Carrier

Abstract

The utility model provides a carrier, and relates to the technical field of bearing devices. The carrier comprises a bottom plate, a fixing part, a plurality of carrier plates and a plurality of assembly parts, the fixing part is arranged on the bottom plate, each carrier plate is used for bearing a substrate, each carrier plate is movably connected with the fixing part, each assembly part is movably connected with the fixing part, and the assembly parts are movably connected with the fixing part. At least one assembly part is arranged between every two adjacent carrier plates, the assembly parts are used for supporting the carrier plates, the bottom plate abuts against one carrier plate or one assembly part, and the carrier can conveniently adjust the distance between the substrates borne on the different carrier plates.

Description

Technical Field

[0001] This application relates to the technical field of carrying devices, and more particularly, to a vehicle. Background Art

[0002] During the process of batch deposition or coating, it is necessary to deposit multiple substrates simultaneously. However, the spacing between the substrates along the height direction of the existing vehicle is fixed, and there is an uneven flow field during the deposition process, so it is necessary to adjust the spacing between the substrates. Therefore, there is an urgent need for a vehicle that is convenient for adjusting the spacing between the substrates. Summary of the Utility Model

[0003] The objectives of this application include, for example, providing a vehicle that can facilitate the adjustment of the spacing between substrates.

[0004] The embodiments of this application can be implemented as follows:

[0005] The embodiments of this application provide a vehicle, which includes a bottom plate, fixing members, carrier plates, and fitting members. The fixing members are arranged on the bottom plate. The number of the carrier plates is multiple, and each carrier plate is movably connected to the fixing members. The number of the fitting members is multiple, and each fitting member is movably connected to the fixing members. At least one fitting member is arranged between two adjacent carrier plates, and the fitting member is used to support the carrier plate. The bottom plate abuts against one of the carrier plates or one of the fitting members.

[0006] Optionally, the fixing member is columnar. A first through hole is formed in each carrier plate, and the fixing member passes through the first through holes formed in multiple carrier plates at the same time. The diameter of the fixing member is less than or equal to the diameter of the first through hole;

[0007] And / or, a second through hole is formed in each fitting member, and the fixing member passes through the second through holes formed in multiple fitting members at the same time. The diameter of the fixing member is less than or equal to the diameter of the second through hole.

[0008] Optionally, the carrier plate is used to carry a substrate. A plurality of hollowed-out carrying areas are provided on the carrier plate, and a carrying flange is provided in each carrying area, and the carrying flange is used to carry the substrate.

[0009] Optionally, the number of the fixing members is multiple, and the multiple fixing members are arranged along the circumference of the bottom plate. Each carrier plate is movably connected to the multiple fixing members at the same time, and each fitting member is movably connected to one of the fixing members.

[0010] Optionally, a first positioning post is provided on the bottom plate, a first positioning hole is formed at one end of the fixing member facing the bottom plate, and the first positioning post is fixedly connected to the first positioning hole.

[0011] Optionally, the carrier further includes a top cover, the top cover is disposed opposite to the bottom plate along the arrangement direction of the plurality of carrier plates, a second positioning post is provided on the top cover, a second positioning hole is formed at one end of the fixing member away from the bottom plate, and the second positioning post is fixedly connected to the second positioning hole.

[0012] Optionally, the carrier further includes a sealing cover, a central hole is formed on the bottom plate, a supporting platform is provided on the inner sidewall of the central hole, the sealing cover is supported on the supporting platform to close the central hole, and the sealing cover is connected to the supporting platform through a fastener.

[0013] Optionally, a first card slot is provided on the plate surface of the bottom plate facing the fixing member, and one of the fitting members is snap-connected to the first card slot;

[0014] In the arrangement direction of the plurality of carrier plates, second card slots are provided on two opposite plate surfaces of each carrier plate, and the two second card slots on each carrier plate are respectively snap-connected to two adjacent fitting members.

[0015] Optionally, the fitting member is in a cylindrical shape, the height of the fitting member along its own axis direction is 10 - 35 mm, the outer diameter of the fitting member is 12 - 40 mm, and the inner diameter of the fitting member is 8 - 30 mm;

[0016] The fixing member is in a columnar shape, the height of the fixing member along its own axis direction is 200 - 1000 mm, and the diameter of the fixing member is 5 - 30 mm;

[0017] The diameter of the first through hole formed on the carrier plate is larger than the diameter of the fixing member and smaller than the outer diameter of the fitting member.

