Target sheet automatic rapid replacement device

Abstract

The utility model relates to the technical field of radiation medical treatment, in particular to a target sheet automatic rapid replacement device which comprises a manipulator fixing base, a six-axis industrial robot, a rotary neutron target station, a clamp locking mechanism robot side, a clamping tool supporting seat, a target station door clamping tool, a target sheet radial clamping tool and a target sheet loading box. Through cooperative use of the six-axis industrial robot, the rotary neutron target station, the clamp locking mechanism robot side, the target station door clamping tool and the target sheet radial clamping tool, the automatic target replacing function of the target sheet is achieved, in the automatic target sheet replacing process, the neutron target station does not need to be integrally hoisted out of an equipment room and then replaced with a new neutron target station, and the target sheet replacing efficiency is greatly improved. Therefore, the replacement cost of the target sheet is reduced, the maintenance period is shortened, and the technical problems of long maintenance period and high cost caused by the fact that the existing target sheet is replaced by hoisting the whole neutron target station out of the equipment room and replacing the neutron target station with a new neutron target station are solved.

Description

Technical Field

[0001] The utility model relates to the technical field of radiation medical treatment, in particular to an automatic and rapid target sheet replacement device. Background Art

[0002] Boron Neutron Capture Therapy (BNCT) is a binary, targeted, and cell-level precise radiotherapy mode that combines radiation and drugs based on neutron capture reactions. It combines the advantages of "biological targeting" and "heavy ion radiotherapy". When the isotope boron-10 enriched in tumor tissues captures thermal neutrons, high-energy α particles and recoil lithium-7 nuclei are generated, which cause ionizing radiation inside tumor cells, resulting in irreparable double-strand DNA damage to biological organisms and cell macromolecules, thereby leading to apoptosis or necrosis of tumor cells, while being able to well protect surrounding normal tissues.

[0003] Traditional photon radiotherapy and proton heavy ion therapy require irradiating the tumor lesion multiple times, up to more than 30 times, while BNCT treatment usually only requires 1 to 2 irradiations. The treatment course is significantly shorter than that of traditional photon radiotherapy and proton heavy ion therapy. The applicable symptoms of BNCT are mainly invasive, multiple, recurrent, radiation-resistant, and inoperable malignant tumors that cannot be well solved by other radiotherapy means.

[0004] The core component of this treatment device related to this patent is the neutron target station. The neutron target station is a device used to generate neutrons. The specific principle is that a proton beam with a certain energy in the upstream beam tube bombards the target body in the neutron target station. The target body generally consists of a copper base and a very thin lithium plating layer. Nuclear reactions occur in the proton lithium plating layer to generate neutrons. Generally, water-cooled microchannels are arranged in the copper base, and the heat generated by the proton bombardment of the target body is carried away by the passing plasma water. The neutron target station can be classified into a fixed target and a rotating target. The fixed target fixes a single target sheet in a non-moving target station mechanism, and the rotating target is a device that evenly assembles multiple target sheets onto a rotating mechanism. The fixed target does not need to move, and the proton beam will continuously hit the fixed position on the target sheet, resulting in an aggravated heat dissipation problem of the target sheet and a short service life; in the rotating target structure, the target sheet is driven by a motor to rotate. A single target sheet will not always be in a working state, and the target sheets dispersed on the rotating mechanism will work at equal intervals. While effectively increasing the yield of epithermal neutron beams, it greatly increases the proton bombardment area, reduces the heat received by a single target sheet, thereby reducing the temperature rise of the target sheet, greatly increasing the service life of the target sheet, reducing the target replacement frequency, and improving the reliability of the neutron target station.

[0005] In existing boron neutron capture therapy (BNCT) tumor treatment devices, there are mainly two ways to generate waste targets: 1. Waste targets are generated when the device operates normally until it reaches its performance limit. After a new target plate is bombarded by charged particles for a fixed period of time, the amount of material available for nuclear reactions decreases. When the amount of nuclear reaction raw material becomes too small to produce neutrons with sufficient technical parameter quality, the target plate becomes a waste target plate that has lost its original performance; 2. During operation, due to individual differences in the target plate, abnormal situations such as melting or peeling of the lithium plating layer on the target plate, radiation damage, and bubble bulging occur, resulting in a significant reduction in the neutron yield generated by proton bombardment of the target; these waste targets need to be replaced with new target plates for the neutron tumor treatment device to continue operating. The waste target plate has a high dose of induced radioactivity after being used under proton irradiation for a long time. If manual replacement is used, maintenance staff need to wear heavy radiation protection suits; not only is the maintenance operation clumsy and inefficient, but it also poses a serious risk to the physical health of the operators.

