Device for measuring surface magnetic field of rotor shaft of moving-magnet galvanometer motor

Abstract

The utility model provides a device for measuring a surface magnetic field of a rotor shaft of a moving magnet type galvanometer motor, which comprises a rotary table, a multi-jaw chuck, a gauss meter, a movable first working table, a movable second working table, a mounting clamp arranged on the second working table, an angle sensor and a displacement sensor. The gauss meter probe can be positioned at a specific position on the cylindrical surface of the rotor shaft by matching with the movement of the two workbenches, so that the magnetic field intensity at a limited space point on the cylindrical surface of the rotor shaft can be measured, and the device can be conveniently operated in an industrial environment to complete the measurement. And the electromagnetic and mechanical characteristics of the moving-magnet galvanometer motor can be better analyzed, so that the high-performance moving-magnet galvanometer motor can be designed on the basis. Moreover, the rotor shaft is horizontally installed on the device, and the first workbench and the second workbench can move in the axial direction and the radial direction respectively, so that the device can achieve a large installation face and a small installation height.

Description

Technical Field

[0001] The utility model belongs to the field of laser processing, and particularly relates to a device for measuring the surface magnetic field of a moving magnet galvanometer motor rotor shaft in the field of laser processing. Background Art

[0002] In the field of laser processing, a moving magnet galvanometer motor is an excellent vector scanning device, which drives a laser reflecting lens to realize beam guiding within a limited swing angle range. Currently, it is mainly used for laser drilling, laser marking, etc. The moving magnet galvanometer motor has a motor rotor shaft, which is a permanent magnet and generally has a cylindrical shape. Studying the magnetic field distribution law on the surface of the motor rotor shaft is very important for analyzing the electromagnetic and mechanical characteristics of the moving magnet galvanometer motor.

[0003] Currently, the measurement of the magnetic field of the galvanometer motor is usually limited to the measurement of the maximum magnetic field on the cylindrical surface of the motor rotor shaft, and it is impossible to measure the magnetic field strength at any position on the cylindrical surface well. The existing measurement devices cannot meet the design and manufacturing requirements of high-performance moving magnet galvanometer motors. To solve the above problems, it is necessary to design a new measurement device that can meet the above measurement requirements. Considering practicality, the measurement device needs to be able to realize convenient and fast magnetic field measurement in the existing industrial environment. Summary of the Utility Model

[0004] The utility model is made to solve the above problems, and the purpose is to provide a measurement device that can conveniently measure the magnetic field spatial distribution on the entire cylindrical surface of the motor rotor shaft. The utility model adopts the following technical solutions:

[0005] The utility model provides a device for measuring the surface magnetic field of a moving magnet galvanometer motor rotor shaft, which is used to measure the magnetic field strength of the cylindrical surface of the rotor shaft of the galvanometer motor. The device has the following technical features: it includes a turntable; a multi-jaw chuck coaxially arranged on the turntable for fixing one end of the rotor shaft, so that the axial direction of the rotor shaft is horizontal and the rotor shaft can rotate along its central axis; a gaussmeter with a gaussmeter probe for detecting the magnetic field strength of the cylindrical surface; a workbench base; a first workbench arranged on the workbench base and movable along the axial direction of the rotor shaft; a second workbench arranged on the first workbench and movable along the radial direction of the rotor shaft; a mounting fixture arranged on the second workbench for clamping the gaussmeter probe; an angle sensor for detecting the movement angle of the turntable; and two displacement sensors respectively for detecting the displacements of the first workbench and the second workbench.

[0006] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: it further includes a first guide rail, which is horizontally arranged on the workbench base and is parallel to the axial direction of the rotor shaft, and the first workbench is movably arranged on the first guide rail; and a second guide rail, which is horizontally arranged on the first workbench and is perpendicular to the first guide rail, and the second workbench is movably arranged on the second guide rail, wherein the axial direction of the rotor shaft is the horizontal direction.

[0007] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: the end of the Gauss meter probe has a measurement plane, the mounting fixture makes the Gauss meter probe vertically arranged, and the measurement plane faces the cylindrical surface of the rotor shaft.

[0008] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: the mounting fixture includes a column, which is vertically arranged on the second workbench; a clamping member, one end of which is mounted on the column, and the other end has a strip-shaped clamping groove for clamping the Gauss meter probe.

