Vacuum sample optical detection device

Abstract

The utility model provides a vacuum sample optical detection device, and belongs to the technical field of optical detection. The device comprises a vacuum sample chamber, a top cover, a gun cover assembly, a high-precision proportional valve and a vacuum exhaust pipe, a movable gland is opened, a detection material is placed in the vacuum sample chamber, a vacuum pump is started, the vacuum pump vacuumizes a vacuum cavity through the exhaust pipe, and a negative pressure state is formed in the vacuum cavity after vacuumizing; therefore, the movable gland is firmly sucked with the vacuum sample chamber. The control unit controls opening or closing of the high-precision proportional valve according to different proportions, so that different vacuum degrees in the vacuum cavity are adjusted, and the technical problems that in the prior art, a vacuum sample chamber can only be used for Dewar test, and the vacuum degree in the vacuum sample chamber cannot be adjusted are solved. And the object placing table can be moved at different positions through the X-axis moving assembly and the Y-axis moving assembly, so that a worker can conveniently observe a detection material in multiple directions.

Description

Technical Field

[0001] The utility model belongs to the technical field of optical detection, and particularly relates to an optical detection device for vacuum samples. Background Art

[0002] The Chinese utility model patent with the publication number of CN2351756Y discloses "a flat vacuum sample chamber capable of simultaneously measuring light projection and photoelectric response characteristics", and provides a flat vacuum sample chamber that can be used in narrow areas. Such a sample chamber is only used for Dewar tests and has no interfaces for light sources and particle beams, and it is impossible to observe and detect samples that require electromagnetic radiation, light sources, and electron beams as excitation sources to emit light. In addition, during the detection of some samples, such as cold field cathode luminescence, a certain degree of vacuum is required, and the degree of vacuum in the vacuum sample chamber cannot be adjusted in the prior art. Summary of the Utility Model

[0003] An embodiment of the utility model provides an optical detection device for vacuum samples, aiming to solve the technical problems in the prior art that the vacuum sample chamber can only be used for Dewar tests and the degree of vacuum in the vacuum sample chamber cannot be adjusted.

[0004] To achieve the above object, the technical solution adopted by the utility model is: to provide an optical detection device for vacuum samples, including a vacuum sample chamber, a top cover, a gun cover assembly, a high-precision proportional valve, and a vacuum extraction pipe. The vacuum sample chamber is provided with a vacuum cavity with an opening at the top, and the vacuum cavity is used to accommodate the detection material; the top cover is covered on the top of the vacuum cavity, and an observation window is provided on the top cover; the gun cover assembly is arranged on the top cover, and the gun cover assembly includes a movable pressing cover, a adapter, and lead glass; the movable pressing cover is covered on the top cover, the central axis of the adapter is arranged at an angle with the top surface of the movable pressing cover, one end of the adapter is connected to the movable pressing cover and one end of the adapter is communicated with the vacuum cavity, and the other end of the adapter is connected to a light source adapter; the lead glass is embedded in the movable pressing cover, and the lead glass is arranged above the observation window; an air valve is fixedly arranged on the vacuum sample chamber, and the air valve is communicated with the vacuum cavity; the high-precision proportional valve is fixedly arranged on the vacuum sample chamber, and the high-precision proportional valve is communicated with the vacuum cavity; the vacuum extraction pipe is fixedly arranged on the vacuum sample chamber, and the vacuum extraction pipe is communicated with the vacuum cavity.

[0005] In a possible implementation manner, a groove is provided on the movable pressing cover, and a through hole is provided in the groove, and the lead glass is connected to the side wall of the through hole.

[0006] In a possible implementation manner, a first sealing ring is provided between the adapter and the movable pressing cover.

[0007] In a possible implementation, a second sealing ring is provided at the connection between the adapter and the light source adapter.

[0008] In a possible implementation, the other end of the adapter is stepped, and the adapter further has a first annular protrusion and a second annular protrusion, and the inner diameter of the second annular protrusion is greater than the inner diameter of the first annular protrusion.

[0009] In a possible implementation, a first receiving groove is provided on the movable gland, and a second receiving groove corresponding to the first receiving groove is provided on the adapter, and the depth of the first receiving groove is less than the height of the first sealing ring.

[0010] In a possible implementation, the top cover is connected to the vacuum sample chamber by bolts.

[0011] In a possible implementation, the air valve is provided on the side wall of the vacuum sample chamber.

