Clamping mechanism and slicing machine

Abstract

The utility model discloses a clamping mechanism which comprises at least one clamping piece, the clamping piece comprises a clamping base, a clamping head and a supporting plate are arranged on the clamping base, the clamping head is located above the supporting plate, and the clamping head is movably connected with the clamping base and can move in a reciprocating mode towards the direction where the supporting plate is located. A clamping space used for clamping a clamped object is formed between the clamping head and the supporting plate. According to the clamping mechanism, the chuck does not need to overcome the gravity of a clamped object in the clamping process, the influence of external stress on the clamped object is reduced, the area of the clamping face of the chuck is increased, the clamping effect is improved, the subfissure rate is reduced, and the clamping mechanism runs stably.

Description

Technical Field

[0001] The utility model relates to the field of hard and brittle material processing equipment, in particular to a clamping mechanism and a slicing machine. Background Art

[0002] For cutting and processing equipment of hard and brittle materials, especially cutting equipment for cutting silicon wafers, it is often necessary to ensure high processing accuracy. Existing equipment mostly uses a wire saw slicing machine to cut silicon materials. The silicon materials are first connected to a resin plate on a workpiece plate by bonding, and then the workpiece plate is tightly connected to a clamping mechanism. The clamping mechanism drives the silicon materials to move and cooperate with a cutting device to make the silicon materials contact the wire saw on the cutting device, thereby completing the cutting process.

[0003] The clamping effect of the clamping mechanism on the workpiece plate directly affects the final processing accuracy and cutting quality of the silicon materials. Existing clamping mechanisms usually adopt an upward-pulling clamping method, that is, an inverted T-shaped groove is provided on the workpiece plate, and a corresponding inverted T-shaped chuck is provided on the clamping mechanism. The chuck first slides into the groove and is mutually clamped with the groove, and then the chuck is pulled upward to press the upper surface of the workpiece plate against the body of the clamping mechanism to complete the clamping operation of the workpiece plate.

[0004] The above-mentioned clamping mechanism with upward-pulling clamping has the following problems: during the clamping process, the chuck needs to overcome the self-gravity of hard and brittle materials such as silicon rods and the workpiece plate before clamping, resulting in poor clamping effect; in order to ensure the structural strength of the workpiece plate itself, the opening size of the inverted T-shaped groove is limited, usually small. Correspondingly, the size of the chuck for clamping cooperation cannot be made large, especially in terms of the width dimension of the chuck. Based on this, for the clamping mechanism with upward-pulling clamping, the cutting force generated by cutting tools such as wire saws during material cutting will generate a large torque at the clamping point of the clamping mechanism, thereby causing hard and brittle materials to easily generate internal stress, resulting in defects such as hidden cracks in the processed materials such as silicon rods, affecting the cutting quality and processing accuracy of the materials. Summary of the Utility Model

[0005] The purpose of the utility model is to provide a clamping mechanism and a slicing machine. The clamping mechanism uses a downward-pressing clamping method to clamp the object to be clamped. The specific technical solution is as follows:

[0006] A clamping mechanism includes at least one clamping member. The clamping member includes a clamping base, a chuck and a support plate are arranged on the clamping base. The chuck is located above the support plate. The chuck is movably connected to the clamping base and can reciprocate in the direction of the support plate. A clamping space for clamping the object to be clamped is formed between the chuck and the support plate.

[0007] Further, the lower surface of the chuck is the clamping surface, and the upper surface of the support plate is the clamping surface. The chuck and the support plate move relative to each other by extrusion to clamp the object to be clamped.

[0008] Further, the width of the chuck matches the width of the clamping space.

[0009] Further, two relatively arranged extension arms are provided on the clamping base. The extension arms extend downward in the vertical direction. The chuck and the clamping space are located between the two extension arms. A support plate is provided at each lower end of the two extension arms. The two support plates extend relatively in the horizontal direction so as to form a clamping space between the two support plates and the chuck.

[0010] Further, a through hole is provided on the clamping base. A connecting rod is arranged in the through hole. One end of the connecting rod is connected to the chuck, and the other end is connected to a first driving assembly. The first driving assembly can drive the connecting rod to reciprocate in the through hole, thereby driving the chuck to reciprocate.

