Clamping device and lead bonding equipment

Through the clamping device of the adjustment mechanism and positioning structure, the problem of high product structure requirements of traditional bonding equipment is solved, high versatility and high precision clamping is achieved, maintenance costs are reduced, and working efficiency and bonding quality are improved.

CN223092861UActive Publication Date: 2025-07-11HANS PHOTOELECTRIC EQUIP CO LTD
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Patent Information

Application Number
CN202422278123.3
Authority / Receiving Office
CN · China
Patent Type
Utility models(China)
Current Assignee / Owner
Filing Date
2024-09-18
Publication Date
2025-07-11
Estimated Expiration
2034-09-18

AI Technical Summary

Technical Problem

Traditional bonding equipment has great requirements for product structure and is low in versatility. Different fixtures need to be customized according to different products, resulting in increased costs.

Method used

A clamping device is provided. Through the adjustment mechanism and the positioning structure, the clamping jaw structure can be adjusted to adapt to different clamping sizes and positions, including adjustment parts, motors, screw assembly and camshafts, etc., to adjust the distance between the clamping jaw and the positioning structure.

Benefits of technology

It improves product versatility and positioning accuracy, reduces dependence on fixtures, reduces maintenance costs, and improves operating efficiency and bonding quality.

✦ Generated by Eureka AI based on patent content.

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Abstract

The utility model belongs to the technical field of semiconductor packaging, and relates to a clamping device, which comprises an adjusting mechanism, a positioning structure and a clamping jaw structure, and is characterized in that the clamping jaw structure comprises a clamping jaw and a connecting piece, and the clamping jaw is adjustably arranged on the connecting piece; the positioning structure and / or the clamping jaw structure adjust the distance between the clamping jaw and the positioning structure through the adjusting mechanism so as to adapt to material sheets with different clamping sizes and clamping positions. The utility model also relates to a wire bonding device. According to the technical scheme provided by the invention, the distance between the clamping jaw and the positioning structure can be adjusted by adjusting the clamping jaw or adjusting the positioning structure and / or the clamping jaw structure through the adjusting mechanism so as to adapt to material sheets with different clamping sizes and clamping positions, so that the material sheets with different thicknesses and different structures are clamped, the product universality is high, and the production efficiency is high. A customized clamp is not needed, the product application range is wide, the compatibility, the positioning precision and the clamping reliability are high, the operation efficiency and precision are improved, and the maintenance cost is low.
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Description

Technical Field

[0001] The present application relates to the technical field of semiconductor packaging, and more particularly, to a clamping device and a wire bonding apparatus including the clamping device. Background Art

[0002] During the packaging process of a chip, a packaging bonding process is usually included, and the packaging bonding process includes wire bonding of a circuit chip to a pad of a lead frame. Traditional bonding apparatuses bond by manually leading wires, with a slow bonding speed, poor wire bonding quality, and low positioning accuracy.

[0003] To adapt to the increasing diversification of semiconductor packaging products in the market, new packaging types emerge in an endless stream, and fully automatic wire bonding apparatuses have appeared. However, these fully automatic wire bonding apparatuses all use a rail system to transfer and load / unload products. Although this method has a certain degree of automation, it has high requirements for the product structure, low versatility, and requires different fixtures to be customized according to different products, resulting in an increase in cost and being unable to meet the diverse product needs of the market. Summary of the Utility Model

[0004] The technical problem to be solved by the embodiments of the present application is that traditional bonding apparatuses have high requirements for the product structure, low versatility, and require different fixtures to be customized according to different products, resulting in an increase in cost.

[0005] To solve the above technical problem, the embodiments of the present application provide a clamping device, which adopts the following technical solutions, including:

[0006] An adjusting mechanism;

[0007] A positioning structure, arranged on the adjusting mechanism and used for placing a wafer;

[0008] A jaw structure, arranged on the adjusting mechanism, the jaw structure including jaws and a connecting member, the jaws being adjustably arranged on the connecting member to adjust the distance between the jaws and the positioning structure;

[0009] Wherein, the positioning structure moves towards or away from the jaws through the adjusting mechanism, and the jaw structure moves towards or away from the positioning structure through the adjusting mechanism;

[0010] The positioning structure and / or the jaw structure adjust the distance between the jaws and the positioning structure through the adjusting mechanism to adapt to wafers with different clamping sizes and clamping positions.