[0012] Compared with the prior art, a vacuum sample optical detection device provided in this embodiment includes a vacuum sample chamber, a top cover, a gun cover assembly, a high-precision proportional valve, an air valve, and a vacuum extraction pipe. Open the movable gland, place the test material in the vacuum sample chamber, start the vacuum pump, and the vacuum pump evacuates the vacuum chamber through the extraction pipe. After evacuation, a negative pressure state is formed in the vacuum chamber, so that the movable gland is firmly sucked tightly to the top cover and the vacuum sample chamber. The control unit controls the opening or closing of different ratios of the high-precision proportional valve, so as to adjust different vacuum degrees in the vacuum chamber, thereby solving the technical problem that the vacuum sample chamber in the prior art can only be used for Dewar tests and cannot adjust the vacuum degree in the vacuum sample chamber. BRIEF DESCRIPTION OF THE DRAWINGS

[0013] Figure 1 is a top view of a vacuum sample optical detection device provided by an embodiment of the present invention;

[0014] Figure 2 is a front view of a vacuum sample optical detection device provided by an embodiment of the present invention;

[0015] Figure 3 is a top view of a gun cover assembly provided by an embodiment of the present invention;

[0016] Figure 4 is Figure 3 a cross-sectional view of the gun cover assembly shown;

[0017] Figure 5 is Figure 4 a partial enlarged view of area A in

[0018] Figure 6 isFigure 4 Partial enlarged view of area B;

[0019] Figure 7 Schematic structural diagram of the vacuum sample chamber and the moving assembly;

[0020] Explanation of reference numerals:

[0021] 1. Vacuum sample chamber; 2. Top cover; 3. Air valve; 4. High-precision proportional valve; 5. Vacuum extraction pipe; 6. Gun cover assembly; 61. Movable gland; 62. Adapter; 63. Lead glass; 611. Groove; 81. First sealing ring; 7. Light source adapter; 82. Second sealing ring; 621. First annular protrusion; 622. Second annular protrusion; 91. X-axis lead screw; 92. X-axis guide rail; 93. X-axis drive motor; 94. X-axis moving table; 95. Y-axis drive motor; 96. Y-axis lead screw; 97. Y-axis guide rail; 10. Placing table; 11. Test material. Detailed implementation manners

[0022] In order to make the technical problems, technical solutions and beneficial effects to be solved by the present utility model clearer and more understandable, the present utility model will be further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are only used to explain the present utility model and are not used to limit the present utility model.

[0023] It should be further noted that the drawings and embodiments of the present utility model mainly describe and explain the concept of the present utility model. On the basis of this concept, the specific forms and settings of some connection relationships, positional relationships, power mechanisms, power supply systems, hydraulic systems and control systems may not be fully described. However, on the premise that those skilled in the art understand the concept of the present utility model, those skilled in the art can implement the above specific forms and settings in a well-known manner.

[0024] When an element is referred to as being "fixed to" or "disposed on" another element, it can be directly on the other element or indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or indirectly connected to the other element.

[0025] The orientation or positional relationship indicated by the terms "length", "width", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0026] The terms "first" and "second" are for descriptive purposes only and should not be construed as indicating or implying relative importance or implicitly specifying the quantity of the indicated technical features. Thus, features defined with "first" and "second" may explicitly or implicitly include one or more of such features. In the description of the present utility model, "a plurality" means two or more, and "several" means one or more, unless otherwise specifically defined.

[0027] A vacuum sample optical detection device provided by the present utility model will now be described.

[0028] Please refer to Figure 1 and Figure 2 . A vacuum sample optical detection device includes a vacuum sample chamber 1, a top cover 2, a gun cover assembly 6, a gas valve 3, a high-precision proportional valve 4, and a vacuum extraction pipe 5. The vacuum sample chamber 1 is provided with a vacuum cavity having an opening at the top, and the vacuum cavity is used to accommodate a detection material 11; the top cover 2 is covered on the top of the vacuum cavity, and an observation window is provided on the top cover 2.

[0029] The gun cover assembly 6 is provided on the top cover 2. The gun cover assembly 6 includes a movable pressing cover 61, a connector 62, and lead glass 63; the movable pressing cover 61 is covered on the top cover 2, the central axis of the connector 62 is disposed at an angle with the top surface of the movable pressing cover 61, one end of the connector 62 is connected to the movable pressing cover 61 and one end of the connector 62 is communicated with the vacuum cavity, and the other end of the connector 62 is connected to a light source adapter 7; the movable pressing cover 61 is provided with an observation hole, and the lead glass 63 is embedded in the movable pressing cover 61, and the lead glass 63 is disposed above the observation window.

