Multi-laser confocal processing mechanism and processing equipment

Abstract

The multi-laser confocal processing mechanism comprises a laser light source, a first lens group and a second lens group, wherein the first lens group and the second lens group are sequentially arranged in the laser emitting direction of the laser light source; the laser light source is composed of a plurality of lasers, the first lens group is composed of a plurality of lens groups, and the lens groups perform first condensation on laser emitted by the lasers; the laser emitted after being condensed by the lens group is all located in the coverage range of the second lens group, and the workpiece is processed after being condensed for the second time by the second lens group. And the processing material is conveyed to the condensation part of the second lens group through the material conveying mechanism for processing. Material conveying holes are formed in the middle positions of the laser light source, the first lens set and the second lens set, and machining materials penetrate through the material conveying holes to be conveyed.

Description

Technical Field

[0001] The utility model relates to the field of laser processing, and particularly relates to a multi-laser confocal processing mechanism and a processing device using the processing mechanism. Background Art

[0002] Laser processing technology is a processing technology that uses the characteristics of the interaction between a laser beam and a substance to cut, weld, additively manufacture, perform surface treatment, drill holes, and micro-process materials (including metals and non-metals). As an advanced manufacturing technology, laser processing has been widely applied in important sectors of the national economy such as automobiles, electronics, electrical appliances, aviation, metallurgy, and mechanical manufacturing, and plays an increasingly important role in improving product quality, labor productivity, automation, pollution-free, and reducing material consumption.

[0003] Laser processing is widely used in fields such as additive manufacturing and welding. At present, most of the direct laser processing methods use fiber lasers installed obliquely for incidence or form annular lasers for processing after optical path shaping of the laser. For the former, in order to improve the uniformity and processing power of the laser, multiple fiber lasers are usually arranged around the processing material and obliquely incident inward. Since the lasers must be installed obliquely to shoot the laser to the same cladding point, the angle adjustment of each laser is particularly important. The more lasers installed obliquely, the more cumbersome the adjustment, which greatly affects the use efficiency of the processing mechanism. If the angle adjustment of the lasers is not accurate enough, it may also lead to the failure of the cladding project. The structure of the obliquely installed lasers also has disadvantages such as a relatively large volume of the processing mechanism and is prone to interference during the processing process; for the latter, the optical path is complex and the manufacturing cost is high. Although the formed light spot is relatively symmetrical, it is impossible to perform non-uniform adjustment of the light spot deflection and some complex processing processes cannot be realized. Summary of the Invention

[0004] In view of the deficiencies of the prior art, the utility model provides a multi-laser confocal processing mechanism and a processing device using the processing mechanism.

[0005] The specific technical solution of the utility model is as follows: A multi-laser confocal processing mechanism includes a laser light source, and a first lens group and a second lens group arranged in sequence along the laser emission direction of the laser light source; the laser light source is composed of multiple lasers, the first lens group is composed of multiple lens groups, and the lens groups perform the first condensation on the laser emitted by the lasers; the laser emitted after being condensed by the lens groups is all within the coverage range of the second lens group, and the second lens group performs the second condensation and then processes the workpiece.

[0006] As a preference of the utility model, it further includes a processing material, and the processing material is transported to the condensation part of the second lens group by a material transport mechanism for processing.

[0007] Preferably, a material conveying hole is provided at the middle positions of the laser light source, the first lens group and the second lens group, and the processing material is conveyed through the material conveying hole.

[0008] Preferably, the laser in the laser light source can be independently controlled to turn on and off.

[0009] Preferably, the laser in the laser light source can be independently controlled in power.

[0010] Preferably, a plurality of the lasers in the laser light source form a laser group, and the laser group can be independently controlled to turn on and off.

[0011] Preferably, the laser group in the laser light source can be independently controlled in power.

[0012] Preferably, the laser is a fiber laser or a semiconductor laser.

[0013] Preferably, the lens group includes at least one condenser lens.

[0014] Preferably, the lens group includes a first auxiliary lens.

[0015] Preferably, the second lens group includes at least one condenser lens.

[0016] Preferably, the second lens group includes a second auxiliary lens, and the second auxiliary lens is located on the laser path of some of the lasers in the laser light source.

[0017] Preferably, the second lens group includes multiple groups of radially nested annular lenses.

[0018] Preferably, the second lens group can be adjusted for lateral displacement relative to the laser light source.

[0019] Preferably, the second lens group can be adjusted for longitudinal displacement relative to the laser light source.

[0020] Preferably, it further includes a mounting base, and the laser light source is mounted on the mounting base.

[0021] Preferably, the mounting base includes a horizontal mounting portion, and the laser light source is mounted on the horizontal mounting portion.

[0022] Preferably, the mounting base includes a vertical mounting portion, and the laser light source is mounted on the vertical mounting portion.

[0023] Preferably, the first lens group is mounted on the mounting base, and the lens group in the first lens group is opposite to the laser in the laser light source in position.

[0024] Preferably, the second lens group is mounted on the mounting base.

[0025] Preferably, a plurality of the mounting bases with different sizes are included, and the mounting bases with different sizes can be nested and combined for installation inside and outside.

[0026] Preferably, the second lens group includes a plurality of annular lenses with different sizes, and the annular lenses are respectively mounted at the bottoms of the mounting bases with different sizes nested inside and outside.

[0027] Preferably, a first protective mirror is mounted between the first lens group and the second lens group.

[0028] Preferably, a second protective mirror is mounted at the bottom of the second lens group.

[0029] A processing method for the multi-laser confocal processing mechanism as described above includes the following control method: The control system selects some of the lasers in the laser light source to generate not less than one graphic area, and controls the laser light source in the graphic area to be turned on during the processing.

[0030] A processing method for the multi-laser confocal processing mechanism as described above includes the following control method: The control system selects some of the lasers in the laser light source to generate not less than one graphic area, controls the position of the graphic area to change at a certain frequency, dynamically controls the lasers in the graphic area to be turned on by the control system, and controls the lasers outside the graphic area to be turned off.

[0031] A processing method for the multi-laser confocal processing mechanism as described above includes the following control method: The control system selects some of the lasers in the laser light source to generate not less than one graphic area, controls some or all of the graphic areas to be generated or eliminated during the processing, dynamically controls the lasers in the graphic area to be turned on by the control system, and controls the lasers outside the graphic area to be turned off.

[0032] A processing method for the multi-laser confocal processing mechanism as described above includes the following control method: The control system selects some of the lasers in the laser light source to generate not less than one graphic area, and controls the power of the laser light source in the graphic area to change during the processing.

[0033] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the lasers within the laser light source to generate no less than one graphic area, and controls the position change of the graphic area at a certain frequency. The control system dynamically controls the power change of the lasers within the graphic area.

[0034] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the lasers within the laser light source to generate no less than one graphic area, and controls the generation or elimination of some of the graphic areas during the processing. The control system dynamically controls the power change of the lasers within the graphic area.

[0035] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the laser groups within the laser light source to generate no less than one graphic area, and controls the turning on of the laser light source within the graphic area during the processing.

[0036] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the laser groups within the laser light source to generate no less than one graphic area, and controls the position change of the graphic area at a certain frequency. The control system dynamically controls the turning on of the laser groups within the graphic area, and controls the turning off of the laser groups outside the graphic area.

[0037] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the laser groups within the laser light source to generate no less than one graphic area, and controls the generation or elimination of some of the graphic areas during the processing. The control system dynamically controls the turning on of the laser groups within the graphic area, and controls the turning off of the laser groups outside the graphic area.

[0038] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the laser groups within the laser light source to generate no less than one graphic area, and controls the power change of the laser light source within the graphic area during the processing.

[0039] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some of the laser groups within the laser light source to generate no less than one graphic area, and controls the position change of the graphic area at a certain frequency. The control system dynamically controls the power change of the laser groups within the graphic area.