[0011] Further, the jaw structure further includes a first adjusting member, the jaws being horizontally adjustably arranged on the first adjusting member, and the first adjusting member being vertically adjustably arranged on the connecting member.

[0012] Further, a plurality of first connection holes are provided on the first adjusting member, and a plurality of second connection holes are provided on the connecting member. The first adjusting member is fixedly connected to the connecting member through a first fixing member. By selecting different second connection holes aligned with the first connection holes, the distance between the clamping jaw and the positioning structure is adjusted.

[0013] Further, the clamping jaw further includes a second adjusting member. A third connection hole is provided on the second adjusting member, and a strip-shaped groove is formed on the clamping jaw. The clamping jaw is fixedly connected to the second adjusting member through a second fixing member.

[0014] Further, one side of the second adjusting member close to the positioning structure is rotatably connected to the first adjusting member. An elastic member is provided on the side of the second adjusting member away from the positioning structure. Two ends of the elastic member respectively abut against the first adjusting member and the second adjusting member, so that one end of the clamping jaw away from the second adjusting member has a tendency to abut against the sheet.

[0015] Further, the positioning structure includes a material table for placing the sheet, and a right-angle limit block for positioning is provided on the material table.

[0016] Further, the adjusting mechanism includes a bracket, a first adjusting device for adjusting the position of the positioning structure on the bracket, and a second adjusting device for adjusting the position of the clamping jaw structure on the bracket. The distance between the clamping jaw and the positioning structure is adjusted by the adjustment of the first adjusting device and / or the second adjusting device.

[0017] Further, the first adjusting device includes a first motor, a lead screw assembly linked to the first motor, and a first transmission member linked to the lead screw assembly. The positioning structure is fixedly arranged on the first transmission member, and the first transmission member is slidably arranged on the bracket, so that the first motor drives the first transmission member and the positioning structure to move relative to the bracket through the lead screw assembly, so that the positioning structure moves in a direction close to or away from the clamping jaw.

[0018] Further, the second adjusting device includes a second motor, a camshaft linked to the second motor, and a second transmission member slidably arranged on the bracket. The clamping jaw structure is fixedly arranged on the second transmission member, and the second transmission member is linked to the camshaft. When the second motor drives the camshaft to rotate, the camshaft drives the second transmission member and the clamping jaw structure to move relative to the bracket, so that the clamping jaw moves in a direction close to or away from the positioning structure.

[0019] To solve the above technical problems, the embodiments of the present application further provide a wire bonding device, which adopts the following technical solutions: The wire bonding device includes: a workbench system, a bonding head system, and the clamping device.

[0020] Compared with the prior art, the embodiments of the present application mainly have the following beneficial effects: The present application can adjust the clamping jaw, and can also adjust the positioning structure and / or the clamping jaw structure through the adjusting mechanism, so as to adjust the distance between the clamping jaw and the positioning structure to adapt to wafers with different clamping sizes and clamping positions, and further realize clamping wafers with different thicknesses and different structures. The product has strong versatility, does not require customized jigs, has wide applicability, high compatibility, positioning accuracy, and clamping reliability, improves the operation efficiency and accuracy, and has low maintenance cost. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] To more clearly illustrate the solutions of the present application, the following will briefly introduce the drawings required for the description of the embodiments. Obviously, the drawings in the following description are some embodiments of the present application. For those of ordinary skill in the art, other drawings can be obtained based on these drawings without creative efforts.

