Tail gas pipeline heating system

Abstract

The utility model belongs to the technical field of tail gas treatment, particularly relates to a tail gas pipeline heating system, and provides the following scheme aiming at the problems of inconvenience in installation, low heating efficiency and difficulty in maintenance of the traditional tail gas pipeline heating system: the tail gas pipeline heating system comprises a tail gas pipeline, a first connecting arc-shaped block and a second connecting arc-shaped block are respectively arranged on two sides of the surface of the tail gas pipeline; the first connecting arc-shaped block and the second connecting arc-shaped block are each internally provided with an outer heating assembly used for heating gas in the tail gas pipeline. The two connecting assemblies are arranged between the first connecting arc-shaped block and the second connecting arc-shaped block and used for fixing the first connecting arc-shaped block and the second connecting arc-shaped block to the surface of the tail gas pipeline. And by adopting an internal and external combined heating mode, the heating efficiency is greatly improved.

Description

Technical Field

[0001] The utility model relates to the technical field of tail gas treatment, in particular to a tail gas pipeline heating system. Background Art

[0002] In the process of semiconductor manufacturing, the equipment machine continuously extracts the residues and reaction tail gas in the reaction chamber through the pump system to ensure that the environment of each process reaction meets the standards. These residues and tail gas often contain harmful chemical substances and gases, which need to be safely discharged through the tail gas pipeline.

[0003] However, there is a key problem in the discharge process of residues and tail gas in semiconductor processes: they need to be maintained stable under certain temperature conditions to prevent crystallization or powder formation after cooling in the pipeline. Once these substances crystallize or aggregate in the tail gas pipeline, it will not only block the pipeline, affect the discharge efficiency, but also may cause corrosion to the pipeline and even lead to safety accidents.

[0004] In addition, the tail gas pipelines in semiconductor production lines are usually long and complex, and need to be maintained and component replaced regularly. The traditional tail gas pipeline heating systems often have problems such as inconvenient installation, low heating efficiency and difficult maintenance, and cannot meet the requirements of high efficiency, safety and stability of tail gas treatment in the semiconductor industry. Summary of the Utility Model

[0005] The purpose of the utility model is to solve the disadvantages that the traditional tail gas pipeline heating systems in the prior art often have inconvenient installation, low heating efficiency and difficult maintenance, and to propose a tail gas pipeline heating system.

[0006] In order to achieve the above purpose, the utility model adopts the following technical scheme:

[0007] A tail gas pipeline heating system, including a tail gas pipeline, on both sides of the surface of the tail gas pipeline, a first connecting arc-shaped block and a second connecting arc-shaped block are respectively arranged;

[0008] Wherein, a set of external heating components for heating the gas in the tail gas pipeline are arranged in both the first connecting arc-shaped block and the second connecting arc-shaped block;

[0009] Two groups of connecting components, both of the two groups of connecting components are arranged between the first connecting arc-shaped block and the second connecting arc-shaped block for fixing the first connecting arc-shaped block and the second connecting arc-shaped block on the surface of the tail gas pipeline;

[0010] And a pressing component used in cooperation with the two groups of connecting components, the pressing component is used to release the connection between the first connecting arc-shaped block and the second connecting arc-shaped block;

[0011] An internal heating component, which is arranged in the tail gas pipeline and used to heat-treat the tail gas passing through the tail gas pipeline.

[0012] In a possible design, each group of the external heating components includes an arc-shaped groove formed in the first connecting arc-shaped block, and a plurality of second resistance heating wires are uniformly fixed in the arc-shaped groove.

[0013] In a possible design, a matching block is fixed to the side end of the second connecting arc-shaped block, and a matching groove matching with the matching block is formed in the side end of the first connecting arc-shaped block.

[0014] In a possible design, each group of the connecting components includes a second groove formed in the matching block, two clamping blocks are slidably arranged in the second groove, two clamping springs are fixed between the two clamping blocks, two clamping grooves communicated with the matching groove are formed in the first connecting arc-shaped block, and the two clamping blocks are respectively clamped with the two clamping grooves.

[0015] In a possible design, the extrusion component includes a first groove formed in the second connecting arc-shaped block, a pressing block is slidably arranged in the first groove, four extrusion rods are fixed to the side end of the pressing block, extrusion grooves are formed in the four clamping blocks, the four extrusion rods respectively penetrate through the four extrusion grooves movably, and the four extrusion rods are respectively in extrusion contact with the inclined surfaces of the four extrusion grooves.

[0016] In a possible design, a return spring is fixed to the side end of the pressing block, and the side end of the return spring is fixed in the first groove.

[0017] In a possible design, two anti-slip pads are fixed to the arc-shaped inner walls of the first connecting arc-shaped block and the second connecting arc-shaped block, and the four anti-slip pads are respectively arranged on the upper and lower sides of the arc-shaped inner walls of the first connecting arc-shaped block and the second connecting arc-shaped block.

[0018] In a possible design, the internal heating components each include a guiding block fixed in the tail gas pipeline, and a plurality of first resistance heating wires are uniformly fixed in the guiding block.