[0011] Further, an elastic member is provided between the connecting rod and the clamping base. The first driving assembly can apply a thrust at the end of the connecting rod away from the chuck, so that the connecting rod compresses the elastic member and drives the chuck to move towards the support plate; when the first driving assembly withdraws the thrust, the connecting rod can be reset under the action of the elastic member's rebound.

[0012] Further, a disc spring cylinder is provided on the clamping base, and the connecting rod is the power output rod of the disc spring cylinder.

[0013] Further, the first driving assembly includes a rotating shaft, an eccentric wheel is sleeved on the rotating shaft, the rotating shaft is connected to the second driving assembly, the second driving assembly can drive the rotating shaft to drive the eccentric wheel to rotate together, and the eccentric wheel is in contact connection with the connecting rod. The eccentric wheel rotates to drive the connecting rod to reciprocate through the change of the eccentricity.

[0014] Further, the second driving assembly includes a power element and a swing arm. The power element is hinged to the first end of the swing arm, and the second end of the swing arm is fixedly connected to the rotating shaft. The power element can drive the first end of the swing arm to swing, thereby driving the rotating shaft at the second end of the swing arm to rotate.

[0015] Further, the second driving assembly includes a power element, a rack and a gear. The gear is sleeved on the rotating shaft, the rack is meshed with the gear, and the power element is connected to the rack. The power element can drive the rack to reciprocate, thereby driving the gear and the rotating shaft to rotate; alternatively, the second driving assembly includes a power element, a first gear and a second gear. The first gear is connected to the power element, the second gear is sleeved on the rotating shaft, the first gear is meshed with the second gear, and the power element can drive the first gear to rotate, and the first gear drives the second gear and the rotating shaft to rotate.

[0016] Further, the clamping members include two or more, and the two or more clamping members are dispersedly arranged on the rotating shaft. The rotating shaft can drive the two or more clamping members to clamp two or more parts on the object to be clamped respectively.

[0017] Further, a first bearing seat is arranged at the end of the rotating shaft. A first bearing, a first shaft snap ring and a first hole snap ring are arranged in the first bearing seat. The first bearing is sleeved on the rotating shaft, the first shaft snap ring is clamped on the rotating shaft, and the first hole snap ring is clamped on the first bearing seat; at least one second bearing seat is arranged in the middle of the rotating shaft. A second bearing, a second shaft snap ring and a second hole snap ring are arranged in the second bearing seat. The second bearing is sleeved on the rotating shaft, the second shaft snap ring is clamped on the rotating shaft, and the second hole snap ring is clamped on the second bearing seat.

[0018] A slicing machine includes a workpiece plate for connecting the material to be processed and the clamping mechanism described above. Slots are arranged on both sides of the workpiece plate. The support plate in the clamping mechanism is clamped in the slots on both sides of the workpiece plate. The lower surface of the chuck in the clamping mechanism is in extrusion fit with the upper surface of the workpiece plate to clamp the workpiece plate.

[0019] The clamping mechanism and the slicing machine of the present utility model have the following advantages:

[0020] 1. Adopting the downward pressing clamping method with the cooperation of the chuck and the support plate enables the chuck not to need to overcome the self-gravity of the object to be clamped during the clamping process, thereby improving the clamping effect and reducing the hidden crack rate.

[0021] 2. Adopting the downward pressing clamping method can greatly increase the size of the chuck, which can be roughly equivalent to the width of the object to be clamped, and the area of the clamping surface is increased. It can not only ensure reliable and stable clamping, but also greatly reduce the cutting torque generated when cutting the material, making the material to be cut not easily generate internal stress and further reducing the hidden crack rate.

[0022] 3. The workpiece plate for fixing the material to be cut does not need to be hollowed out in the middle to cooperate with the chuck, which improves the rigidity of the workpiece plate and can further reduce the generation of internal stress.

[0023] 4. Adopting the cooperation driving method of the eccentric wheel and the disc spring cylinder is beneficial to enhancing the working stability of the chuck and improving the clamping effect. Description of the Drawings

[0024] Figure 1 It is a schematic structural diagram when the clamping member in the clamping mechanism clamps the object to be clamped.

[0025] Figure 2 It is a cross-section of the first embodiment of the clamping mechanism Figure 1 。

[0026] Figure 3 It is a cross-section of the first embodiment of the clamping mechanismFigure 2 .