[0040] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects within the laser light source some of the laser groups to generate no less than one graphic area, and controls the generation or elimination of some of the graphic areas during the processing, and the control system dynamically controls the power change of the laser groups within the graphic area.

[0041] Processing method, for the multi-laser confocal processing mechanism described above,

[0042] The lens group includes a melting lens group and a preheating lens group. The laser emitted by the laser light source is condensed by the melting lens group and the second lens group to form a melting light spot in the molten pool area. The laser emitted by the laser light source is condensed by the preheating lens group and the second lens group to form a preheating light spot in the molten pool area. The area of the preheating light spot is larger than the area of the melting light spot;

[0043] Including the following processing method: Dynamically obtain the moving direction of the processing mechanism relative to the molten substrate, and the control system dynamically controls the lasers corresponding to the preheating lens group on the moving direction side to turn on or increase the power.

[0044] Processing method, for the multi-laser confocal processing mechanism described above,

[0045] The second auxiliary lens is a concave lens or a convex lens. The laser emitted by the laser light source forms a melting light spot in the molten pool area without being condensed by the second auxiliary lens. The laser emitted by the laser light source is condensed by the second auxiliary lens to form a preheating light spot in the molten pool area. The area of the preheating light spot is larger than the area of the melting light spot;

[0046] Including the following processing method: Dynamically obtain the moving direction of the multi-laser confocal processing mechanism relative to the molten substrate, and the control system dynamically controls some of the lasers on the moving direction side among the lasers corresponding to the second auxiliary lens to turn on or increase the power.

[0047] Processing method, for the multi-laser confocal processing mechanism described above,

[0048] The annular lens includes a melting annular lens and a preheating annular lens. The laser emitted by the laser light source is condensed by the first lens group and the melting annular lens to form a melting light spot in the molten pool area. The laser emitted by the laser light source is condensed by the first lens group and the preheating annular lens to form a preheating light spot in the molten pool area. The area of the preheating light spot is larger than the area of the melting light spot;

[0049] Including the following processing method: Dynamically obtain the moving direction of the multi-laser confocal processing mechanism relative to the molten substrate, and the control system dynamically controls some of the lasers on the moving direction side among the lasers corresponding to the preheating annular lens to turn on or increase the power.

[0050] The processing device includes the multi-laser confocal processing mechanism described above.

[0051] In summary, the present utility model has the following beneficial effects:

[0052] The multi-laser confocal processing mechanism of the present utility model uses lasers arranged in an array to form a laser light source. The lasers pass through the first condenser lens group to converge the divergence angle of the emitted laser, and then the second condenser lens group performs confocal focusing on all the laser light sources arranged in an array. This focusing method can make the installation directions of the lasers consistent without adjustment, and the laser optical paths and focusing points are more consistent and accurate. Moreover, the same installation direction of the lasers enables the volume of the processing mechanism to be reduced, especially the volume in the width direction is more compact; the laser array arrangement of the laser light source can be very dense, and the number of lasers can far exceed the number of direct lasers, enabling the overall processing power to reach a very high level; the densely distributed lasers make the energy distribution of the laser spot more uniform, capable of approaching or even achieving the uniformity of the annular laser, and the array lasers do not require optical path shaping, being simpler in structure compared to the annular laser; the first lens group and the second lens group can use different degrees of focusing for the lasers in different regions within the laser light source, capable of forming multiple focal points for processing, or dividing the laser beam into a laser beam for melting and a laser beam for preheating to respectively achieve the melting function and the preheating function; the power of the lasers in the array laser can be independently controlled, or evenly divided into several groups, and the power of each group can be independently controlled, so as to be able to control the laser power to present a non-Gaussian distribution, or control the laser power to be non-uniform in different directions, and the processing power can also dynamically change following the moving direction of the processing mechanism, thereby being able to enhance the process effect and complete some relatively complex processing techniques. Description of the Drawings

[0053] Figure 1 It is a schematic structural diagram of the lasers of the multi-laser confocal processing mechanism of the present utility model linearly arranged in a square area;

[0054] Figure 2 It is a schematic structural diagram of the lasers of the multi-laser confocal processing mechanism of the present utility model arranged in a regular polygon area;

[0055] Figure 3 It is a schematic structural diagram of the lasers of the multi-laser confocal processing mechanism of the present utility model arranged in a circular area;

[0056] Figure 4 It is a schematic structural diagram of the lasers of the multi-laser confocal processing mechanism of the present utility model linearly arranged in a square area when using a processing material for processing;

[0057] Figure 5Schematic diagram of the array structure of the lasers in the multi-laser confocal processing mechanism of the present utility model when processing with a processing material within a regular polygon area;

[0058] Figure 6 Schematic diagram of the array structure of the lasers in the multi-laser confocal processing mechanism of the present utility model when processing with a processing material within a circular area;

[0059] Figure 7 For the present utility model Figure 4 Top view;

[0060] Figure 8 For the present utility model Figure 5 Top view;

[0061] Figure 9 For the present utility model Figure 6 Top view;

[0062] Figure 10 For the present utility model Figure 4 Front view;

[0063] Figure 11 For the present utility model Figure 5 Front view;

[0064] Figure 12 For the present utility model Figure 6 Front view;

[0065] Figure 13 For the present utility model Figure 10 、 Figure 11 、 Figure 12 One embodiment of the partial enlarged view at A in , , ;

[0066] Figure 14 For the present utility model Figure 10 、 Figure 11 、 Figure 12 One embodiment of the partial enlarged view at A in , , ;

[0067] Figure 15 Schematic diagram of the structure of the first lens group of the multi-laser confocal processing mechanism of the present utility model when using a microlens array;

[0068] Figure 16 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the laser cladding part is in a negative defocus state during the overall descent;

[0069] Figure 17 Schematic diagram of the structure of the lasers turned on within the graphic area of the multi-laser confocal processing mechanism of the present utility model;

[0070] Figure 18 For the present utility model Figure 17The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0071] Figure 19 The structural schematic diagram of the graphic area movement of the multi-laser confocal processing mechanism of the present utility model;

[0072] Figure 20 For the present utility model Figure 19 The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0073] Figure 21 The structural schematic diagram of the graphic area rotation of the multi-laser confocal processing mechanism of the present utility model;

[0074] Figure 22 For the present utility model Figure 21 The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0075] Figure 23 The structural schematic diagram of the multi-laser confocal processing mechanism of the present utility model for forming two graphic areas;

[0076] Figure 24 For the present utility model Figure 23 The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0077] Figure 25 The structural schematic diagram of the multi-laser confocal processing mechanism of the present utility model for forming two graphic areas and one of which can be opened or closed;

[0078] Figure 26 For the present utility model Figure 25 The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0079] Figure 27 The structural schematic diagram of the graphic area composed of high-power lasers of the multi-laser confocal processing mechanism of the present utility model;

[0080] Figure 28 For the present utility model Figure 27 The corresponding laser in Figure 12 The top view enlarged schematic diagram of the graphic light spot formed at position B in

[0081] Figure 29 The structural schematic diagram of the graphic area movement composed of high-power lasers of the multi-laser confocal processing mechanism of the present utility model;

[0082] Figure 30 For the present utility model Figure 29 The corresponding laser forms a graphic light spot at position B in Figure 12 a top - view enlarged schematic diagram;

[0083] Figure 31 is a schematic structural diagram of the rotation of the graphic area formed by high - power lasers in the multi - laser confocal processing mechanism of the present utility model;

[0084] Figure 32 For the present utility model Figure 31 The corresponding laser forms a graphic light spot at position B in Figure 12 a top - view enlarged schematic diagram;

[0085] Figure 33 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model forming graphic areas of two high - power lasers;

[0086] Figure 34 For the present utility model Figure 33 The corresponding laser forms a graphic light spot at position B in Figure 12 a top - view enlarged schematic diagram;

[0087] Figure 35 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model forming graphic areas of two high - power lasers with different power densities in the two graphic areas;