[0009] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: the mounting fixture further includes a clamping and fixing member and a clamping and adjusting member. One end of the clamping member has a socket hole and a pair of position locking holes. This end is sleeved on the column, and the clamping and fixing member is arranged in the pair of position locking holes to fix this end of the clamping member on the column through the clamping and fixing member. The other end of the clamping member has the clamping groove and a pair of groove distance adjusting holes, and the clamping and adjusting member is arranged in the pair of groove distance adjusting holes to adjust the width of the clamping groove through the clamping and adjusting member, so as to clamp or loosen the Gauss meter probe.

[0010] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: the angle sensor is an angle encoder, and the displacement sensor is a displacement grating scale.

[0011] The surface magnetic field measurement device for the rotor shaft of the moving magnet galvanometer motor provided by the present utility model may further have the following technical feature: it further includes a data acquisition card, which is respectively connected to the angle encoder, the displacement grating scale and the Gauss meter for acquiring the measured data; and an industrial computer, which is connected to the data acquisition card for obtaining the data from the data acquisition card.

[0012] Functions and effects of the utility model

[0013] According to the magnetic field measurement device for the surface of the rotor shaft of a moving magnet galvanometer motor of the present utility model, it includes a turntable, a multi-jaw chuck, a gaussmeter, a movable first workbench, a second workbench arranged on the first workbench and movable in different directions, a gaussmeter mounting fixture arranged on the second workbench, an angle sensor, and a displacement sensor. Therefore, the rotation angle of the rotor shaft can be adjusted through the turntable, and combined with the movement of the two workbenches, the gaussmeter probe can be positioned at a specific position on the cylindrical surface of the rotor shaft, so as to measure the magnetic field strength at a limited space point on the cylindrical surface of the rotor shaft. Through this device, the above measurement can be conveniently carried out in an industrial environment, which is beneficial to better analyze the electromagnetic and mechanical characteristics of the moving magnet galvanometer motor, and thus a high-performance moving magnet galvanometer motor can be designed on this basis. Moreover, since the turntable and the multi-jaw chuck enable the rotor shaft to be horizontally installed on the device, the first workbench can move along the axial direction of the rotor shaft, and the second workbench can move along the radial direction of the rotor shaft. Therefore, the gaussmeter probe can be conveniently and accurately fed to each measurement position on the cylindrical surface, and the overall device can achieve a large installation surface and a small installation height, which is more convenient for installation and operation in actual use. Description of the Drawings

[0014] Figure 1 is a perspective view of the magnetic field measurement device for the surface of the rotor shaft of a moving magnet galvanometer motor in an embodiment of the present utility model;

[0015] Figure 2 is a side view of the magnetic field measurement device for the surface of the rotor shaft of a moving magnet galvanometer motor in an embodiment of the present utility model;

[0016] Figure 3 is an enlarged view of the end of the gaussmeter probe in an embodiment of the present utility model;

[0017] Figure 4 is a schematic diagram of the mesh division on the surface of the rotor shaft of the galvanometer motor in an embodiment of the present utility model.

[0018] Reference Numerals:

[0019] Turntable 1; Three-jaw chuck 2; Workbench base 3; Gaussmeter probe 4; Probe end 41; Measurement plane 42; Gaussmeter mounting fixture 5; X-axis workbench 6; Y-axis workbench 7; Rotor shaft 8 of the galvanometer motor; Gaussmeter 9; First guide rail 10; Second guide rail 11. Detailed Embodiment

[0020] In order to make the technical means, creative features, achieved purposes, and functions realized by the present utility model easy to understand, the magnetic field measurement device for the surface of the rotor shaft of the moving magnet galvanometer motor of the present utility model will be specifically described below in conjunction with the embodiments and the drawings.

[0021] <Embodiment>

[0022] Figure 1 is a perspective view of the surface magnetic field measuring device for the rotor shaft of the moving magnet galvanometer motor in this embodiment. Figure 2 is a side view of the surface magnetic field measuring device for the rotor shaft of the moving magnet galvanometer motor in this embodiment.

