Detection tool for parfocal distance of microscope objective

Abstract

The utility model discloses a tool for detecting the parfocal distance of a microscope objective. The tool comprises a light interferometer, a linear guide rail, a grating ruler, an objective clamping tool and a plane optical flat, the objective lens clamping tool is connected with a sliding block on the linear guide rail through a support, and the grating ruler is connected to the linear guide rail. The plane optical flat is connected with the objective lens clamping tool, and the objective lens clamping tool is further used for being connected with an objective lens to be measured; the optical interferometer is located on one side of the linear guide rail, a lens of the optical interferometer is used for facing the plane optical flat or an objective lens to be measured, and the grating ruler is used for measuring the distance between the focus of the lens of the optical interferometer and the surface of the plane optical flat. According to the detection tool, the parfocal distance of the objective lens is detected by using an interferometer, a grating ruler and the like, and high-precision detection can be realized.

Description

Technical Field

[0001] The utility model relates to the field of parfocal distance detection of a microscope objective lens, in particular to a detection tool for the parfocal distance of a microscope objective lens. Background Art

[0002] A microscope is an instrument widely used in the fields of scientific research and education. When it is used, it needs to be adjusted to the best focal length state to observe clear and accurate images. Among them, the parfocal distance, also known as the parfocal length, is the distance from the mounting end face of the objective lens thread to the upper surface of the cover glass (or to the focal plane of the objective lens when the cover glass is not used). However, due to differences in the manufacturing process of microscopes of different brands and models, their parfocal distances will also be different. In order to ensure that different brands and models of microscopes have the same parfocal distance when adjusted to the best focal length state, the ISO organization has formulated a series of international standards for microscopes. The purpose of this standard is to stipulate the parfocal distance of the microscope when adjusted to the best focal length state, so as to ensure the accuracy and repeatability of observing images with different brands and models of microscopes. By formulating this standard, the standardization level of microscope manufacturing can be improved, and the errors caused by manufacturing differences can be reduced, so as to ensure that microscope users can obtain more accurate and reliable observation results when using microscopes of different brands and models.

[0003] Since there will be some deviations during the processing of the objective lens, it is necessary to detect the parfocal distance of the objective lens to ensure that the objective lens has a qualified parfocal distance. At present, the existing detection device for the parfocal distance of the objective lens includes a standard objective lens and a standard rack. This detection device measures the focus manually, that is, by comparing and measuring with the standard objective lens and the standard rack. First, install the standard lens on the standard rack, manually focus, measure the parfocal position, then replace it with the objective lens to be tested, and then observe whether the objective lens to be tested forms a clear image. If it is not clear, the objective lens to be tested needs to be adjusted again. Repeat this process until the objective lens to be tested forms a clear image at this parfocal position. This method includes measuring the parfocal distance of the objective lens to be tested, that is, judging whether the parfocal distance of the objective lens to be tested is consistent with that of the standard objective lens. However, in this method, there will be errors in manual reading of the standard rack, errors in the parfocal distance of the standard lens itself, and errors in manual reading when measuring the lens to be tested. Therefore, this method has problems of low precision and blurred imaging, which affects the use of the objective lens. Therefore, in view of the above problems, the utility model provides a detection tool for the parfocal distance of a microscope objective lens to achieve high-precision detection. Summary of the Invention

[0004] The technical problem to be solved by the utility model is to provide a detection tool for the parfocal distance of a microscope objective lens in view of the above-mentioned deficiencies of the prior art. The detection tool for the parfocal distance of this microscope objective lens uses an interferometer, a grating scale, etc. to detect the parfocal distance of the objective lens, and can achieve high-precision detection.

[0005] To achieve the above technical objectives, the technical solution adopted by the present utility model is as follows:

[0006] A detection tooling for the parfocal distance of a microscope objective lens, comprising an optical interferometer, a linear guide rail, a grating scale, an objective lens clamping tooling, and a flat optical flat;

[0007] The objective lens clamping tooling is connected to the slider on the linear guide rail through a bracket, and the grating scale is connected to the linear guide rail;

[0008] The flat optical flat is connected to the objective lens clamping tooling, and the objective lens clamping tooling is also used to connect the objective lens to be measured;

[0009] The optical interferometer is located on one side of the linear guide rail. The lens of the optical interferometer is used to face the flat optical flat or the objective lens to be measured, and the grating scale is used to measure the distance between the focal point of the lens of the optical interferometer and the surface of the flat optical flat.