[0018] Optionally, the carrier plate and the fitting member are both made of one of aluminum alloy, magnesium alloy, and titanium alloy, and the bottom plate and the fixing member are both made of one of stainless steel, carbon steel, and alloy steel.

[0019] The beneficial effects of the vehicle provided by the embodiments of the present application include, for example: In order to facilitate the adjustment of the spacing between substrates, a vehicle is designed. The vehicle includes a bottom plate, a fixing member, a carrier plate, and a fitting. The fixing member is disposed on the bottom plate. The number of carrier plates is multiple, and each carrier plate is used to carry a substrate. Each carrier plate is movably connected to the fixing member. The number of fittings is multiple, and each fitting is movably connected to the fixing member. At least one fitting is disposed between two adjacent carrier plates. The fitting is used to support the carrier plate. The bottom plate abuts against one of the carrier plates or one of the fittings. During the process of adjusting the spacing between the substrates, since both the carrier plate and the fitting are movably connected to the fixing member, if it is necessary to increase the spacing between two adjacent carrier plates, adding a fitting between the two adjacent carrier plates is sufficient; if it is necessary to decrease the spacing between two adjacent carrier plates, removing a fitting between the two adjacent carrier plates is sufficient. The spacing between the substrates changes as the spacing between the carrier plates is adjusted, making the adjustment process of the spacing between the substrates convenient and fast. BRIEF DESCRIPTION OF THE DRAWINGS

[0020] In order to more clearly illustrate the technical solutions of the embodiments of the present application, the drawings required for use in the embodiments will be briefly introduced below. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, other related drawings can be obtained based on these drawings without creative efforts.

[0021] Figure 1 Structural schematic diagram of the vehicle in the embodiments of the present application;

[0022] Figure 2 Cross-sectional schematic diagram of the vehicle in the embodiments of the present application;

[0023] Figure 3 For Figure 2 Enlarged view of part A in

[0024] Figure 4 Structural schematic diagram of the bottom plate in the embodiments of the present application;

[0025] Figure 5 Structural schematic diagram of the carrier plate in the embodiments of the present application.

[0026] Reference numerals: 1 - bottom plate; 11 - first card slot; 12 - first positioning post; 13 - central hole; 14 - supporting platform; 2 - fixing member; 3 - carrier plate; 31 - first through hole; 32 - second card slot; 33 - bearing area; 4 - fitting; 41 - second through hole; 5 - top cover; 51 - second positioning post; 6 - sealing cover. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0027] To make the objectives, technical solutions, and advantages of the embodiments of this application clearer, the following will clearly and completely describe the technical solutions in the embodiments of this application with reference to the accompanying drawings in the embodiments of this application. Obviously, the described embodiments are part of the embodiments of this application, rather than all of them. Usually, the components of the embodiments of this application described and illustrated in the accompanying drawings here can be arranged and designed in various different configurations.

[0028] Therefore, the following detailed description of the embodiments of this application provided in the accompanying drawings is not intended to limit the scope of this application claimed, but merely represents selected embodiments of this application. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0029] It should be noted that: similar reference numerals and letters indicate similar items in the following drawings. Therefore, once an item is defined in one drawing, it does not need to be further defined and explained in subsequent drawings.

[0030] In the description of this application, it should be noted that if terms such as "upper", "lower", "inner", "outer", etc. indicate the orientation or positional relationship based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship when the utility model product is normally placed, it is only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to this application.

[0031] In addition, terms such as "first", "second", etc. are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance.

[0032] It should be noted that, without conflict, the features in the embodiments of this application can be combined with each other.

[0033] The inventors of this application found that existing carriers generally use multiple carrier plates to separately carry substrates, and the spacing between the carrier plates is fixed. However, according to different coating requirements, it is often necessary to adjust the spacing between the carrier plates, and thus change the spacing between the substrates carried on different carrier plates. Therefore, there is an urgent need for a carrier that is convenient for adjusting the spacing between substrates. The embodiments of this application provide a carrier, which is at least used to solve this technical problem.