[0088] Figure 36 For the present utility model Figure 35 The corresponding laser forms a graphic light spot at position B in Figure 12 a top - view enlarged schematic diagram;

[0089] Figure 37 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model where adjacent lasers form a laser group;

[0090] Figure 38 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model where lasers in a specific area form a laser group;

[0091] Figure 39 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model when the cladding material is wire and the laser is a semiconductor laser with end - emitting light;

[0092] Figure 40 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model when the cladding material is powder;

[0093] Figure 41 is a schematic structural diagram of the multi - laser confocal processing mechanism of the present utility model when the cladding materials of wire and powder are transported simultaneously;

[0094] Figure 42 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the laser is a fiber laser;

[0095] Figure 43 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the laser is a side-emitting semiconductor laser;

[0096] Figure 44 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when a preheating spot is formed when the distance between the lens group of the laser and the laser is reduced;

[0097] Figure 45 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the lens group of the laser is a non-collimating lens and the laser diverges to form a preheating spot;

[0098] Figure 46 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the laser diverges to form a preheating spot when the lens group of the laser includes a first auxiliary lens which is a concave lens;

[0099] Figure 47 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the laser diverges to form a preheating spot when the lens group of the laser includes a first auxiliary lens which is a convex lens;

[0100] Figure 48 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group uses a convex lens to generate spherical aberration;

[0101] Figure 49 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group uses a convex lens to generate chromatic aberration;

[0102] Figure 50 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group uses a plano-convex lens to generate chromatic aberration;

[0103] Figure 51 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group uses a doublet lens to eliminate chromatic aberration and spherical aberration;

[0104] Figure 52 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group uses a Fresnel lens;

[0105] Figure 53 Schematic diagram of the structure of the multi-laser confocal processing mechanism of the present utility model when the second lens group includes a second auxiliary lens located in the innermost circle;

[0106] Figure 54 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, including the second auxiliary lens located in the outermost circle;

[0107] Figure 55 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, including multiple sets of nested annular lenses;

[0108] Figure 56 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, including multiple sets of nested annular lenses with different heights of the annular lenses to offset aberration;

[0109] Figure 57 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, including multiple sets of nested annular lenses with different heights of the annular lenses to generate different focal points;

[0110] Figure 58 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, installed on the mounting base and capable of lateral displacement adjustment relative to the laser light source;

[0111] Figure 59 Schematic diagram of the second lens group of the multi-laser confocal processing mechanism of the present utility model, capable of longitudinal displacement adjustment relative to the laser light source;

[0112] Figure 60 Schematic diagram of the multi-laser confocal processing mechanism of the present utility model, where the laser light source and the first lens group are installed on the mounting base and the laser light source is installed on the lateral mounting part;

[0113] Figure 61 Schematic diagram of the multi-laser confocal processing mechanism of the present utility model, where the laser light source and the first lens group are installed on the mounting base and the laser light source is installed on the longitudinal mounting part;

[0114] Figure 62 Schematic diagram of the multi-laser confocal processing mechanism of the present utility model, showing the combined installation of mounting bases of different sizes in an inner and outer nested manner;

[0115] Figure 63 Schematic diagram of the multi-laser confocal processing mechanism of the present utility model, showing the combined installation of mounting bases of different sizes in an inner and outer nested manner;

[0116] Figure 64 Schematic diagram of the multi-laser confocal processing mechanism of the present utility model, where the annular lenses of the second lens group are respectively installed at the bottom of the corresponding nested mounting bases;

[0117] Figure 65Schematic diagram of the structure of the first protective mirror installed between the first lens group and the second lens group of the multi-laser confocal processing mechanism of the present utility model;

[0118] Figure 66 Schematic diagram of the structure of the second protective mirror installed at the bottom of the second lens group of the multi-laser confocal processing mechanism of the present utility model;

[0119] In the figure, 1 - laser light source, 11 - laser, 11a - laser group, 1a - graphic area, 1a1 - first graphic area, 1a2 - second graphic area, 1b - graphic light spot, 1b1 - first graphic light spot, 1b2 - second graphic light spot, 1c - extra-graphic light spot, 2 - first lens group, 21 - lens group, 21a - first auxiliary lens, 21b - microlens array, 3 - second lens group, 31 - material delivery hole, 3a - second auxiliary lens, 3b - annular lens, 4 - processing material, 5 - mounting seat, 51 - horizontal mounting part, 52 - vertical mounting part, 6 - first protective mirror, 7 - second protective mirror. Detailed implementation manners

[0120] The present utility model will be further described below in conjunction with the accompanying drawings through specific embodiments.

[0121] The multi-laser confocal processing mechanism includes a laser light source 1, and a first lens group 2 and a second lens group 3 arranged in sequence along the laser emission direction of the laser light source 1; the laser light source 1 is composed of a plurality of lasers 11, the first lens group 2 is composed of a plurality of lens groups 21, and the lens group 21 performs the first light condensation on the laser emitted by the laser 11; the laser emitted after being condensed by the lens group 21 is all within the coverage range of the second lens group 3, and the second lens group 3 performs the second light condensation to process the workpiece.

[0122] As Figures 1 - 3 shown, the laser light source 1 is composed of a plurality of lasers 11 with the same incident direction, and after the light condensation of the first lens group 2 and the co-light condensation of the second lens group 3, a laser energy convergence point for processing is formed, so that the workpiece can be heated and melted to realize functions such as laser cutting, laser drilling, and laser heat treatment.

[0123] It further includes a processing material 4, and the processing material 4 is transported to the light-condensing part of the second lens group 3 through a material delivery mechanism for processing.

[0124] As Figures 4 - 12As shown, the laser light source 1 is composed of multiple lasers 11 with the same incident direction. After the lasers 11 are condensed by the first lens group 2 and co-condensed by the second lens group 3, a laser energy convergence point for processing is formed. After the processing material 4 is transported to the laser energy convergence point, it can be melted to achieve functions such as laser additive manufacturing, laser welding, and laser cladding. Currently, most of the direct laser melting methods use fiber lasers installed obliquely for incidence. To improve the uniformity and melting power of the laser, multiple fiber lasers are usually arranged around the material and obliquely incident inward. Since the lasers must be installed obliquely to shoot the laser to the same melting area, the angle adjustment of each laser is particularly important. The more lasers installed obliquely, the more cumbersome the adjustment, which greatly affects the use efficiency of the processing mechanism. If the angle adjustment of the lasers is not precise enough, it may also lead to the failure of the processing project. The structure of the obliquely installed lasers will also bring disadvantages such as a larger volume of the processing mechanism. In the confocal lasers 11, the laser incident direction usually remains the same as the conveying direction of the processing material 4, and the installation directions of the lasers 11 are the same. There is no need for oblique installation, so there is no need for angle adjustment. The second lens group 3 is used to change the laser path so that the laser shoots in the direction of the processing material 4. Therefore, the volume of the processing mechanism can be reduced, especially the lateral volume is more compact. The lasers 11 in the laser light source 1 are arranged in a dense distribution, which can be a linear array distribution in a planar area, or an array distribution in a regular polygon area, or an array distribution in a circular area, or can be combined by the above arrangement methods. Even if the power of a single laser 11 is small, by superimposing the powers of multiple array-distributed lasers 11, the overall melting power of the processing mechanism can be greatly improved. The confocal lasers can use lasers 11 with small power and volume for dense arrangement. Although the power of a single laser 11 is smaller than that of the current direct lasers, the lasers 11 can be arranged very densely in an array, and the number of lasers 11 can far exceed the number of direct lasers, so that the overall processing power exceeds the power of the direct lasers. Moreover, the densely arranged lasers 11 make the energy distribution of the laser more uniform, and can approach or even reach the uniformity of the ring laser. Since the confocal lasers 11 do not require the optical path shaping structure of the ring laser, they are simpler in structure than the ring laser. In addition, different from the ring laser, the power of the confocal lasers 11 can be independently controlled, or the lasers 11 can be grouped and the power of each group can be independently controlled, so that the laser power can be controlled to be non-uniform within the melting range. For some processing operations, the laser power in the front side of the moving direction of the processing mechanism is usually increased to enhance the melting effect. In order to ensure better melting effect during the movement of the processing mechanism, the laser power should also change dynamically during the melting process. Obviously, the densely arranged lasers 11 can easily achieve this through independent control or independent group control, which has more advantages in the processing technology than the ring laser.