[0010] As a further improved technical solution of the present utility model, the objective lens clamping tooling is provided with an installation through hole. An inner table surface is provided inside the through hole of the objective lens clamping tooling. The flat optical flat is placed inside the through hole of the objective lens clamping tooling and is fixedly connected to the inner table surface of the objective lens clamping tooling.

[0011] As a further improved technical solution of the present utility model, one end of the objective lens to be measured is provided with a threaded connection end. Internal threads are provided on the installation through hole of the objective lens clamping tooling. The threaded connection end of the objective lens to be measured is threadedly connected to the internal threads of the installation through hole of the objective lens clamping tooling.

[0012] As a further improved technical solution of the present utility model, a horizontal through hole is opened in the upper part of the bracket, and the objective lens clamping tooling is connected inside the horizontal through hole of the bracket.

[0013] As a further improved technical solution of the present utility model, a phase measuring interferometer is adopted for the optical interferometer.

[0014] The beneficial effects of the present utility model are as follows:

[0015] The detection tooling for the parfocal distance of the microscope objective lens of the present utility model uses a phase measuring interferometer to determine the optimal focal plane position of the objective lens to be measured and the zero position at the cat's eye of the flat optical flat, and the linear guide rail is used to achieve the movement between these positions to ensure the collimation of the objective lens to be measured during movement at different positions. At the same time, the grating scale is used to accurately record the position data. Compared with the existing detection devices for manual focus measurement, this detection tooling has high-precision and high-quality data output, and the obtained results are also more accurate. Description of the Drawings

[0016] Figure 1It is a schematic diagram of the connection between the objective lens clamping tooling and the flat optical flat.

[0017] Figure 2 It is a sectional view of the connection between the objective lens clamping tooling and the flat optical flat.

[0018] Figure 3 It is a schematic diagram of the parfocal distance of the microscope objective lens.

[0019] Figure 4 It is a schematic diagram of the position of the cat's eye of the flat optical flat in the detection tooling.

[0020] Figure 5 It is Figure 4 The partial enlarged view in

[0021] Figure 6 It is a schematic diagram of the confocal position of the microscope objective lens and the laser interferometer.

[0022] Figure 7 It is Figure 6 The partial enlarged view in Specific implementation manners

[0023] The present invention will be described in detail below in conjunction with the accompanying drawings and specific implementation manners. Obviously, the following examples are only one case of the present utility model, and different toolings can be designed according to different types of objective lenses in the future, but the detection principles are the same.

[0024] A detection tooling for the parfocal distance of a microscope objective lens includes an optical interferometer 6, a linear guide 7, a grating scale (not shown in the figure), an objective lens clamping tooling 1, and a flat optical flat 2. The flat optical flat 2 is fixed on the objective lens clamping tooling 1 and is used in cooperation with the objective lens 3 for detection by the optical interferometer 6.

[0025] As Figure 1-2 shown, the objective lens clamping tooling 1 is provided with an installation through hole, an inner table surface 1-1 is arranged inside the through hole of the objective lens clamping tooling 1, the flat optical flat 2 is placed inside the through hole of the objective lens clamping tooling 1 and is fixedly connected by glue to the inner table surface 1-1 of the objective lens clamping tooling 1.

[0026] As Figure 3 shown, it is a schematic diagram of the parfocal distance of the objective lens 3. Taking the installation and positioning end surface 4 of the objective lens 3 as a reference, the working distance c of the objective lens, and the parfocal distance b of the objective lens 3 is the distance from the installation and positioning end surface 4 to the best focal plane of the objective lens. A threaded connection end is arranged above the installation and positioning end surface 4 of the objective lens 3, an internal thread is arranged on the installation through hole of the objective lens clamping tooling 1, and the threaded connection end of the objective lens 3 is threadedly connected to the internal thread of the installation through hole of the objective lens clamping tooling 1.

[0027] As Figure 4-5As shown, the objective lens clamping tooling 1 is connected to the slider on the linear guide 7 through the bracket 5. A transverse through-hole 501 is provided in the upper part of the bracket 5, and the objective lens clamping tooling 1 is fixedly connected in the transverse through-hole 501 of the bracket 5.

