Robot plate feeding machine

Abstract

The utility model discloses a robot board feeding machine, which relates to the technical field of circuit boards, and comprises a rack, a first board supporting mechanism, a second board supporting mechanism, a positioning mechanism and a carrying manipulator, the rack is provided with a first notch and a second notch, and the first notch and the second notch are both used for a carrier containing a substrate to enter; the carrying mechanical arm is arranged above the positioning mechanism, the first notch and the second notch and used for carrying the base plates supported by the first plate supporting mechanism in the first notch and the second plate supporting mechanism in the second notch to the positioning mechanism, and the positioning mechanism is used for positioning the base plates. After the base plate on the plate supporting mechanism of one notch is taken by the carrying manipulator, the base plate can be supplemented in time, at the moment, the carrying manipulator carries the base plate at the position of the other notch, the situation of material breakage is avoided, the base plates are continuously fed, and the carrying manipulator is arranged above the positioning mechanism, the first notch and the second notch. And the occupied area of the plate feeding machine can be reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of printed circuit boards, and particularly relates to a board loading machine. Background Art

[0002] In the process of manufacturing circuit boards, it is necessary to transfer substrates on various devices to complete various processing procedures of the circuit boards on various devices. At present, most use a board placing machine to feed a conveyor belt or various devices. After the board placing machine finishes loading the substrates on it, additional equipment or manual operation is required to feed the substrates to the board placing machine. At this time, the board placing machine stops feeding the conveyor belt or various devices, and it is impossible to continuously feed the substrates, which will affect the processing speed of subsequent various devices. Summary of the Utility Model

[0003] The utility model aims to solve at least one of the technical problems existing in the prior art. For this purpose, the utility model provides a robotic board loading machine that can continuously feed materials.

[0004] A robotic board loading machine according to an embodiment of the utility model includes a frame, a first pallet mechanism, a second pallet mechanism, a positioning mechanism, and a handling manipulator. The frame is provided with a first notch and a second notch, and both the first notch and the second notch are used for a carrier containing substrates to enter; the first pallet mechanism is arranged in the first notch, and the first pallet mechanism is used to lift the substrates on the carrier in the first notch; the second pallet mechanism is arranged in the second notch, and the second pallet mechanism is used to lift the substrates on the carrier in the second notch; the positioning mechanism is arranged on the frame, and the handling manipulator is arranged above the positioning mechanism, the first notch, and the second notch. The handling manipulator is used to transport the substrates lifted by the first pallet mechanism and the second pallet mechanism to the positioning mechanism, and the positioning mechanism is used to position the substrates.

[0005] It has at least the following beneficial effects:

[0006] Since both the first notch and the second notch can receive and supply substrates, when the substrates on the pallet mechanism in one notch are taken away by the handling manipulator, substrates can be replenished in time. At this time, the handling manipulator transports the substrates at the other notch to avoid material shortage and achieve continuous feeding of substrates, thus avoiding affecting the processing speed of subsequent various devices. And the handling manipulator is arranged above the positioning mechanism, the first notch, and the second notch, which can reduce the floor area of the board loading machine.

[0007] According to some embodiments of the utility model, the handling manipulator includes a first horizontal swing arm, a second horizontal swing arm, a first lifting drive mechanism, and a fixture connected in sequence, and the first horizontal swing arm is connected to the frame.

[0008] According to some embodiments of the present utility model, the fixture includes a mounting plate connected to the output end of the first lifting drive mechanism. Two first crossbars that can move away from and close to each other are provided on the mounting plate. At least two cushion plates and two clamping arms are provided on the first crossbar. The cushion plates and the clamping arms cooperate to clamp one end of the substrate.

[0009] According to some embodiments of the present utility model, a second lifting drive mechanism is provided in the area of the first crossbar corresponding to the cushion plate. A pneumatic finger is provided at the output end of the second lifting drive mechanism. The clamping arm is connected to the first crossbar through the pneumatic finger and the second lifting drive mechanism.

[0010] According to some embodiments of the present utility model, a plurality of first suction nozzles for adsorbing the substrate are provided on the first crossbar.

[0011] According to some embodiments of the present utility model, a second crossbar is provided in the middle area of the mounting plate. At least two second suction nozzles for adsorbing the substrate are provided on the second crossbar.

[0012] According to some embodiments of the present utility model, a first linear drive mechanism is provided on the mounting plate. The output end of the first linear drive mechanism is connected to the first crossbar through a linear bearing. An elastic member is provided between the output end of the first linear drive mechanism and the first crossbar.