[0034] Please refer to Figures 1-5, the vehicle provided by the embodiments of the present application includes a bottom plate 1, a fixing member 2, a carrier plate 3, and a fitting member 4. The fixing member 2 is disposed on the bottom plate 1. The number of carrier plates 3 is multiple, and each carrier plate 3 is used to carry a substrate. Each carrier plate 3 is movably connected to the fixing member 2. The number of fitting members 4 is multiple, and each fitting member 4 is movably connected to the fixing member 2. At least one fitting member 4 is disposed between two adjacent carrier plates 3. The fitting member 4 is used to support the carrier plate 3. The bottom plate 1 abuts against one of the carrier plates 3 or one of the fitting members 4.

[0035] The fixing member 2 is columnar, and the axial direction of the fixing member 2 is consistent with the arrangement direction of the multiple carrier plates 3. The fixing member 2 is fixedly connected near the edge of the bottom plate 1. Each carrier plate 3 can move along the axial direction of the fixing member 2, and each carrier plate 3 can be disengaged from the fixing member 2 when moving to either end of the fixing member 2; each fitting member 4 can slide along the axial direction of the fixing member 2, and each fitting member 4 can be disengaged from the fixing member 2 when moving to either end of the fixing member 2.

[0036] It can be understood that when it is necessary to remove the carrier plate 3 or the fitting member 4 from one end of the fixing member 2 close to the bottom plate 1, it is necessary to first separate the fixing member 2 from the bottom plate 1. In order to facilitate the removal of the carrier plate 3 or the fitting member 4, generally, the carrier plate 3 or the fitting member 4 is removed from the end of the fixing member 2 away from the bottom plate 1.

[0037] In this embodiment, the fixing member 2 is vertically disposed on the bottom plate 1, and the included angle between the axial direction of the fixing member 2 and the bottom plate 1 is a right angle. The axial direction of the fixing member 2, the arrangement direction of the multiple carrier plates 3, and the arrangement direction of the multiple fitting members 4 are all the same. In other embodiments, the fixing member 2 is inclinedly disposed on the bottom plate 1. At this time, the included angle between the axial direction of the fixing member 2 and the bottom plate 1 is not a right angle, but the axial direction of the fixing member 2, the arrangement direction of the multiple carrier plates 3, and the arrangement direction of the multiple fitting members 4 are all the same.

[0038] The number of fitting members 4 between two adjacent carrier plates 3 can be determined according to the actual required distance between two adjacent carrier plates 3. For example, if the actual required distance between two adjacent carrier plates 3 is small, one or two fitting members 4 can be disposed between two adjacent carrier plates 3; if the actual required distance between two adjacent carrier plates 3 is large, more than three fitting members 4 can be disposed between two adjacent carrier plates 3.

[0039] It should be noted that when no fitting member 4 is disposed between the bottom plate 1 and the carrier plate 3 closest to itself, the bottom plate 1 abuts against and supports the carrier plate 3 closest to itself; when one or more fitting members 4 are disposed between the bottom plate 1 and the carrier plate 3 closest to itself, the bottom plate 1 abuts against and supports the fitting member 4 closest to itself. The bottom plate 1 can play a role in carrying the fixing member 2 and all the carrier plates 3 and fitting members 4 above the bottom plate 1.

[0040] Each fitting 4 can not only support the carrier plate 3 above itself, but also support other fittings 4 above itself.

[0041] Specifically, if one end of a single fitting 4 away from the bottom plate 1 abuts against the carrier plate 3, this fitting 4 supports the carrier plate 3; if one end of a single fitting 4 away from the bottom plate 1 abuts against another fitting 4, this fitting 4 supports the other fitting 4; in addition, while the fitting 4 plays a supporting role, it also provides a spacing between the carrier plates 3 near its upper and lower sides, and the plate surface of any carrier plate 3 away from the bottom plate 1 abuts against and supports the adjacent fitting 4 above it.

[0042] During the process of adjusting the spacing between two adjacent carrier plates 3, slide one of the carrier plates 3 on the fixing member 2 and make this carrier plate 3 disengage from the fixing member 2 at one end of the fixing member 2. At this time, if it is necessary to increase the spacing between two adjacent carrier plates 3, slide and arrange a new fitting 4 on the fixing member 2, then slide the carrier plate 3 again and arrange it on the fixing member 2, and make the carrier plate 3 bear on the new fitting 4; if it is necessary to decrease the spacing between two adjacent carrier plates 3, remove one or more fittings 4 arranged on the fixing member 2, and then slide the carrier plate 3 again and arrange it on the fixing member 2. The adjustment process of the entire carrier plate spacing is convenient and fast.

