Device for detecting abnormal rotation of semiconductor carrier

Abstract

The utility model discloses a device for detecting abnormal rotation of a semiconductor carrier. The detection device is matched with the semiconductor processing equipment. The semiconductor processing equipment comprises a reaction cavity, a quartz disc, a semiconductor bearing body and a rotating mechanism used for driving the semiconductor bearing body. The detection device comprises a magnetic force induction piece located in the reaction cavity and a magnet located above the magnetic force induction piece and arranged close to the magnetic force induction piece. The magnetic induction piece is fixedly installed on the quartz disc, the magnetic induction piece is a magnetic switch, a magnetic reed switch or a Hall proximity switch, and the magnet is fixedly installed on the semiconductor bearing body. The rotating mechanism comprises a motor, a bearing body shaft and a magnetofluid transmission part, the bearing body shaft and the quartz disc are vertically and movably arranged in a penetrating manner, and the magnetic induction part is located on the corresponding side of the bearing body shaft. According to the utility model, the rotation turns and the rotation speed of the semiconductor carrier are detected through magnetic force induction, the abnormal rotation condition is timely judged, and the implementation is easy.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor thin film deposition processing, in particular to a device for detecting abnormal rotation of a semiconductor carrier. Background Art

[0002] In thin film deposition processing, a wafer is placed in a reaction chamber through a semiconductor carrier, and one end of the reaction chamber is a reaction gas inlet, and the other side is an exhaust port. The reaction gas reacts on the surface of the wafer to generate a thin film. To make the reaction uniform, it is necessary to drive the wafer to rotate to achieve uniform thickness of the deposition layer. The rotation of the wafer is usually realized by a structure in which a motor drives the carrier shaft to rotate.

[0003] The motor is usually a stepper motor or a servo motor. The motor is linked with the carrier shaft through a magnetic fluid or a coupling. However, there are problems that the magnetic fluid or the coupling fails, resulting in the motor idling, the semiconductor carrier actually not rotating, or the rotation becoming slower due to an increase in the frictional force between the shafts. Therefore, it is necessary to provide a detection device that can detect abnormal rotation of the semiconductor carrier. Summary of the Utility Model

[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of the present utility model is to provide a device for detecting abnormal rotation of a semiconductor carrier to detect the rotation speed or number of turns of the semiconductor carrier, timely identify abnormal rotation situations, and prevent problems caused by the idling of the motor shaft resulting in the non-rotation of the semiconductor carrier.

[0005] A device for detecting abnormal rotation of a semiconductor carrier is provided in cooperation with semiconductor processing equipment; the semiconductor processing equipment includes a reaction chamber, a quartz disk for closing the inlet and outlet of the reaction chamber, a semiconductor carrier located in the reaction chamber, and a rotation mechanism for driving the semiconductor carrier;

[0006] The detection device includes:

[0007] A magnetic induction member located in the reaction chamber, which is fixedly installed on the quartz disk; and

[0008] A magnet, which is located above the magnetic induction member and is arranged close to the magnetic induction member.

[0009] In one embodiment, the magnet is fixedly installed on the semiconductor carrier.

[0010] In one embodiment, the magnetic induction member is a magnetic switch, a magnetic reed switch or a Hall proximity switch.

[0011] In one embodiment, the rotation mechanism includes a motor located below the reaction chamber, a carrier shaft vertically fixed at the bottom of the semiconductor carrier, and a magnetic fluid transmission member for connecting the output end of the motor and the carrier shaft.

[0012] Further, the magneto - hydrodynamic drive is located below the quartz disk, and the carrier shaft and the quartz disk are vertically movably penetrated; the magnetic induction member is located at a position corresponding to the carrier shaft.

[0013] Still further, the detection device further includes a fixed disk fixedly sleeved on the carrier shaft, which is located above the quartz disk.

[0014] Even further, the magnet is fixedly mounted on the fixed disk.

[0015] Compared with the prior art, the beneficial effects of the present utility model are as follows: By using magnetic induction to detect the number of rotations and rotational speed of the semiconductor carrier, abnormal rotation can be judged in a timely manner, preventing problems such as the semiconductor carrier not rotating due to the idling of the motor shaft or the rotation becoming slower due to an increase in the frictional force between the shafts. Moreover, compared with detecting whether the carrier rotates by an optical method, the detection mode of the present utility model is easy to implement. BRIEF DESCRIPTION OF THE DRAWINGS

[0016] In order to more clearly illustrate the embodiments of the present utility model or the technical solutions in the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings described below are only exemplary, and for those of ordinary skill in the art, other implementation drawings can be obtained based on the provided drawings without creative efforts.