[0022] Figure 1 is one of the structural schematic diagrams of the clamping device provided by the embodiments of the present application;

[0023] Figure 2 is the second structural schematic diagram of the clamping device provided by the embodiments of the present application;

[0024] Figure 3 is the exploded view of the first adjusting device in the clamping device provided by the embodiments of the present application;

[0025] Figure 4 is the exploded view of the second adjusting device in the clamping device provided by the embodiments of the present application;

[0026] Figure 5 is the cross-sectional view of the clamping device provided by the embodiments of the present application;

[0027] Figure 6 is Figure 5 the enlarged schematic view of A in

[0028] Figure 7 is Figure 5 the enlarged schematic view of B in

[0029] Figure 8 is the exploded view of the positioning structure provided by the embodiments of the present application;

[0030] Figure 9 is the exploded view of the clamping jaw structure provided by the embodiments of the present application;

[0031] Figure 10 is a schematic structural view of the bracket provided by an embodiment of the present application;

[0032] Figure 11 is a schematic structural view of the first transmission member provided by an embodiment of the present application;

[0033] Figure 12 is a schematic structural view of the second transmission member provided by an embodiment of the present application.

[0034] Reference numerals: 1, clamping jaw; 11, first adjusting member; 111, first connection hole; 12, first fixing member; 13, second adjusting member; 131, third connection hole; 14, strip-shaped groove; 15, second fixing member; 16, elastic member; 17, second spring; 19, sensor; 2, connecting member; 21, second connection hole; 3, material table; 31, right-angle limit block; 32, adsorption hole; 33, heating module; 4, first motor; 41, first transmission member; 42, guide rail; 5, lead screw assembly; 51, lead screw; 52, lead screw nut; 6, second motor; 7, camshaft; 71, convex portion; 72, shielding piece; 8, second transmission member; 81, movable member; 10, material piece; 101, edge; 102, wire bonding surface; 61, bracket; 100, positioning structure; 200, clamping jaw structure; 300, first adjusting device; 400, second adjusting device. Detailed implementation manners

[0035] Unless otherwise defined, all technical and scientific terms used herein have the same meaning as commonly understood by those of ordinary skill in the technical field to which this application belongs; the terms used in the specification of this application are only for the purpose of describing specific embodiments and are not intended to limit this application; the terms "including" and "having" and any variations thereof in the specification and claims of this application and the above drawings are intended to cover non-exclusive inclusion. The terms "first", "second", etc. in the specification and claims of this application or the above drawings are used to distinguish different objects and are not used to describe a specific order.

[0036] Reference to "embodiment" herein means that a particular feature, structure, or characteristic described in connection with the embodiment can be included in at least one embodiment of this application. The phrase appears in various places in the specification and does not necessarily refer to the same embodiment, nor is it an independent or alternative embodiment mutually exclusive with other embodiments. Those skilled in the art will explicitly and implicitly understand that the embodiments described herein can be combined with other embodiments.

[0037] In order to enable those skilled in the technical field to better understand the solution of this application, the technical solutions in the embodiments of this application will be clearly and completely described below with reference to the drawings.

[0038] As shown in the attached Figure 1 to the attached Figure 12 figures, an embodiment of the present application provides a clamping device, including:

[0039] An adjustment mechanism;

[0040] A positioning structure 100, arranged on the adjustment mechanism, for placing a wafer 10;

[0041] A jaw structure 200, arranged on the adjustment mechanism, the jaw structure 200 includes a jaw 1 and a connecting member 2, the jaw 1 is adjustably arranged on the connecting member 2 to adjust the distance between the jaw 1 and the positioning structure 100;

[0042] Wherein, the positioning structure 100 moves towards or away from the jaw 1 through the adjustment mechanism, and the jaw structure 200 moves towards or away from the positioning structure 100 through the adjustment mechanism;

[0043] The positioning structure 100 and / or the jaw structure 200 adjust the distance between the jaw 1 and the positioning structure 100 through the adjustment mechanism to adapt to wafers 10 with different clamping sizes and clamping positions.