[0125] A material delivery hole 31 is provided at the middle position among the laser light source 1, the first lens group 2, and the second lens group 3, and the processing material 4 is transported through the material delivery hole 31.

[0126] As Figures 4 - 12 shown, the opening of the material delivery hole 31 can realize the coaxial transportation of the processing material 4 inside the laser, so that the light spot formed by the laser light source 1 in the melting area is evenly distributed around the processing material 4, and a better melting effect can be achieved; the material delivery hole 31 can only allow the processing material 4 to be transported through, or the processing material 4 can be transported after the material delivery mechanism passes through; as Figure 39 、 Figure 40 、 Figure 41 shown, taking the material delivery mechanism passing through the material delivery hole 31 to transport the processing material 4 as an example, the processing material 4 can be a wire or powder material, or a combination of wire and powder materials; the material delivery hole 31 can also transport the protective gas. Generally speaking, in order to ensure the effect of the protective gas, the protective gas surrounds the processing material 4 and is transported together with the processing material 4 through the material delivery hole 31.

[0127] The laser 11 in the laser light source 1 can be independently controlled to turn on and off.

[0128] The independent control of the switch of the laser 11 can realize the zonal processing of the laser light source 1. According to different process requirements, the laser 11 at a specific part is turned on. As Figure 16 shown, especially when the whole processing mechanism or the second lens group 3 descends, the laser melting part is in a negative defocus state, and the laser light spot presents the same light spot as the laser light source 1 at the melting part. As Figure 17 shown, taking the laser light source 1 arranged in a square in a linear array as an example, in order to reduce the heat input during the processing, the lasers 11 within the range of the elliptical-like graphic area 1a are turned on, and the width of the long axis of the ellipse covers the melting width, which can reduce the number of lasers 11 working in the moving direction while meeting the melting width, thereby reducing the heat input; as Figure 18 shown, the lasers 11 within the graphic area 1a form a graphic light spot 1b with laser aggregation in the laser melting area. The graphic light spot 1b is similar to an ellipse and is consistent with the image of the graphic area 1a, so as to meet the realization of the process effect. As Figure 19 、 Figure 20 shown, in some applications, by dynamically changing the position of the graphic area 1a during the processing, the movement of the graphic light spot 1b can be controlled. In this solution, the elliptical-like light spot moves forward a certain displacement in the moving direction of the processing mechanism, so that the melting light spot has a certain lead, thereby improving the processing efficiency. As Figure 21 、 Figure 22As shown, in some applications, by dynamically changing the position of the graphic area 1a during the processing so that it rotates around the material conveying hole 31, the rotation of the graphic light spot 1b can be controlled. In this solution, the quasi-elliptical light spot is biased towards the processing material 4 and rotates around the processing material 4 as the center, which can play a role in molten pool stirring, making the growth of material grains more beneficial to the mechanical properties of the material and improving the processing quality. For example Figure 23 、 Figure 24 As shown, in some applications, there are multiple graphic areas 1a. In this solution, the graphic area 1a consists of two circular rings with different sizes, and the graphic light spot 1b also correspondingly presents as two rings of light spots. Through this solution, a better melting effect can be achieved. For example, the situation of molten pool splash can be effectively reduced. For example Figure 25 、 Figure 26 As shown, in some applications, there are multiple graphic areas 1a. In this solution, there are two graphic areas 1a. One is in a circular ring shape, and the other is on the side offset from the processing material 4. During the processing, the graphic light spot 1b also presents as a combination of a circular ring light spot and an offset light spot. The circular ring light spot is used to melt the processing material 4, and the offset light spot is used to preheat the workpiece. The offset light spot is turned on when preheating is required and turned off when preheating is not required. During the movement of the processing mechanism, the opening and closing of some graphic areas 1a are continuously controlled.

[0129] The laser 11 in the laser light source 1 can independently control the power.

[0130] The independent control of the power of the laser 11 can realize the zonal power adjustment of the laser light source 1, and adjust the power of the laser 11 at specific parts according to different process requirements. Similar to the Figures 17 - 26 solution, as Figures 27 - 36 shown, all the lasers 11 can be turned on, and the power of the lasers 11 in the graphic area 1a can be controlled to be higher than that outside the graphic area 1a. The unit density power in the graphic light spot 1b is higher than the unit density power of the light spot 1c outside the graphic area at the melting part. Different from the solution of independent control of the switch, the graphic area 1a can include multiple areas and the powers of the lasers 11 in different areas can be different; for example Figure 35 、 Figure 36As shown, the graphic area 1a is divided into a first graphic area 1a1 in an annular shape for melting and a second offset graphic area 1a2 for preheating. Since the preheating power does not need to be too high, the power of the laser 11 in the first graphic area 1a1 is greater than that of the laser 11 in the second graphic area 1a2. At the melting part, the unit density power in the first graphic light spot 1b1 is higher than that in the second graphic light spot 1b2, and the unit density powers in both the first graphic light spot 1b1 and the second graphic light spot 1b2 are greater than the unit density power of the light spot 1c outside the graphic. By adjusting the power levels of different graphic areas, more complex processes can be achieved.

[0131] A number of lasers 11 in the laser light source 1 form a laser group 11a, and the laser group 11a can be independently controlled for switching.

[0132] When the number of lasers 11 installed in the laser light source 1 is large, the influence of a single laser 11 on the melting area is very small, and it is also rather cumbersome to control each laser 11 individually. Controlling a number of lasers 11 in series will simplify the control circuit and the control process. As Figure 37 shown, preferably, adjacent lasers 11 form a laser group 11a, and the laser group 11a is still arranged in an array. This is equivalent to increasing the power of a single laser light source and reducing the number of laser light sources, which not only enhances the effect achieved by independent control but also simplifies the control process. As Figure 38 shown, preferably, the lasers 11 in a specific area form a laser group 11a. For example, the lasers 11 on the outer circle of the laser light source 1 form a laser group 11a for melting the processing material 4, and the lasers 11 on the inner circle of the laser light source 1 form a laser group 11a for melting the base material, thereby simplifying the control process.

[0133] The laser group 11a in the laser light source 1 can independently control the power.

[0134] The independent control of the power of the laser group 11a can achieve the zonal power adjustment of the laser light source 1, and adjust the power of the laser group 11a at a specific part according to different process requirements.

[0135] The laser 11 is a fiber laser or a semiconductor laser.

[0136] The laser light source 1 can obtain a greater melting power by using a fiber laser, and using a semiconductor laser can make the laser energy distribution after focusing more uniform. In order to balance the melting power and laser uniformity, the fiber laser and the semiconductor laser can also be used in combination; among them, the semiconductor lasers include TO series lasers, COS series lasers, BB series lasers, BC series lasers, VSL series lasers, VTOF series lasers, etc.; due to the different packaging forms and light emission forms of different series of semiconductor lasers, their installation positions are also different. For example, the TO series, VSL series, and VTOF series lasers all emit from the surface of the semiconductor device, as shown in Figure 39 , Figure 42 . Such semiconductor lasers are usually installed on the top of the processing mechanism like the fiber laser; while the COS series, BB series, and BC series lasers emit from the side of the semiconductor device, as shown in Figure 43 . Such semiconductor lasers are more suitable for installation on the side of the processing mechanism.

[0137] The lens group 21 includes at least one condenser lens.

