polluting the mask plate by using an organic adhesive, and the protective film structure is easy to disassemble, and there will be no situation of damaging the mask plate due to cleaning the residual glue during the disassembly process.

[0005] In order to achieve the above purpose, the utility model provides a mask plate with a protective film structure, including:

[0006] A mask substrate, on the surface of which a ring-shaped groove is provided;

[0007] A mask pattern layer, located on one side of the mask substrate where the groove is provided;

[0008] A protective film structure, including an annular frame and a protective film, the top of the frame is connected to the protective film, the bottom of the frame is embedded in the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds and protects the mask pattern layer.

[0009] Optionally, the groove has a shape with a narrower upper part and a wider lower part.

[0010] Optionally, the frame includes a connected first part and a second part, the first part is embedded in the groove, and the second part is connected to the protective film.

[0011] Optionally, the first part is an inflation and deflation structure, and the inflated first part fits into the groove.

[0012] Optionally, the top of the first part embedded in the groove is higher than the top of the groove, and an inflation and deflation port is provided on the first part higher than the top of the groove.

[0013] Optionally, the groove has a top-wide and bottom-narrow shape.

[0014] Optionally, the bottom of the frame has a top-wide and bottom-narrow shape, and the bottom of the frame is embedded in the groove to fit with the groove.

[0015] Optionally, the side wall of the groove is vertical.

[0016] Optionally, the side wall of the bottom of the frame is vertical, and the bottom of the frame is embedded in the groove to fit with the groove.

[0017] Optionally, a pin structure is provided at the edge of the mask substrate, a horizontal through hole is provided at the bottom of the frame, and the pin structure extends horizontally from the edge of the mask substrate through the through hole to fix the frame.

[0018] In the present utility model, a mask plate with a protective film structure is provided, including: a mask substrate, a mask pattern layer, and a protective film structure. A ring-shaped groove is provided on the surface of the mask substrate, and the mask pattern layer is located on one side of the mask substrate where the groove is provided; the protective film structure includes a ring-shaped frame and a protective film. The top of the frame is connected to the protective film, the bottom of the frame is embedded in the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds and protects the mask pattern layer. By providing a ring-shaped groove on the surface of the mask substrate in the present utility model, the bottom of the ring-shaped frame can be embedded in the groove to connect the mask substrate and the protective film structure, avoiding contamination of the mask plate when using an organic adhesive to bond the frame and the mask substrate, and the protective film structure is convenient for disassembly, and there will be no situation of damaging the mask plate due to cleaning residual glue during the disassembly process. Description of the Drawings

[0019] Figure 1 It is a schematic structural diagram of a mask plate with a protective film structure provided by Embodiment 1 of the present utility model;

[0020] Figure 2 It is a top view of the mask substrate in the mask plate with a protective film structure provided by Embodiment 1 of the present utility model;

[0021] Figure 3 It is a top view of the protective film structure in the mask plate with a protective film structure provided by Embodiment 1 of the present utility model;

[0022] Figure 4Schematic diagram of the mask with a protective film structure provided in the second embodiment of the present utility model;

[0023] Figure 5 Schematic diagram of the mask with a protective film structure provided in the third embodiment of the present utility model.

[0024] Among them, the reference numerals are as follows:

[0025] 10 - mask substrate; 12 - groove; 20 - mask pattern layer; 30 - protective film structure; 31 - frame; 31a - first part; 31b - second part; 32 - protective film; 40 - pin structure. Detailed implementation manners

[0026] To make the objectives, technical solutions, and advantages of the embodiments of the present application clearer, the technical solutions in the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. Components of the embodiments of the present application usually described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0027] Therefore, the following detailed description of the embodiments of the present application provided in the accompanying drawings is not intended to limit the scope of the present application claimed, but merely represents selected embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present application without creative efforts fall within the scope of protection of the present application.

[0028] In the description of the present application, it should be understood that the orientation or positional relationships indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. are based on the orientation or positional relationships shown in the accompanying drawings, or the orientation or positional relationships when the product of this application is in its usual placement, or the orientation or positional relationships commonly understood by those skilled in the art. It is only for the convenience of describing the present application and simplifying the description, and does not indicate or imply that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and thus should not be construed as limiting the present application.

