Crucible for evaporation source
By designing the narrow and long opening of the funnel-shaped crucible cover, the bonding force between the plating material and the film during the evaporation process is enhanced, and the problem of unsolid plating in the prior art is solved, and a firm plating effect is achieved.
Patent Information
- Application Number
- CN202422293090.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-20
- Publication Date
- 2025-07-18
- Estimated Expiration
- 2034-09-20
AI Technical Summary
In the prior art, the bonding force between the plating material and the polymer material during the evaporation process is insufficient, resulting in the unsolid plating layer.
A crucible for evaporation source is designed, including a crucible body and a crucible cover. The crucible cover is in a funnel shape and is equipped with a narrow opening. The upper top surface area of the crucible cover is larger than the lower bottom surface. The opening is located in the middle of the upper top surface and the lower bottom surface. After the plating material is heated, it will be flushed out from the narrow opening to enhance the bonding force with the film.
Through the design of narrow openings, the bonding force between the plating material and the film is improved, and a solid coating is formed, solving the problem of unsolid coating.
Smart Images
Figure CN223118532U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of evaporation coating, and particularly relates to a crucible for an evaporation source. Background Art
[0002] Evaporation coating refers to a process method in which, under vacuum conditions, a coating material is evaporated by a certain heating and evaporation method to be vaporized, and the particles fly to the surface of a substrate to condense into a film. Evaporation coating is a gas-phase deposition technology that has been used earlier and has a wide range of applications. It has the advantages of simple film-forming method, high purity and density of the thin film, and unique film structure and performance. In the process of vacuum coating, after the material to be coated is melted, under vacuum conditions, the melted material to be coated forms on a polymer material for evaporation coating. However, in the currently obtained products by evaporation coating, the bonding force between the coated material and the polymer material is still prone to problems. Therefore, the existing technology still needs to be improved. Content of the Utility Model
[0003] In view of the deficiencies of the above-mentioned existing technology, the purpose of the utility model is to provide a crucible for an evaporation source, and the crucible is used as an evaporation source to perform evaporation treatment on the material to be coated.
[0004] To solve the above technical problems, the utility model adopts the following technical solutions:
[0005] The utility model provides a crucible for an evaporation source, which includes a crucible body and a crucible cover. The crucible cover is covered on the crucible body. The crucible cover has an upper top surface and a lower bottom surface. The area of the upper top surface of the crucible cover is larger than the area of the lower bottom surface of the crucible cover. A long and narrow opening is provided on the crucible cover, and the opening penetrates through the upper top surface and the lower bottom surface of the crucible cover. The opening is located in the middle of the upper top surface and the middle of the lower bottom surface. The crucible cover is in a funnel shape from the upper top surface to the lower bottom surface.
[0006] Further, for the crucible for an evaporation source, the upper top surface of the crucible cover is oval, and the lower bottom surface of the crucible cover is circular.
[0007] Further, for the crucible for an evaporation source, the crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible cover is larger than the diameter of the crucible body.
[0008] Further, for the crucible for an evaporation source, the inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.
[0009] Further, for the crucible for an evaporation source, the distance between the upper top surface and the lower bottom surface of the crucible cover is 40 mm to 150 mm.
[0010] Further, for the crucible of the evaporation source, the minimum width of the upper top surface of the crucible lid is not less than the diameter of the lower bottom surface of the crucible lid.
[0011] Further, for the crucible of the evaporation source, the opening is a rectangular opening.
[0012] Further, for the crucible of the evaporation source, the length of the opening is 30 mm to 100 mm, and the width of the opening is 20 mm to 50 mm.
[0013] Further, for the crucible of the evaporation source, the crucible body is a silicon nitride or silicon carbide crucible body, and the crucible lid is a graphite crucible lid.
[0014] Further, for the crucible of the evaporation source, the minor axis length of the upper top surface of the crucible lid is not less than the diameter of the lower bottom surface of the crucible lid. Magnetic bodies that attract each other are provided on the front and rear sides of the crucible lid in the major axis direction or minor axis direction of the upper top surface, and the opening is provided along the minor axis direction or major axis direction of the upper top surface.
[0015] Compared with the prior art, a crucible for an evaporation source provided by the present utility model includes a crucible body and a crucible lid. The crucible lid is covered on the crucible body. The crucible lid has an upper top surface and a lower bottom surface. The area of the upper top surface of the crucible lid is larger than the area of the lower bottom surface of the crucible lid. A long and narrow opening is provided on the crucible lid. The opening penetrates through the upper top surface and the lower bottom surface of the crucible lid. The opening is located in the middle of the upper top surface and the middle of the lower bottom surface. The crucible lid is funnel-shaped from the upper top surface to the lower bottom surface. In this application, a crucible is used as the evaporation source. A crucible lid is provided on the crucible body. The crucible lid is funnel-shaped. A material to be plated is placed inside the crucible body. After the material to be plated is heated and melted, it forms steam and rushes out from the opening to form on the thin film. Since the opening on the top of the crucible is narrow, the pressure of the material to be plated inside the crucible body is high and it rushes out of the opening, so that the material to be plated firmly adheres to the target thin film, thereby forming a firm coating. Description of the Drawings
[0016] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the following drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the structures shown in these drawings.
