Absorption device for trace impurities in electronic gas

Abstract

The utility model discloses an absorption device for trace impurities in electronic gas, and relates to the technical field of trace impurity absorption devices.The absorption device comprises an impurity absorption box and a plurality of partition plates arranged in the impurity absorption box, and the multiple partition plates are configured to form an S-shaped flow channel in the impurity absorption box; a gas inlet pipe and a gas outlet pipe which extend into the impurity absorption box are fixedly mounted at the top of the impurity absorption box, and the lower end of the gas inlet pipe penetrates through the partition plates and extends to the bottom of the impurity absorption box, so that bubbles with electronic gas flow along the S-shaped flow channel, the stroke of the bubbles is increased, and the retention time of the bubbles in absorption liquid in the impurity absorption box is prolonged; the absorption efficiency is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of trace impurity absorption devices, in particular to an absorption device for trace impurities in electronic gases. Background Art

[0002] With the development of the integrated circuit industry, the usage of electronic gases is increasing, and the detection requirements for ionic impurities, especially metal cation impurities, in electronic gases are also getting higher and higher. At present, ionic impurities in electronic gases, such as metal cation impurities or anion impurities, are mainly enriched by an absorption method using a trace impurity absorption device.

[0003] However, when using the trace impurity absorption device in the prior art, there is a problem that the residence time of the bubbles of the electronic gas in the absorption liquid is too short, resulting in low absorption efficiency. Summary of the Utility Model

[0004] This application aims to solve at least one of the technical problems existing in the prior art. For this reason, this application provides an absorption device for trace impurities in electronic gases, which solves the problem that the residence time of the bubbles of the electronic gas in the absorption liquid is too short in the prior art, resulting in low absorption efficiency.

[0005] The purpose of this application can be achieved through the following technical solutions:

[0006] This application provides an absorption device for trace impurities in electronic gases. The absorption device includes an impurity absorption box and multiple partition plates arranged in the impurity absorption box. The multiple partition plates are configured to form a serpentine flow channel in the impurity absorption box. An air inlet pipe and an air outlet pipe extending into the impurity absorption box are fixedly installed at the top of the impurity absorption box, and the lower end of the air inlet pipe penetrates through each partition plate and extends to the bottom of the impurity absorption box.

[0007] Optionally, a gap is provided between one end of each partition plate and the inner side wall of the impurity absorption box, and the gaps formed between adjacent partition plates and the impurity absorption box are located on two opposite sides of the impurity absorption box.

[0008] Optionally, the width of each of the gaps falls within the range of 0.5 cm to 2.0 cm.

[0009] Optionally, each of the partition plates has an inclined angle with respect to the horizontal plane, and the inclined angles of each of the partition plates fall within the range of 10° to 50°. Preferably, the inclined angle of each of the partition plates is 30°.

[0010] Optionally, both the impurity absorption box and the partition plates are made of PFA material or PP material. When the trace impurities in the electronic gas to be treated are mainly metal cation impurities, both the impurity absorption box and the partition plates are made of PFA material. When the trace impurities in the electronic gas to be treated are mainly anion impurities, both the impurity absorption box and the partition plates are made of PP material.

[0011] Optionally, a filter element is provided at the lower end of the intake pipe, and the filtration pore size of the filter element falls within the range of 5 microns to 50 microns.

[0012] Optionally, a liquid injection port is fixedly connected to the top of the impurity absorption tank. The liquid injection port is located between the gas pipeline connecting pipe and the outlet pipe, and a sealing cover is screwed to the top of the liquid injection port.

[0013] Optionally, a liquid level scale is provided on one side of the impurity absorption tank.

[0014] Optionally, a cooling tank is fixedly installed on one side surface of the impurity absorption tank.

[0015] Optionally, a plurality of fixing plates are arranged at intervals in the cooling tank. The plurality of fixing plates divide the inside of the cooling tank into a plurality of cooling chambers, and a liquid injection port communicating with each cooling chamber is provided on the cooling tank.

