Crystal support surface glue removing system

Abstract

The utility model relates to a crystal support surface glue removing system which comprises a cleaning cavity, a glue removing device capable of moving linearly is arranged on the cleaning cavity, the glue removing device comprises a support and a glue shoveling mechanism arranged on the support, and the glue shoveling mechanism comprises a rotary driving piece arranged on the upper portion of a first lifting plate, and the output end of the rotary driving piece is connected with a first slewing bearing; the first slewing bearing is located on the lower portion of the first lifting plate and connected with the annular rotary disc in the axial direction; a plurality of cutters distributed along the circumference are arranged on the annular turntable; the floating mechanism is located on the inner side of the first slewing bearing and the annular rotating disc and comprises a floating plate and a spring piece, the floating plate is connected with the first lifting plate through the spring piece, a pressing piece is arranged on the floating plate, and when the spring piece is in an initial state, the bottom end of the pressing piece extends out of the working face of the cutter; and the pressure sensing piece is used for acquiring the pressure borne by the pressing piece and transmitting the pressure to the control system so as to judge the height of the pressing piece. The tool distance is controlled, and the surface of a workpiece is prevented from being scratched in the glue shoveling process.

Description

Technical Field

[0001] The utility model relates to the technical field of ingot processing, in particular to a glue removing system for the surface of a crystal carrier. Background Art

[0002] The existing glue removing device for crystal carriers includes a glue removing mechanism, which includes a cutter driven by a linear driving member. The cutter moves linearly to scrape the glue on the surface of the workpiece. The existing problems include: the glue removing area covered by the cutter under a single linear movement path is small, resulting in repeated movement of the cutter and low scraping efficiency; the distance between the cutter and the surface of the workpiece is not well controlled, resulting in the working surface of the cutter being too close to the surface of the workpiece and damaging the surface of the workpiece. Summary of the Utility Model

[0003] Aiming at the deficiencies of the prior art, the utility model provides a glue removing system for the surface of a crystal carrier, aiming to control the distance of the cutter to prevent scratching the surface of the workpiece during the glue scraping process.

[0004] The technical scheme adopted by the utility model is as follows:

[0005] A glue removing system for the surface of a crystal carrier includes a cleaning chamber, and a glue removing device capable of linear movement is arranged on the cleaning chamber. The glue removing device includes a bracket and a glue scraping mechanism arranged on the bracket. The structure of the glue scraping mechanism includes:

[0006] A first lifting plate, which is used for lifting movement;

[0007] A rotary driving member, which is arranged on the upper part of the first lifting plate, and the output end is connected with a first slewing bearing;

[0008] A first slewing bearing, which is located at the lower part of the first lifting plate and is axially connected with an annular turntable;

[0009] An annular turntable, which is driven by the first slewing bearing to rotate, and a plurality of cutters are arranged on the annular turntable along the circumference;

[0010] A floating mechanism, which is located inside the first slewing bearing and the annular turntable, includes a floating plate and a spring member. The floating plate is connected with the first lifting plate through the spring member, and a pressing member is arranged on the floating plate. When the spring member is in the initial state, the bottom end of the pressing member extends out of the working surface of the cutter;

[0011] A pressure sensing member, which is used to obtain the pressure received by the pressing member and transmit it to the control system to judge the height of the pressing member.

[0012] The further technical scheme is:

[0013] The structure of the floating mechanism further includes a guide sleeve and a guide shaft. The two ends of the guide shaft are respectively connected to the guide sleeve and the floating plate, and the guide sleeve is fixedly arranged at the bottom of the first lifting plate. The spring sleeve is sleeved on the guide shaft, and its two ends are respectively connected to the guide sleeve and the floating plate.

[0014] A plurality of pressing members are evenly arranged along the circumferential direction, and the bottom end of each pressing member is spherical.

[0015] The structure of the rubber scraping mechanism further includes a lifting driving member, which is arranged on the bracket, and the output end is connected to the first lifting plate through a connecting member.

[0016] A number of the cutting tools are evenly distributed along the circumference.

[0017] The rubber removing device further includes a grinding mechanism arranged on the bracket. The structure of the grinding mechanism includes:

[0018] A second lifting plate, which is used for lifting movement;

[0019] A rotary driving member, which is arranged on the upper part of the second lifting plate, and the output end is connected to a second slewing bearing;

[0020] A second slewing bearing, which is arranged on the bottom surface of the second lifting plate and is axially connected to a rotating disc;

[0021] A rotating disc, which is driven by the second slewing bearing to rotate. A number of wire brushes are arranged on the rotating disc along the circumference.