[0030] The gas valve 3 is fixedly provided on the vacuum sample chamber 1, and the gas valve 3 is communicated with the vacuum cavity; the high-precision proportional valve 4 is fixedly provided on the vacuum sample chamber 1, and the high-precision proportional valve 4 is communicated with the vacuum cavity; the vacuum extraction pipe 5 is fixedly provided on the vacuum sample chamber 1, and the vacuum extraction pipe 5 is communicated with the vacuum cavity. Among them, the gas valve 3 and the high-precision proportional valve 4 are electrically connected to an external control unit.

[0031] The vacuum extraction pipe 5 is connected to a vacuum pump. The vacuum pump is started, and the vacuum pump evacuates the vacuum sample chamber 1 through the vacuum extraction pipe 5. The high-precision proportional valve 4 controls the vacuum degree of the vacuum cavity. One end of the gas valve 3 is communicated with the vacuum cavity, and the other end of the gas valve 3 is communicated with the atmosphere or a gas tank. The gas in the atmosphere or the gas tank enters the vacuum cavity through the gas valve 3. Since the lead glass 63 is embedded in the movable pressing cover 61, a microscope or the naked eye can observe the characteristics of the detection material 11 in the vacuum cavity through the lead glass 63.

[0032] The high-precision proportional valve 4 is a direct-acting two-way standard proportional solenoid valve. In this application, the high-precision proportional valve 4 adopts the DS2871 type. The DS2871 direct-acting proportional solenoid valve is used as an actuator in the process control loop. Due to the adoption of an elastic valve seat seal, within the nominal pressure range related to the nominal diameter, the valve is tightly closed (integrated closing function). At the same time, the plunger of the valve adopts a frictionless installation method, which enables it to have excellent control performance. This valve is particularly suitable for high-demand regulation conditions (wide regulation range, dry gas, etc.).

[0033] A vacuum sample optical detection device provided in this embodiment, compared with the prior art, a vacuum sample optical detection device includes a vacuum sample chamber 1, a top cover 2, a gun cover assembly 6, a high-precision proportional valve 4, a gas valve 3, and a vacuum extraction pipe 5. Open the movable gland 61, place the test material in the vacuum sample chamber 1, start the vacuum pump, and the vacuum pump evacuates the vacuum chamber through the extraction pipe. After evacuation, a negative pressure state is formed in the vacuum chamber, so that the movable gland 61 is firmly sucked against the top cover 2 and the vacuum sample chamber 1. The control unit controls the opening or closing of the high-precision proportional valve 4 in different proportions, so as to adjust different vacuum degrees in the vacuum chamber, which can avoid the influence of air absorption, refraction, and scattering on observation, thereby solving the technical problem that the vacuum sample chamber 1 in the prior art can only be used for Dewar tests and cannot adjust the vacuum degree in the vacuum sample chamber.

[0034] Please refer to Figures 2 to 4 , the adapter 62 is connected to the light source adapter 7, and the particle beam in the light source adapter 7 finally enters the vacuum chamber through the adapter 62. The particle beam in the light source adapter 7 can be an electron beam, ultraviolet light, infrared light, X-ray, etc. Among them, the central axis of the adapter 62 is arranged at an angle with the top surface of the movable gland 61, which is convenient for observing the test material 11. The lead glass 63 is provided to transmit the convergent light of the microscope, which is convenient for the staff to observe the test material 11 in the vacuum chamber. At the same time, the lead glass 63 can effectively prevent electromagnetic radiation from overflowing while allowing light to pass through.

[0035] Furthermore, the angle between the adapter 62 and the movable gland 61 can be adjusted. By adjusting the angle between the adapter 62 and the movable gland 61, the irradiation angle of the particle beam on the test material is adjusted, so as to better observe the test material 11 in the vacuum chamber.

[0036] The movable gland 61 is provided with a groove 611. The setting of the groove 611 can reduce the observation distance between the microscope objective lens and the test material 11, so as to effectively observe the test material 11.