[0023] As Figure 1 and Figure 2 shown, the surface magnetic field measuring device for the rotor shaft of the moving magnet galvanometer motor (hereinafter referred to as the measuring device) includes a turntable 1, a three-jaw chuck 2, a workbench base 3, a Gauss meter mounting fixture 5, an X-axis workbench 6 (the first workbench), a Y-axis workbench 7 (the second workbench), a Gauss meter 9, a first guide rail 10, and a second guide rail 11.

[0024] Among them, the workbench base 3 is a flat plate. The turntable 1 is fixed at one end of the workbench base 3. The three-jaw chuck 2 is arranged on the turntable 1, and the turntable 1 can drive the three-jaw chuck 2 to rotate. The turntable 1 and the three-jaw chuck 2 constitute a rotational drive mechanism.

[0025] The first guide rail 10 is a linear guide rail, fixed in the middle of the workbench base 3 and extending along the length direction of the workbench base 3. The X-axis workbench 6 is in the shape of a cuboid block, and its upper surface is a plane. The X-axis workbench 6 is fitted on the first guide rail 10 and can move along the first guide rail 10. The second guide rail 11 is also a linear guide rail, fixed on the upper surface of the X-axis workbench 6 and extending along the width direction of the workbench base 3, that is, perpendicular to the extension direction of the first guide rail 10. The Y-axis workbench 7 is in the shape of a cuboid block, and its upper surface is a plane. The Y-axis workbench 7 is fitted on the second guide rail 11 and can move along the second guide rail 11. The Gauss meter mounting fixture 5, the X-axis workbench 6, the Y-axis workbench 7, the first guide rail 10, and the second guide rail 11 constitute a probe positioning mechanism.

[0026] The Gauss meter mounting fixture 5 includes a column, a clamping member, a clamping and fixing member (screw), and a clamping adjustment member. The column is fixed on the Y-axis workbench 7, and the length direction of the column is perpendicular to the plane direction of the workbench base 3. The clamping member is a special-shaped member, one end of which has a socket hole and a pair of position locking holes. It is sleeved on the column through the socket hole. The clamping and fixing member passes through the pair of position locking holes. Adjusting the clamping and fixing member can fix or loosen one end of the clamping member on the column. When loosened, the clamping member can move up and down along the column. The other end of the clamping member is bifurcated, having a strip-shaped clamping groove and a pair of groove pitch adjustment holes.

[0027] In this embodiment, the above-mentioned structural members such as the Gauss meter mounting fixture 5, the X-axis workbench 6, the Y-axis workbench 7, the first guide rail 10, and the second guide rail 11 are all made of non-magnetic materials.

[0028] The gaussmeter 9 includes a gaussmeter probe 4. The gaussmeter probe 4 is in a long strip shape and is embedded in the clamping groove of the gaussmeter mounting fixture 5. By adjusting the clamping adjustment member provided in a pair of groove distance adjustment holes, the gaussmeter probe 4 can be clamped or loosened, so that the installation position of the gaussmeter probe 4 on the fixture can be adjusted. In this embodiment, the length direction of the gaussmeter probe 4 mounted on the gaussmeter mounting fixture 5 is perpendicular to the plane direction of the workbench base 3, and the end (detection end) of the gaussmeter probe 4 faces upward.

[0029] Figure 3 It is an enlarged view of the end of the gaussmeter probe in this embodiment.

[0030] As Figure 3 shown, the probe end 41 of the gaussmeter probe 4 is in the shape of a rectangular plate, and a rectangular measurement plane 42 is provided in the middle of one of its surfaces.

[0031] The galvanometer motor rotor shaft 8 to be measured is a permanent magnet. Its main body is in a cylindrical shape with a uniform diameter, and the side surface of the main body is a cylindrical surface. One end of the galvanometer motor rotor shaft 8 is clamped and fixed by a three-jaw chuck 2, and the central axis of the galvanometer motor rotor shaft 8 coincides with the rotation central axis of the turntable 1. The middle part and the other end of the galvanometer motor rotor shaft 8 are suspended above the workbench base 3, and the length direction of the galvanometer motor rotor shaft 8 is consistent with the length direction of the workbench base 3. Driven by the turntable 1, the galvanometer motor rotor shaft 8 can rotate along its central axis.