[0017] The structures, ratios, sizes, etc. illustrated in this specification are only used to cooperate with the content disclosed in the specification for those familiar with this technology to understand and read, and are not used to limit the limiting conditions for the implementation of the present utility model. Therefore, they do not have technical substance. Any modification of the structure, change in the proportional relationship, or adjustment of the size, without affecting the effects that the present utility model can produce and the purposes that can be achieved, should still fall within the scope covered by the technical content disclosed in the present utility model.

[0018] Figure 1 Shown is a schematic structural diagram of a semiconductor carrier rotation anomaly detection device provided by Embodiment 1 of the present utility model.

[0019] Figure 2 Shown is a schematic structural diagram of a semiconductor carrier rotation anomaly detection device provided by Embodiment 2 of the present utility model.

[0020] Figure 3 Shown is a schematic structural diagram of a semiconductor carrier rotation anomaly detection device provided by Embodiment 3 of the present utility model.

[0021] Figure 4The figure shows a schematic structural diagram of a semiconductor carrier rotation anomaly detection device provided by Embodiment 4 of the present utility model.

[0022] Main element symbol description

[0023] 1. Reaction chamber; 2. Quartz disk; 3. Magnet; Magnetic induction element 4. Magnetic switch; 5. Reed switch; 6. Hall proximity switch; 7. Fixed disk.

[0024] The above main element symbol description further describes the present utility model in detail in conjunction with the accompanying drawings and specific embodiments. Specific embodiments

[0025] The following specific embodiments illustrate the implementation manners of the present utility model. Those skilled in the art can easily understand other advantages and effects of the present utility model from the content disclosed in this specification. Obviously, the described embodiments are part of the embodiments of the present utility model, rather than all of them. Based on the embodiments of the present utility model, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present utility model.

[0026] Embodiment 1

[0027] Please refer to Figure 1 , this embodiment provides a semiconductor carrier rotation anomaly detection device, which is arranged in cooperation with a semiconductor processing device. The semiconductor processing device includes a reaction chamber 1, a quartz disk 2 for closing the inlet and outlet of the reaction chamber 1, a semiconductor carrier located in the reaction chamber 1, and a rotation mechanism for driving the semiconductor carrier. The rotation mechanism includes a motor located below the reaction chamber 1, a carrier shaft vertically fixed at the bottom of the semiconductor carrier, and a magnetohydrodynamic transmission member for connecting the output end of the motor and the carrier shaft. The magnetohydrodynamic transmission member is located below the quartz disk 2, and the carrier shaft and the quartz disk 2 are vertically movably penetrated, and the magnetic switch 4 is located at a corresponding position on the carrier shaft.

[0028] The detection device includes a magnetic induction element located in the reaction chamber 1 and a magnet 3 located above the magnetic induction element and close to the magnetic induction element. The magnetic induction element in this embodiment adopts a magnetic switch 4, the magnetic switch 4 is fixedly installed on the quartz disk 2, and the magnet 3 is fixedly installed on the semiconductor carrier. In this embodiment, by cooperating the magnetic switch 4 and the magnet 3, the effect of detecting whether the semiconductor carrier rotates abnormally is achieved by detecting whether a magnetic induction signal is received within a predetermined period.

[0029] The detection device of this embodiment utilizes magnetic induction to detect the number of rotation cycles and the rotation angle of the semiconductor carrier, so as to timely judge the abnormal rotation during the semiconductor processing, and avoid the problems that the motor runs idly when the magnetic fluid or the coupling fails, the semiconductor carrier actually does not rotate, or the rotation becomes slower due to the increase in the frictional force between the shafts. The detection device of this embodiment judges the abnormal rotation of the semiconductor carrier as follows: 1. Compare the period of the magnetic induction detection signal with the preset rotation period (the time for one rotation determined according to the set rotation speed). If the period of the detection signal does not match the preset rotation period, it is determined that the semiconductor carrier rotates abnormally; 2. Compare with the previous rotation period (such as the time for one rotation in the previous one or two times). If the two do not match, it is determined that the semiconductor carrier rotates abnormally.