[0017] Figure 1Front view structural schematic diagram of the crucible for an evaporation source provided by the present utility model.
[0018] Figure 2 Top view structural schematic diagram of the crucible for an evaporation source provided by the present utility model.
[0019] Explanation of reference numerals in the attached drawings:
[0020] Crucible body 10
[0021] Crucible lid 20
[0022] Opening 30
[0023] Magnetic body 40 Specific embodiments
[0024] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments. Based on the embodiments in the present utility model, all other embodiments obtained by those of ordinary skill in the art without making creative efforts belong to the scope of protection of the present utility model.
[0025] It should be noted that if there are directional indications (such as up, down, left, right, front, back,...) involved in the embodiments of the present utility model, then the directional indications are only used to explain the relative positional relationship and movement conditions between components in a specific posture (as shown in the attached drawings). If the specific posture changes, the directional indications will also change accordingly.
[0026] In addition, if there are descriptions such as "first", "second", etc. involved in the embodiments of the present utility model, then the descriptions of "first", "second", etc. are only for descriptive purposes and cannot be understood as indicating or implying their relative importance or implicitly indicating the quantity of the indicated technical features. Thus, the features defined with "first", "second" may explicitly or implicitly include at least one such feature. In addition, the technical solutions between various embodiments can be combined with each other, but it must be based on the ability of those of ordinary skill in the art to implement. When the combination of technical solutions results in contradictions or cannot be implemented, it should be considered that such a combination of technical solutions does not exist and is not within the scope of protection required by the present utility model.
[0027] Such as Figure 1 And Figure 2As shown in the figure, a crucible for an evaporation source provided by the present utility model includes a crucible body 10 and a crucible lid 20. The crucible lid 20 is covered on the crucible body 10. The crucible lid 20 has an upper top surface and a lower bottom surface. The area of the upper top surface of the crucible lid 20 is larger than the area of the lower bottom surface of the crucible lid 20. A narrow opening 30 is provided on the crucible lid 20. The opening 30 penetrates through the upper top surface and the lower bottom surface of the crucible lid 20. The opening 30 is located in the middle of the upper top surface and the middle of the lower bottom surface. The crucible lid 20 is funnel-shaped from the upper top surface to the lower bottom surface. In this application, a crucible is used as the evaporation source. A crucible lid 20 is provided on the crucible body 10. The crucible lid 20 is funnel-shaped. A material to be plated is placed inside the crucible body 10. After the material to be plated is heated and melted, it forms steam and rushes out from the opening 30 to form on the thin film. Since the opening 30 on the top of the crucible is narrow, the pressure of the material to be plated inside the crucible body 10 is high and rushes out of the opening 30, so that the material to be plated firmly adheres to the target thin film, thereby forming a firm coating layer.
[0028] Further, for the crucible for an evaporation source provided by the present utility model, the crucible body 10 is cylindrical, and the diameter of the lower bottom surface of the crucible lid 20 is larger than the diameter of the crucible body 10, so as to facilitate the crucible lid 20 to be covered on the crucible body 10. Further, for the crucible for an evaporation source provided by the present utility model, the upper top surface of the crucible lid 20 is oval, and the lower bottom surface of the crucible lid 20 is circular. In the evaporation coating equipment, there are multiple crucibles arranged side by side. The top of the crucible lid 20 of this application is oval. Since the upper top surface is oval, the side-by-side oval structures can make up for the gaps between the crucibles, thereby preventing the coating layer on the thin film from being uneven.
[0029] Furthermore, the crucible for an evaporation source provided by the present utility model has an inner diameter of the crucible body 10 ranging from 100 mm to 120 mm and an outer diameter of the crucible body 10 ranging from 120 mm to 140 mm. For example, the inner diameter of the crucible body 10 can be 100 mm and the outer diameter of the crucible body 10 can be 120 mm. Such a design can ensure that the material to be plated placed in the crucible body 10 will not remain at the bottom of the crucible after plating. Because if it remains at the bottom, after the evaporation plating stops and the crucible cools down, the remaining material to be plated will cool and solidify, which is likely to damage the crucible. Furthermore, for the crucible for an evaporation source provided by the present utility model, the distance between the upper top surface and the lower bottom surface of the crucible lid 20 is 40 mm to 150 mm. Such a height can, on the one hand, contribute to the stability of the structure of the crucible lid 20 and, at the same time, prevent the crucible lid 20 from being pushed open by the pressure generated by the heating of the crucible. Further, for the crucible for an evaporation source provided by the present utility model, the length of the opening 30 is 30 mm to 100 mm. Within this range, the evaporation coating efficiency can be improved, and on the other hand, the structure of the crucible can be stabilized. The width of the opening 30 is 20 mm to 50 mm. Such a range can result in the highest bonding strength between the material to be plated and the thin film. Specifically, the length of the opening 30 can be 50 mm, and the width of the opening 30 can be 20 mm.