[0043] In addition, in order to facilitate the rotation of the entire carrier, the bottom plate 1 is connected to an external rotating mechanism, and when the rotating mechanism is started, the fixing member 2 can play a role in transmitting the rotational torque. A plurality of hollowed-out bearing areas 33 are provided on each carrier plate 3, and a bearing flange is provided in each bearing area 33. The bearing flange of each bearing area 33 is used to bear a substrate. Among them, the substrate can be a wafer, a semiconductor, a lens, glass, etc. The shape of each bearing area 33 can be circular, polygonal or other irregular shapes.

[0044] In this embodiment, a first through hole 31 is formed in each carrier plate 3, and the fixing member 2 passes through the first through holes 31 formed in a plurality of carrier plates 3 at the same time, and the diameter of the fixing member 2 is less than or equal to the diameter of the first through hole 31; and / or, a second through hole 41 is formed in each fitting 4, and the fixing member 2 passes through the second through holes 41 formed in a plurality of fittings 4 at the same time, and the diameter of the fixing member 2 is less than or equal to the diameter of the second through hole 41.

[0045] It should be noted that both the first through hole 31 and the second through hole 41 are circular holes. The opening direction of the first through hole 31 is consistent with the axis direction of the fixing member 2. The fixing member 2 simultaneously passes through the first through holes 31 opened on multiple carrier plates 3. Since the diameter of the fixing member 2 is less than or equal to the diameter of the first through hole 31, the multiple carrier plates 3 are respectively movably connected to the fixing member 2. The opening direction of the second through hole 41 is consistent with the axis direction of the fixing member 2. The fixing member 2 simultaneously passes through the second through holes 41 opened on multiple fitting members 4. Since the diameter of the fixing member 2 is less than or equal to the diameter of the second through hole 41, the multiple fitting members 4 are respectively slidably connected to the fixing member 2.

[0046] In other embodiments, the end face shape of the fixing member 2 can also be polygonal or irregular. Both the first through hole 31 and the second through hole 41 match the shape of the fixing member 2, as long as the end face area of the fixing member 2 is less than or equal to the cross-sectional area of the first through hole 31 or the second through hole 41 in the direction perpendicular to its own axis.

[0047] In other embodiments, sleeves are provided at the edges of each carrier plate 3. The sleeves on each carrier plate 3 are sleeved on the fixing member 2, and since the diameter of the fixing member 2 is less than or equal to the inner diameter of the sleeves on each carrier plate 3, the movable connection between the carrier plate 3 and the fixing member 2 can also be achieved.

[0048] When a fitting member 4 is provided between the bottom plate 1 and the carrier plate 3 closest to itself, a first card slot 11 is provided on the plate surface of the bottom plate 1 facing the fixing member 2, and the fitting member 4 closest to the bottom plate 1 is engaged with the first card slot 11. Second card slots 32 are provided at positions close to the first through hole 31 on both the upper and lower plate surfaces of the carrier plate 3. During the process of assembling the carrier plate 3 and the fitting member 4 on the fixing member 2, the second card slots 32 provided on both the upper and lower plate surfaces of the carrier plate 3 can be respectively engaged with the two fitting members 4 located on the upper and lower sides of the carrier plate 3, which not only positions the bottom plate 1, the carrier plate 3, and the fitting member 4, but also improves the stability of the entire carrier.

[0049] In this embodiment, the number of fixing members 2 is multiple. The multiple fixing members 2 are arranged along the circumference of the bottom plate 1. Each carrier plate 3 is simultaneously movably connected to the multiple fixing members 2, and each fitting member 4 is movably connected to one of the fixing members 2.

[0050] When the number of fixing members 2 is multiple, multiple first through holes 31 are opened along the circumference of each carrier plate 3, and the multiple fixing members 2 are respectively passed through the multiple first through holes 31 in a one-to-one correspondence, so that each carrier plate 3 is simultaneously movably connected to the multiple fixing members 2, further improving the stability of the movement process of the carrier plate 3. The number and positions of the fitting members 4 provided on each fixing member 2 are the same, so as to stably support the carrier plate 3.