[0006] The main existing technical solution on the market is to lift the entire neutron target station out of the equipment room and replace it with a new neutron target station. This solution has the problems of a long maintenance cycle and high costs, and it is not excluded that some manufacturers use manual target replacement methods.

[0007] The automated device described in this patent can achieve automatic replacement of the target plate, without the need to lift the entire neutron target station out, nor the need for personnel to work in a high-dose radiation environment, thus well solving the above problems. Summary of the Utility Model

[0008] The purpose of this utility model is to provide a device for rapid automatic replacement of target plates, which solves the technical problems of long maintenance cycle and high costs existing in the current replacement of target plates by lifting the entire neutron target station out of the equipment room and replacing it with a new neutron target station.

[0009] To achieve the above purpose, this utility model provides a device for rapid automatic replacement of target plates, including a manipulator fixed base, and also including a six-axis industrial robot, a rotating neutron target station, a fixture locking mechanism on the robot side, a clamping tooling support seat, a target station door clamping tooling, a target plate radial clamping tooling, and a target plate loading box. The six-axis industrial robot is arranged below the manipulator fixed base, the rotating neutron target station is located on the side of the six-axis industrial robot away from the manipulator fixed base, the fixture locking mechanism on the robot side is arranged on the side of the six-axis industrial robot close to the rotating neutron target station, the clamping tooling support seat is located on the side of the six-axis industrial robot away from the rotating neutron target station, the target station door clamping tooling and the target plate radial clamping tooling are respectively arranged on the left and right sides of the clamping tooling support seat, and the target plate loading box is located on the side of the clamping tooling support seat close to the manipulator fixed base.

[0010] Among them, the rotating neutron target station includes a target disk, a target piece, a target station end cover, a rotary clamping cylinder, clamping fingers, a plunger mounting block, a cylinder adapter plate, a vacuum chamber body, a target piece window cover, a target piece window opening / closing handle, a sealing ring, a throttle valve, a magnetic proximity switch, a hinge pin, a torsion spring, and a plunger. The plunger is mounted on the plunger mounting block, and the plunger mounting block is fixed on the target disk. The throttle valve and the magnetic proximity switch are both mounted on the rotary clamping cylinder. The rotary clamping cylinder is mounted on the vacuum chamber body through the cylinder adapter plate. The sealing ring is mounted on the vacuum chamber body. The target piece is inserted into the target disk. The target piece window cover is connected to the vacuum chamber body through the torsion spring and the hinge pin. The target piece window opening / closing handle is mounted outside the target piece window cover. The clamping fingers are mounted on the rotary clamping cylinder. The target station end cover is mounted on one side of the vacuum chamber body away from the target piece window cover.

[0011] Among them, the robot side of the fixture locking mechanism includes a robot side, a first steel ball, a guide pin, a first electrical signal interface, and a first compressed air interface. The first steel ball is arranged in a ring inside the robot side, and the guide pin, the first electrical signal interface, and the first compressed air interface are all arranged outside the robot side.

[0012] Among them, the clamping tool support base includes a floor support base adapter plate, a profile frame, a target station door clamping tool placement position, and a target piece radial clamping tool placement position. The profile frame is arranged on the floor support base adapter plate, and the target station door clamping tool placement position and the target piece radial clamping tool placement position are respectively arranged on the left and right sides of the profile frame.

[0013] Among them, the target station door clamping tool includes a first fixture locking mechanism tool side, a first fixture positioning structure, a first cylinder connection structure, a first magnetic proximity switch, clamping fingers, a rotary gripper cylinder, a first throttle valve, a first straight through air pipe joint, a first solenoid valve, a bent air pipe joint, and a first solenoid valve cable. The first fixture positioning structure and the first cylinder connection structure are both arranged below the first fixture locking mechanism tool side. The rotary gripper cylinder is arranged below the first cylinder connection structure. The first magnetic proximity switch is arranged inside the rotary gripper cylinder. The clamping fingers are arranged below the rotary gripper cylinder. The first throttle valve is arranged outside the rotary gripper cylinder. The first straight through air pipe joint is located above the first throttle valve, and the first straight through air pipe joint is connected to the bent air pipe joint through the first solenoid valve. The first solenoid valve cable is arranged outside the first solenoid valve.

