Target material back plate with uniformly distributed cooling water channels
By designing a target backplate with uniform cooling waterway distribution and using a rectangular runner and an opposite-direction runner layout, the problems of large temperature differences and high energy consumption of the target backplate are solved, more efficient heat dissipation and energy consumption are achieved, and the role of the magnetic field is enhanced.
Patent Information
- Application Number
- CN202422227480.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-11
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-11
AI Technical Summary
The existing target backplane has a simple structure, resulting in large differences in temperature in the surface area, and it is difficult to achieve the same sputtering rate under high power conditions. In the prior art, the cooling waterway design is complex and the energy consumption is high.
A target back plate with uniform cooling water channels is designed, a rectangular flow channel and a flow channel layout in the opposite direction is designed, and a sealing ring is set between the back plate main body and the sealing plate. Water inlet and water outlet holes are provided in the runner to achieve stable flow of coolant.
It effectively reduces the surface temperature difference of the target backplane, reduces energy consumption, and achieves the same sputtering rate under smaller power conditions, enhancing the magnetic field action capability.
Smart Images
Figure CN223087891U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of target backplates, and specifically relates to a target backplate with a uniform cooling water channel distribution. Background Art
[0002] A target is a special electronic material with high added value, mainly used in industries such as microelectronics, displays, memories, and optical coatings; sputtering coating is a process in which ions generated by an ion source bombard the surface of the target, causing target atoms to leave the target and be sputtered out, and then deposited on the surface of the substrate; sputtering coating has the following significant advantages: the bonding force of the film layer is strong, the film thickness stability is good, and the film thickness does not change. The stability of the film thickness can be attributed to the good controllability and repeatability of the film thickness; currently, when performing target sputtering coating, a high-speed ion beam bombards the surface of the target, generating a large amount of heat on the target, thereby increasing the temperature of the target and affecting the coating quality; in the prior art, the structure of the target backplate is simple, and there is a large temperature difference in the surface area; on the other hand, in the prior art, the pipelines in the target backplate are all laterally embedded round pipes, which not only have a complex process, but also require a large power when achieving the same sputtering rate; therefore, there is an urgent need for a target backplate with a uniform cooling water channel distribution to solve the current problems. Content of the Utility Model
[0003] To solve the above problems, the utility model proposes a target backplate with a uniform cooling water channel distribution, effectively solving the problems of large temperature differences in the surface area of the target backplate in the prior art and the need for high power to achieve the same sputtering rate; not only effectively ensuring the heat dissipation function of the target backplate, but also greatly reducing energy consumption.
[0004] To achieve the above object, the utility model proposes the following technical solution; a target backplate with a uniform cooling water channel distribution, including a backplate main body, a plurality of flow channels are arranged on the backplate main body, the directions between adjacent flow channels are opposite, and the flow channels are available for the coolant to flow; the cross-section of the flow channels is rectangular; a sealing plate is arranged on the backplate main body and is matched with it, and the backplate main body and the sealing plate seal the flow channels therein; a target is arranged on the other side of the sealing plate.
[0005] Further: the flow channels are all U-shaped, and through holes are arranged at the U-shaped ports on the backplate main body.
[0006] Further: the through holes include water inlet holes and water outlet holes.
[0007] Further: a sealing ring is arranged between the backplate main body and the sealing plate.
[0008] Compared with the prior art, the beneficial effects of the utility model are:
[0009] The utility model is ingeniously conceived and has comprehensive functions. The opposite directions between adjacent flow channels and the settings of the water inlet holes and water outlet holes effectively solve the problem of large temperature differences occurring during the cooling of the target backplane in the prior art. The rectangular shape of the flow channels greatly increases the surface contact between the flow channels and the backplane body and the sealing plate, thereby achieving the same cooling effect even when the thickness of the backplane is reduced. The thinner backplane means enhanced magnetic field action ability, and the same sputtering rate can be achieved under lower power conditions. Description of the Drawings
[0010] Figure 1 It is a perspective view of the utility model.
[0011] Figure 2 It is a bottom perspective view of the utility model.
[0012] Figure 3 It is an internal perspective view of the utility model.
[0013] Figure 4 It is a partially enlarged view of the utility model.
[0014] Figure 5 It is an internal top view of the utility model.