[0019] In this application, it is necessary to first install a first connecting arc-shaped block and a second connecting arc-shaped block on the surface of the tail gas pipeline. The first connecting arc-shaped block and the second connecting arc-shaped block are respectively located on both sides of the surface of the tail gas pipeline. After aligning the matching block at the side end of the second connecting arc-shaped block with the matching groove at the side end of the first connecting arc-shaped block and inserting it, the elastic force of the second groove pushes the two clamping blocks to move away from each other. The two clamping blocks are respectively pushed into the two clamping grooves, thereby fixing the positions of the first connecting arc-shaped block and the second connecting arc-shaped block. Through the pressure generated by the connection between the first connecting arc-shaped block and the second connecting arc-shaped block, the first connecting arc-shaped block and the second connecting arc-shaped block are fixed on the surface of the tail gas pipeline. When disassembly is required, only need to press the pressing block to drive the extrusion rod to move. The extrusion rod squeezes the inclined surface of the extrusion groove, driving the two clamping blocks to move closer to each other, so that the clamping blocks are disengaged from the clamping grooves, facilitating disassembly, maintenance or replacement;

[0020] The tail gas is discharged through the tail gas pipeline. When passing through the guiding block in the tail gas pipeline, the tail gas is guided into the gap of the guiding block. A first resistance heating wire for heating is provided in the gap of the guiding block, which can heat the tail gas. The second resistance heating wire in the first connecting arc-shaped block and the second connecting arc-shaped block heats the tail gas in the tail gas pipeline, effectively ensuring the constancy of the temperature during the tail gas transportation process, so that residues and reaction tail gas do not crystallize or form powder aggregates in the tail gas pipeline.

[0021] Beneficial effects

[0022] In the present utility model, an internal and external combined heating method is adopted. Not only the external heating component heats the outside of the tail gas pipeline, but also the internal heating component directly heats the tail gas, greatly improving the heating efficiency;

[0023] In the present utility model, through a reasonable structural design, the tail gas pipeline is uniformly stressed during the heating process, reducing the thermal stress caused by temperature changes and extending the service life of the tail gas pipeline;

[0024] In the present utility model, the unique design of the connecting component and the extrusion component makes the installation and disassembly of the first connecting arc-shaped block and the second connecting arc-shaped block simple and fast, facilitating the maintenance and upgrade of the system. BRIEF DESCRIPTION OF THE DRAWINGS

[0025] Figure 1 is the main perspective view of the tail gas pipeline heating system proposed by the present utility model;

[0026] Figure 2 is the first partial cross-sectional view of the tail gas pipeline heating system proposed by the present utility model;

[0027] Figure 3 is the second partial cross-sectional view of the tail gas pipeline heating system proposed by the present utility model;

[0028] Figure 4 This is the third partial cross-sectional view of the tail gas pipeline heating system proposed by the present utility model.

[0029] In the figure: 1. Tail gas pipeline; 2. First connecting arc-shaped block; 3. Second connecting arc-shaped block; 4. First groove; 5. Pressing block; 6. Anti-slip pad; 7. Guide block; 8. First resistance heating wire; 9. Matching groove; 10. Matching block; 11. Clamping groove; 12. Clamping block; 13. Extrusion groove; 14. Extrusion rod; 15. Second groove; 16. Clamping spring; 17. Return spring; 18. Arc-shaped groove; 19. Second resistance heating wire. Specific embodiments

[0030] Next, the technical solutions in the embodiments of the present utility model will be clearly and completely described in conjunction with the accompanying drawings in the embodiments of the present utility model. Obviously, the described embodiments are only a part of the embodiments of the present utility model, rather than all the embodiments.

[0031] Embodiment 1

[0032] Referring to Figures 1-4 , the tail gas pipeline heating system is applied in the field of tail gas treatment technology and includes a tail gas pipeline 1, a first connecting arc-shaped block 2, a second connecting arc-shaped block 3, two groups of connecting components, an extrusion component, and an internal heating component;

[0033] The tail gas pipeline 1 serves as the main body for tail gas transmission, and a first connecting arc-shaped block 2 and a second connecting arc-shaped block 3 are respectively provided on both sides of its surface; a group of external heating components are provided inside both of them. The external heating component is composed of an arc-shaped groove 18 opened in the first connecting arc-shaped block 2. A plurality of second resistance heating wires 19 are uniformly fixed in the arc-shaped groove 18 for preliminarily heating the surface and the internal gas of the tail gas pipeline 1.

[0034] Specifically, the second resistance heating wires 19 are arranged along the length direction of the tail gas pipeline 1 and are arranged around the tail gas pipeline 1. Among them, the second resistance heating wires 19 are connected to the power supply through wires, and a power switch is generally also connected to the wires to control the on-off of the circuit, which is convenient to start or close the heating system when needed. A temperature controller is used to monitor and control the temperature of the heating system to ensure its operation within a safe range and is used to control whether the second resistance heating wires 19 are energized.