[0014] Among them, the tool side of the first fixture locking mechanism has a locking and positioning surface, a second compressed air interface, and a second electrical signal interface, and the locking and positioning surface, the second compressed air interface, and the second electrical signal interface are all arranged on the side of the tool side of the first fixture locking mechanism away from the clamping fingers.

[0015] Among them, the radial clamping tooling for the target piece includes a tool side of a second fixture locking mechanism, a second fixture positioning structure, a second cylinder connection structure, a second magnetic proximity switch, a fixed-side target piece jaw, a flange-side target piece jaw, a parallel gripper cylinder, a second throttle valve, a second straight-through air pipe joint, a second solenoid valve, and a second solenoid valve cable. The second fixture positioning structure is arranged outside the tool side of the second fixture locking mechanism. The second cylinder connection structure is arranged on the side of the second fixture positioning structure away from the tool side of the second fixture locking mechanism. The second magnetic proximity switch is located on the side of the second cylinder connection structure away from the second fixture positioning structure. The fixed-side target piece jaw and the flange-side target piece jaw are respectively arranged on the left and right sides of the second cylinder connection structure. The parallel gripper cylinder is arranged on the side of the second cylinder connection structure close to the fixed-side target piece jaw and is located between the fixed-side target piece jaw and the flange-side target piece jaw. The second throttle valve is arranged outside the parallel gripper cylinder. The second straight-through air pipe joint is located on the side of the second throttle valve away from the parallel gripper cylinder. The second solenoid valve is connected to the second straight-through air pipe joint. The second solenoid valve cable is arranged on the side of the second solenoid valve away from the second straight-through air pipe joint.

[0016] A target piece automatic rapid replacement device of the present utility model realizes the automatic target piece replacement function through the cooperation of the manipulator fixed base, the six-axis industrial robot, the rotating neutron target station, the robot side of the fixture locking mechanism, the clamping tooling support seat, the target station door clamping tooling, the radial clamping tooling for the target piece, and the target piece loading box. During the automatic replacement process of the target piece, it is not necessary to hoist the entire neutron target station out of the equipment room and then replace it with a new neutron target station, thereby reducing the replacement cost of the target piece and shortening the maintenance cycle, and solving the technical problems that the existing replacement of the target piece is achieved by hoisting the entire neutron target station out of the equipment room and replacing it with a new neutron target station, with a long maintenance cycle and high cost. Description of the Drawings

[0017] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art.

[0018] Figure 1 It is a schematic structural diagram of the whole of the target piece automatic rapid replacement device according to the first embodiment of the present utility model.

[0019] Figure 2 It is a schematic diagram of the open state of the target piece window cover of the rotating neutron target station according to the first embodiment of the present utility model.

[0020] Figure 3 It is a schematic diagram of the closed state of the target piece window cover of the rotating neutron target station according to the first embodiment of the present utility model.

[0021] Figure 4 It is a partial enlarged view of the target piece according to the first embodiment of the present utility model.

[0022] Figure 5 It is a schematic diagram of the structure of the plunger according to the first embodiment of the present utility model.

[0023] Figure 6 It is a schematic diagram of the structure of the robot side of the clamp locking mechanism according to the first embodiment of the present utility model.

[0024] Figure 7 It is a schematic diagram of the structure of the clamping tool support seat according to the first embodiment of the present utility model.

[0025] Figure 8 It is a schematic diagram of the structure of the target station door clamping tool according to the first embodiment of the present utility model.

[0026] Figure 9 It is a schematic diagram of the structure of the target piece radial clamping tool according to the first embodiment of the present utility model.