[0015] In the figure: 1. Backplane body, 2. Sealing plate, 5. Flow channel. Detailed Description of the Embodiments
[0016] First Embodiment:
[0017] A target backplane with a uniform distribution of cooling water channels includes a backplane body 1, and a plurality of flow channels 5 are arranged on the backplane body 1. The directions between adjacent flow channels 5 are opposite, and the flow channels 5 are for the coolant to flow through; a sealing plate 2 is arranged on the backplane body 1 in cooperation with it, and the backplane body 1 and the sealing plate 2 seal the flow channels 5 therein; a target is arranged on the other side of the sealing plate 2; the flow channels 5 are all U-shaped, and through holes are arranged at the U-shaped ports on the backplane body 1; the through holes include water inlet holes and water outlet holes; a sealing ring is arranged between the backplane body 1 and the sealing plate 2.
[0018] As Figure 1 、 2 、3 and 5 show: When the utility model works, the cooling water enters the flow channels 5 through the water inlet holes, and the sealing of the backplane body 1 and the sealing plate 2 ensures the stability of the unidirectional flow of the flow channels 5. The cooling water is discharged from the water outlet holes after passing through the U-shaped flow channels 5; the alternately reverse setting between adjacent flow channels 5 effectively solves the problem of large temperature differences occurring during the cooling of the target backplane in the prior art.
[0019] Second Embodiment:
[0020] A target backplane with a uniform distribution of cooling channels, comprising a backplane main body 1, on which a plurality of flow channels 5 are arranged, and the flow channels 5 are available for the coolant to flow through; the cross-section of the flow channels 5 is rectangular; a sealing plate 2 is arranged on the backplane main body 1 and is matched with the backplane main body 1, and the backplane main body 1 and the sealing plate 2 seal the flow channels 5 therein; a target is arranged on the other side of the sealing plate 2; the flow channels 5 are all U-shaped, and through holes are arranged on the backplane main body 1 at the U-shaped ports; the through holes include water inlet holes and water outlet holes; a sealing ring is arranged between the backplane main body 1 and the sealing plate 2.
[0021] As Figure 1 , 2 , 3 and 4 show: When the present utility model works, the cooling water enters the flow channels 5 through the water inlet holes, and the sealing of the backplane main body 1 and the sealing plate 2 ensures the stability of the one-way flow of the flow channels 5. The cooling water is discharged from the water outlet holes after passing through the U-shaped flow channels 5; the flow channels 5 with a rectangular cross-section greatly increase the surface contact between the flow channels 5 and the backplane main body 1 and the sealing plate 2, so as to achieve the same cooling effect while reducing the thickness of the backplane; the thinning of the backplane means the enhancement of the magnetic field action ability; the same sputtering rate can be achieved under smaller power conditions; and the energy consumption is also greatly reduced.
[0022] The working process of the present utility model is as follows:
[0023] As Figure 1 , 2 , 3, 4 and 5 show: When the present utility model works, the cooling water enters the flow channels 5 through the water inlet holes, and the sealing of the backplane main body 1 and the sealing plate 2 ensures the stability of the one-way flow of the flow channels 5. The cooling water is discharged from the water outlet holes after passing through the U-shaped flow channels 5; the flow channels 5 with a rectangular cross-section greatly increase the surface contact between the flow channels 5 and the backplane main body 1 and the sealing plate 2, so as to achieve the same cooling effect while reducing the thickness of the backplane; the thinning of the backplane means the enhancement of the magnetic field action ability; the same sputtering rate can be achieved under smaller power conditions; the alternating reverse arrangement between adjacent flow channels 5 effectively solves the problem of large temperature difference during the cooling of the target backplane in the prior art; it not only effectively ensures the heat dissipation function of the target backplane, but also greatly reduces the energy consumption.
Claims
1. A target backplane with uniform distribution of cooling water channels, characterized in that: It includes a backplane main body (1), on which a plurality of flow channels (5) are provided. The directions between adjacent flow channels (5) are opposite, and the flow channels (5) are available for coolant to flow through; the cross-section of the flow channels (5) is rectangular; a sealing plate (2) is provided on the backplane main body (1) and is matched with it. The backplane main body (1) and the sealing plate (2) seal the flow channels (5) therein; a target is provided on the other side of the sealing plate (2).
2. The target backplane with uniform cooling water channel distribution according to claim 1, wherein: The flow channels (5) are all U-shaped, and through holes are provided at the U-shaped ports on the backplane main body (1).
3. The target backplane with uniform cooling water channel distribution according to claim 2, wherein: The through holes include a water inlet hole and a water outlet hole.
4. The target backplane with uniform cooling water channel distribution according to claim 1, wherein: A sealing ring is provided between the backplane main body (1) and the sealing plate (2).