Target material backboard insulation structure and vacuum coating equipment
By setting the insulating layer and gap on the target backplane, the high voltage difference between the target backplane and the magnetron plate is solved, and the safety and stability of the vacuum coating equipment are improved.
Patent Information
- Application Number
- CN202422357727.7
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-26
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-09-26
AI Technical Summary
In vacuum coating equipment, the high voltage difference between the target back plate and the magnetron plate easily leads to ionization and arcing, affecting process stability and safety.
An insulating layer is provided on the target back plate, and a gap is left between the target back plate and the magnetron plate to increase the distance to avoid high-pressure breakdown. Materials such as polytetrafluoroethylene or aluminum oxide are used as the insulating layer, and the vacuum environment is maintained with the seal.
It effectively avoids high-pressure breakdown between the target back plate and the magnetron plate, and improves the safety and process stability of the equipment.
Smart Images
Figure CN223134561U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of vacuum thin film deposition, in particular to a target backplane insulation structure and a vacuum coating device. Background Art
[0002] In the related art, during the process of a sputtering target, it is connected to high voltage, usually a DC negative voltage of -500 to -1000V. The cavity and the magnet assembly are grounded, that is, the voltage is 0. Therefore, there is a high voltage difference between the target backplane and the magnet or the cavity. According to the Paschen curve, when the product value of the distance and the gas pressure becomes smaller and smaller (the process voltage is constant), ionization and arc phenomena are likely to occur between the two parts with a voltage difference. In the existing planar target sputtering equipment, the distance between the magnetron and the target backplane is relatively close. Due to the potential difference between the two and the gas atmosphere (air or nitrogen) in a high vacuum (1Pa - 100Pa), ionization or breakdown is extremely likely to occur between the two, resulting in the inability to carry out the process and even posing a danger. Summary of the Utility Model
[0003] The utility model aims to at least solve one of the technical problems existing in the prior art. For this reason, the utility model provides a target backplane insulation structure and a vacuum coating device, which can avoid breakdown phenomena and improve safety and the stability of the production process.
[0004] A target backplane insulation structure according to an embodiment of the first aspect of the utility model includes:
[0005] A box body, including a first mounting seat. The box body has an inner cavity, in which a target, a target backplane, and a magnetron plate are provided. Both ends of the target backplane are insulatedly connected to the first mounting seat. The target is fixed to one side of the target backplane, and the magnetron plate is located on the other side of the target backplane facing away from the target. An insulating layer is provided on the side of the target backplane facing the magnetron plate. There is a gap between the insulating layer and the magnetron plate. The distance between both ends of the magnetron plate and the inner wall of the inner cavity is greater than the width of the gap.
[0006] A target backplane insulation structure according to an embodiment of the first aspect of the utility model has at least the following beneficial effects: This embodiment provides a box body, including a first mounting seat. The box body has an inner cavity, in which a target, a target backplane, and a magnetron plate are provided. Both ends of the target backplane are insulatedly connected to the first mounting seat. The target is fixed to one side of the target backplane, and the magnetron plate is located on the other side of the target backplane facing away from the target. An insulating layer is provided on the side of the target backplane facing the magnetron plate. There is a gap between the insulating layer and the magnetron plate. By providing the insulating layer, high voltage breakdown between the magnetron plate and the target backplane can be avoided, so as to improve safety and the stability of the process.
[0007] According to an embodiment of the first aspect of the utility model, first insulating blocks are provided at both ends of the target backplane on the first mounting seat, and the first insulating blocks are fixed between the target backplane and the first mounting seat.
[0008] According to an embodiment of the first aspect of the present utility model, the first mounting seat includes a mounting portion, and two sides of the first insulating block respectively abut against the mounting portion and the target backplane.
[0009] According to an embodiment of the first aspect of the present utility model, the first insulating block includes a first extension portion and a second extension portion. The first extension portion is located between the first mounting seat and the target backplane, and the second extension portion extends along the thickness direction of the first extension portion and covers the side wall of the mounting portion facing the magnetron plate.