[0030] Furthermore, for the crucible for an evaporation source provided by the present utility model, the minimum width of the upper top surface of the crucible lid 20 is not less than the diameter of the lower bottom surface of the crucible lid 20. Further, for the crucible for an evaporation source provided by the present utility model, the opening 30 is a rectangular opening 30. Further, for the crucible for an evaporation source provided by the present utility model, the crucible body 10 is a silicon nitride or silicon carbide crucible body, and the crucible lid 20 is a graphite crucible lid. Graphite has high heat resistance, and its heat resistance can reach 1500 °C, and it can be used on the crucible for a long time, improving the service life of the crucible lid.
[0031] Furthermore, for the crucible for an evaporation source provided by the present utility model, the minor axis length of the upper top surface of the crucible lid 20 is not less than the diameter of the lower bottom surface of the crucible lid 20. Magnetic bodies 40 that attract each other are provided on the front and back sides of the crucible lid 20 in the major axis direction or minor axis direction of the upper top surface. The opening 30 is arranged along the minor axis direction or major axis direction of the upper top surface. The outlet length of the opening 30 on the upper top surface of the crucible lid 20 is greater than the inlet length of the opening 30 on the lower bottom surface of the crucible lid 20. In the evaporation source, multiple crucibles are arranged side by side, and adjacent crucible lids 20 can attract each other, causing multiple openings 30 to be arranged in a straight line or in parallel for evaporation plating.
[0032] In summary, in this application, a crucible is used as an evaporation source, and a crucible lid is provided on the crucible body. The crucible lid is in the shape of a funnel. A material to be plated is placed inside the crucible body. After the material to be plated is heated and melted, it forms vapor that rushes out from the opening and forms on the thin film. Since the opening at the top of the crucible is narrow, the pressure of the material to be plated inside the crucible body is high, and it rushes out of the opening, so that the material to be plated firmly adheres to the target thin film, thereby forming a firm coating layer.
[0033] The above are only the preferred embodiments of the present invention, and do not limit the patent scope of the present invention accordingly. Any equivalent structural transformation made under the inventive concept of the present invention by using the content of the specification and drawings of the present invention, or any direct / indirect application in other related technical fields is included in the patent protection scope of the present invention.
Claims
1. A crucible for an evaporation source, characterized in that, It includes a crucible body and a crucible lid. The crucible lid is covered on the crucible body. The crucible lid has an upper top surface and a lower bottom surface. The area of the upper top surface of the crucible lid is larger than the area of the lower bottom surface of the crucible lid. A long and narrow opening is provided on the crucible lid. The opening penetrates through the upper top surface and the lower bottom surface of the crucible lid. The opening is located at the middle of the upper top surface and the middle of the lower bottom surface. The crucible lid is funnel-shaped from the upper top surface to the lower bottom surface.
2. The crucible for an evaporation source according to claim 1, characterized in that, The upper top surface of the crucible lid is oval, and the lower bottom surface of the crucible lid is circular.
3. The crucible for an evaporation source according to claim 2, characterized in that, The crucible body is in a cylindrical shape, and the diameter of the lower bottom surface of the crucible lid is larger than the diameter of the crucible body.
4. The crucible for an evaporation source according to claim 3, characterized in that, The inner diameter of the crucible body is 100 mm to 120 mm, and the outer diameter of the crucible body is 120 mm to 140 mm.
5. The crucible for an evaporation source according to claim 4, characterized in that, The distance between the upper top surface and the lower bottom surface of the crucible lid is 40 mm to 150 mm.
6. The crucible for an evaporation source according to claim 5, characterized in that, The minimum width of the upper top surface of the crucible lid is not less than the diameter of the lower bottom surface of the crucible lid.
7. The crucible for an evaporation source according to claim 6, characterized in that, The opening is a rectangular opening.
8. The crucible for an evaporation source according to claim 7, wherein, The length of the opening is 30 mm to 100 mm, and the width of the opening is 20 mm to 50 mm.
9. The crucible for an evaporation source according to claim 8, characterized in that, The crucible body is a silicon nitride or silicon carbide crucible body, and the crucible lid is a graphite crucible lid.
10. The crucible for an evaporation source according to claim 2, characterized in that, The minor axis length of the upper top surface of the crucible lid is not less than the diameter of the lower bottom surface of the crucible lid. Magnetic bodies that attract each other are provided on the front and back sides of the crucible lid in the major axis direction or minor axis direction of the upper top surface. The opening is arranged along the minor axis direction or major axis direction of the upper top surface.