[0013] According to some embodiments of the present utility model, the positioning mechanism includes a platen and a plurality of positioning columns. A plurality of first guiding holes and a plurality of second guiding holes are provided on the platen. The length directions of the first guiding holes and the second guiding holes are perpendicular to each other. The second guiding holes are at least divided into two rows. A plurality of second linear drive mechanisms are provided below the positioning columns. The output end of the second linear drive mechanism is connected to a third lifting drive mechanism. The output end of the third lifting drive mechanism is connected to the positioning column. A plurality of the positioning columns pass through the first guiding holes and the second guiding holes. The plurality of positioning columns are used to position the four end faces of the substrate.

[0014] According to some embodiments of the present utility model, a receiving groove is provided on the upper end face of the positioning column. A position sensor is provided in the receiving groove. The position sensor is used to detect whether the substrate is on the positioning column.

[0015] According to some embodiments of the present utility model, the first pallet mechanism includes a fourth lifting drive mechanism connected to the frame and two pallets both provided on the output end of the fourth lifting drive mechanism.

[0016] Additional aspects and advantages of the present utility model will be given in part in the following description, become apparent in part from the following description, or be learned through the practice of the present utility model. Brief Description of the Drawings

[0017] The present utility model will be further described below in conjunction with the drawings and embodiments, where:

[0018] Figure 1 is one of the structural schematic diagrams of the embodiment of the present utility model;

[0019] Figure 2 is the second of the structural schematic diagrams of the embodiment of the present utility model;

[0020] Figure 3 is the structural schematic diagram of the handling manipulator of the embodiment of the present utility model;

[0021] Figure 4 is the structural schematic diagram of the fixture of the embodiment of the present utility model;

[0022] Figure 5 is the structural schematic diagram of the platen and the positioning column of the embodiment of the present utility model;

[0023] Figure 6 is the structural schematic diagram of the platen, the second linear drive mechanism, the third lifting drive mechanism and the positioning column of the embodiment of the present utility model;

[0024] Reference Numerals in the Drawings:

[0025] Frame 100; First Notch 110; Second Notch 120;

[0026] First Pallet Mechanism 200;

[0027] Second Pallet Mechanism 300;

[0028] Positioning Mechanism 400; Platen 410; First Guide Hole 411; Second Guide Hole 412; Positioning Column 420; Receiving Groove 421; Second Linear Drive Mechanism 430; Third Lifting Drive Mechanism 440;

[0029] Handling Manipulator 500; First Horizontal Swing Arm 510; Second Horizontal Swing Arm 520; Fixture 530; Mounting Plate 531; First Cross Bar 532; Clamping Arm 533; Second Lifting Drive Mechanism 534; Pneumatic Finger 535; First Suction Nozzle 536; Linear Bearing 537; Elastic Member 538; Second Cross Bar 539;

[0030] Second Suction Nozzle 600. Detailed Embodiments

[0031] Embodiments of the present utility model will be described in detail below. Examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals denote the same or similar elements or elements having the same or similar functions throughout. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.

[0032] In the description of the present utility model, it should be understood that with regard to the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc., is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model.

[0033] In the description of the present utility model, "a plurality" refers to more than two. If there is a description of first and second, it is only for the purpose of distinguishing technical features and should not be construed as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or the sequence relationship of the indicated technical features.

[0034] In the description of the present utility model, unless otherwise clearly defined, terms such as "set", "installed", "connected", etc. should be understood in a broad sense. Those skilled in the art can reasonably determine the specific meanings of the above terms in the present utility model in combination with the specific content of the technical solution.

[0035] Refer to Figure 1 and Figure 2 , the present utility model discloses a robot upper board machine, which includes a frame 100, a first pallet mechanism 200, a second pallet mechanism 300, a positioning mechanism 400, and a handling manipulator 500. A first notch 110 and a second notch 120 are provided on the frame 100, and both the first notch 110 and the second notch 120 are used for the carrier containing the substrate to enter; the first pallet mechanism 200 is arranged in the first notch 110, and the first pallet mechanism 200 is used to lift the substrate on the carrier in the first notch 110; the second pallet mechanism 300 is arranged in the second notch 120, and the second pallet mechanism 300 is used to lift the substrate on the carrier in the second notch 120; the positioning mechanism 400 is arranged on the frame 100, the handling manipulator 500 is arranged above the positioning mechanism 400, the first notch 110, and the second notch 120, and the handling manipulator 500 is used to transport the substrates lifted by the first pallet mechanism 200 and the second pallet mechanism 300 to the positioning mechanism 400, and the positioning mechanism 400 is used to position the substrates.