[0010] According to an embodiment of the first aspect of the present utility model, the mounting portion is provided with a receiving groove for mounting the first insulating block, and the first extension portion and the second extension portion on the first insulating block respectively cover two side walls of the receiving groove.
[0011] According to an embodiment of the first aspect of the present utility model, the insulating layer is made of polytetrafluoroethylene material and is laid on one side of the target backplane facing the magnetron plate.
[0012] According to an embodiment of the first aspect of the present utility model, the insulating layer is located between the first extension portion and the target backplane.
[0013] According to an embodiment of the first aspect of the present utility model, the box body further includes a second mounting seat, and the second mounting seat is provided with a second insulating block abutting against the target backplane.
[0014] According to an embodiment of the first aspect of the present utility model, sealing members are provided between the first mounting seat and the first insulating block, between the first insulating block and the target backplane, between the target backplane and the second insulating block, and between the second insulating block and the second mounting seat.
[0015] According to an embodiment of the second aspect of the present utility model, a vacuum coating device is provided, which includes an insulating structure of a target backplane as described above.
[0016] The vacuum coating device according to an embodiment of the second aspect of the present utility model has at least the following beneficial effects:
[0017] Compared with the prior art, an insulating layer is provided on one side of the target backplane in the vacuum coating device facing the magnetron plate, and there is a gap between the insulating layer and the magnetron plate. By providing the insulating layer, high-voltage breakdown between the magnetron plate and the target backplane can be avoided, and the distance between both ends of the magnetron plate and the inner wall of the inner cavity is greater than the width of the gap, which can avoid ionization or breakdown between the target backplane with negative high voltage and the inner wall of the box body, so as to improve safety and process stability.
[0018] The additional aspects and advantages of the present utility model will be partially given in the following description, partially become obvious from the following description, or be understood through the practice of the present utility model. Description of the Drawings
[0019] The following further describes the present utility model in conjunction with the accompanying drawings and embodiments, where:
[0020] Figure 1 It is a cross-sectional view of an insulating structure of a target backplane in an embodiment of the first aspect of the present utility model;
[0021] Figure 2 is Figure 1 an enlarged view of A in
[0022] Figure 3 It is a partial cross-sectional view of an insulating structure of a target backplane in an embodiment of the first aspect of the present utility model;
[0023] Figure 4 It is a cross-sectional view of the insulating layer between the first extension part and the target backplane in an embodiment of the first aspect of the present utility model.
[0024] Reference numerals:
[0025] The first mounting seat 100; the inner cavity 101; the target backplane 102; the target 103; the magnetron plate 104; the insulating layer 105; the gap 106; the first insulating block 107; the first extension part 108; the second extension part 109; the mounting part 110; the receiving groove 111; the first sealing member 112; the second sealing member 113; the third sealing member 114; the fourth sealing member 115;
[0026] The second mounting seat 120; the second insulating block 121; the substrate table 122. Detailed implementation manners
[0027] The following details the embodiments of the present utility model. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions throughout. The embodiments described below by referring to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation to the present utility model.
[0028] In the description of the present utility model, it should be understood that for the orientation description, such as the orientation or positional relationship indicated by up, down, front, back, left, right, etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.
[0029] In the description of the present utility model, the meaning of "a number of" is one or more, the meaning of "a plurality of" is two or more, and understandings such as "greater than", "less than", "exceeding", etc. do not include the present number, and understandings such as "above", "below", "within", etc. include the present number. If there is a description of "first" and "second", it is only for the purpose of distinguishing technical features and cannot be understood as indicating or implying relative importance or implicitly indicating the quantity of the indicated technical features or implicitly indicating the sequence relationship of the indicated technical features.