[0022] The wire brush is in a bowl shape, and the working surface of the wire brush is an annular bottom surface.

[0023] The structure of the grinding mechanism further includes a lifting driving member, which is arranged on the bracket, and the output end is connected to the second lifting plate through a connecting member.

[0024] The cleaning chamber is arranged on the frame. Linear guide rails are respectively arranged on both sides of the cleaning chamber on the frame. A driving device is arranged on the frame, and the output end is connected to the bracket through a transmission mechanism to drive the bracket to move along the linear guide rails.

[0025] A circulating coolant spray pipe is arranged in the cleaning chamber, and a number of nozzles are arranged on it.

[0026] The beneficial effects of the present utility model are as follows:

[0027] The rubber scraping mechanism of the present utility model is provided with a floating mechanism. The height of the rubber scraping mechanism is adjusted through the pressure feedback of the floating mechanism, so as to control the distance between the working surface of the cutting tool and the surface of the workpiece, and prevent the working surface of the cutting tool from being too low to cause scratches on the surface of the workpiece.

[0028] The cutting tools of the present utility model are uniformly arranged in the circumferential direction. The cutting tools perform rubber scraping along the circumferential direction, and in combination with the linear motion of the rubber scraping mechanism, they rotate and advance simultaneously, greatly improving the rubber scraping efficiency.

[0029] The present utility model integrates rubber scraping, grinding, cleaning, and cooling into one, achieving rubber scraping, cleaning, and cooling simultaneously, reducing the working procedures and improving the working efficiency.

[0030] Other features and advantages of the present utility model will be described in the subsequent specification or understood by implementing the present utility model. BRIEF DESCRIPTION OF THE DRAWINGS

[0031] Figure 1 It is a schematic three-dimensional structure diagram of an embodiment of the present utility model.

[0032] Figure 2 It is a front view of the rubber scraping mechanism of an embodiment of the present utility model.

[0033] Figure 3 It is Figure 2 a cross-sectional view taken along the A-A section in

[0034] Figure 4 It is a schematic three-dimensional structure diagram of the rubber scraping mechanism of an embodiment of the present utility model.

[0035] Figure 5 It is a schematic three-dimensional structure diagram of the grinding mechanism of an embodiment of the present utility model.

[0036] In the figure: 1, lifting driving member; 2, rotating driving member; 3, cleaning chamber; 4, circulating coolant spray pipe; 5, driving device; 6, bracket; 7, frame; 8, linear guide rail; 9, first lifting plate; 10, first slewing bearing; 11, annular turntable; 12, cutting tool; 13, spring member; 14, pressing member; 15, floating plate; 16, guide shaft; 17, guide sleeve; 18, second lifting plate; 19, second slewing bearing; 20, wire brush; 22, rotating disc; 23, connecting member; 201, annular bottom surface. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0037] The following describes the specific embodiments of the present utility model with reference to the accompanying drawings.

[0038] As Figures 1 to 4 shown, the crystal carrier surface degumming system of this embodiment includes a cleaning chamber 3. A degumming device capable of linear movement is provided on the cleaning chamber 3. The degumming device includes a bracket 6 and a rubber scraping mechanism arranged on the bracket 6. The structure of the rubber scraping mechanism includes:

[0039] A first lifting plate 9, which is used for lifting movement;

[0040] A rotary driving member 2 is provided on the upper part of the first lifting plate 9, and its output end is connected to the first slewing bearing 10;

[0041] The first slewing bearing 10 is located below the first lifting plate 9 and is axially connected to the annular turntable 11;

[0042] The annular turntable 11 is driven by the first slewing bearing 10 to rotate, and a plurality of cutting tools 12 are arranged on the annular turntable 11 along the circumference;

[0043] The floating mechanism is located inside the first slewing bearing 10 and the annular turntable 11, and includes a floating plate 15 and a spring member 13. The floating plate 15 is connected to the first lifting plate 9 through the spring member 13. A pressing member 14 is provided on the floating plate 15. When the spring member 13 is in the initial state, the bottom end of the pressing member 14 extends out of the working surface of the cutting tool 12;

[0044] The pressure sensing member is used to obtain the pressure received by the pressing member 14 and transmit it to the control system to judge the height of the pressing member 14.