[0032] As Figure 2 shown, when viewed from the side (i.e., along the length direction of the workbench base 3), the gaussmeter probe 4 is located on one side of the galvanometer motor rotor shaft 8. The length direction of the gaussmeter probe 4 is perpendicular to the central axis of the galvanometer motor rotor shaft 8. The measurement plane 42 on the gaussmeter probe 4 faces the galvanometer motor rotor shaft 8, and the measurement plane 42 is approximately in contact with a position (i.e., the measurement point) on the cylindrical surface of the galvanometer motor rotor shaft 8. The midline (horizontal midline) of the measurement plane 42 points to the central axis of the galvanometer motor rotor shaft 8 along the radial direction of the galvanometer motor rotor shaft 8.

[0033] The measuring device further includes an angle encoder (angle sensor), a displacement grating scale (displacement sensor), a data acquisition card, and an industrial computer not shown in the figure.

[0034] The angle encoder is set at the turntable 1 and is used to detect the movement angle (rotation angle) of the turntable 1. Two displacement grating scales are respectively installed on the X-axis workbench 6 and the Y-axis workbench 7 and are respectively used to detect the displacements of the two workbenches. The angle encoder and the displacement grating scales are respectively connected to the data acquisition card through cables, and the data acquisition card is further connected to the industrial computer through a cable. The gaussmeter 9 is also connected to the data acquisition card through a cable, so that the industrial computer can obtain the data of the collected movement angle, displacement, and magnetic field strength. Further, the industrial computer can perform calculation and analysis based on the collected data to obtain the magnetic field distribution on the entire cylindrical surface of the galvanometer motor rotor shaft 8.

[0035] The following will exemplarily show a preferred usage method of the above-mentioned measuring device.

[0036] Figure 1 Also shown is a cylindrical coordinate system established with a point o on the galvanometer motor rotor shaft 8 provided on the measuring device as the origin. The polar radius coordinate, polar angle, and height are respectively represented by Y, θ, and x. The radius of the main body part of the galvanometer motor rotor shaft 8 is set as r, and the cylindrical coordinates of the magnetic field measurement point of the gaussmeter probe 4 located on the surface of the galvanometer motor rotor shaft 8 can be written as (r, θ, x), where r is the radial distance, θ is the azimuth angle, and x is the offset along the cylindrical axis direction from the origin.

[0037] Figure 4 It is a schematic diagram of the mesh division on the surface of the galvanometer motor rotor shaft in this embodiment.

[0038] As Figure 1 and Figure 4 shown, the cylindrical surface of the galvanometer motor rotor shaft 8 is divided into a plurality of equally spaced meshes with a coordinate increment of ΔX along the X-axis direction and a coordinate increment of Δθ along the rotation angle direction. Mesh nodes are formed between the meshes, and measurements are made based on the mesh nodes.

[0039] First, the galvanometer motor rotor shaft 8 to be measured is installed on the turntable 1 through the three-jaw chuck 2, so that the turntable 1 can drive the galvanometer motor rotor shaft 8 to rotate along its central axis.

[0040] Then, adjust the installation position of the gaussmeter probe 4 on the gaussmeter mounting fixture 5 so that the measurement plane 42 of the gaussmeter probe 4 is located at the cylindrical surface of the galvanometer motor rotor shaft 8, and the midline of the measurement plane 42 points to the central axis of the galvanometer motor rotor shaft 8 along the radial direction of the galvanometer motor rotor shaft 8.

[0041] Next, adjust the rotation angle of the turntable 1, as well as the positions of the X-axis workbench 6 and the Y-axis workbench 7, so that the measurement plane 42 of the gaussmeter probe 4 moves to a grid node on the cylindrical surface of the galvanometer motor rotor shaft 8. During the adjustment process, the angle encoder measures the movement angle of the turntable 1, and the corresponding displacement grating rulers measure the displacements of the X-axis workbench 6 and the Y-axis workbench 7 respectively. Thus, the movement angle and displacement of the gaussmeter probe 4 relative to the galvanometer motor rotor shaft 8 can be obtained and transmitted to the industrial computer.

[0042] After the measurement plane 42 moves to a grid node, measure the magnetic field strength at this grid node through the measurement plane 42 of the gaussmeter probe 4 and transmit it to the industrial computer. The industrial computer calculates the coordinates of the current grid node in the corresponding cylindrical coordinate system based on the measured movement angle of the turntable 1, the displacement of the X-axis workbench 6, and the displacement of the Y-axis workbench 7, and stores the coordinates corresponding to the measured magnetic field strength at this measurement point.