[0036] The carrier is fed into the first notch 110 and the second notch 120 respectively. The substrate is loaded on the carrier. Then, the first pallet mechanism 200 and the second pallet mechanism 300 lift the substrates in the first notch 110 and the second notch 120 respectively, so that the handling manipulator 500 can transport the substrates lifted by the first pallet mechanism 200 and the second pallet mechanism 300 to the positioning mechanism 400. The positioning mechanism 400 is used to position the substrate. After the substrate is accurately positioned on the positioning mechanism 400, the position accuracy of the substrate can be guaranteed, which is beneficial to improving the subsequent processing accuracy of the substrate.

[0037] Since both the first notch 110 and the second notch 120 can receive and supply the substrate, when the substrate on the pallet mechanism of one of the notches is taken away by the handling manipulator 500, the substrate can be replenished in time. At this time, the handling manipulator 500 transports the substrate at the other notch, avoiding the situation of material shortage, achieving continuous feeding of the substrate, and avoiding affecting the processing speed of subsequent various devices. And the handling manipulator 500 is arranged above the positioning mechanism 400, the first notch 110 and the second notch 120, which can reduce the floor area of the board loading machine.

[0038] The carrier can be a tray or an AGV cart. The carriers such as trays or AGV carts are placed in the first notch 110 and the second notch 120, avoiding the exposure of the carriers such as trays or AGV carts outside the frame 100 and improving the cleanliness of the workshop and the production line.

[0039] It can be imagined that the handling manipulator 500 can be an existing robot.

[0040] Refer to Figure 1 and Figure 3 , in some of the embodiments, the handling manipulator 500 includes a first horizontal swing arm 510, a second horizontal swing arm 520, a first lifting drive mechanism and a clamp 530 that are connected in sequence. The first horizontal swing arm 510 is connected to the frame 100. The first horizontal swing arm 510 can swing on the frame 100. The first horizontal swing arm 510 drives the second horizontal swing arm 520 to swing, thereby realizing the swing of the first lifting drive mechanism and the clamp 530 on the horizontal plane, and further enabling the first lifting drive mechanism and the clamp 530 to move between the upper parts of the positioning mechanism 400, the first notch 110 and the second notch 120. The first lifting drive mechanism is used to drive the clamp 530 to lift and lower. The clamp 530 is used to clamp the substrate, thereby realizing the transportation of the substrate on the first pallet mechanism 200 to the positioning mechanism 400, and the transportation of the substrate on the second pallet mechanism 300 to the positioning mechanism 400.

[0041] It can be understood that a workbench and a support frame are provided on the frame 100. The workbench is arranged on the support frame. The first notch 110 and the second notch 120 are arranged on the workbench. The top of the support frame is connected to the first horizontal swing arm 510 through a connecting plate. Both the first horizontal swing arm 510 and the second horizontal swing arm 520 are horizontally arranged.

[0042] The handling robot 500 further includes a rotation driving mechanism. The first lifting driving mechanism is rotatably arranged at the free end of the second horizontal swing arm 520. The rotation driving mechanism is arranged on the second horizontal swing arm 520. The output end of the rotation driving mechanism is in transmission connection with the first lifting driving mechanism. The rotation driving mechanism drives the first lifting driving mechanism and the clamp 530 to rotate. The output end of the first lifting driving mechanism faces downward and is connected to the clamp 530.

[0043] Refer to Figure 1 and Figure 4 In some of these embodiments, the clamp 530 includes a mounting plate 531 connected to the output end of the first lifting driving mechanism. Two first cross bars 532 that can move away from and close to each other are arranged on the mounting plate 531. At least two cushion plates and two clamping arms 533 are arranged on the first cross bar 532. The cushion plates and the clamping arms 533 cooperate to clamp one end of the substrate. One cushion plate and one clamping arm 533 form a clamping mechanism. At least two clamping mechanisms are arranged on the first cross bar 532.

[0044] The cushion plates and the clamping arms 533 on one first cross bar 532 cooperate to clamp one end of the substrate, and the cushion plates and the clamping arms 533 on the other first cross bar 532 cooperate to clamp the other end of the substrate, thereby clamping the substrate. When the two first cross bars 532 move away from each other, the clamping mechanisms on the two first cross bars 532 move away from each other, so that the clamp 530 can clamp a substrate with a larger size. When the two first cross bars 532 move close to each other, the clamping mechanisms on the two first cross bars 532 move close to each other, so that the clamp 530 can clamp a substrate with a smaller size.