[0138] The first lens group 2 is used to preliminarily condense the laser emitted by the laser light source 1, so that the laser enters the second lens group 3 in a collimated or nearly collimated state. As shown in Figures 4 - 6 , Figures 10 - 12 , the first lens group 2 is usually installed at the bottom of the laser light source 1, and each lens group 21 is respectively opposite to the position of the laser 11; as shown in Figure 13 , Figure 14 , the lens group 21 can be installed separately from the laser 11, or integrated with the laser 11 into a laser condenser assembly; as shown in Figure 15As shown, the first lens group 2 can also adopt at least one microlens array 21b. The microlens array 21b arranges the lens group 21 in an array as a component in advance. When the laser 11 and the lens group 21 are arranged in a linear array, it will be more convenient to use the microlens array 21b. For different laser light sources, there are differences in the laser shape and divergence angle emitted. Different lenses are needed for condensing. For example, when the laser light source 1 is a fiber laser, its light source is a circular light spot, and the divergence angle remains unchanged in the circumferential direction, that is, it diverges in a conical shape. The condensing method for such a laser light source is relatively easy, and a spherical convex lens can achieve a good condensing effect; when the laser light source 1 is some semiconductor lasers, its light source has different divergence angles in two perpendicular directions. Using a convex lens to condense it will make the light spot in a long strip or elliptical shape. Although the light spot shape of a single laser beam is not in an ideal state, the overall light spot formed around the processing material 4 after confocal focusing of the densely distributed lasers is still relatively symmetrical and can also achieve a good confocal effect; of course, for these semiconductor lasers, a better condensing form is to first install a fast-axis cylindrical lens near the light source to condense the direction with a larger divergence angle, and then install a slow-axis cylindrical lens at a certain distance from the light source to condense the direction with a smaller divergence angle. Using the combination of the fast-axis and slow-axis cylindrical lenses can make the laser shape close to a circle, so as to achieve a better condensing effect. During the laser processing process, sometimes larger light spots are needed to improve the processing efficiency or preheat the molten substrate. Making certain adjustments to the first lens group 2 can easily achieve this purpose. As Figure 44 shown, as an embodiment, the lens group 21 can change the size of the laser melting light spot by adjusting the distance between it and the laser 11. According to the imaging principle, when the distance between the lens group 21 and the laser 11 decreases, the light spot formed by the light spot emitted by the laser 11 imaging on the molten substrate will become larger, so as to form a larger melting area, which can improve the processing efficiency or preheat the molten substrate. As Figure 45 shown, as an embodiment, the lens of the lens group 21 is a non-collimating lens, so that the laser is emitted at a certain divergence angle or a certain convergence angle. The converging laser becomes a divergent form after crossing at the converging point, and the divergent laser is condensed by the second lens group 3 to form a larger laser melting light spot.

[0139] The lens group 21 includes a first auxiliary lens 21a.

[0140] As Figure 46 、 Figure 47As shown, in addition to the collimating lens group, the lens group 21 may further include a first auxiliary lens 21a; as an embodiment, the first auxiliary lens 21a is a concave lens or a convex lens, so that the laser is emitted at a certain divergence angle or a certain convergence angle. Among them, the converging laser becomes divergent after crossing at the convergence point, and the divergent laser is condensed by the second lens group 3 to form a larger laser melting spot. In practical applications, some lasers in the densely distributed lasers can be selected to face the first auxiliary lens 21a, or the lasers in one or more regions can be selected to face the first auxiliary lens 21a; since the laser generated by the inner laser 11 is incident on the surface of the molten substrate closer to perpendicular, the reflectivity of the substrate surface to the laser is lower, so the inner laser 11 is more effective in preheating the molten substrate.

[0141] The second lens group 3 includes at least one condenser lens.

[0142] The second lens group 3 can use a spherical convex lens to perform confocal focusing on the densely arranged laser beams emitted by the first lens group 2, as Figure 48 shown. Since the actual focusing state of the light cannot be the same as the ideal state of Gaussian optics, the existence of spherical aberration of the spherical convex lens will cause changes in the actual path of the laser and cannot be completely focused to a point. Sometimes, the existence of spherical aberration of the spherical convex lens is beneficial to the melting of the processing material 4 and can improve the processing efficiency; when the focusing requirement is high, the second lens group 3 can also use a compound lens or a combination of multiple lenses to eliminate the influence of aberration on focusing.

[0143] In some cases, the aberration of the convex lens of the second lens group 3 is more conducive to the melting of the processing material 4. Especially when the coverage of the laser 11 of the laser light source 1 is relatively wide, the influence of spherical aberration will cause the laser emitted by the laser 11 on the outer side far from the processing material 4 to have a more upward focus compared to the laser emitted by the laser 11 on the inner side close to the processing material 4. That is, the laser 11 forms multiple focal points within a certain height range along the optical axis at the bottom of the second lens group 3. By controlling the change in the height of the second lens group 3, different focal points can be controlled to be at different positions in the melting area. Specifically, the upper laser focal point can be controlled to be at the bottom part of the processing material 4, and the lower laser focal point can be controlled to be below the surface of the molten substrate, so that both the processing material 4 and the molten substrate can be evenly melted. Further, since the incident angle of the outer laser on the processing material 4 is closer to 90° than that of the inner laser on the processing material 4, the reflectivity of the processing material 4 to the outer laser is lower. The incident angle of the inner laser on the molten substrate is closer to 90° than that of the outer laser on the molten substrate, and the reflectivity of the molten substrate to the inner laser is lower. Therefore, the form of separating the focal points of the lasers 11 on the inner and outer sides can reduce the reflectivity of the processing material 4 and the molten substrate to the laser and improve the overall processing efficiency. Further, when the processing material 4 is made of materials such as aluminum and copper, the laser wavelength has a greater influence on the reflectivity of the processing material 4. The lasers 11 on the outer side of the laser light source 1 can choose to use blue laser light sources, so that the processing material 4 passes through the focal point formed by the blue laser light source first during the conveying process to reduce the reflectivity of the material to the laser and improve the processing efficiency.

[0144] As Figure 49 , Figure 50 shown, the spherical convex lens of the second lens group 3 is also affected by chromatic aberration. The existence of chromatic aberration will cause the laser with a shorter wavelength to have a larger refraction angle, that is, the laser with a shorter wavelength has a more upward focus compared to the laser with a longer wavelength. The melting effect is better when the processing material 4 is a high-reflectivity material such as aluminum and copper. Therefore, the lasers 11 of the laser light source 1 can use light sources with different wavelengths in combination, or a light source with a wider spectral range can be adopted. The existence of chromatic aberration in the second lens group 3 enables the processing material 4 to be first melted by a laser with a shorter wavelength such as blue light during the movement towards the molten pool, and then melted by a laser with a longer wavelength such as red light when the material is melted or close to the molten state. This sequential melting method can give full play to the respective advantages of short-wavelength lasers and long-wavelength lasers and make the overall processing efficiency higher.

[0145] The spherical aberration and chromatic aberration of the second lens group 3 are the two main types of aberrations affecting light concentration. Other types of aberrations such as coma and distortion will have a certain impact on the shape of the laser light source 1 after focusing, but the laser shape has a very small impact on the melting effect of the processing material 4.

[0146] The spherical aberration and chromatic aberration of the second lens group 3 can be beneficial to the melting of the processing material 4 in some cases. However, in some cases with higher precision requirements, spherical aberration and chromatic aberration are not desired, and the degree of spherical aberration and chromatic aberration needs to be controlled within a certain range. For different process requirements, it is particularly important to select appropriate lenses and lens combinations for the second lens group 3. When a single lens is used in the second lens group 3, the spherical aberration varies depending on the lens selection, while chromatic aberration is more difficult to eliminate. The condenser lens of the second lens group 3 can be a positive meniscus lens, a double convex lens, a plano-convex lens, an optimal shape lens, an aspherical lens, etc., and the degree of spherical aberration formed by them is different, and corresponding lenses can be selected according to different process requirements; as Figure 51 shown, when the second lens group 3 has high requirements for both spherical aberration and chromatic aberration, a doublet lens can be used. The doublet lens can mainly reduce the influence of chromatic aberration on laser light sources of different wavelengths, and at the same time can also improve the spherical aberration well, so that laser light sources of different wavelengths and different regions can be focused to a point or close to a point, which greatly improves the melting accuracy.

