Anti-pressing protective device for graphite boat
By designing the anti-pressure protective device of graphite boat, the combination of mechanical structure and buffer solution is used to solve the collision problem during graphite boat stacking, and stable support and protection of silicon wafers are achieved to prevent damage.
Patent Information
- Application Number
- CN202422324761.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-24
- Publication Date
- 2025-07-11
- Estimated Expiration
- 2034-09-24
AI Technical Summary
Graphite boats are prone to collision when stacking, resulting in damage to silicon wafer materials, and protective devices are needed to prevent material pressing.
A graphite boat anti-pressure protection device is designed, including base, material collection plate, slide rail, threaded rod, mobile plate and motor. Through the cooperation of mechanical structure and buffer solution, the graphite boat can be stable support and buffered to prevent collisions.
Effectively prevent collisions between graphite boats, improve the stability and protection effect of the silicon wafer, and avoid damage to the silicon wafer.
Smart Images
Figure CN223092837U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to a protective device, in particular to a graphite boat material pressure prevention protective device, belonging to the technical field of protective devices. Background Art
[0002] Graphite boat is a graphite mold. The graphite mold itself is a carrier. The raw materials and parts that humans need to position or shape can be placed in the graphite mold together and sintered at high temperature. The graphite mold is made of artificial graphite through mechanical processing and has corresponding electrode sheets. The electrode sheets serve as the positive and negative poles of the power supply, thereby generating an electric field, ionizing the gas into plasma, and forming a new film layer.
[0003] After placing the silicon wafers on the graphite boat, the graphite boat needs to be placed on a rack for storage. However, when the graphite boats are stacked, collisions between the graphite boats are likely to occur, causing the silicon wafer materials to be bumped and damaged. A protective device is needed to protect the graphite boats from material compression. Utility Model Content
[0004] 1. Technical issues to be solved
[0005] The purpose of the utility model is to provide a graphite boat anti-material pressure protection device in order to solve the above-mentioned problem, so as to solve the problem in the prior art that when the graphite boats are stacked, the graphite boats are prone to collision, resulting in collision with the silicon wafer materials, thereby damaging the silicon wafers, and a protection device to prevent material pressure is needed to protect the graphite boats.
[0006] (II) Technical solution
[0007] The utility model is implemented through the following technical scheme: a graphite boat anti-pressure material protection device, including a base, a sloping plate fixedly connected to one side of the base, a first material receiving plate arranged on the top of the base, a second material receiving plate arranged on the top of the first material receiving plate, side plates fixedly connected to both sides of the top of the base, slide rails fixedly connected to the tops of the two side plates, sleeves fixedly connected to both sides of the tops of the two side plates, threaded rods slidably connected inside the four sleeves, limit plates fixedly connected to both sides of the two slide rails, the four threaded rods respectively penetrate the four limit plates and are threadedly connected to the limit plates.
[0008] Preferably, the top ends of the four threaded rods are rotatably connected to connecting plates, the two slide rails are slidably connected to the first movable plates, the two first movable plates are respectively fixedly connected to the four connecting plates, the two slide rails are rotatably connected to guide rods, the two guide rods respectively penetrate the two first movable plates and are slidably connected to the two first movable plates, so as to support and limit the two first movable plates and improve the stability of the first movable plates.
[0009] Preferably, second moving plates are fixedly connected to both sides of the first material receiving plate. The two second moving plates are respectively slidably connected inside the two slide rails. The two second moving plates are respectively sleeved outside the two guide rods and slidably connected to the two guide rods to limit the two second moving plates.
[0010] Preferably, springs are sleeved on both ends of the outer sides of the two guide rods. The four springs are respectively in contact with the two second moving plates and the two first moving plates. L-shaped rods are fixedly connected to one side of the two first moving plates. The bottoms of the two L-shaped rods correspond to the two second moving plates respectively to buffer the second moving plates and the first moving plates.
[0011] Preferably, guide plates are formed on both sides inside the four sleeves. Chute grooves are formed on both sides of the four threaded rods. The guide plates are adapted to the chute grooves and slidably connected inside the chute grooves to limit the chute grooves by the guide plates and make the sleeves drive the threaded rods to rotate synchronously.
[0012] Preferably, piston sleeves are fixedly connected to the four corners of the tops of the base and the first material receiving plate. Buffer liquid is filled inside the piston sleeves. Sliding plates are slidably connected inside the piston sleeves. A plurality of through holes are formed inside the sliding plates. Slide rods are fixedly connected to the tops of the sliding plates. The top ends of the slide rods are fixedly connected to support plates. The slide rods penetrate through the top walls of the piston sleeves and are slidably connected to the piston sleeves. The eight support plates respectively correspond to the bottoms of the first material receiving plate and the second material receiving plate to support the first material receiving plate and the second material receiving plate and prevent material pressing.