[0045] Refer to Figure 4 In some of these embodiments, a second lifting driving mechanism 534 is arranged in the area of the first cross bar 532 corresponding to the cushion plate. A pneumatic finger 535 is arranged at the output end of the second lifting driving mechanism 534. The clamping arm 533 is connected to the first cross bar 532 through the pneumatic finger 535 and the second lifting driving mechanism 534. The second lifting driving mechanism 534 drives the pneumatic finger 535 and the clamping arm 533 to lift. The finger 535 drives the clamping arm 533 to swing, so that the clamping arm 533 approaches or moves away from the cushion plate, that is, the clamping arm 533 and the cushion plate clamp or open.

[0046] Refer to Figure 4, in some of these embodiments, a plurality of first suction nozzles 536 for adsorbing a substrate are provided on the first cross bar 532, and the first suction nozzles 536 further ensure that the fixture 530 can stably hold the substrate.

[0047] It can be conceived that the first suction nozzles 536 are connected to a negative pressure mechanism through air pipes.

[0048] In some of these embodiments, a second cross bar 539 is provided in the middle area of the mounting plate 531, and at least two second suction nozzles 600 for adsorbing a substrate are provided on the second cross bar 539, and the second suction nozzles 600 further ensure that the fixture 530 can stably hold the substrate.

[0049] It can be conceived that the second suction nozzles 600 are connected to a negative pressure mechanism through air pipes.

[0050] The adsorption positions of the first suction nozzles 536 and the second suction nozzles 600 are different, ensuring the function of stably adsorbing the substrate.

[0051] Refer to Figure 4 , in some of these embodiments, a first linear drive mechanism is provided on the mounting plate 531. The output end of the first linear drive mechanism is connected to the first cross bar 532 through a linear bearing 537. An elastic member 538 is provided between the output end of the first linear drive mechanism and the first cross bar 532. The first linear drive mechanism drives the linear bearing 537 and the first cross bar 532 to move on the mounting plate 531, thereby causing the two first cross bars 532 to move away from and close to each other. The linear bearing 537 enables the first cross bar 532 to move up and down on the mounting plate 531. The elastic member 538 forces the first cross bar 532 to descend on the mounting plate 531. When the mounting plate 531 descends, the first suction nozzles 536 abut against the substrate, causing the first cross bar 532 to rise relative to the first cross bar 532, and the elastic member 538 is compressed, enabling the fixture 530 to have a buffering function.

[0052] Refer to Figure 5 and Figure 6 , in some of these embodiments, the positioning mechanism 400 includes a platen 410 and a plurality of positioning posts 420. A plurality of first guide holes 411 and a plurality of second guide holes 412 are provided on the platen 410. The length directions of the first guide holes 411 and the second guide holes 412 are perpendicular to each other. The second guide holes 412 are at least divided into two rows. A plurality of second linear drive mechanisms 430 are provided below the positioning posts 420. The output end of the second linear drive mechanism 430 is connected to a third lifting drive mechanism 440. The output end of the third lifting drive mechanism 440 is connected to the positioning posts 420. The plurality of positioning posts 420 pass through the first guide holes 411 and the second guide holes 412, and the plurality of positioning posts 420 are used to position the four end faces of the substrate.

[0053] The third lifting drive mechanism 440 is used to drive the positioning column 420 to rise and fall. When the third lifting drive mechanism 440 drives the positioning column 420 to rise, the positioning column 420 extends to the top of the table 410 through the guide hole, so as to push the substrate on the table 410. When the third lifting drive mechanism 440 drives the positioning column 420 to descend, the positioning column 420 shrinks to the bottom of the table 410, so as to avoid the substrate from directly resting on the positioning column 420 or avoiding the positioning column 420 from interfering with the placement position of the substrate.

[0054] The second linear drive mechanism 430 is used to drive the third lifting drive mechanism 440 and the positioning column 420 to move along the length direction of the guide hole. Since the length direction of the first guide hole 411 and the length direction of the second guide hole 412 are perpendicular to each other, when multiple positioning columns 420 approach each other, they can abut against the four end faces of the substrate, thereby positioning the substrate on a horizontal plane.

[0055] Reference Figure 5 It can be imagined that the number of first guide holes 411 is two, the two first guide holes 411 are on the same straight line, the number of second guide holes 412 is four, the four second guide holes 412 are distributed in a rectangular shape and are parallel to each other, the length direction of the second guide holes 412 is perpendicular to the length direction of the first guide holes 411, the number of positioning columns 420 is six, two positioning columns 420 are respectively matched with the two first guide holes 411, and four positioning columns 420 are respectively matched with the four second guide holes 412.