[0029] In addition, relational terms such as "first" and "second" are only used to distinguish one entity or operation from another entity or operation, and do not necessarily require or imply any actual relationship or order between these entities or operations. Moreover, the terms "comprising", "including" or any other variant thereof are intended to cover non-exclusive inclusion, such that a process, method, article or device comprising a series of elements not only includes those elements but also includes other elements not expressly listed, or elements inherent to such article or device. Without further limitation, an element defined by the statement "comprising a..." does not exclude the presence of additional identical elements in the article or device comprising said element. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood in specific circumstances.

[0030] The present utility model provides a mask plate with a protective film structure, comprising: a mask substrate, a mask pattern layer and a protective film structure. A ring-shaped groove is provided on the surface of the mask substrate, and the mask pattern layer is located on one side of the mask substrate where the groove is provided; the protective film structure includes a ring-shaped frame and a protective film. The top of the frame is connected to the protective film, and the bottom of the frame is embedded in the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds and protects the mask pattern layer. By providing a ring-shaped groove on the surface of the mask substrate in the present utility model, the bottom of the ring-shaped frame can be embedded in the groove to connect the mask substrate and the protective film structure, avoiding contamination of the mask plate when using an organic adhesive to bond the frame and the mask substrate, and the protective film structure is convenient to disassemble, and there will be no situation of damaging the mask plate due to cleaning residual glue during the disassembly process.

[0031] Embodiment 1

[0032] Figure 1 is a schematic structural diagram of the mask plate with a protective film structure provided in this embodiment; Figure 2 is a top view of the mask substrate in the mask plate with a protective film structure provided in this embodiment; Figure 3 is a top view of the protective film structure in the mask plate with a protective film structure provided in this embodiment. Please refer to Figures 1 to 3 , this embodiment provides a mask plate with a protective film structure, comprising: a mask substrate 10, a mask pattern layer 20 and a protective film structure 30. A ring-shaped groove 12 is provided on the surface of the mask substrate 10 (as Figure 2As shown in the figure, the mask pattern layer 20 is located on one side of the mask substrate 10 where the groove 12 is formed (the mask pattern layer 20 is located within the pattern area of the mask substrate 10, and the shape of the mask pattern layer 20 in the figure is only an example). In this embodiment, the annular groove 12 surrounds the mask pattern layer 20. The groove 12 is formed at the edge of the mask substrate 10. The shape of the mask substrate 10 can be rectangular, and the groove 12 can be in the shape of a rectangular ring, not limited to the above shapes. In this embodiment, the groove 12 has a top-narrow and bottom-wide morphology. Specifically, the top width of the groove 12 is smaller than the bottom width of the groove 12 (the width is the horizontal dimension in the figure). The upper part of the side wall of the groove 12 slopes from the top of the groove 12 to the bottom of the groove 12 and the width increases, and the lower part of the side wall of the groove 12 is vertical and flush with the bottom of the groove 12. The setting of the groove 12 in this embodiment can enable the protective film structure 30 to be fixedly connected to the mask substrate 10. In other embodiments, the side wall of the groove 12 can be arc-shaped, and the side wall of the groove 12 can also have an irregular morphology, such as zigzag, corrugated, etc., not limited to the above morphologies.

[0033] The protective film structure 30 includes an annular frame 31 and a protective film 32 (such as Figure 3 shown in the figure). The top of the frame 31 is connected to the protective film 32 to support the protective film 32. The bottom of the frame 31 is embedded in the groove 12 to connect the mask substrate 10 and the protective film structure 30, and the protective film structure 30 surrounds and protects the mask pattern layer 20 to prevent particulate matter from contaminating the mask pattern layer 20. In this embodiment, the frame 31 includes a connected first part 31a and a second part 31b. The first part 31a is embedded in the groove 12, and the second part 31b is connected to the protective film 32 to support the protective film 32. The materials of the first part 31a and the second part 31b can be different. The first part 31a mainly plays a supporting role, and the material of the first part 31a can be a plastic material or a metal material. Since the groove 12 has a top-narrow and bottom-wide morphology, in order to ensure that the first part 31a will not fall off after being embedded in the groove 12, in this embodiment, the first part 31a is set as an air charging and discharging structure. Specifically, the material of the first part 31a can be an elastic material. The first part 31a can be an airbag. The material of the airbag is relatively hard to support the second part 31b and the protective film 32. The interior of the second part 31b and the interior of the first part 31a may not be connected. The interior of the second part 31b can be a hollow structure or a solid structure. In this embodiment, the top of the first part 31a embedded in the groove 12 is higher than the top of the groove 12 (slightly higher than the top of the groove 12, for example, it can be 1 cm to 2 cm higher than the top of the groove 12). An air charging and discharging port is provided on the first part 31a higher than the top of the groove 12 (such as Figure 1 the black square shown in the oval frame). The first part 31a is inflated through the air charging and discharging port so that the first part 31a expands. The inflated (expanded) first part 31a supports the second part 31b and the protective film 32 and fits with the groove 12.