[0027] Figure 4 A cross-sectional view of the second embodiment of the clamping mechanism.

[0028] Figure 5 A cross-sectional view of the third embodiment of the clamping mechanism. Detailed implementation manners

[0029] For a better understanding of the purpose, structure and function of the present utility model, the clamping mechanism and the slicing machine of the present utility model will be described in detail below with reference to the accompanying drawings.

[0030] As Figure 1 and Figure 2 shown, the clamping mechanism in the present utility model includes at least one clamping member. The clamping member includes a clamping base 1, a chuck 2 and a support plate 3 are arranged on the clamping base 1. The chuck 2 is located above the support plate 3. The chuck 2 is movably connected to the clamping base 1 and can reciprocate towards the direction where the support plate 3 is located. A clamping space for clamping the object to be clamped is formed between the chuck 2 and the support plate 3. The object to be clamped is located in the clamping space. The support plate 3 abuts against the object to be clamped from below, and the chuck 2 presses the object to be clamped downward from above to realize stable clamping of the object to be clamped.

[0031] In the slicing machine of the present utility model, the above clamping mechanism is mainly used to clamp the workpiece plate 100. As Figure 1 shown, the bottom surface of the workpiece plate 100 is used for adhesively fixing the resin plate 200. The photovoltaic material 300 is fixed on the resin plate 200 by an adhesive method. The clamping mechanism stably clamps the workpiece plate 100 and contacts the cutting wire mesh wound on the cutting device in the slicing machine to realize the cutting process of the photovoltaic material 300. Of course, the clamping mechanism in the present utility model can also be used for clamping other objects to be clamped involved in the field of hard and brittle material processing.

[0032] Further, the lower surface of the chuck 2 is a plane, forming a clamping surface for clamping the object to be clamped. The upper surface of the support plate 3 forms a clamping surface for clamping the object to be clamped. The lower surface of the chuck 2 and the upper surface of the support plate 3 move relatively and squeeze to realize the clamping operation of the object to be clamped.

[0033] The above downward pressing type clamping structure with the chuck 2 and the support plate 3 cooperating up and down can enable the chuck 2 not to overcome the self-gravity of the object to be clamped during the clamping process, thereby improving the clamping effect and reducing the hidden crack rate of the material during the processing.

[0034] Further, as Figure 1As shown, the width of the chuck 2 matches the width of the clamping space. To improve the clamping stability and clamping force of the chuck 2, reduce the cutting torque generated during material processing, and make the material to be cut less likely to generate internal stress, it is preferably to set the width of the chuck 2 as large as possible to increase the area of the clamping surface of the chuck 2. Therefore, in the above "the width of the chuck 2 matches the width of the clamping space", "matches" means that the width of the chuck 2 is slightly smaller than the width of the clamping space. On the premise of ensuring that there is no movement interference between the chuck 2 and components such as the clamping base 1 and the support plate 3, the chuck 2 has the largest possible width. Usually, the width of the clamping space roughly matches the width of the object to be clamped. Therefore, the chuck 2 in the present utility model can be roughly equivalent to the width of the object to be clamped in terms of width. Adopting the above setting method helps to further reduce the hidden crack rate of the material.

[0035] Specifically, as Figure 1 and Figure 2 shown, two relatively arranged extension arms 11 are provided on the clamping base 1. The extension arms 11 extend downward in the vertical direction. The chuck 2 and the clamping space are located between the two extension arms 11. A support plate 3 is provided at the lower end of each of the two extension arms 11. The two support plates 3 extend relatively in the horizontal direction so as to form a clamping space between the two support plates 3 and the chuck 2.

[0036] As Figure 2 shown, a through hole is provided on the clamping base 1. A connecting rod 4 is provided in the through hole. One end of the connecting rod 4 is connected to the chuck 2, and the other end is connected to a first driving component. The first driving component can drive the connecting rod 4 to reciprocate in the through hole, and then drive the chuck 2 to reciprocate up and down between the two extension arms 11 of the clamping base 1. When the chuck 2 extends downward, it can clamp the object to be clamped together with the support plate 3.