[0056] When the second linear drive mechanism 430 drives the positioning posts 420 corresponding to the two guide holes on the same straight line to move away from each other, that is, the space surrounded by the six positioning posts 420 becomes larger, the transport robot 500 transports the substrate to the space position on the table 410 corresponding to the six positioning posts 420, and then the second linear drive mechanism 430 drives the positioning posts 420 corresponding to the two guide holes on the same straight line to move closer to each other, the six positioning posts 420 are retracted and all of the six positioning posts 420 are against the end surface of the substrate, thereby pushing the substrate to move in the horizontal direction, and finally positioning the substrate at a preset fixed position.

[0057] The working process and principle are as follows. According to the size of the substrate and its positioning position on the platen 410, the positions of the six positioning posts 420 when they are far away from each other and when they are close to each other are set. Initially, the six second linear drive mechanisms 430 drive the six positioning posts 420 to move respectively. The six positioning posts 420 move to the positions when they are far away from each other. The six third lifting drive mechanisms 440 drive the six positioning posts 420 to descend to a position lower than the upper surface of the platen 410. Then, the handling manipulator 500 transports the substrate onto the platen 410, and the substrate is located between the six positioning posts 420. Next, the six third lifting drive mechanisms 440 drive the six positioning posts 420 to rise respectively. The upper ends of the six positioning posts 420 are higher than the upper surface of the platen 410. The six second linear drive mechanisms 430 drive the six positioning posts 420 to approach each other, so as to push the substrate to the preset position by the six positioning posts 420, ensuring that each substrate transported onto the platen 410 is in the same position, realizing precise positioning of the substrate and helping to improve the processing accuracy of the substrate.

[0058] Referring to Figure 6 , in some of the embodiments, a receiving groove 421 is provided on the upper end surface of the positioning post 420, and a in-place sensor is provided in the receiving groove 421. The in-place sensor is used to detect whether there is a substrate on the positioning post 420.

[0059] The following operation process can be adopted to position the substrate. The six second linear drive mechanisms 430 drive the six positioning posts 420 to move respectively. The six positioning posts 420 move away from each other. The third lifting drive mechanism 440 drives the positioning posts 420 to descend. The handling manipulator 500 transports the substrate onto the platen 410. Then, the six second linear drive mechanisms 430 drive the six positioning posts 420 to move respectively. The six positioning posts 420 move closer to each other. When the positioning posts 420 with the in-place sensor move below the substrate, the in-place sensor is blocked by the substrate, and the in-place sensor will feedback that the positioning posts 420 just move below the substrate, so as to know the initial position of the substrate on the platen 410.

[0060] By comparing the preset positioning position information of the substrate and the initial position information, the direction F and distance L that the positioning posts 420 need to move next are obtained. The six positioning posts 420 move away from each other by a fixed distance l again, so that the positioning posts 420 are no longer below the substrate. Then, the six third lifting drive mechanisms 440 drive the six positioning posts 420 to rise respectively. The upper ends of the six positioning posts 420 are higher than the upper surface of the platen 410. The six second linear drive mechanisms 430 drive the six positioning posts 420 to move according to the direction F and the distance of L + l, so as to drive the substrate to the preset position.

[0061] The in-place sensor can be an infrared sensor.

[0062] Referring toFigure 2 In some of these embodiments, the first pallet mechanism 200 includes a fourth lifting drive mechanism connected to the frame 100 and two pallets both provided at the output end of the fourth lifting drive mechanism. The pallets are used to abut against the lower surface of the pallet or the substrate. The fourth lifting drive mechanism drives the pallets, thereby realizing the lifting of the pallet or the substrate.

[0063] Initially, the fourth lifting drive mechanism drives the pallets to descend to the low position. When the pallet or the AGV cart transports the substrate into the notch, the pallet or the substrate is above the pallets. Then the fourth lifting drive mechanism drives the pallets to rise. The pallets lift the pallet or lift the substrate from the AGV cart. After the pallets lift the substrate to an appropriate height, it is convenient for the handling manipulator 500 to transport the substrates to the positioning mechanism 400 one by one.

[0064] It can be conceived that the first linear drive mechanism, the second linear drive mechanism 430, the first lifting drive mechanism, the second lifting drive mechanism 534, the third lifting drive mechanism 440, and the fourth lifting drive mechanism can all be lead screw pairs or cylinders. The rotary drive mechanism can be a motor.