[0027] In the figure: 1 - Manipulator fixed base, 2 - Six-axis industrial robot, 3 - Rotary neutron target station, 4 - Robot side of fixture locking mechanism, 5 - Support seat of clamping tooling, 6 - Target station door clamping tooling, 7 - Radial clamping tooling for target piece, 8 - New target piece loading box, 9 - Waste target piece loading box, 301 - Target disc, 302 - Target piece, 303 - Target station end cover, 304 - Rotary clamping cylinder, 305 - Clamping finger, 306 - Plunger mounting block, 307 - Cylinder adapter plate, 308 - Vacuum chamber body, 309 - Target piece window cover, 310 - Target piece window opening and closing handle, 311 - Sealing ring, 312 - Throttle valve, 313 - Magnetic proximity switch, 314 - Hinge pin, 315 - Torsion spring, 316 - Plunger, 401 - Robot side, 402 - First steel ball, 403 - Guide pin, 404 - First electrical signal interface, 405 - First compressed air interface, 501 - Floor support seat adapter plate, 502 - Profile frame, 503 - Placement position of target station door clamping tooling, 504 - Placement position of radial clamping tooling for target piece, 601 - Tool side of first fixture locking mechanism, 602 - First fixture positioning structure, 603 - First cylinder connection structure, 604 - First magnetic proximity switch, 605 - Clamping finger, 606 - Rotary gripper cylinder, 607 - First throttle valve, 608 - First straight air pipe joint, 609 - First solenoid valve, 610 - Bent air pipe joint, 611 - First solenoid valve cable, 6011 - Locking and positioning surface, 6012 - Second compressed air interface, 6013 - Second electrical signal interface, 6021 - Fixture alignment and positioning pin, 701 - Tool side of second fixture locking mechanism, 702 - Second fixture positioning structure, 703 - Second cylinder connection structure, 704 - Second magnetic proximity switch, 705 - Fixed side target piece gripper, 706 - Flange side target piece gripper, 707 - Parallel gripper cylinder, 708 - Second throttle valve, 709 - Second straight air pipe joint, 710 - Second solenoid valve, 711 - Second solenoid valve cable. Detailed implementation manners

[0028] The embodiments of the present invention will be described in detail below. The examples of the embodiments are shown in the drawings. The embodiments described below with reference to the drawings are exemplary and are intended to explain the present invention and should not be construed as a limitation to the present invention.

[0029] First embodiment:

[0030] Please refer to Figures 1 to 9, the present utility model provides an automatic and rapid target sheet replacement device, which includes a manipulator fixed base 1, a six-axis industrial robot 2, a rotating neutron target station 3, a fixture locking mechanism robot side 4, a clamping tooling support seat 5, a target station door clamping tooling 6, a target sheet radial clamping tooling 7 and a target sheet loading box. The rotating neutron target station 3 includes a target disk 301, a target sheet 302, a target station end cover 303, a rotary clamping cylinder 304, clamping fingers 305, a plunger mounting block 306, a cylinder adapter plate 307, a vacuum chamber body 308, a target sheet window opening and closing handle 309, a target sheet window opening and closing handle 310, a sealing ring 311, a throttle valve 312, a magnetic proximity switch 313, a hinge pin 314, a torsion spring 315 and a plunger 316. The fixture locking mechanism robot side 4 includes a robot side 401, a first steel ball 402, a guide pin 403, a first electrical signal interface 404 and a first compressed air interface 405. The clamping tooling support seat 5 includes a floor support seat adapter plate 501, a profile frame 502, a target station door clamping tooling placement position 503 and a target sheet radial clamping tooling placement position 504. The target station door clamping tooling 6 includes a first fixture locking mechanism tool side 601, a first fixture positioning structure 602, a first cylinder connection structure 603, a first magnetic proximity switch 604, clamping fingers 605, a rotating gripper cylinder 606, a first throttle valve 607, a first straight-through air pipe joint 608, a first solenoid valve 609, a bent air pipe joint 610 and a first solenoid valve cable 611. The first fixture locking mechanism tool side 601 has a locking and positioning surface 6011, a second compressed air interface 6012 and a second electrical signal interface 6013. The first fixture positioning structure 602 has a fixture alignment and positioning pin 6021. The target sheet radial clamping tooling 7 includes a second fixture locking mechanism tool side 701, a second fixture positioning structure 702, a second cylinder connection structure 703, a second magnetic proximity switch 704, a fixed-side target sheet gripper 705, a flange-side target sheet gripper 706, a parallel gripper cylinder 707, a second throttle valve 708, a second straight-through air pipe joint 709, a second solenoid valve 710 and a second solenoid valve cable 711.