[0044] The present application can adjust the distance between the jaw 1 and the positioning structure 100 by adjusting the jaw 1 or by adjusting the positioning structure 100 and / or the jaw structure 200 through the adjustment mechanism, so as to adapt to wafers 10 with different clamping sizes and clamping positions, and further realize clamping wafers with different thicknesses and different structures. The product has strong versatility, does not require customized fixtures, has a wide range of applications, high compatibility, positioning accuracy and clamping reliability, improves the operation efficiency and accuracy, and has low maintenance costs.

[0045] Furthermore, the clamping device of the present application can be quickly replaced with the rail system of a traditional fully automatic wire bonding device, that is, directly replace the clamping device on the traditional fully automatic wire bonding device, improving the convenience of the overall machine maintenance and application, and solving the problems that traditional wire bonding devices need to frequently customize fixtures and cannot meet the loading and unloading requirements of products with different sizes and specifications.

[0046] As shown in the attached Figure 1 to the attached Figure 5 and the attached Figure 9As shown, further, the jaw structure 200 further includes a first adjusting member 11. The jaw 1 is horizontally adjustably disposed on the first adjusting member 11, and the first adjusting member 11 is vertically adjustably disposed on the connecting member 2. Through the adjustment of the first adjusting member 11, the jaw 1 can be adjusted in the horizontal direction, that is, to adapt to wafers 10 of different sizes, and can also be adjusted in the vertical direction, that is, to adapt to wafers 10 of different thicknesses. By adjusting in both directions simultaneously, it can adapt to wafers 10 of different structures, enabling the jaw 1 to grip different wafers 10 with high gripping reliability, strong product versatility, no need to customize fixtures, wide product applicability, high compatibility and positioning accuracy, improving the operation efficiency and accuracy, and having low maintenance costs.

[0047] As shown in the attached Figure 1 to the attached Figure 5 and the attached Figure 9 As shown, further, a plurality of first connection holes 111 are provided on the first adjusting member 11, and a plurality of second connection holes 21 are provided on the connecting member 2. The first adjusting member 11 is fixedly connected to the connecting member 2 through a first fixing member 12. By selecting different second connection holes 21 aligned with the first connection holes 111, the distance between the jaw 1 and the positioning structure 100 is adjusted. When the wafer 10 is relatively thick, the first fixing member 12 is removed, and the first adjusting member 11 is moved upward so that the second connection hole 21 aligned with the first connection hole 111 after movement is located above the second connection hole 21 aligned with the first connection hole 111 before movement, and the first fixing member 12 is used to pass through the first connection hole 111 and then connect to the second connection hole 21. When the wafer 10 is relatively thin, the first fixing member 12 is removed, and the first adjusting member 11 is moved downward so that the second connection hole 21 aligned with the first connection hole 111 after movement is located below the second connection hole 21 aligned with the first connection hole 111 before movement, thereby adapting to wafers 10 of different thicknesses, with strong product versatility, no need to customize fixtures, wide product applicability, high compatibility, high positioning accuracy, low maintenance costs, realizing the positioning and gripping of multiple product widths, and solving the problems that traditional wire bonding equipment needs to frequently customize fixtures and cannot meet the loading and unloading requirements of products with different sizes and specifications.

[0048] As shown in the attached Figure 1 to the attached Figure 5 and the attached Figure 9As shown, further, the jaw 1 further includes a second adjusting member 13. A third connection hole 131 is provided on the second adjusting member 13. A strip-shaped groove 14 is formed on the jaw 1. The jaw 1 is fixedly connected to the second adjusting member 13 through a second fixing member 15. When the sheet 10 is larger or smaller, loosen the second fixing member 15, move the jaw 1 left and right so that the jaw 1 abuts against the sheet 10 after movement, and tighten the second fixing member 15. The clamping reliability is high and the product versatility is strong. There is no need to customize the fixture, the product has a wide application range, high compatibility, high positioning accuracy, and low maintenance cost.