[0051] Exemplarily, the number of the fixing members 2 is three. The three fixing members 2 are evenly spaced along the circumferential direction of the bottom plate 1. Each carrier plate 3 is provided with three first through holes 31 along its own circumferential direction. Each carrier plate 3 is slidably connected to the three fixing members 2 through the three first through holes 31. Under the condition that the rotational speed of the rotating mechanism is less than 30 r / min, the three fixing members 2 have less influence on the air flow and can ensure the transmission of torque. It can be understood that the number of the fixing members 2 can be determined according to the actual working conditions and is not limited thereto.

[0052] In this embodiment, a first positioning post 12 is provided on the bottom plate 1. One end of the fixing member 2 facing the bottom plate 1 is provided with a first positioning hole, and the first positioning post 12 is fixedly connected to the first positioning hole.

[0053] It should be noted that the first positioning hole is a blind hole. The first positioning hole is opened at the center of one end of the fixing member 2 facing the bottom plate 1. The fixed connection manner between the first positioning post 12 and the first positioning hole includes but is not limited to: the first positioning post 12 is threadedly connected to the first positioning hole, and the first positioning post 12 is in interference fit with the first positioning hole; when the first positioning post 12 is fixedly connected to the first positioning hole, the fixing member 2 is relatively fixed to the bottom plate 1.

[0054] When the number of the fixing members 2 is multiple, a plurality of first positioning posts 12 are correspondingly provided on the bottom plate 1. The plurality of first positioning posts 12 are fixedly connected to the first positioning holes on the plurality of fixing members 2 one by one, so that the plurality of fixing members 2 are respectively relatively fixed to the bottom plate 1.

[0055] In other embodiments, the fixing member 2 can also be bonded or welded to the bottom plate 1. Among them, when the fixing member 2 is welded to the bottom plate 1, the carrier plate 3 and the fitting 4 can only be removed from the end of the fixing member 2 away from the bottom plate 1.

[0056] In this embodiment, the carrier further includes a top cover 5. The top cover 5 is disposed opposite to the bottom plate 1 along the arrangement direction of the plurality of carrier plates 3. A second positioning post 51 is provided on the top cover 5. One end of the fixing member 2 away from the bottom plate 1 is provided with a second positioning hole, and the second positioning post 51 is fixedly connected to the second positioning hole.

[0057] It should be noted that one end of the plurality of fixing members 2 away from the bottom plate 1 jointly bears the top cover 5. The second positioning hole is also a blind hole. The second positioning hole is opened at the center of one end of the fixing member 2 away from the bottom plate 1. The fixed connection manner between the second positioning post 51 and the second positioning hole includes but is not limited to: the second positioning post 51 is threadedly connected to the second positioning hole, and the second positioning post 51 is in interference fit with the second positioning hole; when the second positioning post 51 is fixedly connected to the second positioning hole, the top cover 5 is relatively fixed to the fixing member 2.

[0058] When the number of the fixing members 2 is multiple, a plurality of second positioning posts 51 are correspondingly arranged on the top cover 5. The plurality of second positioning posts 51 are fixedly connected to the second positioning holes on the plurality of fixing members 2 one by one, so that the plurality of fixing members 2 are respectively relatively fixed to the top cover 5.

[0059] In this embodiment, the carrier further includes a sealing cover 6. A central hole 13 is formed in the bottom plate 1. A supporting platform 14 is arranged on the inner side wall of the central hole 13. The sealing cover 6 is supported on the supporting platform 14 to close the central hole 13, and the sealing cover 6 is connected to the supporting platform 14 through a fastener. Wherein, the supporting platform 14 can be formed by partial depression of the inner side wall of the central hole 13 towards the outside of the central hole 13.

[0060] It should be noted that the setting of the top cover 5 can reduce the turbulence above the carrier. In order to reduce the weight of the bottom plate 1, a central hole 13 is formed in the bottom plate 1. However, in order to reduce the turbulence below the carrier and enable the gas to flow in the center of the carrier, a sealing cover 6 is arranged in the central hole 13, and the sealing cover 6 is supported on the supporting platform 14 to close the central hole 13. In order to ensure the stability of the sealing cover 6, the sealing cover 6 is connected to the supporting platform 14 through fasteners such as bolts. The number of the fasteners such as bolts is not limited, as long as the sealing cover 6 can be fixed to the supporting platform 14.

[0061] In an alternative embodiment, the fitting 4 is in a cylindrical shape. The height of the fitting 4 along its own axis direction is 10 - 35 mm, the outer diameter of the fitting 4 is 12 - 40 mm, and the inner diameter of the fitting 4 is 8 - 30 mm.