[0031] In this embodiment, through the combined use of the manipulator fixed base 1, the six-axis industrial robot 2, the rotating neutron target station 3, the fixture locking mechanism robot side 4, the clamping tooling support seat 5, the target station door clamping tooling 6, the target sheet radial clamping tooling 7 and the target sheet loading box, the automatic target sheet replacement function of the target sheet 302 is realized. During the automatic replacement process of the target sheet 302, it is not necessary to hoist the entire neutron target station out of the equipment room and then replace it with a new neutron target station. Therefore, the replacement cost of the target sheet 302 is reduced, and the maintenance cycle is shortened, solving the technical problem that the existing replacement of the target sheet 302 is achieved by hoisting the entire neutron target station out of the equipment room and replacing it with a new neutron target station, which has a long maintenance cycle and high cost.

[0032] Among them, the six-axis industrial robot 2 is arranged below the manipulator fixed base 1, the rotating neutron target station 3 is located on the side of the six-axis industrial robot 2 away from the manipulator fixed base 1, the robot side of the fixture locking mechanism 4 is arranged on the side of the six-axis industrial robot 2 close to the rotating neutron target station 3, the clamping tooling support seat 5 is located on the side of the six-axis industrial robot 2 away from the rotating neutron target station 3, the target station door clamping tooling 6 and the target slice radial clamping tooling 7 are respectively arranged on the left and right sides of the clamping tooling support seat 5, the target slice loading box is located on the side of the clamping tooling support seat 5 close to the manipulator fixed base 1, the target slice loading box includes a new target slice loading box 8 and a waste target slice loading box 9, the new target slice loading box 8 and the waste target slice loading box 9 are both placed at positions convenient for the manipulator of the manipulator fixed base 1 to pick and place. The relative positions of each mechanism are not interfering and can be within the motion space of the six-axis industrial robot 2. The manipulator fixed base 1 is installed and fixed on the building, and the levelness of the manipulator installation reference is adjusted. After adjustment, the six-axis industrial robot 2 is installed, and the rotating neutron target station 3 and the clamping tooling support seat 5 are installed at appropriate positions on the building, and the relative position relationship is adjusted. The new target loading box and the waste target loading box are placed at positions convenient for the manipulator to pick and place.

[0033] Secondly, the plunger 316 is installed on the plunger mounting block 306, the plunger mounting block 306 is fixed on the target disk 301, the throttle valve 312 and the magnetic proximity switch 313 are both installed on the rotary clamping cylinder 304, the rotary clamping cylinder 304 is installed on the vacuum chamber body 308 through the cylinder adapter plate 307, the sealing ring 311 is installed on the vacuum chamber body 308, the target piece 302 is inserted into the target disk 301, the target piece window opening and closing handle 309 is connected to the vacuum chamber body 308 through the torsion spring 315 and the hinge pin 314, the target piece window opening and closing handle 310 is installed outside the target piece window opening and closing handle 309, the clamping finger 305 is installed on the rotary clamping cylinder 304, the target station end cover 303 is installed on the side of the vacuum chamber body 308 away from the target piece window opening and closing handle 309, the target piece 302 is inserted into the target disk 301 to ensure that the second steel balls at the ends of the four plungers 316 are embedded in the pits at the roots of the target piece 302, and the water-cooled quick-connect male and female interfaces are nested reliably. After aligning the hinge structure holes on the target piece window opening and closing handle 309 with those on the vacuum chamber body 308 and aligning the torsion spring 315 to the accurate position, insert the hinge pin 314 and install a shaft-mounted E-ring at the end of the hinge pin 314. The target piece window opening and closing handle 310 is connected to the target piece window opening and closing handle 309 by screws. The clamping finger 305 is connected to the rotary clamping cylinder 304 by screws, and adjust the position of the clamping finger 305 to ensure that when the rotary clamping cylinder 304 contracts, it can press into the shallow pit in the middle of the target piece window opening and closing handle 310. Finally, lock the target station end cover 303 to the vacuum chamber body 308 with screws.