[0037] Further, an elastic member 5 is provided between the connecting rod 4 and the clamping base 1. The first driving component can apply a thrust at one end of the connecting rod 4 away from the chuck 2, so that the connecting rod 4 compresses the elastic member 5 and drives the chuck 2 to make an extending movement; when the first driving component withdraws the thrust, the connecting rod 4 can be reset under the elastic return of the elastic member 5. The elastic member 5 can be an elastic element such as a spring, a spring sheet, or a disc spring.

[0038] Preferably, a disc spring cylinder 6 is provided on the clamping base 1, and the connecting rod 4 is a power output rod of the disc spring cylinder 6. The first driving component pushes the power output rod of the disc spring cylinder 6, so that the power output rod drives the chuck 2 to extend. At this time, the disc spring in the disc spring cylinder 6 is compressed. When the first driving component reduces or withdraws the thrust, the disc spring in the disc spring cylinder 6 rebounds and resets, thereby driving the power output rod and the chuck 2 to make a reset movement.

[0039] Of course, the above-described method of driving the chuck 2 to reciprocate by the disc spring cylinder 6 is a preferred embodiment. In addition, other common transmission and drive structures can also be used to movably connect the chuck 2 to the clamping base 1 to achieve the reciprocating movement of the chuck 2.

[0040] Preferably, as Figure 2 shown, the first drive assembly includes a rotating shaft 71, on which an eccentric wheel 72 is sleeved. The rotating shaft 71 and the eccentric wheel 72 are fixedly connected by a flat key 73. The rotating shaft 71 is connected to the second drive assembly, and the second drive assembly can drive the rotating shaft 71 to drive the eccentric wheel 72 to rotate together. The outer peripheral wall of the eccentric wheel 72 is in contact connection with the end of the connecting rod 4. During the rotation of the eccentric wheel 72, the eccentricity of the eccentric wheel 72 will change, and the eccentric wheel 72 drives the connecting rod 4 to reciprocate up and down through the change of the eccentricity.

[0041] Of course, in addition to the above-described preferred embodiment in which the rotating shaft 71 and the eccentric wheel 72 cooperate, the first drive assembly can also directly use power elements such as air cylinders and oil cylinders as drive members and connect them to the connecting rod 4 to achieve the pushing of the connecting rod 4.

[0042] Preferably, in Figure 2 and Figure 3 shown in the first embodiment of the present invention, the second drive assembly includes a power element and a swing arm 8. The power element is hinged to the first end of the swing arm 81, and the second end of the swing arm 81 is fixedly connected to the rotating shaft 71 by a key. The power element can drive the first end of the swing arm 81 to swing, thereby driving the rotating shaft 71 at the second end of the swing arm 81 to rotate. The rotation of the rotating shaft 71 can drive the eccentric wheel 72 to rotate to achieve the drive of the connecting rod 4. The power element can be a drive structure such as an air cylinder, an oil cylinder, or a motor.

[0043] Preferably, as Figure 2 shown, a joint is connected to the power element, and the joint is hinged to the first end of the swing arm 81 by a pin shaft.

[0044] Preferably, in Figure 4 shown in the second embodiment of the present invention, the second drive assembly includes a power element, a rack 82, and a gear 83. The gear 83 is sleeved on the rotating shaft 71, the rack 82 is meshed with the gear 83, the power element is connected to the rack 82, and the power element can drive the rack 82 to reciprocate, thereby driving the gear 83 and the rotating shaft 71 to rotate. The rotation of the rotating shaft 71 can drive the eccentric wheel 72 to rotate to achieve the drive of the connecting rod 4. The power element can be a drive structure such as an air cylinder, an oil cylinder, or a motor.

[0045] Preferably, in Figure 5In the third embodiment of the present utility model shown, the second driving assembly includes a power element, a first gear 84 and a second gear 85. The first gear 84 is connected to the power element, the second gear 85 is sleeved on the rotating shaft 71, the first gear 84 meshes with the second gear 85. The power element can drive the first gear 84 to rotate, and the first gear 84 drives the second gear 85 to rotate, thereby driving the rotating shaft 71 to rotate. The rotation of the rotating shaft 71 can drive the eccentric wheel 72 to rotate, so as to realize the driving of the connecting rod 4. The power element can be a driving structure such as a cylinder, an oil cylinder, a motor, etc.