[0013] Preferably, motors are fixedly connected inside the two side plates. Rotating rods are fixedly connected to the bottoms of the two sleeves. The two rotating rods respectively penetrate through the two ends of the side plates and are rotatably connected to the side plates. Sprockets are fixedly connected to the outer sides of the two rotating rods and the outer sides of the output ends of the motors. Chains are sleeved and meshed on the outer sides of the sprockets.
[0014] The utility model provides a graphite boat anti-material-pressing protection device, and the beneficial effects thereof are as follows:
[0015] 1. When the sleeve rotates, the anti-pressure material protection device for the graphite boat limits the chute through the guide plate inside it, and drives the threaded rod to rotate accordingly. Since the threaded rod is threadedly connected to the limit plate, when the threaded rod rotates inside the limit plate, it moves upward inside the limit plate, thereby driving the connecting plate to rise, and the connecting plate drives the first moving plate to rise. When the first moving plate rises, it drives the second material receiving plate to move upward. When the second material receiving plate moves upward, the distance between the second material receiving plate and the first material receiving plate increases. At the same time, when the two first moving plates rise, they drive the two L-shaped rods to rise. When the bottom ends of the L-shaped rods contact the bottoms of the two second moving plates, they drive the two second moving plates to rise, and thereby drive the first material receiving plate to rise, increasing the distance between the first material receiving plate and the base. This facilitates placing the graphite boat loaded with silicon wafers inside the base, the first material receiving plate, and the second material receiving plate, which is beneficial for limiting and supporting the graphite boat and improving stability.
[0016] 2. When the sleeve of the anti-pressure material protection device for the graphite boat rotates in the reverse direction, it drives the threaded rod to move downward, and drives the first moving plate and the second moving plate to move downward, squeezing the spring and limiting the first moving plate and the second moving plate to improve stability. When the first material receiving plate and the second material receiving plate move downward, the sides of the second material receiving plate and the first material receiving plate come into contact with multiple support plates, causing the first material receiving plate and the second material receiving plate to press down on the support plates, thereby driving the support plates and the sliding rods to slide inside the piston sleeve, driving the multiple sliding rods to slide inside the multiple sliding plates, enabling the buffer liquid inside the piston sleeve to flow through the multiple through holes, and causing the sliding plates to form a damping effect, which supports and buffers the first material receiving plate and the second material receiving plate. This is beneficial for supporting the first material receiving plate and the second material receiving plate, improving stability, and preventing the materials inside the graphite boat from being pressed. BRIEF DESCRIPTION OF THE DRAWINGS
[0017] Figure 1 is a schematic diagram of the overall structure of the present utility model;
[0018] Figure 2 is a side view of the present utility model;
[0019] Figure 3 is a schematic diagram of the structure of the slide rail of the present utility model;
[0020] Figure 4 is a schematic diagram of the structure of the side plate of the present utility model;
[0021] Figure 5 is a schematic diagram of the structure of the sleeve of the present utility model;
[0022] Figure 6 is a schematic diagram of the structure of the slide plate of the present utility model.
[0023]
SYMBOLS DESCRIPTION OF MAIN COMPONENTS
[0024] 1. Base; 2. First receiving plate; 3. Second receiving plate; 4. Slide rail; 5. Sleeve; 6. Threaded rod; 7. Limiting plate; 8. Connecting plate; 9. First moving plate; 10. Guide rod; 11. Spring; 12. Second moving plate; 13. Guide plate; 14. Chute; 15. Piston sleeve; 16. Slide plate; 17. Slide rod; 18. Support plate; 19. Motor; 20. Rotating rod; 21. Sprocket; 22. Chain; 23. Side plate; 24. Inclined plate; 25. L-shaped rod. Detailed implementation manner
[0025] An embodiment of the present utility model provides a graphite boat anti-pressure material protection device.