[0147] As Figure 52 shown, the second lens group 3 can also use a Fresnel lens for light condensation. Especially when the number of lasers 11 of the laser light source 1 is large and the coverage range is wide, the thickness of the convex lens will become very thick, resulting in a very large weight of the overall processing mechanism. Using a Fresnel lens in the second lens group 3 can effectively reduce the weight of the processing mechanism.

[0148] The second lens group 3 includes a second auxiliary lens 3a, and the second auxiliary lens 3a is located on the laser path of some lasers 11 inside the laser light source 1.

[0149] The second auxiliary lens 3a is used to adjust the light condensation path of part of the laser passing through the second lens group 3 or before passing through the second lens group 3. Especially when the number of installed lasers 11 of the laser light source 1 is large and the arrangement range is wide, the laser emitted by some of the lasers 11 is adjusted. As Figure 53 、 Figure 54 shown, as an embodiment, a concave lens or a convex lens is installed as the second auxiliary lens 3a in the innermost or outermost circle of the range where the second lens group 3 is located, so that the laser beam of the laser 11 passing through the second auxiliary lens 3a will not be focused at the melting part, and the laser melting spot formed at the melting part is larger than the confocal laser melting spot, thereby improving the processing efficiency or preheating part of the melting area. In particular, since the second auxiliary lens 3a can change the laser focal length, it can also eliminate the influence of some laser aberrations.

[0150] The second lens group 3 includes multiple groups of radially nested annular lenses 3b.

[0151] When the second lens group 3 uses a single lens for confocal imaging, the structure becomes very simple and reliable, but there are also some limitations in use. For example, the middle part of the lens is relatively thick, making the overall weight of the processing mechanism relatively heavy. Another example is that all the laser beam focal lengths are the same, resulting in poor process flexibility. As Figure 55 shown, in order to eliminate the above limitations, the second lens group 3 can be composed of multiple groups of radially nested annular lenses 3b. This solution allows the inner annular lenses 3b to use thinner lenses like the outer ones, effectively reducing the overall weight of the processing mechanism. As an embodiment, the annular lenses 3b of different nested layers can be selected to have different focal lengths, so that the lasers in different circles achieve different effects. For example, the outer laser is used for focusing, and the inner laser is used for preheating, improving the process effect. As Figure 56 shown, as an embodiment, the annular lenses 3b of different nested layers use different mounting heights, so as to be able to offset the influence of aberration. As Figure 57 shown, adjusting the height of some of the nested annular lenses 3b can more precisely control the focus points of the lasers in different circles to meet the requirements of some processing technologies.

[0152] The second lens group 3 can be adjusted horizontally relative to the laser light source 1.

[0153] As Figure 58 shown, to ensure that the processing material 4 can pass through the focusing part of the second lens group 3, or the focusing point of the second lens group 3 is located on the processing material 4, the second lens group 3 is usually designed with a horizontally adjustable structure, so that the focusing point can follow its horizontal adjustment. There is a certain gap between the material conveying hole 31 and the processing material 4, enabling the second lens group 3 to be horizontally fine-tuned without interfering with the processing material 4. The fine-tuning range is determined by the size of the gap, thus ensuring that the processing material 4 is aligned with the optical axis.

[0154] The second lens group 3 can be adjusted longitudinally relative to the laser light source 1.

[0155] As Figure 59 shown, as an embodiment, the second lens group 3 is adjusted up and down by the rotation of the mounting base, and the focus point of the laser light source 1 can move following the up and down movement of the second lens group 3. When the second lens group 3 moves upward, the conveying distance of the processing material 4 can be reduced, and the processing mechanism is closer to the molten pool. When the second lens group 3 moves downward, the conveying distance of the processing material 4 can be increased, and the processing mechanism is farther from the molten pool. Therefore, when the processing material 4 is a relatively thin wire, the second lens group 3 can be moved upward to reduce the influence caused by wire bending. When the processing material 4 is a relatively thick wire that is not easily bent, the second lens group 3 can be moved downward to reduce the influence of the high temperature of the molten pool on the processing mechanism.

[0156] It also includes a mounting base 5, and the laser light source 1 is installed on the mounting base 5.

[0157] The mounting base 5 is usually made of materials with good heat conduction such as copper and aluminum, and a water cooling channel can be opened near the laser light source 1 and the first lens group 2 to ensure the cooling performance of the heat generating part.

[0158] The mounting base 5 includes a horizontal mounting part 51, and the laser light source 1 is mounted on the horizontal mounting part 51.

[0159] As Figure 60 shown, taking the circular array installation of the laser 11 as an example, when the laser 11 of the laser light source 1 is a fiber laser or some semiconductor lasers such as TO series, VSL series, VTOF series, etc., the laser emits from the end of the fiber laser or the surface of the semiconductor device. Mounting the laser light source 1 on the horizontal mounting part 51 can make the laser emission direction face the first lens group 2 to achieve primary light concentration.

[0160] The mounting base 5 includes a vertical mounting part 52, and the laser light source 1 is mounted on the vertical mounting part 52.

[0161] As Figure 61 shown, taking the circular array installation of the laser 11 as an example, when the laser 11 of the laser light source 1 is some semiconductor lasers such as COS series, BB series, BC series, etc., the laser emits from the side of the semiconductor device. Mounting the laser light source 1 on the vertical mounting part 52 can make the laser emission direction face the first lens group 2 to achieve primary light concentration.

[0162] The first lens group 2 is mounted on the mounting base 5, and the lens group 21 in the first lens group 2 is opposite to the laser 11 in the laser light source 1 in position.

[0163] As Figure 60 、 Figure 61 shown, mounting the laser 11 and the lens group 21 on the mounting base 5 at the same time can ensure the stability of the optical path; preferably, the laser 11 and the lens group 21 are hermetically packaged on the mounting base 5, which can reduce the influence of the external processing environment.

[0164] The second lens group 3 is mounted on the mounting base 5.

[0165] As Figure 58 shown, mounting the second lens group 3 on the mounting base 5 can ensure the coaxiality of the optical axis of the second lens group 3 and the center of the laser light source 1, reduce the generation of laser coma, etc., and make the laser spot hitting the melting part remain symmetrical around the processing material 4.

[0166] It includes a plurality of mounting bases 5 with different sizes, and the mounting bases 5 with different sizes can be nested and combined for installation inside and outside.

[0167] As Figure 62 、 Figure 63As shown, the number of lasers 11 of the laser light source 1 installed on a single mounting base 5 is limited. When a higher laser power is required, the mounting base 5 can increase the number of installed lasers 11 by means of stacking and nesting, so as to improve the melting power of the processing mechanism. The mounting base 5 can be nested from the inside out, or from the outside in, or nested simultaneously inside and outside; the form of nesting from the inside out has a simpler structure, but the innermost mounting base 5 in the initial state usually has relatively limited dimensions, and the number of installed lasers 11 cannot be too many, resulting in a relatively small laser power of the processing mechanism in the initial state, and the number of lasers 11 installed on the outer nested mounting base 5 is more than that on the inner layer, resulting in a relatively large power jump after nesting; the form of nesting from the outside in can make the number of lasers 11 installed on the outermost mounting base 5 in the initial state relatively large, and the laser power of the processing mechanism in the initial state is relatively large. The number of lasers 11 installed on the inner nested mounting base 5 is less than that on the outer layer, and the power jump after nesting is relatively stable, but its nesting form will make the volume of the processing mechanism in the initial state relatively large and the structure more complex; preferably, the mounting base 5 in the initial state can be designed into a structure with multiple rings of lasers 11 installed, or a structure with lasers 11 installed on both sides, and then a mounting base 5 with a single ring of lasers 11 installed is nested outside it.