[0046] Preferably, as Figure 3 and Figure 5 shown, in the clamping mechanism of the present utility model, the clamping members include two or more, and two or more clamping members are dispersedly arranged on the rotating shaft 71. The rotating shaft 71 can drive two or more clamping members to work simultaneously, so as to clamp two or more parts on the object to be clamped respectively, improve the stability and reliability of clamping, and at the same time further disperse and reduce the generation of stress.

[0047] Specifically, a first bearing seat 91 is arranged at the end of the rotating shaft 71. A first bearing 92, a first shaft snap ring and a first hole snap ring are arranged in the first bearing seat 91. The first bearing 92 is sleeved on the rotating shaft 71, the first shaft snap ring is clamped on the rotating shaft 71, and the first hole snap ring is clamped on the first bearing seat 91. The first shaft snap ring is used to fix the inner ring of the first bearing 92, and the first hole snap ring cooperates with the end face of the first bearing seat 91 to fix the outer ring of the first bearing 92; at least one second bearing seat 93 is arranged in the middle of the rotating shaft 71. A second bearing 94, a second shaft snap ring and a second hole snap ring are arranged in the second bearing seat 93. The second bearing 94 is sleeved on the rotating shaft 71, the second shaft snap ring is clamped on the rotating shaft 71, and the second hole snap ring is clamped on the second bearing seat 93. The second shaft snap ring is used to fix the inner ring of the second bearing 94, and the second hole snap ring cooperates with the end face of the second bearing seat 93 to fix the outer ring of the second bearing 94.

[0048] The present utility model also discloses a slicing machine, which includes a workpiece plate 100 for connecting the material to be processed and the clamping mechanism described above. As Figure 1 shown, clamping grooves are arranged on both sides of the workpiece plate 100. The support plate 3 in the clamping mechanism is clamped in the clamping grooves on both sides of the workpiece plate 100, and the lower surface of the chuck 2 in the clamping mechanism is in extrusion fit with the upper surface of the workpiece plate 100 to clamp the workpiece plate 100. By using the clamping mechanism in the present utility model, the workpiece plate 100 for fixing the material to be cut does not need to be hollowed out in the middle to cooperate with the chuck 2, which improves the rigidity of the workpiece plate 100, further reduces the generation of internal stress, and reduces the hidden crack rate.

[0049] The clamping mechanism and the slicing machine of the present utility model have the following advantages:

[0050] 1. The downward clamping method with the cooperation of a chuck and a support plate enables the chuck not to overcome the self - gravity of the clamped object during the clamping process, thereby improving the clamping effect and reducing the hidden crack rate.

[0051] 2. The downward clamping method can greatly increase the size of the chuck, which can be roughly equivalent to the width of the clamped object, increasing the area of the clamping surface. This not only ensures reliable and stable clamping but also greatly reduces the cutting torque generated when cutting the material, reduces the influence of external stress on the clamped object, and further reduces the hidden crack rate.

[0052] 3. The workpiece plate for fixing the material to be cut does not need to be hollowed out in the middle to cooperate with the chuck, improving the rigidity of the workpiece plate and further reducing the generation of internal stress.

[0053] 4. The cooperation driving method of an eccentric wheel and a disc spring cylinder is beneficial to enhancing the working stability of the chuck and improving the clamping effect.

[0054] The above further describes the present utility model with the help of specific embodiments. However, it should be understood that this specific description should not be construed as a limitation on the essence and scope of the present utility model. Various modifications made by those of ordinary skill in the art to the above - mentioned embodiments after reading this specification all fall within the scope protected by the present utility model. Among the various specific technical features described in the above - mentioned specific implementation manners, they can be combined in any appropriate manner without contradiction. To avoid unnecessary repetition, the embodiments of the present utility model do not separately explain various possible combination methods.

[0055] If there are directional indications (such as up, down, left, right, front, back...) involved in the embodiments of the present utility model, then such directional indications are only used to explain the relative position relationship and movement conditions between components in a certain specific posture (as shown in the drawings). If this specific posture changes, then the directional indications will also change accordingly.

Claims

1. A clamping mechanism, characterized in that, It includes at least one clamping member, and the clamping member includes a clamping base. A chuck and a support plate are arranged on the clamping base. The chuck is located above the support plate. The chuck is movably connected to the clamping base and can reciprocate in the direction of the support plate. A clamping space for clamping the object to be clamped is formed between the chuck and the support plate.