[0045] As Figure 3 shown, the structure of the floating mechanism further includes a guide sleeve 17 and a guide shaft 16. The two ends of the guide shaft 16 are respectively connected to the guide sleeve 17 and the floating plate 15, and the guide sleeve 17 is fixedly provided at the bottom of the first lifting plate 9; the spring member 13 is sleeved on the guide shaft 16 and its two ends are respectively connected to the guide sleeve 17 and the floating plate 15.

[0046] Specifically, the structure of the rubber scraping mechanism further includes a lifting driving member 1, which is arranged on the bracket 6, and its output end is connected to the first lifting plate 9 through a connecting member 23.

[0047] Specifically, the lifting driving member 1 can specifically adopt a lifting electric cylinder, which includes a lead screw-nut transmission mechanism.

[0048] Specifically, the cleaning chamber 3 is arranged on the frame 7. Linear guide rails 8 are respectively arranged on both sides of the cleaning chamber 3 on the frame 7. A driving device 5 is arranged on the frame 7, and its output end is connected to the bracket 6 through a transmission mechanism to drive the bracket 6 to move along the linear guide rail 8.

[0049] A circulating coolant spray pipe 4 is arranged in the cleaning chamber 3, and a plurality of nozzles are arranged on it.

[0050] The working principle of this embodiment:

[0051] The workpiece to be defrosted is placed in the cleaning chamber 3, and the defrosting device moves along the length direction of the cleaning chamber 3 until the defrosting mechanism is located above the workpiece. Among them, the pressure sensing member can specifically adopt a separate pressure sensor and is installed on the connecting member 23. Or, the pressure sensing member directly uses the rotation torque detection system of the lifting electric cylinder. When it is detected that the pressure received by the pressing member 14 is at a preset value, the lifting driving member 1 stops working, and the first lifting plate 9 stops moving downward, so that the position of the cutting tool 12 can be accurately controlled, and the working surface of the cutting tool 12 contacts the glue layer on the surface of the workpiece, preventing the cutting tool 12 from being too low and damaging the surface of the workpiece. After the first lifting plate 9 stops moving downward, the rotation driving member 2 is started. It rotates through the first slewing bearing 10 and drives the annular turntable 11 to rotate, and each cutting tool 12 moves along the circumferential direction to scrape the glue on the surface of the workpiece. At the same time, the defrosting device continues to move along the length direction of the cleaning chamber 3, and the cutting tool 12 rotates and advances at the same time, realizing the defrosting operation on the surface of the workpiece, greatly improving the defrosting efficiency.

[0052] As a preferred embodiment, a plurality of pressing members 14 are evenly arranged along the circumferential direction, and the bottom end of each pressing member 14 is spherical.

[0053] As a preferred embodiment, several cutting tools 12 are evenly distributed along the circumference. The number of cutting tools 12 is set to satisfy that at least two cutting tools are in contact with the workpiece.

[0054] As Figure 5 shown, the defrosting device further includes a grinding mechanism arranged on the bracket 6, and the structure of the grinding mechanism includes:

[0055] A second lifting plate 18, which is used for lifting movement;

[0056] A rotation driving member 2, which is arranged on the upper part of the second lifting plate 18, and the output end is connected to the second slewing bearing 19;

[0057] A second slewing bearing 19, which is arranged on the bottom surface of the second lifting plate 18 and is axially connected to the rotating disk 22;

[0058] A rotating disk 22, which is driven by the second slewing bearing 19 to rotate, and several wire brushes 20 are arranged on the rotating disk 22 along the circumference.

[0059] The wire brush 20 is in a bowl shape, and the working surface of the wire brush 20 is the annular bottom surface 201.

[0060] The structure of the grinding mechanism further includes a lifting driving member 1, which is arranged on the bracket 6, and the output end is connected to the second lifting plate 18 through the connecting member 23.

[0061] Working principle of the grinding mechanism: The second lifting plate 18 is lifted and lowered by the lifting driving member 1 until the wire brush 20 contacts the surface of the workpiece. Then the second lifting plate 18 stops moving downward. The second slewing bearing 19 drives the rotating disk 22, which in turn drives the wire brush 20 to rotate, so as to grind the surface of the workpiece.

[0062] After the rubber scraping and grinding are completed, the rubber removing device is removed. The nozzles on the circulating coolant spray pipe 4 in the cleaning chamber 3 spray cleaning liquid onto the workpiece to clean and cool the workpiece.