[0049] Furthermore, the first fixing member 12 and the second fixing member 15 are configured as bolts, which facilitates adjusting the jaw 1 in the horizontal or vertical direction at any time when bonding the sheets 10 with different thicknesses, sizes, and structures, realizing the positioning and clamping of various product widths, solving the problem that traditional wire bonding equipment needs to frequently customize fixtures, and improving the bonding quality.

[0050] As shown in the appendix Figure 1 to the appendix Figure 5 and the appendix Figure 9 As shown, further, one side of the second adjusting member 13 close to the positioning structure 100 is rotatably connected to the first adjusting member 11. An elastic member 16 is provided on the side of the second adjusting member 13 away from the positioning structure 100. Both ends of the elastic member 16 respectively abut against the first adjusting member 11 and the second adjusting member 13, so that one end of the jaw 1 away from the second adjusting member 13 has a tendency to abut against the sheet 10. The elastic member 16 provides a flexible clamping force for the jaw 1, thereby realizing flexible clamping of the sheet 10, preventing the sheet 10 from being damaged, and at the same time ensuring that the left and right jaws 1 fully contact the product, eliminating voids, and improving the bonding quality.

[0051] Furthermore, the elastic member 16 is configured as a spring, which is easy to manufacture and maintain, can provide reliable performance, and ensure that the left and right jaws 1 fully contact the product, eliminating the situation that the jaws 1 are not firm due to poor flatness of the clamping surface. Of course, compression springs, leaf springs, rubber parts, composite materials and other elastic elements can also be used to make one end of the jaw 1 away from the second adjusting member 13 have a tendency to abut against the sheet 10.

[0052] As shown in the appendix Figure 1 to the appendix Figure 5 and the appendix Figure 7 to the appendix Figure 8As shown, further, the positioning structure 100 includes a material table 3 for placing the material sheet 10, and a right-angle limit block 31 for positioning is arranged on the material table 3. The right-angle limit block 31 can achieve repeated precision positioning of the material sheet 10, different product specifications can be quickly replaced, and the simple mechanism also increases the convenience of its operation, ensuring that the processing position of the material sheet 10 always remains unchanged and improving the yield rate of the material sheet 10.

[0053] Furthermore, adsorption holes 32 are arranged on the material table 3. The positioning structure 100 further includes a heating module 33, a vacuum air path communicating with the adsorption holes 32, and a vacuum generator. Through the action of the vacuum generator, a negative pressure is generated around the adsorption holes 32 to adsorb and fix the material sheet 10. The heating module 33 provides a continuous and stable heating environment for the material sheet 10, facilitating bonding. Of course, magnetic attraction, buckles, etc. can also be used to fix the material sheet 10.

[0054] As shown in the attached Figure 1 to the attached Figure 6 and the attached Figure 10 to the attached Figure 12 As shown, further, the adjusting mechanism includes a bracket 61, a first adjusting device 300 for adjusting the position of the positioning structure 100 on the bracket 61, and a second adjusting device 400 for adjusting the position of the jaw structure 200 on the bracket 61. By adjusting the first adjusting device 300 and / or the second adjusting device 400, the distance between the jaws 1 and the positioning structure 100 is adjusted, so as to adapt to material sheets 10 with different clamping sizes and clamping positions. The first adjusting device 300 or the second adjusting device 400 can be used alone for adjustment to achieve automatic movement, or the first adjusting device 300 and the second adjusting device 400 can be used simultaneously for adjustment, so as to adapt to material sheets 10 with different thicknesses and structures. The product has strong versatility, does not require customized fixtures, has wide product applicability, high compatibility, high positioning accuracy, low maintenance cost, realizes the positioning and clamping of multiple product widths, solves the problem that traditional wire bonding equipment needs to frequently customize fixtures, and improves the bonding quality.