[0030] In the description of the present utility model, unless otherwise clearly defined, words such as "arrangement", "installation", "connection", etc. should be understood in a broad sense, and those skilled in the art can reasonably determine the specific meanings of the above words in the present utility model in combination with the specific content of the technical solution.
[0031] Refer to Figure 1 , in an insulating structure of a target backplane in an embodiment of the present utility model, it includes a box body. The box body includes a first mounting seat 100 and a second mounting seat 120. The cavities of the first mounting seat 100 and the second mounting seat 120 are combined into an inner cavity 101. A target 103, a target backplane 102, and a magnetron plate 104 are provided in the inner cavity 101. A substrate stage 122 is provided on the second mounting seat 120. The substrate stage 122 is located on the side of the target 103 facing away from the first mounting seat 100. Both ends of the target backplane 102 are insulatingly connected to the first mounting seat 100. The target 103 is fixed to one side of the target backplane 102. The magnetron plate 104 is located on the other side of the target backplane 102 facing away from the target 103. An insulating layer 105 is provided on the side of the target backplane 102 facing the magnetron plate 104. There is a gap 106 between the insulating layer 105 and the magnetron plate 104. By providing the insulating layer 105, it is possible to avoid high-voltage breakdown between the magnetron plate 104 and the target backplane 102. It can be understood that the insulating layer 105 can be made of materials such as polytetrafluoroethylene (PTFE) or alumina, and the thickness of the insulating layer 105 coated on the target backplane 102 is 0.05 mm - 0.4 mm.
[0032] Specifically, refer to Figure 2, at both ends of the target backplane 102 on the first mounting base 100, there are first insulating blocks 107. The first insulating blocks 107 are fixed between the target backplane 102 and the first mounting base 100 to prevent conduction between the first mounting base 100 and the target backplane 102. Further, the first mounting base 100 is provided with a mounting portion 110. Both sides of the first insulating block 107 abut against the mounting portion 110 and the target backplane 102 respectively. Further, the mounting portion 110 has a receiving groove 111, and the first insulating block 107 is installed in the receiving groove 111. It can be understood that the first insulating block 107 includes a first extension portion 108 and a second extension portion 109. The first extension portion 108 is located between the first mounting base 100 and the target backplane 102 and extends along the width direction of the target backplane 102. The second extension portion 109 extends along the thickness direction of the first extension portion 108 and covers the side wall of the mounting portion 110 facing the magnetron plate 104. And the first extension portion 108 and the second extension portion 109 on the first insulating block 107 respectively cover both side walls of the receiving groove 111. It can be understood that the thickness of the first extension portion 108 on the first insulating block 107 is greater than the width of the gap 106. When there is no insulating layer 105 on the target backplane 102, due to the small gap 106, ionization or breakdown is likely to occur between the target backplane 102 and the magnetron plate 104, resulting in conduction between the two. When the insulating layer 105 is provided on the target backplane 102, the occurrence of breakdown can be effectively avoided. Therefore, the part where conduction is likely to occur between the target backplane 102 and the first mounting base 100 is the part where the first insulating block 107 is provided. When the thickness of the first extension portion 108 is greater than the width of the gap 106, the distance between the target backplane 102 and the first mounting base 100 can be increased, thereby avoiding breakdown conduction between the target backplane 102 and the first mounting base 100 at the accessory part where the first insulating block 107 is provided.
[0033] Refer to Figure 3 , in some embodiments, the insulating layer 105 is made of polytetrafluoroethylene material and laid on the side of the target backplane 102 facing the magnetron plate 104. Further, the insulating layer 105 is located between the first extension portion 108 and the target backplane 102, which can further increase the distance between the target backplane 102 and the first mounting base 100 and the thickness of the insulating material, thereby further improving the insulation effect and reducing the possibility of conduction or breakdown.