[0034] Thirdly, the first steel balls 402 are arranged in a ring inside the robot side 401, and the guide pin 403, the first electrical signal interface 404 and the first compressed air interface 405 are all arranged outside the robot side 401.

[0035] Meanwhile, the profile frame 502 is arranged on the floor support base adapter plate 501. The target station door clamping tooling placement position 503 and the target station radial clamping tooling placement position are respectively arranged on the left and right sides of the profile frame 502. The target station door clamping tooling placement position 503 and the target station radial clamping tooling placement position are connected to the two ends of the horizontal profile on the profile frame 502 by screws, and their relative positions are adjustable. The floor support base adapter plate 501 is locked to the profile frame 502 by aluminum alloy corner codes and connected to the building floor through expansion bolts.

[0036] In addition, the first fixture positioning structure 602 and the first cylinder connection structure 603 are both arranged below the tool side 601 of the first fixture locking mechanism. The rotary gripper cylinder 606 is arranged below the first cylinder connection structure 603. The first magnetic proximity switch 604 is arranged inside the rotary gripper cylinder 606. The clamping fingers 605 are arranged below the rotary gripper cylinder 606. The first throttle valve 607 is arranged outside the rotary gripper cylinder 606. The first straight-through air pipe joint 608 is located above the first throttle valve 607, and the first straight-through air pipe joint 608 is connected to the bent air pipe joint 610 through the first solenoid valve 609. The first solenoid valve cable 611 is arranged outside the first solenoid valve 609.

[0037] Furthermore, the locking positioning surface 6011, the second compressed air interface 6012, and the second electrical signal interface 6013 are all arranged on the side of the tool side 601 of the first fixture locking mechanism away from the clamping fingers 605. The fixture alignment positioning pin 6021 is arranged on the side of the first fixture positioning structure 602 away from the tool side of the fixture locking mechanism.

[0038] Finally, the second fixture positioning structure 702 is arranged outside the tool side 701 of the second fixture locking mechanism. The second cylinder connection structure 703 is arranged on the side of the second fixture positioning structure 702 away from the tool side 701 of the second fixture locking mechanism. The second magnetic proximity switch 704 is located on the side of the second cylinder connection structure 703 away from the second fixture positioning structure 702. The fixed-side target piece gripper 705 and the flange-side target piece gripper 706 are respectively arranged on the left and right sides of the second cylinder connection structure 703. The parallel gripper cylinder 707 is arranged on the side of the second cylinder connection structure 703 close to the fixed-side target piece gripper 705 and is located between the fixed-side target piece gripper 705 and the flange-side target piece gripper 706. The second throttle valve 708 is arranged outside the parallel gripper cylinder 707. The second straight-through air pipe joint 709 is located on the side of the second throttle valve 708 away from the parallel gripper cylinder 707. The second solenoid valve 710 is connected to the second straight-through air pipe joint 709. The second solenoid valve cable 711 is arranged on the side of the second solenoid valve 710 away from the second straight-through air pipe joint 709. The tool side 701 of the second fixture locking mechanism and the second fixture positioning structure 702 are structurally identical to the tool side 601 of the first fixture locking mechanism and the first fixture positioning structure 602.

[0039] When using an automatic rapid target plate replacement device of this embodiment, sensors (magnetic proximity switches) are provided at the positions where each cylinder of the entire automatic device acts to detect the action in place or perform mechanical limit. When the target plate 302 of the rotating neutron target station 3 cannot meet the usage effect, after an operator clicks the automatic target option on the human-machine interaction interface in the control room, the PLC controls the solenoid valve to open and break the vacuum in the target station cavity. The target station door clamping tooling 6 at the end of the six-axis industrial robot 2 clamps the target plate window opening and closing handle 310 on the window of the target plate 302. The PLC controls the solenoid valve to release the clamping fingers 305 of the rotary clamping cylinder. The PLC controls the first solenoid valve 609 in the target station door clamping tooling 6 to introduce compressed air to open the rotary gripper cylinder 606. At the same time, the six-axis industrial robot 2 moves to avoid the rotation space of the target plate window opening and closing handle 309 and moves to the target plate radial clamping tooling placement position 504 of the clamping tooling support base 5, replaces it with the target plate radial clamping tooling 7. At the same time, the target plate window opening and closing handle 309 automatically opens a fixed angle under the drive of the torsion spring 315.