[0055] As shown in the attached Figure 1 to the attached Figure 6 and the attached Figure 10 to the attached Figure 12As shown in the figure, further, the first adjusting device 300 includes a first motor 4, a lead screw assembly 5 linked to the first motor 4, and a first transmission member 41 linked to the lead screw assembly 5. The positioning structure 100 is fixedly arranged on the first transmission member 41. The first transmission member 41 is slidably arranged on the bracket 61, so that the first motor 4 drives the first transmission member 41 and the positioning structure 100 to move relative to the bracket 61 through the lead screw assembly 5, so that the positioning structure 100 moves in a direction close to or away from the jaw 1. The lead screw assembly 5 has high precision. Lead screw transmission can achieve precise position control and motion control, with a compact structure, improved operation efficiency and precision, and low maintenance cost.

[0056] Furthermore, the lead screw assembly 5 includes a lead screw 51 and a lead screw nut 52 linked to the lead screw. The lead screw nut 52 is fixedly connected to the first transmission member 41, converting the rotational motion of the first motor 4 and the lead screw 51 into the linear motion of the lead screw nut 52 and the first transmission member 41, so as to adapt to the wafers 10 of different thicknesses and structures. The product has strong versatility, does not require customized jigs, has a wide range of applications, high compatibility, high positioning accuracy, low maintenance cost, realizes the positioning and clamping of multiple product widths, solves the problem that traditional wire bonding equipment needs to frequently customize jigs, and improves the bonding quality.

[0057] As shown in the Figure 1 to the Figure 6 and the Figure 10 to the Figure 12 As shown in the figure, further, the second adjusting device 400 includes a second motor 6, a camshaft 7 linked to the second motor 6, and a second transmission member 8 slidably arranged on the bracket 61. The jaw structure 200 is fixedly arranged on the second transmission member 8. The second transmission member 8 is linked to the camshaft 7. When the second motor 6 drives the camshaft 7 to rotate, the camshaft 7 drives the second transmission member 8 and the jaw structure 200 to move relative to the bracket 61, so that the jaw 1 moves in a direction close to or away from the positioning structure 100. The second adjusting device 400 drives the second transmission member 8 to reciprocate through the camshaft 7, thereby realizing the pressing and opening of the jaw structure 200. The structure is simple and the reliability is high. Different pressing forces will be generated when the camshaft 7 rotates to different positions. The contour of the camshaft 7 can be precisely designed to achieve precise control of the pressing force and high transmission efficiency.

[0058] Furthermore, guide rails 42 are respectively arranged between the first transmission member 41 and the bracket 61 and between the second transmission member 8 and the bracket 61. The guide rails 42 are crossed roller guide rails, which are a kind of linear motion guiding product with a limited stroke, light and fast movement. They can bear loads in all directions, have high rigidity, strong corrosion resistance, and accurate movement, facilitating the height adjustment of the first transmission member 41 and the second transmission member 8 on the bracket 61. In addition to being driven by the above-mentioned lead screw assembly and camshaft, the first adjustment device 300 and the second adjustment device 400 can also control the up and down movement of the positioning structure 100 and the jaw structure 200 through means such as gear transmission, chain transmission, worm and worm gear transmission, and hydraulic transmission, so as to clamp and process wafers of different structures.

[0059] Furthermore, the second motor 6 is linked with the camshaft 7 through a synchronous belt, facilitating the control of the angle of lifting or lowering of the second transmission member 8. A convex portion 71 protruding away from the center of the circle is arranged on one side of the camshaft 7. A movable member 81 in contact with the camshaft 7 is rotatably arranged on the second transmission member 8. A second spring 17 is also arranged on the bracket 61. Both ends of the second spring 17 are respectively abutted against the bracket 61 and the second transmission member 8, ensuring that the camshaft 7 can always be in contact with the movable member 81, and avoiding accidents such as the inability to drive the second transmission member 8 to move due to the separation of the camshaft 7 from the movable member 81 during use. When the second motor 6 drives the camshaft 7 to rotate so that the convex portion 71 abuts against the movable member 81, the camshaft 7 drives the second transmission member 8 and the jaw structure 200 to move downward relative to the bracket 61. At this time, the second spring 17 is in a compressed state. When the second motor 6 drives the camshaft 7 to rotate so that the convex portion 71 no longer abuts against the movable member 81, the second transmission member 8 and the jaw structure 200 move upward relative to the bracket 61 under the reset action of the second spring 17. The distance of the up and down movement of the second transmission member 8 and the jaw structure 200 on the bracket 61 can also be controlled by controlling the rotation angle of the second motor 6 driving the camshaft 7, so as to achieve precise control of the second transmission member 8, with high transmission efficiency.