[0065] The technical features of the above embodiments can be combined arbitrarily. For the sake of concise description, not all possible combinations of the technical features in the above embodiments are described. However, as long as there is no contradiction in the combination of these technical features, it should be considered as the scope described in this specification.

[0066] Certainly, the present utility model is not limited to the above embodiments. Those skilled in the art can also make equivalent deformations or substitutions without departing from the spirit of the present utility model. These equivalent deformations or substitutions are all included in the scope defined by the claims of this application.

Claims

1. A robot upper plate machine, characterized in that, Comprising: A frame (100) provided with a first notch (110) and a second notch (120), both the first notch (110) and the second notch (120) being adapted for a carrier containing a substrate to enter; A first pallet mechanism (200) disposed within the first notch (110), the first pallet mechanism (200) being adapted to lift the substrate on the carrier within the first notch (110); A second pallet mechanism (300) disposed within the second notch (120), the second pallet mechanism (300) being adapted to lift the substrate on the carrier within the second notch (120); A positioning mechanism (400) and a handling robot (500), the positioning mechanism (400) being disposed on the frame (100), the handling robot (500) being disposed above the positioning mechanism (400), the first notch (110) and the second notch (120), the handling robot (500) being adapted to transfer the substrate lifted by the first pallet mechanism (200) and the second pallet mechanism (300) onto the positioning mechanism (400), and the positioning mechanism (400) being adapted to position the substrate.

2. The robotic feeder according to claim 1, characterized in that: The handling robot (500) includes a first horizontal swing arm (510), a second horizontal swing arm (520), a first lifting drive mechanism and a fixture (530) connected in sequence, the first horizontal swing arm (510) being connected to the frame (100).

3. The robotic loading machine according to claim 2, wherein: The fixture (530) includes a mounting plate (531) connected to the output end of the first lifting drive mechanism, two first cross bars (532) capable of moving away from and approaching each other being provided on the mounting plate (531), at least two cushion plates and two clamping arms (533) being provided on the first cross bars (532), the cushion plates and the clamping arms (533) cooperating to clamp one end of the substrate.

4. The robot upper board machine according to claim 3, characterized in that: A second lifting drive mechanism (534) is provided in the area of the first cross bar (532) corresponding to the cushion plate, a pneumatic finger (535) is provided at the output end of the second lifting drive mechanism (534), and the clamping arm (533) is connected to the first cross bar (532) through the pneumatic finger (535) and the second lifting drive mechanism (534).

5. A robot upper plate machine according to claim 3 or 4, characterized in that: A plurality of first suction nozzles (536) for adsorbing the substrate are provided on the first cross bar (532).

6. The robot loading machine according to claim 5, wherein: A second cross bar (539) is provided in the middle area of the mounting plate (531), and at least two second suction nozzles (600) for adsorbing the substrate are provided on the second cross bar (539).

7. A robot upper board machine according to claim 5, characterized in that: A first linear drive mechanism is provided on the mounting plate (531), the output end of the first linear drive mechanism is connected to the first cross bar (532) through a linear bearing (537), and an elastic member (538) is provided between the output end of the first linear drive mechanism and the first cross bar (532).

8. A robot upper board machine according to claim 1, characterized in that: The positioning mechanism (400) includes a platen (410) and a plurality of positioning posts (420). A plurality of first guiding holes (411) and a plurality of second guiding holes (412) are provided on the platen (410). The length directions of the first guiding holes (411) and the second guiding holes (412) are perpendicular to each other. The second guiding holes (412) are at least divided into two rows. A plurality of second linear driving mechanisms (430) are provided below the positioning posts (420). The output end of the second linear driving mechanism (430) is connected to a third lifting driving mechanism (440). The output end of the third lifting driving mechanism (440) is connected to the positioning posts (420). A plurality of the positioning posts (420) pass through the first guiding holes (411) and the second guiding holes (412). The plurality of positioning posts (420) are used to position four end faces of the substrate.

9. The robot loading machine according to claim 8, wherein: A receiving groove (421) is provided on the upper end face of the positioning post (420). A position sensor is provided in the receiving groove (421). The position sensor is used to detect whether the substrate is on the positioning post (420).

10. A robot upper board machine according to claim 1, characterized in that: The first support plate mechanism (200) includes a fourth lifting driving mechanism connected to the frame (100) and two support plates both provided on the output end of the fourth lifting driving mechanism.

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