[0043] Repeat the above operations. After completing the measurement of all grid nodes, for any point on the cylindrical surface of the galvanometer motor rotor shaft 8, the coordinates of this arbitrary point can also be obtained through the angle encoder and the displacement grating ruler. Then, based on the coordinates, determine the grid where this arbitrary point is located. Next, based on the coordinates and magnetic field strengths of the four grid nodes of this grid, the magnetic field strength of this arbitrary point can be calculated.

[0044] Measure the magnetic field strength of each grid node through the measuring device and record the cylindrical coordinates and magnetic field strength (i.e., B) at each grid node in the form of (r, θ, x, B). After measuring all grid nodes, the obtained data is as follows:

[0045] (r, θ1, x1, B 11 )、(r, θ2, x1, B 12 )…(r, θ n , x1, B 1n )

[0046] (r, θ1, x2, B 21 )、(r, θ2, x1, B 22 )…(r, θ n , x1, B 2n )

[0047] …………

[0048] (r, θ1, x m , B m1 )、(r, θ2, x m , B m2 )…(r, θ n , x m , B mn )

[0049] In the formula, m and n are the numbers of grid divisions along the X-axis and circumferentially on the cylindrical surface of the galvanometer motor rotor shaft 8, respectively.

[0050] Assume that the cylindrical coordinates of any point E on the cylindrical surface of the galvanometer motor rotor shaft 8 are (r, θ, x), and the cylindrical coordinates and magnetic field intensities of the four grid nodes of the grid where point E is located are respectively recorded as: (r, θ i , x j , B ij ), (r, θ i , x j+1 , B i(j+1) ), (r, θ i+1 , x j , B (i+1)j ), and (r, θ i+1 , x j+1 , B (i+1)(j+1) ), where i and j are the numbers of the four grid nodes. Then the magnetic field intensity at point E can be obtained by the following formula:

[0051]

[0052] Although an exemplary preferred measurement method is shown above, the usage method of the measurement device provided in this embodiment is not limited thereto. It is also possible to measure the magnetic field intensities of multiple predetermined measurement points on the cylindrical surface as needed, or to measure the magnetic field intensities of multiple measurement points and then obtain the magnetic field distribution of the entire cylindrical surface of the galvanometer motor rotor shaft 8 according to other algorithms in the prior art.

[0053] Functions and effects of the embodiment

[0054] According to the surface magnetic field measuring device of the moving magnet galvanometer motor rotor shaft provided by this embodiment, the spatial distribution measuring device of the surface magnetic field of the moving magnet galvanometer motor rotor shaft includes a turntable, a multi-jaw chuck, a gaussmeter, a movable first workbench, a second workbench arranged on the first workbench and movable in different directions, a gaussmeter mounting fixture arranged on the second workbench, an angle sensor and a displacement sensor. Therefore, the rotation angle of the rotor shaft can be adjusted through the turntable, and combined with the movement of the two workbenches, the gaussmeter probe can be positioned at a specific position on the cylindrical surface of the rotor shaft, so that the magnetic field intensity at finite space points on the cylindrical surface of the rotor shaft can be measured, and further the magnetic field intensity at any point on the surface of the moving magnet galvanometer motor rotor shaft can be obtained. Through this device, the above-mentioned measurement can be conveniently carried out in an industrial environment, which is beneficial to better analyzing the electromagnetic and mechanical characteristics of the moving magnet galvanometer motor, and thus a high-performance moving magnet galvanometer motor can be designed on this basis. Moreover, since the turntable and the multi-jaw chuck make the rotor shaft horizontally installed on the device, the first workbench can move along the axial direction of the rotor shaft and the second workbench can move along the radial direction of the rotor shaft, so the gaussmeter probe can be conveniently and accurately fed to each measurement position on the cylindrical surface, and the overall device can achieve a larger mounting surface and a smaller mounting height, which is more convenient for installation and operation in actual use.

[0055] In the embodiment, the moving magnet galvanometer motor rotor shaft to be detected can be conveniently installed and replaced through the three-jaw chuck; the two workbenches are respectively an X-axis workbench along the axial direction of the rotor shaft and a Y-axis workbench along the radial direction of the rotor shaft, and the measurement plane of the gaussmeter probe can be conveniently moved to each measurement point on the cylindrical surface through the movement in two directions, so as to improve the measurement efficiency. At the same time, the device also has the advantages of relatively simple structure, easy to maintain, no need for specially processed parts, and low cost.