[0040] The target plate radial clamping tooling 7 at the end of the six-axis industrial robot 2 moves into the opened window of the rotating neutron target station 3 and positions to an accurate position. The PLC controls the second solenoid valve 710 to introduce compressed air to contract the parallel gripper cylinder 707 to clamp the waste target plate 302, move radially away from the rotation center to pull out the waste target plate 302, take out the waste target plate 302 and place it in the accurate position in the waste target plate loading box 9. The PLC controls the second solenoid valve 710 to introduce compressed air to open the parallel gripper cylinder 707 to release the waste target plate 302. The target plate radial clamping tooling 7 at the end of the six-axis industrial robot 2 moves to the accurate position in the new target plate loading box 8. The PLC controls the second solenoid valve 710 to introduce compressed air to contract the parallel gripper cylinder 707 to clamp the new target plate 302, move radially away from the rotation center to pull out the new target plate 302. The target plate radial clamping tooling 7 at the end of the six-axis industrial robot 2 clamps the new target plate 302, moves into the opened window of the rotating neutron target station 3 and positions to an accurate position, moves radially closer to the rotation center to insert the new target plate 302, and makes the four concave positions of the new target plate 302 radially closer to the rotation center catch on the second steel balls at the end of the plunger 316. The PLC controls the second solenoid valve 710 to introduce compressed air to open the parallel gripper cylinder 707 to release the new target plate 302. The target plate radial clamping tooling 7 at the end of the six-axis industrial robot 2 moves to a safe position close to the target station. After being aimed, let the rotating neutron target station 3 rotate a fixed angle to expose the new and waste target plates 302 to the repeated position.

[0041] This process is repeated until all the waste target wafers 302 are removed and all new target wafers 302 are replaced. The target wafer radial clamping tooling 7 at the end of the six-axis industrial robot 2 moves to the position of the target station door clamping tooling placement position 503 of the clamping tooling support base 5, and the target station door clamping tooling 6 is replaced. The target station door clamping tooling 6 at the end of the six-axis industrial robot 2 moves to the opened target station window opening / closing handle and is accurately positioned. The target wafer window opening / closing handle 310 on the clamped target wafer window opening / closing handle 309 moves to the closed state of the target wafer window opening / closing handle 309 and stabilizes its position. The PLC controls the solenoid valve to rotate and press down the clamping fingers 305 of the rotary clamping cylinder to ensure that the target wafer window opening / closing handle 309 is in the closed state and stable. The PLC controls the opening and closing of the solenoid valve, and evacuates to a vacuum degree that meets the requirements to make the rotary neutron target station 3 work properly, realizing the closed-loop of the action principle.

[0042] The above-disclosed are only one or more preferred embodiments of the present application, and the scope of rights of the present application cannot be limited thereby. Those of ordinary skill in the art can understand all or part of the processes of implementing the above embodiments, and the equivalent changes made according to the claims of the present application still fall within the scope covered by the present application.

Claims

1. An automatic and rapid target sheet replacement device, comprising a manipulator fixed base, characterized in that, it further includes a six-axis industrial robot, a rotating neutron target station, a robot side of the fixture locking mechanism, a clamping tooling support seat, a target station door clamping tooling, a target sheet radial clamping tooling, and a target sheet loading box. The six-axis industrial robot is arranged below the manipulator fixed base. The rotating neutron target station is located on one side of the six-axis industrial robot away from the manipulator fixed base. The robot side of the fixture locking mechanism is arranged on one side of the six-axis industrial robot close to the rotating neutron target station. The clamping tooling support seat is located on one side of the six-axis industrial robot away from the rotating neutron target station. The target station door clamping tooling and the target sheet radial clamping tooling are respectively arranged on the left and right sides of the clamping tooling support seat. The target sheet loading box is located on one side of the clamping tooling support seat close to the manipulator fixed base.