[0168] The second lens group 3 includes multiple groups of annular lenses 3b with different sizes, and the annular lenses 3b are respectively installed at the bottoms of the mounting bases 5 with different sizes nested inside and outside.

[0169] As Figure 64 shown, when the second lens group 3 adopts a combination of multiple groups of annular lenses 3b, the annular lenses 3b in different circles can be correspondingly installed on the mounting bases 5 in different nested layers. This installation form enables each group of mounting bases 5 to form an independent light condensing module, eliminating the need to install and adjust the second lens group 3 again, making the power expansion of the processing mechanism modular and more convenient to use.

[0170] A first protective mirror 6 is installed between the first lens group 2 and the second lens group 3.

[0171] As Figure 65 shown, the first protective mirror 6 is used to protect the first lens group 2 from damage and extend its service life; preferably, the first protective mirror 6 is hermetically installed with the mounting base 5, so that the laser light source 1 and the first lens group 2 work in a sealed environment to ensure their stability.

[0172] A second protective mirror 7 is installed at the bottom of the second lens group 3.

[0173] As Figure 66 shown, the second protective mirror 7 is used to protect the second lens group 3 from being splashed and polluted by molten slag, soot, etc. generated during the laser processing; preferably, the second protective mirror 7 is detachably connected with the mounting base 5, which is convenient for its regular cleaning or replacement.

[0174] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some lasers 11 within the laser light source 1 to generate no less than one graphic area, and controls the laser light source 1 within the graphic area to turn on during the processing.

[0175] As Figure 17 、 Figure 18 shown, as an embodiment, the graphic area generated by the control system is approximately elliptical, the center of the ellipse is at the optical axis position, the major axis of the ellipse is along the melting width direction, and the minor axis of the ellipse is along the moving direction of the processing mechanism. Thus, the heat input can be reduced while ensuring the melting width, and the workpiece processing quality can be improved. As Figure 23 、 Figure 24 shown, as an embodiment, the graphic area generated by the control system is two concentric circular rings, one inside the other. By using the two graphic areas for melting simultaneously, the splashing of the molten pool can be reduced.

[0176] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some lasers 11 within the laser light source 1 to generate no less than one graphic area, controls the position of the graphic area to change at a certain frequency, dynamically controls the lasers 11 within the graphic area to turn on, and controls the lasers 11 outside the graphic area to turn off.

[0177] As Figure 19 、 Figure 20 shown, as an embodiment, the graphic area generated by the control system is approximately elliptical, dynamically controls the minor axis of the approximately elliptical shape to be along the moving direction of the processing mechanism, and dynamically controls the whole graphic to move along the moving direction of the processing mechanism. Thus, the melting area can be biased towards the front of the melting direction, and the processing efficiency and processing quality can be improved.

[0178] As Figure 21 、 Figure 22 shown, as an embodiment, the centroid of the graphic area generated by the control system is biased towards one side of the central optical axis, and dynamically controls the graphic area to rotate around the optical axis at a certain frequency. Thus, during the processing, the molten light spot always rotates around the processing material 4, achieving the effect of stirring the molten pool.

[0179] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some lasers 11 within the laser light source 1 to generate no less than one graphic area, controls the generation or elimination of some or all of the graphic areas during the processing, dynamically controls the lasers 11 within the graphic area to turn on, and controls the lasers 11 outside the graphic area to turn off.

[0180] As Figure 25 、 Figure 26As shown, in one embodiment, one of the graphic regions generated by the control system is annular, and the other is on the offset side of the processing material 4. The offset graphic region is located on the front side of the moving direction of the processing mechanism for preheating the workpiece, and is dynamically turned on or off according to the preheating requirements during the processing.

[0181] A processing method for the above multi-laser confocal processing mechanism includes the following control method: The control system selects some lasers 11 inside the laser light source 1 to generate no less than one graphic region, and controls the power change of the laser light source 1 within the graphic region during the processing.

[0182] As Figure 27 、 Figure 28 As shown, in one embodiment, the graphic region generated by the control system is quasi-elliptical, the center of the ellipse is at the optical axis position, the major axis of the ellipse is along the melting width direction, and the minor axis of the ellipse is along the moving direction of the processing mechanism. Moreover, the control system controls the power of the lasers 11 inside the ellipse to be higher than the power of the lasers 11 outside the ellipse. Thus, the heat input can be reduced while ensuring the melting width, and the processing quality of the workpiece can be improved. As Figure 33 、 Figure 34 As shown, in one embodiment, the graphic region generated by the control system consists of two concentric annular shapes, one inside the other, and the control system controls the power of the lasers 11 inside the annular shape to be higher than the power of the lasers 11 outside the annular shape. By using the two graphic regions for melting simultaneously, the splashing of the molten pool can be reduced.

[0183] A processing method for the above multi-laser confocal processing mechanism includes the following control method: The control system selects some lasers 11 inside the laser light source 1 to generate no less than one graphic region, controls the position change of the graphic region at a certain frequency, and dynamically controls the power change of the lasers 11 within the graphic region.

[0184] As Figure 29 、 Figure 30 As shown, in one embodiment, the graphic region generated by the control system is quasi-elliptical, dynamically controls the minor axis of the quasi-elliptical shape to be along the moving direction of the processing mechanism, and dynamically controls the whole graphic to move along the moving direction of the processing mechanism. Moreover, the control system controls the power of the lasers 11 inside the ellipse to be higher than the power of the lasers 11 outside the ellipse. Thus, the melting region can be biased towards the front of the melting direction, and the processing efficiency and processing quality can be improved.

[0185] As Figure 31 、 Figure 32As shown, as an embodiment, the centroid of the graphic area generated by the control system is biased towards one side of the central optical axis, and the control system dynamically controls the graphic area to rotate around the optical axis at a certain frequency. Moreover, the control system controls the power of the laser 11 inside the graphic to be higher than that of the laser 11 outside the graphic. Thus, during the processing, the molten spot continuously rotates around the processing material 4, achieving the effect of stirring the molten pool.

[0186] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some lasers 11 inside the laser light source 1 to generate no less than one graphic area, and controls the generation or elimination of some graphic areas during the processing. The control system dynamically controls the power change of the lasers 11 within the graphic area.

[0187] As Figure 35 、 Figure 36 As shown, as an embodiment, one part of the graphic area generated by the control system is annular, and the other part is located on the offset side of the processing material 4. The offset graphic area is located on the front side of the moving direction of the processing mechanism for preheating the workpiece. The control system controls the power change of the lasers 11 within the annular and offset graphics, and controls the power of the lasers 11 within the offset graphic to be lower than that within the annular area. During the processing, the power is dynamically adjusted according to the melting and preheating requirements, which can achieve better melting and preheating effects.

[0188] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some laser groups 11a inside the laser light source 1 to generate no less than one graphic area, and controls the laser light source 1 within the graphic area to turn on during the processing.

[0189] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some laser groups 11a inside the laser light source 1 to generate no less than one graphic area, and controls the position change of the graphic area at a certain frequency. The control system dynamically controls the laser groups 11a within the graphic area to turn on and controls the laser groups 11a outside the graphic area to turn off.

[0190] A processing method for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects some laser groups 11a inside the laser light source 1 to generate no less than one graphic area, and controls the generation or elimination of some graphic areas during the processing. The control system dynamically controls the laser groups 11a within the graphic area to turn on and controls the laser groups 11a outside the graphic area to turn off.

[0191] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects a partial laser group 11a within the laser light source 1 to generate no less than one graphic area, and controls the power change of the laser light source 1 within the graphic area during the processing.

[0192] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects a partial laser group 11a within the laser light source 1 to generate no less than one graphic area, controls the position change of the graphic area at a certain frequency, and the control system dynamically controls the power change of the laser group 11a within the graphic area.