[0062] Exemplarily, the height of the fitting 4 along the height direction of the fixing member 2 can be 10 mm, 20 mm, 30 mm or 35 mm, the outer diameter of the fitting 4 can be 12 mm, 20 mm, 30 mm or 40 mm, and the inner diameter of the fitting 4 can be 8 mm, 10 mm, 20 mm or 30 mm. It can be understood that the height of the fitting 4 can be selected according to the actual working conditions. For example, the height of a single fitting 4 is less than or equal to the minimum distance required between two adjacent carrier plates 3.

[0063] In an alternative embodiment, the height of the fixing member 2 is 200 - 1000 mm, and the diameter of the fixing member 2 is 5 - 30 mm.

[0064] It should be pointed out that the diameter of the fixing member 2 is preferably 18 mm or less. The fixing member 2 with a diameter of 18 mm or less has less influence on the air flow and can perform uniform coating when the carrier rotates.

[0065] Exemplarily, the height of the fixing member 2 can be optionally 200 mm, 500 mm, 800 mm or 1000 mm, and the diameter of the fixing member 2 can be optionally 5 mm, 10 mm, 20 mm or 30 mm. It can be understood that the height and diameter of the fixing member 2 can be selected according to the actual working conditions. For example, the height of the fixing member 2 is determined by the number of carrier plates 3 and the required spacing between the carrier plates 3, and the diameter of the fixing member 2 only needs to match the diameter of the first through hole 31 and the diameter of the second through hole 41.

[0066] The fitting 4 is used to support the carrier plate 3. The first through hole on the carrier plate 3 is sleeved on the fixing member 2. Therefore, the diameter of the first through hole 31 opened on the carrier plate 3 is larger than the diameter of the fixing member 2 and smaller than the outer diameter of the fitting 4. Thus, the carrier plate 3 can be movably connected to the fixing member 2, and the fitting can support the carrier plate 3. For example, the diameter of the fixing member 2 is 18 mm, the inner diameter of the fitting 4 is 20 mm, the outer diameter is 30 mm, and the diameter of the first through hole 31 on the carrier plate 3 can be 20 mm, 22 mm, 24 mm, 25 mm, 27 mm, 28 mm, etc. It can be selected and set according to actual needs, and no specific limitation is made here.

[0067] In an alternative embodiment, both the carrier plate 3 and the fitting 4 are made of one of aluminum alloy, magnesium alloy, and titanium alloy, and both the bottom plate 1 and the fixing member 2 are made of one of stainless steel, carbon steel, and alloy steel.

[0068] Since both the bottom plate 1 and the fixing member 2 are made of one of stainless steel, carbon steel, and alloy steel, the bottom plate 1 and the fixing member 2 can form a stable support structure. And since both the carrier plate 3 and the fitting 4 are made of one of aluminum alloy, magnesium alloy, and titanium alloy, the weight of the carrier plate 3 and the fitting 4 is lighter, reducing the weight of the entire carrier. In addition, the sealing cover 6 is also made of thin sheet metal such as stainless steel or aluminum.

[0069] It can be understood that the materials of the carrier plate 3, the fitting 4, the bottom plate 1, the fixing member 2, the top cover 5, and the sealing cover 6 can all be determined according to the actual working conditions. Among them, the bottom plate 1 and the fixing member 2 are selected from materials that can form a stable support, and the remaining components are selected from materials with lighter mass to reduce the weight of the entire carrier.

[0070] In summary, the embodiment of the present application provides a vehicle. When it is necessary to adjust the distance between any two adjacent carrier plates 3, first remove the top cover 5, then remove the upper carrier plate 3 from the end of the fixing member 2 away from the bottom plate 1 among the two adjacent carrier plates 3. Subsequently, add or remove the fitting 4 above the other carrier plate 3. Among them, the process of adding the fitting 4 is to sleave the new fitting 4 on the fixing member 2, and the process of removing the fitting 4 is to remove the fitting 4 originally sleaved on the fixing member 2. After adding or removing the fitting 4, reassemble the removed carrier plate 3 onto the fixing member 2, and finally reassemble the top cover 5 onto the top end of the fixing member 2, thereby quickly and conveniently completing the adjustment of the distance between the carrier plates 3.