[0016] Beneficial effects:

[0017] In this application, by arranging a plurality of partition plates in the impurity absorption tank, a serpentine flow channel is formed in the impurity absorption tank, so that the bubbles containing electronic gas flow along the serpentine flow channel, increasing the travel of the bubbles and prolonging the residence time of the bubbles in the absorption liquid in the impurity absorption tank, thereby improving the absorption efficiency. Description of the drawings

[0018] The following further describes this application with reference to the drawings.

[0019] Figure 1 is a schematic structural diagram of the absorption device in one embodiment of this application;

[0020] Figure 2 is a three-dimensional structural schematic diagram of the impurity absorption tank in one embodiment of this application;

[0021] Figure 3 is Figure 2 the enlarged structural view of part A in

[0022] Figure 4 is an axial sectional view of the absorption device in one embodiment of this application.

[0023] Description of the reference numerals:

[0024] 1. Impurity absorption tank; 2. Partition plate; 3. Intake pipe; 4. Outlet pipe; 5. Gap; 6. Top surface; 7. Control valve; 8. Filter element; 9. Two-way connector; 10. Liquid injection port; 11. Sealing cover; 12. Liquid level scale; 13. Cooling tank; 14. Fixing plate; 15. Liquid inlet pipe; 16. Liquid inlet hopper. Detailed implementation manners

[0025] The following will clearly and completely describe the technical solutions in the embodiments of the present application with reference to the accompanying drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all the embodiments. Based on the embodiments in the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts belong to the scope of protection of the present application.

[0026] Embodiment 1

[0027] As Figures 1-4 shown, the present application provides an absorption device for trace impurities in electronic gas. The absorption device includes an impurity absorption tank 1 and multiple partition plates 2 arranged in the impurity absorption tank 1. The multiple partition plates 2 are configured to form a serpentine flow channel in the impurity absorption tank 1. An inlet pipe 3 and an outlet pipe 4 extending into the impurity absorption tank 1 are fixedly installed at the top of the impurity absorption tank 1. The lower end of the inlet pipe 3 penetrates through each partition plate 2 and extends to the bottom of the impurity absorption tank 1. Bubbles of electronic gas flow out from the bottom of the impurity absorption tank 1 through the inlet pipe 3, flow along the serpentine flow channel in the absorption liquid in the impurity absorption tank 1 towards the top of the impurity absorption tank 1, and finally flow out of the impurity absorption tank 1 through the outlet pipe 4. Compared with the flow of bubbles in the impurity absorption tank 1 without a serpentine flow channel, the present application can greatly increase the travel distance of the bubbles, extend the residence time of the bubbles in the absorption liquid in the impurity absorption tank 1, and improve the absorption efficiency.

[0028] As Figure 2 and Figure 4 shown, specifically, three partition plates 2 are arranged in the impurity absorption tank 1. A gap 5 is provided between one end of each partition plate 2 and the inner side wall of the impurity absorption tank 1. The gaps 5 formed between adjacent partition plates 2 and the impurity absorption tank 1 are located on two opposite sides of the impurity absorption tank 1, and the bubbles flow through each gap 5.

[0029] Preferably, the size of the gap 5 is 0.5 cm to 2.0 cm to make the absorption speed of the electronic gas reach the best.

[0030] Each partition plate 2 has an inclined angle relative to the horizontal plane (the horizontal plane refers to the horizontal reference plane formed by completely static water). The inclined angles of each partition plate 2 fall within the range of 10° to 50°.

[0031] Preferably, the inclined angle of each partition plate 2 is 30°, which is beneficial to the upward movement of the bubbles in the absorption liquid (from bottom to top, successively rising along the lower sides of each partition plate 2 and the gaps 5 between each partition plate 2 and the inner side wall), and can effectively reduce the dead volume of the bubble accumulation travel (accumulated below the partition plate 2).