[0063] Those of ordinary skill in the art can understand that the above are only preferred embodiments of the present invention and are not intended to limit the present invention. Although the present invention has been described in detail with reference to the foregoing embodiments, for those skilled in the art, they can still modify the technical solutions described in the foregoing embodiments, or perform equivalent replacements for some of the technical features. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present invention shall be included within the protection scope of the present invention.

Claims

1. A debonding system for the surface of a crystal carrier, characterized in that, It includes a cleaning chamber (3). A degumming device capable of linear movement is provided on the cleaning chamber (3). The degumming device includes a bracket (6) and a rubber scraping mechanism arranged on the bracket (6). The structure of the rubber scraping mechanism includes: A first lifting plate (9) for performing lifting movement; A rotary driving member (2) arranged on the upper part of the first lifting plate (9), and its output end is connected to a first slewing bearing (10); A first slewing bearing (10) located at the lower part of the first lifting plate (9) and axially connected to an annular turntable (11); An annular turntable (11) driven by the first slewing bearing (10) to rotate. A plurality of cutters (12) are arranged on the annular turntable (11) in a circumferential distribution; A floating mechanism located inside the first slewing bearing (10) and the annular turntable (11), including a floating plate (15) and a spring member (13). The floating plate (15) is connected to the first lifting plate (9) through the spring member (13). A pressing member (14) is arranged on the floating plate (15). When the spring member (13) is in the initial state, the bottom end of the pressing member (14) extends out of the working surface of the cutter (12); A pressure sensing member for obtaining the pressure received by the pressing member (14) and transmitting it to a control system to judge the height of the pressing member (14).

2. The debonding system for the surface of the crystal carrier according to claim 1, characterized in that, The structure of the floating mechanism further includes a guide sleeve (17) and a guide shaft (16). The two ends of the guide shaft (16) are respectively connected to the guide sleeve (17) and the floating plate (15). The guide sleeve (17) is fixedly arranged at the bottom of the first lifting plate (9). The spring member (13) is sleeved on the guide shaft (16) and its two ends are respectively connected to the guide sleeve (17) and the floating plate (15).

3. The debonding system for the surface of the crystal carrier according to claim 1, wherein, A plurality of the pressing members (14) are evenly arranged in the circumferential direction, and the bottom end of each pressing member (14) is spherical.

4. The debonding system for the surface of the crystal carrier according to claim 1, characterized in that, The structure of the rubber scraping mechanism further includes a lifting driving member (1) arranged on the bracket (6), and its output end is connected to the first lifting plate (9) through a connecting member (23).

5. The crystal carrier surface degumming system according to claim 1, wherein A plurality of the cutters (12) are evenly distributed in the circumferential direction.

6. The debonding system for the surface of the crystal carrier according to claim 1, wherein The degumming device further includes a grinding mechanism arranged on the bracket (6). The structure of the grinding mechanism includes: A second lifting plate (18) for performing lifting movement; A rotary driving member (2) arranged on the upper part of the second lifting plate (18), and its output end is connected to a second slewing bearing (19); A second slewing bearing (19) arranged on the bottom surface of the second lifting plate (18) and axially connected to a rotating disk (22); A rotating disk (22) driven by the second slewing bearing (19) to rotate. A plurality of wire brushes (20) are arranged on the rotating disk (22) in a circumferential distribution; 7. The debonding system for the surface of the crystal carrier according to claim 6, wherein The wire brush (20) is bowl-shaped, and the working surface of the wire brush (20) is an annular bottom surface (201).

8. The debonding system for the surface of the crystal carrier according to claim 6, characterized in that, The structure of the grinding mechanism further includes a lifting driving member (1) arranged on the bracket (6), and its output end is connected to the second lifting plate (18) through a connecting member (23).

9. The debonding system for the surface of the crystal carrier according to claim 1, wherein The cleaning chamber (3) is arranged on the frame (7). Linear guide rails (8) are respectively arranged on both sides of the cleaning chamber (3) on the frame (7). A driving device (5) is arranged on the frame (7), and its output end is connected to the bracket (6) through a transmission mechanism to drive the bracket (6) to move along the linear guide rails (8).

10. The debonding system for the surface of the crystal carrier according to claim 1, wherein A circulating coolant spray pipe (4) is arranged in the cleaning chamber (3), and a number of nozzles are arranged thereon.

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