[0056] Furthermore, all fixture and other structural parts in the device are made of non-magnetic materials, which can avoid affecting the magnetic field measurement results and obtain a more accurate magnetic field intensity distribution.

[0057] The above-mentioned embodiments are only used to illustrate the specific implementation manners of the present invention, and the present invention is not limited to the description scope of the above-mentioned embodiments. Those skilled in the art of this industry should understand that the present invention is not limited by the above-mentioned embodiments. What is described in the above-mentioned embodiments and the specification only illustrates the principle of the present invention. Without departing from the spirit and scope of the present invention, the present invention will have various changes and improvements, and these changes and improvements all fall within the scope of the present invention claimed. The scope of protection required by the present invention is defined by the appended claims and their equivalents.

Claims

1. A magnetic field measuring device for the surface of the rotor shaft of a moving magnet galvanometer motor, which is used to measure the magnetic field strength on the cylindrical surface of the rotor shaft of the galvanometer motor, and is characterized in that, Comprising: Rotary table; Multi-jaw chuck, coaxially arranged on the rotary table, for fixing one end of the rotor shaft, such that the axial direction of the rotor shaft is horizontal and the rotor shaft can rotate along its central axis; Gaussmeter, having a Gaussmeter probe, for detecting the magnetic field strength on the surface of the cylinder; Workbench base; First workbench, arranged on the workbench base and movable along the axial direction of the rotor shaft; Second workbench, arranged on the first workbench and movable along the radial direction of the rotor shaft; Mounting fixture, arranged on the second workbench, for clamping the Gaussmeter probe, Angle sensor, for detecting the movement angle of the rotary table; Two displacement sensors, respectively for detecting the displacements of the first workbench and the second workbench.

2. The surface magnetic field measuring device for the rotor shaft of the moving magnet type galvanometer motor according to claim 1, characterized in that, Further comprising: First guide rail, horizontally arranged on the workbench base and parallel to the axial direction of the rotor shaft, the first workbench is movably arranged on the first guide rail; And Second guide rail, horizontally arranged on the first workbench and perpendicular to the first guide rail, the second workbench is movably arranged on the second guide rail.

3. The device for measuring the magnetic field on the surface of the rotor shaft of a moving-magnet galvanometer motor according to claim 2, wherein: Among them, The end of the Gaussmeter probe has a measurement plane, The mounting fixture makes the Gaussmeter probe vertically arranged, and the measurement plane faces the cylindrical surface of the rotor shaft.

4. The surface magnetic field measuring device for the rotor shaft of a moving magnet type galvanometer motor according to claim 3, Characterized in that: Wherein, the mounting fixture includes: Column, vertically arranged on the second workbench; Clamping member, one end is mounted on the column, and the other end has a strip-shaped clamping groove for clamping the Gaussmeter probe.

5. The device for measuring the magnetic field on the surface of the rotor shaft of a moving-magnet galvanometer motor according to claim 4, wherein: Among them, The mounting fixture further includes a clamping and fixing member and a clamping adjustment member, One end of the clamping member has a socket hole and a pair of position locking holes, this end is sleeved on the column, the clamping and fixing member is arranged in the pair of position locking holes, and this end of the clamping member is fixed on the column through the clamping and fixing member, The other end of the clamping member has the clamping groove and a pair of groove distance adjustment holes, the clamping adjustment member is arranged in the pair of groove distance adjustment holes, and the width of the clamping groove is adjusted through the clamping adjustment member, so as to clamp or loosen the Gaussmeter probe.

6. The device for measuring the magnetic field on the surface of the rotor shaft of a moving-magnet galvanometer motor according to claim 1, wherein: Among them, The angle sensor is an angle encoder, The displacement sensor is a displacement grating scale.

7. The surface magnetic field measuring device for the rotor shaft of the moving magnet type galvanometer motor according to claim 6, characterized in that, Further comprising: Data acquisition card, respectively connected to the angle encoder, the displacement grating scale and the Gaussmeter, for acquiring the measured data thereof; And Industrial computer, connected to the data acquisition card, for obtaining the data from the data acquisition card.

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