[0193] Processing method, for the multi-laser confocal processing mechanism described above, including the following control methods: The control system selects a partial laser group 11a within the laser light source 1 to generate no less than one graphic area, controls the generation or elimination of some graphic areas during the processing, and the control system dynamically controls the power change of the laser group 11a within the graphic area.

[0194] Processing method, for the multi-laser confocal processing mechanism described above,

[0195] The lens group 21 includes a melting lens group and a preheating lens group. The laser emitted by the laser light source 1 forms a melting light spot in the melting pool area after being condensed by the melting lens group and the second lens group 3. The laser emitted by the laser light source 1 forms a preheating light spot in the melting pool area after being condensed by the preheating lens group and the second lens group 3. The area of the preheating light spot is larger than that of the melting light spot;

[0196] Including the following processing method: Dynamically obtain the moving direction of the processing mechanism relative to the molten substrate, and the control system dynamically controls the laser 11 corresponding to the preheating lens group on the moving direction side to turn on or increase the power.

[0197] Processing method, for the multi-laser confocal processing mechanism described above,

[0198] The second auxiliary lens 3a is a concave lens or a convex lens. The laser emitted by the laser light source 1 forms a melting light spot in the melting pool area without being condensed by the second auxiliary lens 3a. The laser emitted by the laser light source 1 forms a preheating light spot in the melting pool area after being condensed by the second auxiliary lens 3a. The area of the preheating light spot is larger than that of the melting light spot;

[0199] Including the following processing method: Dynamically obtain the moving direction of the multi-laser confocal processing mechanism relative to the molten substrate, and the control system dynamically controls some lasers 11 on the moving direction side in the lasers 11 corresponding to the second auxiliary lens 3a to turn on or increase the power.

[0200] Processing method, for the multi-laser confocal processing mechanism described above,

[0201] The annular lens 3b includes a molten annular lens and a preheating annular lens. The laser emitted by the laser light source 1 is condensed by the first lens group 2 and the molten annular lens to form a molten light spot in the molten pool area. The laser emitted by the laser light source 1 is condensed by the first lens group 2 and the preheating annular lens to form a preheating light spot in the molten pool area. The area of the preheating light spot is larger than that of the molten light spot.

[0202] It includes the following processing method: dynamically obtaining the moving direction of the multi-laser confocal processing mechanism relative to the molten substrate, and the control system dynamically controls some of the lasers 11 on the moving direction side in the lasers 11 corresponding to the preheating annular lens to be turned on or the power to be increased.

[0203] The processing equipment includes the above-mentioned multi-laser confocal processing mechanism.

[0204] The processing equipment includes additive manufacturing equipment, laser welding equipment, laser cladding equipment, laser cutting equipment, laser drilling equipment, laser heat treatment equipment, etc.

[0205] The above-described embodiments are only descriptions of the preferred embodiments of the present invention, and do not limit the concept and scope of the present invention. Without departing from the design concept of the present invention, various variations and improvements made by those of ordinary skill in the art to the technical solution of the present invention should fall within the protection scope of the present invention. The technical content claimed by the present invention has been fully recorded in the claims.

Claims

1. Multi-laser confocal processing mechanism, characterized in that: It includes a laser light source (1), and a first lens group (2) and a second lens group (3) arranged in sequence along the laser emission direction of the laser light source (1); the laser light source (1) is composed of multiple lasers (11), the first lens group (2) is composed of multiple lens groups (21), and the lens group (21) can perform primary focusing on the laser emitted by the laser (11); the laser emitted after being focused by the lens group (21) is all within the coverage range of the second lens group (3), and the second lens group (3) can perform secondary focusing on the laser emitted after being focused by the lens group (21).

2. The multi-laser confocal processing mechanism according to claim 1, characterized in that: It further includes a processing material (4), and the processing material (4) is transported to the focusing part of the second lens group (3) for processing through a material conveying mechanism.

3. The multi-laser confocal machining mechanism according to claim 2, wherein: A material conveying hole (31) is provided at the middle position among the laser light source (1), the first lens group (2), and the second lens group (3), and the processing material (4) is conveyed through the material conveying hole (31).

4. The multi-laser confocal processing mechanism according to any one of claims 1-3, characterized in that: The lasers (11) in the laser light source (1) can be independently controlled for switching on and off.

5. The multi-laser confocal processing mechanism according to claim 4, characterized in that: The lasers (11) in the laser light source (1) can be independently controlled for power.

6. The multi-laser confocal processing mechanism according to any one of claims 1-3, characterized in that: Several of the lasers (11) in the laser light source (1) form a laser group (11a), and the laser group (11a) can be independently controlled for switching on and off.

7. The multi-laser confocal processing mechanism according to claim 6, characterized in that: The laser group (11a) in the laser light source (1) can be independently controlled for power.

8. The multi-laser confocal processing mechanism according to any one of claims 1-3, characterized in that: The laser (11) is a fiber laser or a semiconductor laser.

9. The multi-laser confocal machining mechanism according to any one of claims 1-3, characterized in that: The lens group (21) includes at least one focusing lens.

10. The multi-laser confocal processing mechanism according to claim 9, characterized in that: The lens group (21) includes a first auxiliary lens (21a).

11. The multi-laser confocal processing mechanism according to any one of claims 1-3, characterized in that: The second lens group (3) includes at least one focusing lens.

12. The multi-laser confocal machining mechanism according to claim 11, characterized in that: The second lens group (3) includes a second auxiliary lens (3a), and the second auxiliary lens (3a) is located on the laser path of some of the lasers (11) inside the laser light source (1).

13. The multi-laser confocal machining mechanism according to claim 11, wherein: The second lens group (3) includes multiple groups of radially nested annular lenses (3b).

14. The multi-laser confocal processing mechanism according to claim 11, wherein: The second lens group (3) can be adjusted for lateral displacement relative to the laser light source (1).

15. The multi-laser confocal processing mechanism according to claim 11, characterized in that: The second lens group (3) can be adjusted for longitudinal displacement relative to the laser light source (1).

16. The multi-laser confocal machining mechanism according to any one of claims 1-3, characterized in that: It further includes a mounting base (5), and the laser light source (1) is mounted on the mounting base (5).

17. The multi-laser confocal processing mechanism according to claim 16, characterized in that: The mounting base (5) includes a horizontal mounting part (51), and the laser light source (1) is mounted on the horizontal mounting part (51).

18. The multi-laser confocal machining mechanism according to claim 16, characterized in that: The mounting base (5) includes a vertical mounting part (52), and the laser light source (1) is mounted on the vertical mounting part (52).

19. The multi-laser confocal processing mechanism according to claim 16, wherein: The first lens group (2) is mounted on the mounting base (5), and the lens group (21) in the first lens group (2) is opposite in position to the lasers (11) in the laser light source (1).

20. The multi-laser confocal machining mechanism according to claim 16, wherein: The second lens group (3) is mounted on the mounting base (5).

21. The multi-laser confocal processing mechanism according to claim 16, characterized in that: It includes multiple mounting bases (5) of different sizes, and the mounting bases (5) of different sizes can be nested and combined for installation inside and outside each other.

22. The multi-laser confocal machining mechanism according to claim 21, characterized in that: The second lens group (3) includes multiple sets of annular lenses (3b) with different sizes, and the annular lenses (3b) are respectively mounted at the bottoms of the mounting seats (5) with different sizes nested inside and outside.

23. The multi-laser confocal processing mechanism according to claim 19, wherein: A first protective mirror (6) is mounted between the first lens group (2) and the second lens group (3).

24. The multi-laser confocal processing mechanism according to claim 20, characterized in that: A second protective mirror (7) is mounted at the bottom of the second lens group (3).

25. Processing equipment, characterized in that: It includes the multi-laser confocal processing mechanism according to any one of claims 1-24.

Images