[0034] In this embodiment, an annular groove 12 is formed on the surface of the mask substrate 10, and the groove 12 has a shape with a narrower upper part and a wider lower part; the uninflated first part 31a is placed in the groove 12, and the size of the uninflated first part 31a is smaller than the top size of the groove 12. The first part 31a is inflated through the air inlet / outlet to make it expand. The expanded first part 31a supports the second part 31b and the protective film 32, fills the groove 12 and fits with the groove 12, so as to realize the fixed connection between the protective film structure 20 and the mask substrate 10, and avoid contaminating the mask when using an organic adhesive to bond the frame and the mask substrate; when the protective film structure 30 needs to be disassembled, the air in the first part 31a is released by opening the air inlet / outlet, and then the first part 31a can be taken out from the groove 12, so as to realize the disassembly of the protective film structure 20. The disassembly is simple, and there will be no situation of damaging the mask when cleaning the residual glue during the disassembly process.

[0035] Embodiment 2

[0036] Figure 4 is a schematic structural diagram of a mask with a protective film structure provided in this embodiment. Please refer to Figure 4 , the difference between this embodiment and Embodiment 1 is that: the groove 12 has a shape with a wider upper part and a narrower lower part. Specifically, the top width of the groove 12 is greater than the bottom width of the groove 12. The upper part of the side wall of the groove 12 is vertical, and the lower part of the side wall of the groove 12 inclines from the upper part of the side wall of the groove 12 to the bottom of the groove 12 and the width decreases, and the bottom of the groove 12 is flush. The bottom of the frame 31 has a shape with a wider upper part and a narrower lower part (as shown by the dashed frame in Figure 4 ), and the part of the frame 31 embedded in the groove 12 is the bottom of the frame 31. The bottom size of the frame 31 is slightly smaller than the size of the groove 12, so that the bottom of the frame 31 just fits into the groove 12 to fit with the groove 12.

[0037] In this embodiment, a plug structure 40 is provided at the edge of the mask substrate 10, and a horizontal through hole is provided at the bottom of the frame 31. The plug structure 40 extends horizontally from the edge of the mask substrate 10 through the through hole to fix the frame 31 (the horizontal direction is the horizontal direction in Figure 4 ), so that the protective film structure 30 and the mask substrate 10 are fixedly connected. In other embodiments, the plug structure 40 may not be provided, and an organic adhesive may be added to the groove 12. Since the organic adhesive is placed in the groove 12 and not on the surface of the mask substrate 10, it can avoid contaminating the mask, and the residual glue can be removed by heating.

[0038] In this embodiment, an annular groove 12 is formed on the surface of the mask substrate 10, and the groove 12 has a top-wide and bottom-narrow morphology. The bottom of the frame 31 is embedded in the groove 12, and then the pin structure 40 is inserted. The pin structure 40 extends horizontally from the edge of the mask substrate 10 through the perforation to fix the frame 31, so that the protective film structure 30 and the mask substrate 10 are fixedly connected, avoiding contamination of the mask when using an organic adhesive to bond the frame and the mask substrate. When the protective film structure 30 needs to be disassembled, the pin structure 40 is taken out and the frame 31 is taken out from the groove 12, so as to realize the disassembly of the protective film structure 20. The disassembly is simple, and the mask will not be damaged due to cleaning the residual glue during the disassembly process.