[0060] Furthermore, a sensor 19 is also arranged on the bracket 61, and a shielding piece 72 is arranged on the camshaft 7. The sensor 19 can accurately understand the rotation angle of the camshaft 7 through the shielding piece 72, so as to know the height of the lifting or lowering of the second transmission member 8, and thus detect the pressing and opening of the jaw structure 200.

[0061] Furthermore, the wafer 10 can be attached as shown in Appendix Figure 5 to Appendix Figure 8As shown, there are provided a rib 101 and a wire bonding surface 102. The wire bonding surface 102 is located within the rib 101. When bonding, the first adjusting device 300 and the second adjusting device 400 can be used simultaneously. Through the combined action of the first adjusting device 300 and the second adjusting device 400, it is possible to adapt to wafers 10 with different clamping sizes and clamping positions, and thus achieve clamping of wafers with different thicknesses and different structures. The product has strong versatility, does not require custom fixtures, has a wide range of applications, high compatibility, positioning accuracy, and clamping reliability, improves operation efficiency and accuracy, and has low maintenance costs.

[0062] Furthermore, the wafer 10 can also be in a stepped shape and provided with a number of steps. The wire bonding surface of such a wafer 10 is located on the surface between the steps, and wire bonding needs to be performed on the surface between each pair of steps. Due to the special structure, when wire bonding such wafers 10, it is not necessary to use the clamping jaws 1. Only through the action of the vacuum generator, a negative pressure is generated around the adsorption holes 32 to adsorb and fix the wafer 10. At the same time, due to the special wire bonding surface, it is necessary for the first adjusting device 300 to continuously raise or lower the wafer stage 3 during bonding so that the bonding head is always aligned with the wire bonding surface to be bonded and perform bonding on it, thereby achieving processing of wafers with different structures. The product has strong versatility, does not require custom fixtures, has a wide range of applications, high compatibility, positioning accuracy, and clamping reliability, improves operation efficiency and accuracy, and has low maintenance costs.

[0063] As shown in the attached Figure 1 to the attached Figure 12 As shown, based on the above clamping device, an embodiment of the present application further provides a wire bonding device, which adopts the following technical solution: The wire bonding device includes: a workbench system, a bonding head system, and the clamping device. The workbench system is responsible for supporting and precisely moving the wafer. The bonding head system is the part that performs the actual bonding operation. The clamping device can not only adjust the clamping jaws 1, but also adjust the positioning structure 100 and / or the clamping jaw structure 200 through the adjusting mechanism, so as to adjust the distance between the clamping jaws 1 and the positioning structure 100 to adapt to wafers 10 with different clamping sizes and clamping positions, and thus achieve clamping of wafers with different thicknesses and different structures. The product has strong versatility, does not require custom fixtures, has a wide range of applications, high compatibility, positioning accuracy, and clamping reliability, improves operation efficiency and accuracy, and has low maintenance costs.

[0064] Obviously, the embodiments described above are only a part of the embodiments of this application, rather than all of them. The preferred embodiments of this application are shown in the drawings, but they do not limit the patent scope of this application. This application can be implemented in many different forms. On the contrary, the purpose of providing these embodiments is to make the understanding of the disclosed content of this application more thorough and comprehensive. Although this application has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing specific embodiments, or equivalently replace some of the technical features. Any equivalent structure made by using the content of the specification and drawings of this application, directly or indirectly applied in other related technical fields, is similarly within the scope of patent protection of this application.