[0026] Please refer to Figure 1 , Figure 2 , Figure 3 , Figure 4 , Figure 5 and Figure 6, including a base 1, on one side of the base 1 is fixedly connected with an inclined plate 24, on the top of the base 1 is provided with a first material receiving plate 2, on the top of the first material receiving plate 2 is provided with a second material receiving plate 3, on both sides of the top of the base 1 are fixedly connected with side plates 23, on the top of the two side plates 23 are fixedly connected with slide rails 4, on both sides of the top of the two side plates 23 are fixedly connected with sleeves 5, inside the four sleeves 5 are slidably connected with threaded rods 6, on both sides of the two slide rails 4 are fixedly connected with limiting plates 7, the four threaded rods 6 respectively penetrate through the four limiting plates 7 and are threadedly connected with the limiting plates 7, the tops of the four threaded rods 6 are rotatably connected with connecting plates 8, inside the two slide rails 4 are slidably connected with first moving plates 9, the two first moving plates 9 are respectively fixedly connected with the four connecting plates 8, inside the two slide rails 4 are rotatably connected with guide rods 10, the two guide rods 10 respectively penetrate through the two first moving plates 9 and are slidably connected with the two first moving plates 9, to support and limit the two first moving plates 9 and improve the stability of the first moving plates 9, on both sides of the first material receiving plate 2 are fixedly connected with second moving plates 12, the two second moving plates 12 are respectively slidably connected inside the two slide rails 4, the two second moving plates 12 are respectively sleeved outside the two guide rods 10 and are slidably connected with the two guide rods 10 to limit the two second moving plates 12, on both ends of the outside of the two guide rods 10 are sleeved with springs 11, the four springs 11 are respectively in contact with the two second moving plates 12 and the two first moving plates 9, on one side of the two first moving plates 9 are fixedly connected with L-shaped rods 25, the bottoms of the two L-shaped rods 25 respectively correspond to the two second moving plates 12 to buffer the second moving plates 12 and the first moving plates 9, on both sides of the inside of the four sleeves 5 are formed with guide plates 13, on both sides of the four threaded rods 6 are provided with chutes 14, the guide plates 13 are adapted to the chutes 14 and are slidably connected inside the chutes 14, so that the guide plates 13 limit the chutes 14 and enable the sleeves 5 to drive the threaded rods 6 to rotate synchronously, inside the two side plates 23 are fixedly connected with motors 19, on the bottom ends of the two sleeves 5 are fixedly connected with rotating rods 20, the two rotating rods 20 respectively penetrate through the two ends of the side plates 23 and are rotatably connected with the side plates 23, on the outside of the two rotating rods 20 and on the outside of the output ends of the motors 19 are fixedly connected with sprockets 21, and the outside of the sprockets 21 is sleeved and meshed with a chain 22.
[0027] At the four corners of the tops of the base 1 and the first material receiving plate 2 are fixedly connected with piston sleeves 15, the inside of the piston sleeves 15 is filled with buffer liquid, inside the piston sleeves 15 are slidably connected with sliding plates 16, inside the sliding plates 16 are provided with a plurality of through holes, on the top of the sliding plates 16 are fixedly connected with sliding rods 17, the tops of the sliding rods 17 are fixedly connected with support plates 18, the sliding rods 17 penetrate through the top walls of the piston sleeves 15 and are slidably connected with the piston sleeves 15, the eight support plates 18 respectively correspond to the bottoms of the first material receiving plate 2 and the second material receiving plate 3 to support the first material receiving plate 2 and the second material receiving plate 3 and prevent material pressing.
[0028] When the utility model is in use: during use, two motors 19 are started to drive the sprockets 21 to rotate, and the two rotating rods 20 are driven to rotate through the transmission of the chain 22. When the rotating rods 20 rotate, the sleeves 5 are driven to rotate. Thus, when the sleeves 5 rotate, the guide plates 13 inside them limit the sliding grooves 14, and thereby drive the threaded rods 6 to rotate. Since the threaded rods 6 are threadedly connected to the limiting plates 7, when the threaded rods 6 rotate inside the limiting plates 7, they move upward inside the limiting plates 7. Thus, the threaded rods 6 drive the connecting plates 8 to rise, and the connecting plates 8 drive the first moving plates 9 to rise. When the first moving plates 9 rise, they drive the second material receiving plates 3 to move upward. When the second material receiving plates 3 move upward, the distance between the second material receiving plates 3 and the first material receiving plates 2 increases. At the same time, when the two first moving plates 9 rise, they drive the two L-shaped rods 25 to rise. When the bottoms of the L-shaped rods 25 contact the bottoms of the two second moving plates 12, the two second moving plates 12 are driven to rise, and thereby the first material receiving plates 2 are driven to rise, increasing the distance between the first material receiving plates 2 and the base 1, facilitating the placement of the graphite boats loaded with silicon wafers inside the base 1, the first material receiving plates 2, and the second material receiving plates 3, being conducive to limiting and supporting the graphite boats, and improving stability.