[0037] The specific structure of the groove 611 is heart-shaped. The heart-shaped structure can effectively reduce the observation distance between the microscope objective lens and the test material 11 while ensuring the firm connection between the adapter 62 and the movable gland 61. The lead glass 63 is connected to the side wall of the observation hole, which can prevent the spillage of electromagnetic radiation.

[0038] Please refer to Figure 5 , a first sealing ring 81 is provided between the adapter 62 and the movable gland 61. The setting of the first sealing ring 81 can prevent the leakage of gas molecules and ensure the sealing performance between the adapter 62 and the movable gland 61.

[0039] A second sealing ring 82 is provided at the connection between the adapter 62 and the light source adapter 7. The setting of the second sealing ring 82 can prevent the leakage of gas molecules and ensure the sealing performance between the adapter 62 and the light source adapter 7.

[0040] Please refer to Figure 6 , the other end of the adapter 62 is stepped, and the adapter 62 is further provided with a first annular protrusion 621 and a second annular protrusion 622, and the inner diameter of the second annular protrusion 622 is greater than the inner diameter of the first annular protrusion 621.

[0041] The light source adapter 7 is adapted to the other end of the adapter 62. The adapter 62 is provided with a first annular protrusion and a second annular protrusion, so that the light source adapter 7 and the adapter 62 can be embedded and clamped together, ensuring the firmness and sealing performance of the connection between the light source adapter 7 and the adapter 62.

[0042] Furthermore, the setting of the second sealing ring 82 can prevent the leakage of gas molecules.

[0043] Please refer to Figure 5 , the movable gland 61 is provided with a first receiving groove, and the adapter 62 is provided with a second receiving groove corresponding to the first receiving groove. The depth of the first receiving groove is less than the height of the first sealing ring 81.

[0044] The movable gland 61 is provided with a first receiving groove, and the adapter 62 is provided with a second receiving groove corresponding to the first receiving groove. The depth of the first receiving groove is less than the height of the first sealing ring 81. The first receiving groove and the second receiving groove enclose a cavity for receiving the first sealing ring 81.

[0045] The first sealing ring 81 is arranged in the cavity, strengthening the sealing performance of the connection between the adapter 62 and the first receiving groove.

[0046] The top cover 2 and the vacuum sample chamber 1 are connected by bolts. The use of bolt connection facilitates the disassembly and installation between the top cover 2 and the vacuum sample chamber 1.

[0047] Furthermore, a third sealing ring is also provided between the top cover 2 and the vacuum sample chamber 1. The third sealing ring not only improves the vacuum degree of the vacuum chamber but also prevents the escape of gas molecules.

[0048] The top cover 2 and the vacuum sample chamber 1 can also be connected by a snap connection structure.

[0049] The air valve 3 and the high-precision proportional valve 4 are arranged on the side wall of the vacuum sample chamber 1, which does not affect the connection between the light source adapter 7 and the adapter 62.

[0050] Based on the above embodiments, O-ring seals are provided at the connections of the air valve 3, the high-precision proportional valve 4, and the vacuum extraction pipe 5 with the vacuum sample chamber 1 to improve the sealing performance of the connections.

[0051] Based on the above embodiments, a moving component and a placement table 10 are further provided in the vacuum chamber. The placement table 10 is placed on the moving component, and the moving component is used to move the placement table 10 to different positions in the vacuum chamber.

[0052] Furthermore, a control line connector is also provided on the side wall of the vacuum sample chamber 1. One end of the control line is connected to an external control unit, and the other end of the control line is electrically connected to the moving component. The control unit is used to control the displacement of the moving component in different directions.

[0053] Please refer to Figure 7 , the moving component includes an X-axis displacement unit and a Y-axis displacement unit. The X-axis displacement unit includes an X-axis lead screw 91, an X-axis guide rail 92, an X-axis drive motor 93, and an X-axis moving table 94. The X-axis lead screw 91 is rotatably arranged in the vacuum chamber, and the central axis of the X-axis lead screw 91 is arranged in parallel with the horizontal direction of the vacuum chamber. The X-axis guide rail 92 is arranged in parallel with the X-axis lead screw 91, and both ends of the X-axis guide rail 92 are connected to the bottom inner wall of the vacuum chamber. The power output end of the X-axis drive motor 93 is connected to one end of the X-axis lead screw 91. Two sets of sliders are provided at the bottom of the X-axis moving table 94, and the two sets of sliders are respectively engaged with the X-axis lead screw 91 and slidably engaged with the X-axis guide rail 92.