[0032] As Figure 2 and Figure 4As shown, the impurity absorption tank 1 has a top surface 6 that is inclined, and the inclination angle of the top surface 6 is 10° to 50°. Preferably, the inclination angle of the top surface 6 is 30°. The intake pipe 3 and the outlet pipe 4 are both fixedly installed on the top surface 6, and the outlet pipe 4 is arranged near the upper end of the top surface 6, and the intake pipe 3 is arranged near the lower end of the top surface 6, so that the electronic gas flows out from the outlet pipe 4 along the slope of the top surface 6.

[0033] Gas control valves 7 are provided on the parts of the intake pipe 3 and the outlet pipe 4 that extend out of the impurity absorption tank 1 to control the on / off of the intake pipe 3 and the outlet pipe 4.

[0034] As Figure 3 and Figure 4 shown, a filter element 8 is provided at the lower end of the intake pipe 3. The filter element 8 is docked with the lower end of the intake pipe 3 through a two-way connector 9. The filtration pore diameter of the filter element 8 falls within the range of 5 microns to 50 microns, and it can filter large-particle impurities, but the "metal cation impurities or anion impurities" to be detected will not be intercepted (the particle size is much smaller than the filtration pore diameter). Since the filter element 8 has many filter holes, after the electronic gas passes through the filter element 8, it comes out from the "surface of the filter element 8" and becomes many "small bubbles" (increasing the contact area with the absorption liquid), and then converges into a large bubble in the absorption liquid. This large bubble passes through the gap 5 between the partition 2 and the inner wall of the impurity absorption tank 1 under the guidance of the partition 2 and flows out from the outlet pipe 4 along the serpentine flow path.

[0035] A liquid injection port 10 is fixedly connected to the top of the impurity absorption tank 1. The liquid injection port 10 is located between the gas pipeline connecting pipe and the outlet pipe 4, and a sealing cover 11 is screwed to the top of the liquid injection port 10. When it is necessary to add the absorption liquid into the impurity absorption tank 1, only need to open the sealing cover 11, and then directly add it into the impurity absorption tank 1 through the liquid injection port 10, which is convenient and fast.

[0036] As Figure 1 shown, a liquid level scale 12 is provided on one side of the impurity absorption tank 1. The liquid level scale 12 is provided with 100 mL, 200 mL, and 300 mL scale lines, which is convenient for filling the absorption liquid.

[0037] In some embodiments of the present application, when the trace impurities in the electronic gas to be processed are mainly metal cation impurities, both the impurity absorption tank and the partition are made of PFA material. In some other embodiments of the present application, when the trace impurities in the electronic gas to be processed are mainly anion impurities, both the impurity absorption tank and the partition are made of PP material.

[0038] Specifically, in this embodiment, the trace impurities in the electronic gas to be processed are mainly metal cation impurities; the components in the absorption device that come into contact with the electronic gas (such as the impurity absorption box 1, the partition 2, the inlet pipe 3, and the outlet pipe 4) are all made of PFA material to reduce the migration amount of metal impurities in the entire device, avoid environmental pollution during the absorption process of the electronic gas, and improve the accuracy of the detection results.

[0039] As Figure 1 , Figure 2 and Figure 4 shown, in some embodiments, a cooling box 13 is fixedly installed on one side surface of the impurity absorption box 1, and a coolant (such as an ice-water mixture) is filled in the cooling box 13 to cool the absorption liquid in the impurity absorption box 1 so that the absorption liquid can better absorb the ionic impurities in the electronic gas.

[0040] In a specific implementation manner, a plurality of fixing plates 14 are arranged at intervals along the height direction of the cooling box 13, and the plurality of fixing plates 14 divide the inside of the cooling box 13 into a plurality of cooling chambers. The cooling box 13 is provided with a liquid inlet pipe 15 communicating with each cooling chamber one by one, and the upper end of each liquid inlet pipe 15 is fixedly connected with a liquid inlet hopper 16 for filling the inside of the corresponding cooling chamber with the coolant.

[0041] In another specific implementation manner, the cooling box 13 may also have only one entire cooling chamber.