[0029] When the sleeves 5 rotate in the reverse direction, the threaded rods 6 are driven to move downward, and the first moving plates 9 and the second moving plates 12 are driven to move downward, squeezing the springs 11, limiting the first moving plates 9 and the second moving plates 12, and improving stability. When the first material receiving plates 2 and the second material receiving plates 3 move downward, the sides of the second material receiving plates 3 and the first material receiving plates 2 come into contact with a plurality of support plates 18, causing the first material receiving plates 2 and the second material receiving plates 3 to press down on the support plates 18, thereby driving the support plates 18 and the sliding rods 17 to slide inside the piston sleeves 15, driving the plurality of sliding rods 17 to slide inside the plurality of sliding plates 16, enabling the buffer liquid inside the piston sleeves 15 to flow through the plurality of through holes, causing the sliding plates 16 to form a damping effect, supporting and buffering the first material receiving plates 2 and the second material receiving plates 3, being conducive to supporting the first material receiving plates 2 and the second material receiving plates 3, improving stability, and preventing the materials inside the graphite boats from being pressed.
[0030] The above shows and describes the basic principles, main features, and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principles of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.
Claims
1. A graphite boat anti-pressurizing protection device, comprising a base (1), one side of the base (1) is fixedly connected with an inclined plate (24), and it is characterized in that: A first material receiving plate (2) is provided on the top of the base (1). A second material receiving plate (3) is provided on the top of the first material receiving plate (2). Both sides of the top of the base (1) are fixedly connected with side plates (23). Slide rails (4) are fixedly connected to the tops of the two side plates (23). Sleeve barrels (5) are fixedly connected to both sides of the tops of the two side plates (23). Threaded rods (6) are slidably connected inside the four sleeve barrels (5). Limiting plates (7) are fixedly connected to both sides of the two slide rails (4). The four threaded rods (6) respectively penetrate through the four limiting plates (7) and are threadedly connected to the limiting plates (7).
2. The anti-pressure material protection device for graphite boat according to claim 1, characterized in that: The tops of the four threaded rods (6) are all rotatably connected with connecting plates (8). First moving plates (9) are slidably connected inside the two slide rails (4). The two first moving plates (9) are respectively fixedly connected with the four connecting plates (8). Guide rods (10) are rotatably connected inside the two slide rails (4). The two guide rods (10) respectively penetrate through the two first moving plates (9) and are slidably connected to the two first moving plates (9).
3. A graphite boat anti-pressing material protection device according to claim 2, characterized in that: Second moving plates (12) are fixedly connected to both sides of the first material receiving plate (2). The two second moving plates (12) are respectively slidably connected inside the two slide rails (4). The two second moving plates (12) are respectively sleeved outside the two guide rods (10) and are slidably connected to the two guide rods (10).
4. A graphite boat anti-pressurizing protection device according to claim 3, characterized in that: Spring (11) are sleeved on both ends of the outside of the two guide rods (10). The four springs (11) are respectively in contact with the two second moving plates (12) and the two first moving plates (9). L-shaped rods (25) are fixedly connected to one side of the two first moving plates (9). The bottoms of the two L-shaped rods (25) respectively correspond to the two second moving plates (12).
5. The anti-pressure material protection device for a graphite boat according to claim 1, characterized in that: Guide plates (13) are formed on both sides inside the four sleeve barrels (5). Chute (14) are opened on both sides of the four threaded rods (6). The guide plates (13) are adapted to the chute (14) and are slidably connected inside the chute (14).
6. The anti-pressing material protection device for a graphite boat according to claim 1, wherein: Piston sleeves (15) are fixedly connected to the four corners of the tops of the base (1) and the first material receiving plate (2). Buffer liquid is filled inside the piston sleeves (15). Sliding plates (16) are slidably connected inside the piston sleeves (15). A plurality of through holes are opened inside the sliding plates (16). Slide rods (17) are fixedly connected to the tops of the sliding plates (16). The tops of the slide rods (17) are fixedly connected with support plates (18). The slide rods (17) penetrate through the top walls of the piston sleeves (15) and are slidably connected to the piston sleeves (15). The eight support plates (18) respectively correspond to the bottoms of the first material receiving plate (2) and the second material receiving plate (3).
7. A graphite boat anti-pressurizing protection device according to claim 1, characterized in that: A motor (19) is fixedly connected inside each of the two side plates (23). A rotating rod (20) is fixedly connected to the bottom end of each of the two sleeves (5). The two rotating rods (20) respectively penetrate through both ends of the side plate (23) and are rotatably connected to the side plate (23). A sprocket (21) is fixedly connected to the outer side of each of the two rotating rods (20) and the outer side of the output end of the motor (19). A chain (22) is sleeved on the outer side of the sprocket (21) and is meshed and connected thereto.