[0054] The Y-axis displacement component includes a Y-axis drive motor 95, a Y-axis lead screw 96, and a Y-axis guide rail 97. The Y-axis drive motor 95 is arranged in the X-axis moving table 94, and the power output end of the Y-axis drive motor 95 is connected to the Y-axis lead screw 96. The Y-axis guide rail 97 is arranged along the width direction of the vacuum sample chamber 1. The bottom of the placement table 10 is slidably engaged with the Y-axis guide rail 97, and the bottom of the placement table 10 is engaged with the Y-axis lead screw 96.

[0055] Start the X-axis drive motor 93. The X-axis drive motor 93 drives the X-axis lead screw 91 to rotate. Since the X-axis moving stage 94 meshes with the X-axis lead screw 91, it drives the X-axis moving stage 94 to move along the X-axis direction of the vacuum chamber. The setting of the X-axis guide rail 92 plays a guiding role for the X-axis moving stage 94.

[0056] Start the Y-axis drive motor 95. The Y-axis drive motor 95 drives the Y-axis lead screw 96 to rotate. Since the Y-axis lead screw 96 meshes with the rack, the object stage 10 moves along the Y-axis direction of the vacuum chamber under the drive of the Y-axis lead screw 96.

[0057] Furthermore, there are two X-axis guide rails 92, and the two X-axis guide rails 92 are arranged in parallel.

[0058] Specifically, the X-axis moving stage 94 is a hollow frame structure. The object stage 10 can be a hollow frame structure or a groove frame structure.

[0059] By the individual movement or mutual cooperation of the X-axis drive motor 93 and the Y-axis drive motor 95, the position of the object stage 10 in the vacuum chamber is adjusted, so as to facilitate the multi-directional observation of the test material 11 on the object stage 10 by the microscope or the staff.

[0060] The above are only the preferred embodiments of the present invention, and are not intended to limit the present invention. Any modifications, equivalent replacements, and improvements made within the spirit and principle of the present invention shall be included in the protection scope of the present invention.

Claims

1. An optical detection device for vacuum samples, characterized in that Comprising: A vacuum sample chamber, provided with a vacuum cavity having an opening at the top, and the vacuum cavity is used to accommodate the detection material; A top cover, covering the top of the vacuum cavity, and an observation window is provided on the top cover; A gun cover assembly, the gun cover assembly is provided on the top cover, and the gun cover assembly includes a movable gland, a adapter and lead glass; the movable gland covers the top cover, the central axis of the adapter is arranged at an angle with the top surface of the movable gland, one end of the adapter is connected to the movable gland and one end of the adapter is communicated with the vacuum cavity, and the other end of the adapter is connected to a light source adapter; the lead glass is embedded in the movable gland, and the lead glass is arranged above the observation window; A gas valve, fixedly arranged on the vacuum sample chamber, and the gas valve is communicated with the vacuum cavity; A high-precision proportional valve, fixedly arranged on the vacuum sample chamber, and the high-precision proportional valve is communicated with the vacuum cavity; A vacuum extraction pipe, fixedly arranged on the vacuum sample chamber, and the vacuum extraction pipe is communicated with the vacuum cavity.

2. The optical detection device for vacuum samples according to claim 1, wherein: A groove is provided on the movable gland, and a through hole is provided in the groove, and the lead glass is connected to the side wall of the through hole.

3. The optical detection device for vacuum samples according to claim 2, wherein: A first sealing ring is provided between the adapter and the movable gland.

4. The optical detection device for vacuum samples according to claim 3, wherein: A second sealing ring is provided at the connection between the adapter and the light source adapter.

5. The optical detection device for vacuum samples according to claim 4, wherein: The other end of the adapter is stepped, and the adapter further has a first annular protrusion and a second annular protrusion, and the inner diameter of the second annular protrusion is greater than the inner diameter of the first annular protrusion.

6. The optical detection device for vacuum samples according to claim 5, characterized in that: A first receiving groove is provided on the movable gland, and a second receiving groove corresponding to the first receiving groove is provided on the adapter, and the depth of the first receiving groove is less than the height of the first sealing ring.

7. The optical detection device for vacuum samples according to claim 1, characterized in that: The top cover and the vacuum sample chamber are connected by bolts.

8. A vacuum sample optical detection device according to any one of claims 1-7, characterized in that: The gas valve is arranged on the side wall of the vacuum sample chamber.

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