[0042] When this technical solution is used, first, a certain amount of ice-water mixture is injected into the inside of the cooling box 13 through the liquid inlet hopper 16 and the liquid inlet pipe 15, then the sealing cover 11 is opened, and a certain amount of absorption liquid is injected into the inside of the impurity absorption box 1 through the liquid injection port 10 by using the liquid level scale 12. After that, the electronic gas is injected into the absorption liquid inside the impurity absorption box 1 through the inlet pipe 3, the two-way connector 9, and the filter element 8. The bubbles rise in a "snake shape" along the partition 2 in the absorption liquid, increasing the travel of the bubbles by 300%-500%, greatly prolonging the time of the bubbles in the absorption liquid, and improving the absorption efficiency.

[0043] The above has described a specific embodiment of the present application in detail, but the content described is only a preferred embodiment of the present application and cannot be considered as limiting the scope of implementation of the present application. All equivalent changes and improvements made within the scope of the present application should still fall within the scope covered by the patent of the present application.

[0044] It should be noted that the "first", "second" and similar terms used in this application do not denote any order, quantity or importance, but are only used to distinguish different components. The descriptions of directions such as "left", "right", "left side", "right side", "upper part", "lower part", "top", "bottom", etc. in this application are all defined based on the orientation or position relationship shown in the drawings, and are only for the convenience of describing this application and simplifying the description, rather than indicating or implying that the described structure must be constructed and operated in a specific orientation. Therefore, it should not be construed as a limitation to this application. In the description of this application, "a plurality of" means more than two, unless otherwise specifically defined.

[0045] In the description of this application, unless otherwise clearly specified and limited, the terms "mounted", "connected" and "coupled" shall be understood in a broad sense. For example, it may be a fixed connection, a detachable connection, or an integral connection; it may be directly connected, or indirectly connected through an intermediate medium, and it may be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood according to specific circumstances.

Claims

1. An absorption device for trace impurities in electronic gases, characterized in that, The absorption device includes an impurity absorption tank and a plurality of partition plates arranged in the impurity absorption tank. The plurality of partition plates are configured to form a serpentine flow channel in the impurity absorption tank. An air inlet pipe and an air outlet pipe extending into the impurity absorption tank are fixedly installed at the top of the impurity absorption tank. The lower end of the air inlet pipe penetrates through each partition plate and extends to the bottom of the impurity absorption tank.

2. The absorption device according to claim 1, wherein A gap is provided between one end of each partition plate and the inner side wall of the impurity absorption tank. The gaps formed between adjacent partition plates and the impurity absorption tank are located on two opposite sides of the impurity absorption tank.

3. The absorption device according to claim 2, characterized in that, The width of each gap falls within the range of 0.5 cm to 2.0 cm.

4. The absorption device according to claim 1, wherein Each partition plate has an inclined angle relative to the horizontal plane, and the inclined angles of each partition plate fall within the range of 10° to 50°.

5. The absorption device according to claim 1, characterized in that, Both the impurity absorption tank and the partition plates are made of PFA material or PP material.

6. The absorption device according to claim 1, characterized in that A filter element is provided at the lower end of the air inlet pipe, and the filtration pore diameter of the filter element falls within the range of 5 microns to 50 microns.

7. The absorption device according to claim 1, wherein A liquid injection port is fixedly connected to the top of the impurity absorption tank. The liquid injection port is located between the gas pipeline connecting pipe and the air outlet pipe, and a sealing cover is screwed to the top of the liquid injection port.

8. The absorption device according to claim 1, wherein, A liquid level scale is provided on one side of the impurity absorption tank.

9. The absorption device according to claim 1, characterized in that, A cooling tank is fixedly installed on one side surface of the impurity absorption tank.

10. The absorbing device according to claim 9, characterized in that, Inside the cooling tank at intervals A plurality of fixing plates are provided. The plurality of fixing plates divide the inside of the cooling tank into a plurality of cooling chambers. A liquid inlet pipe communicating with each cooling chamber is provided on the cooling tank.

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