[0039] Embodiment III

[0040] Figure 5 is a schematic structural diagram of a mask with a protective film structure provided in this embodiment. Please refer to Figure 5 , the difference between this embodiment and the second embodiment is that: the side wall of the groove 12 is vertical, and the bottom of the groove 12 is flush. The side wall of the bottom of the frame 31 is vertical (as shown by the dashed box in Figure 5 , the part of the frame 31 embedded in the groove 12 is the bottom of the frame 31), and the size of the bottom of the frame 31 is slightly smaller than the size of the groove 12, so that the bottom of the frame 31 just fits into the groove 12 to fit with the groove 12.

[0041] In this embodiment, similarly, a pin structure 40 is provided at the edge of the mask substrate 10, and a horizontal perforation is provided at the bottom of the frame 31. The pin structure 40 extends horizontally from the edge of the mask substrate 10 through the perforation to fix the frame 31, so that the protective film structure 30 and the mask substrate 10 are fixedly connected. In other embodiments, the pin structure 40 may not be provided, and an organic adhesive may be added to the groove 12. Since the organic adhesive is placed in the groove 12 and not on the surface of the mask substrate 10, it can avoid contamination of the mask, and the residual glue can be removed by heating.

[0042] In summary, a mask with a protective film structure is provided in the present invention, including: a mask substrate, a mask pattern layer and a protective film structure, wherein an annular groove is formed on the surface of the mask substrate, and the mask pattern layer is located on one side of the mask substrate where the groove is formed; the protective film structure includes an annular frame and a protective film, the top of the frame is connected to the protective film, the bottom of the frame is embedded in the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds and protects the mask pattern layer. By forming an annular groove on the surface of the mask substrate in the present invention, the bottom of the annular frame can be embedded in the groove to connect the mask substrate and the protective film structure, avoiding contamination of the mask when using an organic adhesive to bond the frame and the mask substrate, and the protective film structure is easy to disassemble, and the mask will not be damaged due to cleaning the residual glue during the disassembly process.

[0043] The above are only the preferred embodiments of the present utility model and do not impose any restrictive effect on the present utility model. Any person skilled in the relevant art, within the scope of the technical solution of the present utility model, making any form of equivalent substitution or modification and other changes to the technical solution and technical content disclosed by the present utility model, shall fall within the content of the technical solution of the present utility model and still be within the protection scope of the present utility model.

Claims

1. A photomask having a protective film structure, characterized in that, Comprising: A mask substrate, on the surface of which a ring-shaped groove is provided; A mask pattern layer, located on the side of the mask substrate where the groove is provided; A protective film structure, comprising a ring-shaped frame and a protective film, the top of the frame is connected to the protective film, the bottom of the frame is embedded in the groove to connect the mask substrate and the protective film structure, and the protective film structure surrounds and protects the mask pattern layer.

2. The reticle with a protective film structure according to claim 1, wherein The groove has a top-narrow and bottom-wide morphology.

3. The reticle with a protective film structure according to claim 2, characterized in that The frame comprises a connected first part and a second part, the first part is embedded in the groove, and the second part is connected to the protective film.

4. The reticle with a protective film structure according to claim 3, wherein The first part is an air charging and discharging structure, and the first part filled with air is fitted with the groove.

5. The reticle with a protective film structure according to claim 4, wherein, The top of the first part embedded in the groove is higher than the top of the groove, and an air charging and discharging port is provided on the first part higher than the top of the groove.

6. The reticle with a protective film structure according to claim 1, wherein The groove has a top-wide and bottom-narrow morphology.

7. The reticle with a protective film structure according to claim 6, wherein, The bottom of the frame has a top-wide and bottom-narrow morphology, and the bottom of the frame is embedded in the groove to be fitted with the groove.

8. The reticle with a protective film structure according to claim 1, characterized in that, The side wall of the groove is perpendicular.

9. The reticle with a protective film structure according to claim 8, wherein, The side wall of the bottom of the frame is perpendicular, and the bottom of the frame is embedded in the groove to be fitted with the groove.

10. The reticle with a protective film structure according to claim 7 or 9, characterized in that, A pin structure is provided at the edge of the mask substrate, a horizontal through hole is provided at the bottom of the frame, and the pin structure extends horizontally from the edge of the mask substrate through the through hole to fix the frame.

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