[0034] Further, a second insulating block 121 for abutting against the target backplane 102 is provided on the second mounting base 120 to prevent conduction between the target backplane 102 and the second mounting base 120 and improve the safety of the device. It can be understood that the thickness of the second insulating block 121 is greater than that of the insulating layer 105 to ensure a good insulating effect. Further, sealing members are provided between the first mounting base 100 and the first insulating block 107, between the first insulating block 107 and the target backplane 102, between the target backplane 102 and the second insulating block 121, and between the second insulating block 121 and the second mounting base 120. Specifically, the sealing members include a first sealing member 112, a second sealing member 113, a third sealing member 114, and a fourth sealing member 115. The first sealing member 112 is located between the first mounting base 100 and the first insulating block 107 and is embedded in the mounting portion 110; the second sealing member 113 is located between the first insulating block 107 and the target backplane 102 and is embedded in the first insulating block 107; the third sealing member 114 is located between the target backplane 102 and the second insulating block 121 and is embedded in the target backplane 102; the fourth sealing member 115 is located between the second insulating block 121 and the second mounting base 120 and is embedded in the second insulating block 121. Since the inner cavity 101 needs to maintain a vacuum environment, the provision of the sealing members helps to maintain the airtightness of the inner cavity 101. It can be understood that the sealing members are O-ring cross-section sealing strips or sealing rings.
[0035] According to an embodiment of the second aspect of the present invention, a vacuum coating device is provided, including the insulating structure of a target backplane as described above. It can be understood that since the vacuum coating device includes all the technical features of the insulating structure of a target backplane, the vacuum coating device also has all the beneficial effects of the insulating structure of a target backplane.
[0036] The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the above embodiments, and various changes can be made without departing from the spirit of the present invention within the scope of knowledge possessed by those of ordinary skill in the art.
Claims
1. A target backplane insulation structure, characterized in that Comprising: A box body, including a first mounting seat, the box body having an inner cavity, wherein a target, a target back plate and a magnetron plate are provided in the inner cavity, both ends of the target back plate are insulatingly connected to the first mounting seat, the target is fixed to one side of the target back plate, the magnetron plate is located on the other side of the target back plate facing away from the target, an insulating layer is provided on the side of the target back plate facing the magnetron plate, there is a gap between the insulating layer and the magnetron plate, and the distance between both ends of the magnetron plate and the inner wall of the inner cavity is greater than the width of the gap.
2. The insulating structure of a target backplane according to claim 1, characterized in that, First insulating blocks are provided at both ends of the target back plate on the first mounting seat, and the first insulating blocks are fixed between the target back plate and the first mounting seat.
3. The insulating structure of a target backplane according to claim 2, wherein, The first mounting seat includes a mounting portion, and both sides of the first insulating block respectively abut against the mounting portion and the target back plate.
4. The insulating structure of a target backplane according to claim 3, wherein The first insulating block includes a first extension portion and a second extension portion. The first extension portion is located between the first mounting seat and the target back plate, and the second extension portion extends along the thickness direction of the first extension portion and covers the side wall of the mounting portion facing the magnetron plate.
5. The insulating structure of the target backplane according to claim 4, wherein, A receiving groove for mounting the first insulating block is provided on the mounting portion, and the first extension portion and the second extension portion on the first insulating block respectively cover both side walls of the receiving groove.
6. The insulating structure of a target backplane according to claim 4, characterized in that, The insulating layer is made of polytetrafluoroethylene material and is laid on the side of the target back plate facing the magnetron plate.
7. The insulating structure for a target backplane according to claim 6, wherein The insulating layer is located between the first extension portion and the target back plate.
8. The insulating structure of the target backplane according to claim 2, wherein The box body further includes a second mounting seat, and a second insulating block for abutting against the target back plate is provided on the second mounting seat.
9. The insulating structure of a target backplane according to claim 8, wherein, Sealing members are provided between the first mounting seat and the first insulating block, between the first insulating block and the target back plate, between the target back plate and the second insulating block, and between the second insulating block and the second mounting seat.
10. A vacuum coating equipment, characterized in that, Including a target back plate insulating structure according to any one of claims 1 to 9.