[0030] Embodiment 2

[0031] Please refer to Figure 2 , this embodiment provides a detection device for abnormal rotation of a semiconductor carrier, and the difference from Embodiment 1 is that: the magnetic induction component of this embodiment adopts a magnetic reed switch 5, and the magnetic reed switch 5 cooperates with the magnet 3 to detect whether a magnetic induction signal is received within a predetermined period to achieve the effect of detecting whether the semiconductor carrier rotates abnormally.

[0032] Embodiment 3

[0033] Please refer to Figure 3 , this embodiment provides a detection device for abnormal rotation of a semiconductor carrier, and the difference from Embodiment 1 is that: the magnetic induction component of this embodiment adopts a Hall proximity switch 6, and the Hall proximity switch 6 cooperates with the magnet 3 to detect whether a magnetic induction signal is received within a predetermined period to achieve the effect of detecting whether the semiconductor carrier rotates abnormally.

[0034] Embodiment 4

[0035] Please refer to Figure 4 , this embodiment provides a detection device for abnormal rotation of a semiconductor carrier, and the difference from Embodiment 1 is that: the detection device of this embodiment further includes a fixed disk 7 fixedly sleeved on the carrier shaft, which is located above the quartz disk 2. The magnet 3 is fixedly installed on the fixed disk 7. Considering the possibility that the distance between the bottom end of the semiconductor carrier and the quartz disk is far in semiconductor processing equipment, the detection device of this embodiment adds a fixed disk 7 to shorten the distance and achieve good magnetic induction cooperation between the magnet 3 and the magnetic switch 4.

[0036] In summary, the detection device of this embodiment has the following advantages: By using magnetic induction to detect the number of rotations and rotation speed of the semiconductor carrier, it can timely identify abnormal rotation situations, preventing problems such as the semiconductor carrier not rotating due to the idling of the motor shaft or the rotation speed slowing down due to increased friction between shafts. Moreover, compared with the optical method for detecting whether the carrier rotates, the detection mode of the present utility model is easy to implement.

[0037] For the naming of each component involved, the function described in the specification is used as the naming standard, and it is not limited by the specific nouns used in the present utility model. Those skilled in the art can also use other nouns to describe the names of the various components of the present utility model.

Claims

1. A semiconductor carrier rotation anomaly detection device, which is arranged in cooperation with a semiconductor processing device; the semiconductor processing device includes a reaction chamber (1), a quartz disk (2) for closing the inlet and outlet of the reaction chamber (1), a semiconductor carrier located in the reaction chamber (1), and a rotation mechanism for driving the semiconductor carrier; It is characterized in that The detection device includes: A magnetic induction member located in the reaction chamber (1), which is fixedly installed on the quartz disk (2); and A magnet (3), which is located above the magnetic induction member and is arranged close to the magnetic induction member.

2. The semiconductor carrier rotation anomaly detection device according to claim 1, wherein The magnet (3) is fixedly installed on the semiconductor carrier.

3. The semiconductor carrier rotation abnormality detection device according to claim 1, wherein The magnetic induction member is a magnetic switch (4), a magnetic reed switch (5) or a Hall proximity switch (6).

4. A semiconductor carrier rotation anomaly detection device according to claim 1, characterized in that, The rotation mechanism includes a motor located below the reaction chamber (1), a carrier shaft vertically fixed at the bottom of the semiconductor carrier, and a magneto-rheological fluid transmission member for connecting the output end of the motor and the carrier shaft.

5. The semiconductor carrier rotation anomaly detection device according to claim 4, characterized in that, The magneto-rheological fluid transmission member is located below the quartz disk (2), and the carrier shaft and the quartz disk (2) are vertically movably penetrated; The magnetic induction member is located at a corresponding side position of the carrier shaft.

6. The semiconductor carrier rotation abnormality detection device according to claim 5, characterized in that The detection device further includes a fixed disk (7) fixedly sleeved on the carrier shaft, which is located above the quartz disk (2).

7. A semiconductor carrier rotation abnormality detection device according to claim 6, characterized in that, The magnet (3) is fixedly installed on the fixed disk (7).

Images