2. The automatic and rapid target sheet replacement device according to claim 1, characterized in that, the rotating neutron target station includes a target disk, a target sheet, a target station end cover, a rotary clamping cylinder, clamping fingers, a plunger mounting block, a cylinder adapter plate, a vacuum chamber body, a target sheet window cover, a target sheet window opening and closing handle, a sealing ring, a throttle valve, a magnetic proximity switch, a hinge pin, a torsion spring, and a plunger. The plunger is mounted on the plunger mounting block, and the plunger mounting block is fixed on the target disk. The throttle valve and the magnetic proximity switch are both mounted on the rotary clamping cylinder. The rotary clamping cylinder is mounted on the vacuum chamber body through the cylinder adapter plate. The sealing ring is mounted on the vacuum chamber body. The target sheet is inserted into the target disk. The target sheet window cover is connected to the vacuum chamber body through the torsion spring and the hinge pin. The target sheet window opening and closing handle is mounted outside the target sheet window cover. The clamping fingers are mounted on the rotary clamping cylinder. The target station end cover is mounted on one side of the vacuum chamber body away from the target sheet window cover.

3. The automatic and rapid target sheet replacement device according to claim 1, characterized in that, the robot side of the fixture locking mechanism includes a robot side, a first steel ball, a guide pin, a first electrical signal interface, and a first compressed air interface. The first steel ball is arranged in a ring inside the robot side. The guide pin, the first electrical signal interface, and the first compressed air interface are all arranged outside the robot side.

4. The automatic and rapid target sheet replacement device according to claim 1, characterized in that, the clamping tooling support seat includes a floor support seat adapter plate, a profile frame, a target station door clamping tooling placement position, and a target sheet radial clamping tooling placement position. The profile frame is arranged on the floor support seat adapter plate. The target station door clamping tooling placement position and the target station radial clamping tooling placement position are respectively arranged on the left and right sides of the profile frame.

5. The automatic and rapid target sheet replacement device according to claim 1, characterized in that, The target station door clamping tooling includes a first fixture locking mechanism tool side, a first fixture positioning structure, a first cylinder connection structure, a first magnetic proximity switch, clamping fingers, a rotating gripper cylinder, a first throttle valve, a first straight-through air pipe joint, a first solenoid valve, a bent air pipe joint, and a first solenoid valve cable. The first fixture positioning structure and the first cylinder connection structure are both arranged below the first fixture locking mechanism tool side. The rotating gripper cylinder is arranged below the first cylinder connection structure. The first magnetic proximity switch is arranged inside the rotating gripper cylinder. The clamping fingers are arranged below the rotating gripper cylinder. The first throttle valve is arranged outside the rotating gripper cylinder. The first straight-through air pipe joint is located above the first throttle valve, and the first straight-through air pipe joint is connected to the bent air pipe joint through the first solenoid valve. The first solenoid valve cable is arranged outside the first solenoid valve.

6. The automated rapid target replacement device according to claim 5, wherein The first fixture locking mechanism tool side has a locking positioning surface, a second compressed air interface, and a second electrical signal interface. The locking positioning surface, the second compressed air interface, and the second electrical signal interface are all arranged on the side of the first fixture locking mechanism tool side away from the clamping fingers.

7. The automated rapid target replacement device according to claim 5, wherein The target radial clamping tooling includes a second fixture locking mechanism tool side, a second fixture positioning structure, a second cylinder connection structure, a second magnetic proximity switch, a fixed-side target gripper, a flange-side target gripper, a parallel gripper cylinder, a second throttle valve, a second straight-through air pipe joint, a second solenoid valve, and a second solenoid valve cable. The second fixture positioning structure is arranged outside the second fixture locking mechanism tool side. The second cylinder connection structure is arranged on the side of the second fixture positioning structure away from the second fixture locking mechanism tool side. The second magnetic proximity switch is located on the side of the second cylinder connection structure away from the second fixture positioning structure. The fixed-side target gripper and the flange-side target gripper are respectively arranged on the left and right sides of the second cylinder connection structure. The parallel gripper cylinder is arranged on the side of the second cylinder connection structure close to the fixed-side target gripper and is located between the fixed-side target gripper and the flange-side target gripper. The second throttle valve is arranged outside the parallel gripper cylinder. The second straight-through air pipe joint is located on the side of the second throttle valve away from the parallel gripper cylinder. The second solenoid valve is connected to the second straight-through air pipe joint. The second solenoid valve cable is arranged on the side of the second solenoid valve away from the second straight-through air pipe joint.

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