[0028] In this embodiment, the grating scale is connected to the linear guide 7. The fixed scale in the grating scale is connected to the linear guide 7, and the scanning head in the grating scale is connected to the slider on the linear guide 7, or the objective lens clamping tooling 1, or the bracket 5. The slider on the linear guide 7 drives the objective lens clamping tooling 1 and the scanning head in the grating scale to move, thereby measuring the moving distance of the objective lens clamping tooling 1.

[0029] The optical interferometer 6 is located on one side of the linear guide 7. The spherical lens of the optical interferometer 6 is used to face the flat parallel plate 2 or the objective lens 3, and the grating scale is used to measure the distance between the lens focus of the optical interferometer 6 and the surface of the flat parallel plate 2.

[0030] As Figure 4-5 shown, it is a schematic diagram of the cat's eye position of the flat parallel plate 2. To select a suitable spherical standard lens for the optical interferometer 6, at the focus of the spherical standard lens, there is the position of the center of the curvature radius (cat's eye) of the flat parallel plate 2. After the cat's eye image appears in the optical interferometer 6, the distance C corresponding to this position can be recorded through the grating scale.

[0031] As Figure 6-7 shown, it is a schematic diagram of the confocal position of the objective lens 3 and the optical interferometer 6. After the objective lens 3 and the objective lens clamping tooling 1 are installed and fixed, find the coincidence position between the best focal plane of the objective lens and the focus of the spherical standard lens. After the interference fringes appear in the optical interferometer 6, by adjusting the defocus amount, find the zero fringe position, and the distance A corresponding to this position can be recorded through the grating scale. It is easy to measure the distance B from the mounting and positioning end face 4 of the objective lens 3 to the surface of the flat parallel plate 2. At this time, the parfocal distance of the objective lens 3 can be obtained as: the distance A corresponding to the confocal position - the distance C corresponding to the cat's eye position - the distance B between the mounting and positioning end face 4 of the objective lens 3 and the flat parallel plate 2.

[0032] The above objective lens 3 is a micro objective lens to be measured, and the optical interferometer 6 uses a phase measurement interferometer. The parfocal distance detection tooling for the micro objective lens of the present utility model determines the best focal plane position of the objective lens to be measured and the zero position at the cat's eye of the flat parallel plate by using a phase measurement interferometer, and the linear guide is used to realize the movement between these positions to ensure the collimation of the objective lens to be measured during movement at different positions. At the same time, the grating scale is used to accurately record the position data. Compared with the existing detection devices that perform manual focus measurement, this detection tooling has high-precision and high-quality data output, and the obtained results are also more accurate.

[0033] The protection scope of the present utility model includes but is not limited to the above embodiments. The protection scope of the present utility model shall be subject to the claims, and any replacement, variation, or improvement that is easily conceivable by those skilled in the art to this technology shall fall within the protection scope of the present utility model.

Claims

1. A detection tool for the parfocal distance of a microscope objective lens, characterized in that: It includes an optical interferometer, a linear guide rail, a grating scale, an objective lens clamping tooling, and a flat optical flat; The objective lens clamping tooling is connected to the slider on the linear guide rail through a bracket, and the grating scale is connected to the linear guide rail; The flat optical flat is connected to the objective lens clamping tooling, and the objective lens clamping tooling is also used to connect the objective lens to be measured; The optical interferometer is located on one side of the linear guide rail. The lens of the optical interferometer is used to face the flat optical flat or the objective lens to be measured, and the grating scale is used to measure the distance between the focal point of the lens of the optical interferometer and the surface of the flat optical flat.

2. The detection tool for the parfocal distance of the microscope objective lens according to claim 1, wherein, The objective lens clamping tooling is provided with an installation through hole, and an inner table surface is arranged inside the through hole of the objective lens clamping tooling. The flat optical flat is placed inside the through hole of the objective lens clamping tooling and is fixedly connected to the inner table surface of the objective lens clamping tooling.

3. The detection tool for the parfocal distance of the microscopic objective lens according to claim 1, wherein, One end of the objective lens to be measured is provided with a threaded connection end, and an internal thread is arranged on the installation through hole of the objective lens clamping tooling. The threaded connection end of the objective lens to be measured is threadedly connected to the internal thread of the installation through hole of the objective lens clamping tooling.

4. The detection tool for the parfocal distance of the microscopic objective lens according to claim 1, wherein, A horizontal through hole is opened in the upper part of the bracket, and the objective lens clamping tooling is connected in the horizontal through hole of the bracket.

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