[0071] As described above, the above is only the specific embodiment of the present application, but the protection scope of the present application is not limited thereto. Any changes or substitutions that can be easily thought of by those skilled in the art within the technical scope disclosed in the present application should be covered by the protection scope of the present application. Therefore, the protection scope of the present application should be subject to the protection scope of the claims.

Claims

1. A vehicle, characterized in that, It includes a bottom plate (1), a fixing member (2), a carrier plate (3) and a fitting (4). The fixing member (2) is arranged on the bottom plate (1). The number of the carrier plates (3) is multiple, and each carrier plate (3) is movably connected to the fixing member (2). The number of the fittings (4) is multiple, and each fitting (4) is movably connected to the fixing member (2). At least one fitting (4) is arranged between two adjacent carrier plates (3). The fitting (4) is used to support the carrier plate (3). The bottom plate (1) abuts against one of the carrier plates (3) or one of the fittings (4).

2. The vehicle according to claim 1, wherein The fixing member (2) is columnar. A first through hole (31) is formed in each carrier plate (3). The fixing member (2) passes through the first through holes (31) formed in multiple carrier plates (3) at the same time. The diameter of the fixing member (2) is less than or equal to the diameter of the first through hole (31). And / or, a second through hole (41) is formed in each fitting (4). The fixing member (2) passes through the second through holes (41) formed in multiple fittings (4) at the same time. The diameter of the fixing member (2) is less than or equal to the diameter of the second through hole (41).

3. The vehicle according to claim 1, characterized in that, The carrier plate (3) is used to carry a substrate. A plurality of hollow loading areas (33) are provided on the carrier plate (3). A loading flange is provided in each loading area (33), and the loading flange is used to carry the substrate.

4. The vehicle according to claim 1, characterized in that, The number of the fixing members (2) is multiple. The multiple fixing members (2) are arranged along the circumferential direction of the bottom plate (1). Each carrier plate (3) is movably connected to the multiple fixing members (2) at the same time. Each fitting (4) is slidably connected to one of the fixing members (2).

5. The vehicle according to claim 1, characterized in that, A first positioning post (12) is arranged on the bottom plate (1). A first positioning hole is formed at one end of the fixing member (2) facing the bottom plate (1). The first positioning post (12) is fixedly connected to the first positioning hole.

6. The vehicle according to any one of claims 1-5, characterized in that, The carrier further includes a top cover (5). The top cover (5) is arranged opposite to the bottom plate (1) along the arrangement direction of the multiple carrier plates (3). A second positioning post (51) is arranged on the top cover (5). A second positioning hole is formed at one end of the fixing member (2) away from the bottom plate (1). The second positioning post (51) is fixedly connected to the second positioning hole.

7. The vehicle according to claim 1, wherein The carrier further includes a sealing cover (6). A central hole (13) is formed in the bottom plate (1). A supporting platform (14) is arranged on the inner side wall of the central hole (13). The sealing cover (6) is supported on the supporting platform (14) to close the central hole (13), and the sealing cover (6) is connected to the supporting platform (14) through a fastener.

8. The vehicle according to claim 1, wherein A first card slot (11) is arranged on the plate surface of the bottom plate (1) facing the fixing member (2). One of the fittings (4) is clamped with the first card slot (11). In the arrangement direction of the plurality of the carrier plates (3), second card slots (32) are provided on two opposite plate surfaces of each of the carrier plates (3), and the two second card slots (32) on each of the carrier plates (3) are respectively clamped with two adjacent ones of the fitting parts (4).

9. The vehicle according to claim 2, wherein, The fitting part (4) is cylindrical, the height of the fitting part (4) along its own axis direction is 10 - 35 mm, the outer diameter of the fitting part (4) is 12 - 40 mm, and the inner diameter of the fitting part (4) is 8 - 30 mm; The fixing part (2) is columnar, the height of the fixing part along its own axis direction is 200 - 1000 mm, and the diameter of the fixing part (2) is 5 - 30 mm; The diameter of the first through hole (31) formed on the carrier plate is larger than the diameter of the fixing part (2) and smaller than the outer diameter of the fitting part (4).

10. The vehicle according to claim 1, characterized in that, The carrier plate (3) and the fitting part (4) are both made of one of aluminum alloy, magnesium alloy, and titanium alloy, and the bottom plate (1) and the fixing part (2) are both made of one of stainless steel, carbon steel, and alloy steel.

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