Claims

1. A clamping device, characterized in that, Including: Adjusting mechanism; Positioning structure (100), arranged on the adjusting mechanism for placing the sheet (10); Jaw structure (200), arranged on the adjusting mechanism, the jaw structure (200) includes jaws (1) and a connecting piece (2), the jaws (1) are adjustably arranged on the connecting piece (2) to adjust the distance between the jaws (1) and the positioning structure (100); Wherein, the positioning structure (100) moves towards or away from the jaws (1) through the adjusting mechanism, and the jaw structure (200) moves towards or away from the positioning structure (100) through the adjusting mechanism; The positioning structure (100) and / or the jaw structure (200) adjust the distance between the jaws (1) and the positioning structure (100) through the adjusting mechanism to adapt to the sheets (10) with different clamping sizes and clamping positions.

2. The clamping device according to claim 1, characterized in that, The jaw structure (200) further includes a first adjusting member (11), the jaws (1) are horizontally adjustably arranged on the first adjusting member (11), and the first adjusting member (11) is vertically adjustably arranged on the connecting piece (2).

3. The clamping device according to claim 2, characterized in that, A number of first connection holes (111) are arranged on the first adjusting member (11), a number of second connection holes (21) are arranged on the connecting piece (2), and the first adjusting member (11) is fixedly connected to the connecting piece (2) through a first fixing member (12). By selecting different second connection holes (21) aligned with the first connection holes (111), the distance between the jaws (1) and the positioning structure (100) is adjusted.

4. The clamping device according to claim 3, wherein The jaws (1) further include a second adjusting member (13), a third connection hole (131) is arranged on the second adjusting member (13), a strip-shaped groove (14) is formed on the jaws (1), and the jaws (1) are fixedly connected to the second adjusting member (13) through a second fixing member (15).

5. The clamping device according to claim 4, characterized in that, One side of the second adjusting member (13) close to the positioning structure (100) is rotatably connected to the first adjusting member (11), an elastic member (16) is arranged on the side of the second adjusting member (13) far from the positioning structure (100), and both ends of the elastic member (16) respectively abut against the first adjusting member (11) and the second adjusting member (13) so that one end of the jaws (1) far from the second adjusting member (13) has a tendency to abut against the sheet (10).

6. The clamping device according to claim 1, characterized in that, The positioning structure (100) includes a material table (3) for placing the sheet (10), and a right-angle limit block (31) for positioning is arranged on the material table (3).

7. The clamping device according to claim 1, characterized in that, The adjusting mechanism includes a bracket (61), a first adjusting device (300) for adjusting the position of the positioning structure (100) on the bracket (61), and a second adjusting device (400) for adjusting the position of the jaw structure (200) on the bracket (61). The distance between the jaw (1) and the positioning structure (100) is adjusted by adjusting the first adjusting device (300) and / or the second adjusting device (400).

8. The clamping device according to claim 7, characterized in that The first adjusting device (300) includes a first motor (4), a lead screw assembly (5) linked to the first motor (4), and a first transmission member (41) linked to the lead screw assembly (5). The positioning structure (100) is fixedly arranged on the first transmission member (41). The first transmission member (41) is slidably arranged on the bracket (61), so that the first motor (4) drives the first transmission member (41) and the positioning structure (100) to move relative to the bracket (61) through the lead screw assembly (5), so that the positioning structure (100) moves in a direction close to or away from the jaw (1).

9. The clamping device according to claim 7, wherein The second adjusting device (400) includes a second motor (6), a camshaft (7) linked to the second motor (6), and a second transmission member (8) slidably arranged on the bracket (61). The jaw structure (200) is fixedly arranged on the second transmission member (8). The second transmission member (8) is linked to the camshaft (7). When the second motor (6) drives the camshaft (7) to rotate, the camshaft (7) drives the second transmission member (8) and the jaw structure (200) to move relative to the bracket (61), so that the jaw (1) moves in a direction close to or away from the positioning structure (100).

10. A wire bonding device, characterized in that, Comprising: A workbench system, a welding head system, and a clamping device according to any one of claims 1-9.