2. The clamping mechanism according to claim 1, characterized in that, The lower surface of the chuck is a clamping surface, and the upper surface of the support plate is a clamping surface. The chuck and the support plate relatively extrude and move to clamp the object to be clamped.

3. The clamping mechanism according to claim 1, characterized in that, The width of the chuck matches the width of the clamping space.

4. The clamping mechanism according to claim 1, wherein, Two oppositely arranged extension arms are arranged on the clamping base. The extension arms extend downward in the vertical direction. The chuck and the clamping space are located between the two extension arms. A support plate is arranged at the lower end of each of the two extension arms. The two support plates extend relatively in the horizontal direction so that a clamping space is formed between the two support plates and the chuck.

5. The clamping mechanism according to any one of claims 1 to 4, characterized in that, A through hole is arranged on the clamping base. A connecting rod is arranged in the through hole. One end of the connecting rod is connected to the chuck, and the other end is connected to a first driving component. The first driving component can drive the connecting rod to reciprocate in the through hole, thereby driving the chuck to reciprocate.

6. The clamping mechanism according to claim 5, characterized in that, An elastic member is arranged between the connecting rod and the clamping base. The first driving component can apply a thrust at the end of the connecting rod away from the chuck, so that the connecting rod compresses the elastic member and drives the chuck to move towards the support plate. When the first driving component withdraws the thrust, the connecting rod can be reset under the action of the elastic member's rebound.

7. The clamping mechanism according to claim 6, wherein A disc spring cylinder is arranged on the clamping base, and the connecting rod is the power output rod of the disc spring cylinder.

8. The clamping mechanism according to claim 6, characterized in that The first driving component includes a rotating shaft, and an eccentric wheel is sleeved on the rotating shaft. The rotating shaft is connected to the second driving component. The second driving component can drive the rotating shaft to drive the eccentric wheel to rotate together. The eccentric wheel is in contact connection with the connecting rod, and the eccentric wheel rotates to drive the connecting rod to reciprocate through the change of the eccentricity.

9. The clamping mechanism according to claim 8, wherein, The second driving component includes a power element and a swing arm. The power element is hinged to the first end of the swing arm, and the second end of the swing arm is fixedly connected to the rotating shaft. The power element can drive the first end of the swing arm to swing, thereby driving the rotating shaft at the second end of the swing arm to rotate.

10. The clamping mechanism according to claim 8, wherein, The second driving component includes a power element, a rack and a gear. The gear is sleeved on the rotating shaft. The rack is meshed with the gear. The power element is connected to the rack. The power element can drive the rack to reciprocate, thereby driving the gear and the rotating shaft to rotate. Or, the second driving component includes a power element, a first gear and a second gear. The first gear is connected to the power element. The second gear is sleeved on the rotating shaft. The first gear is meshed with the second gear. The power element can drive the first gear to rotate, and the first gear drives the second gear and the rotating shaft to rotate.

11. The clamping mechanism according to any one of claims 8 to 10, characterized in that, There are two or more clamping members. The two or more clamping members are dispersedly arranged on the rotating shaft. The rotating shaft can drive the two or more clamping members to clamp two or more parts on the object to be clamped respectively.

12. The clamping mechanism according to any one of claims 8 to 10, characterized in that, A first bearing seat is arranged at the end of the rotating shaft. A first bearing, a first shaft snap ring and a first hole snap ring are arranged in the first bearing seat. The first bearing is sleeved on the rotating shaft, the first shaft snap ring is clamped on the rotating shaft, and the first hole snap ring is clamped on the first bearing seat; at least one second bearing seat is arranged in the middle of the rotating shaft. A second bearing, a second shaft snap ring and a second hole snap ring are arranged in the second bearing seat. The second bearing is sleeved on the rotating shaft, the second shaft snap ring is clamped on the rotating shaft, and the second hole snap ring is clamped on the second bearing seat.

13. A slicing machine, characterized in that, It includes a workpiece plate for connecting the material to be processed and the clamping mechanism described in any one of claims 1 to 12. Card slots are arranged on both sides of the workpiece plate. The support plate in the clamping mechanism is clamped in the card slots on both sides of the workpiece plate. The lower surface of the chuck in the clamping mechanism is in extrusion fit with the upper surface of the workpiece plate to clamp the workpiece plate.

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