[0035] When the tail gas passes through the tail gas pipeline 1, the second resistance heating wires 19 in the external heating component are energized to generate heat, and the surface and the internal gas of the tail gas pipeline are preliminarily heated. By heating the tail gas, the decomposition and conversion of harmful components in the tail gas can be accelerated, and the treatment efficiency can be improved. By adjusting the power and heating time of the resistance heating wires, precise control of the tail gas temperature and heating speed can be achieved.

[0036] The two sets of connection components are arranged between the first connection arc block 2 and the second connection arc block 3. The specific implementation method is that the matching block 10 is fixed on the side end of the second connection arc block 3, and the side end of the first connection arc block 2 is provided with a matching groove 9 that matches the matching block 10. In addition, a second groove 15 is provided in the matching block 10, and two clamping blocks 12 are slidably installed in the second groove 15. The two clamping blocks 12 are connected by a clamping spring 16. Two clamping grooves 11 are provided at corresponding positions in the first connection arc block 2 for clamping and fixing with the clamping block 12.

[0037] In order to facilitate the installation of the two snap-in blocks 12 into the second groove 15, an installation opening can be reserved on one side of the second groove 15, and in order to prevent the two snap-in blocks 12 from detaching, a limiting structure or a baffle can be installed at the installation opening. The limiting structure or the baffle is fixedly connected to the second groove 15 by bolts, so that the two snap-in blocks 12 are confined in the second groove 15.

[0038] And since the second groove 15 has a sufficient length reserved in the vertical direction, the two clamping blocks 12 can move up and down in the second groove 15, wherein the two clamping blocks 12 have a protruding clamping structure formed at one end facing the outside of the second groove 15, and the upper and lower ends of the second groove 15 are correspondingly provided with through openings, and the two clamping blocks 12 are connected by a clamping spring 16. Therefore, when no external force acts on the two clamping blocks 12, the two clamping blocks 12 will move to the upper and lower ends of the second groove 15, and the protruding clamping structures of the two clamping blocks 12 will extend from the through openings. Since two clamping grooves 11 are opened at corresponding positions in the first connecting arc block 2, the extended clamping structure will extend into the two clamping grooves 11 to form a fixed clamping.

[0039] The clamping structures of the two clamping blocks 12 are consistent with the shapes and sizes of the through opening and the two clamping grooves 11, so as to ensure a tight clamping connection between the two.

[0040] It includes a first groove 4 opened in the second connecting arc block 3, a pressing block 5 is slidably installed in the first groove 4, and the side end of the pressing block 5 is connected to four extrusion rods 14. The extrusion rods 14 are movably inserted into the extrusion groove 13 in the clamping block 12. Through the up and down movement of the pressing block 5, the extrusion rods 14 are squeezed and contacted with the inclined surface of the extrusion groove 13 to realize the release and locking of the clamping block 12.

[0041] Specifically, in order to prevent the pressing block 5 from falling out of the first groove 4, a limiting structure is set on the inner side of the pressing block 5 and the outer side of the first groove 4. By setting the limiting structure, the pressing block 5 will be limited when it moves to the limit position on the inner side of the first groove 4, preventing the pressing block 5 from continuing to move inward, and the pressing block 5 will be limited when it moves to the limit position on the outer side of the first groove 4, preventing the pressing block 5 from continuing to move outward.

[0042] Specifically, the limiting structure is a first extension edge fixed to the inner and outer sides of the first groove 4 and a second extension edge fixed to the inner side of the pressing block 5, and the first extension edge and the second extension edge overlap with each other in the moving direction of the pressing block 5.

[0043] Four extrusion rods 14 are fixed to the side of the pressing block 5 facing the side of the clamping block 12, and the four extrusion rods 14 penetrate into the second groove 15. Therefore, by pushing the pressing block 5 to move reciprocally, the four extrusion rods 14 can be driven to move together. And on the side of the two clamping blocks 12 facing the four extrusion rods 14, extrusion grooves 13 are provided, and an inclined edge is arranged below the extrusion grooves 13. When the extrusion rods 14 extrude the inclined edge, a force moving the clamping block 12 towards the middle will be generated on the clamping block 12. Therefore, when the pressing block 5 is pushed towards the clamping block 12, the clamping structure of the clamping block 12 can be retracted from the clamping groove 11, thereby completing the unlocking of the first connecting arc-shaped block 2 and the second connecting arc-shaped block 3. After releasing the pressing block 5, the pressing block 5 will reset under the action of the return spring 17, and after the two clamping blocks 12 have no external force, they will also reset under the elastic action of the clamping spring 16, and lock the first connecting arc-shaped block 2 and the second connecting arc-shaped block 3 again.

[0044] The return spring 17 is installed between the pressing block 5 and the first groove 4 for the automatic reset of the pressing block 5.

[0045] In this embodiment, the second resistance heating wire 19 is energized to generate heat to preliminarily heat the surface and the internal gas of the tail gas pipe. By heating the tail gas, the decomposition and conversion of harmful components in the tail gas can be accelerated, and the treatment efficiency can be improved. By adjusting the power and heating time of the resistance heating wire, the precise control of the tail gas temperature and heating speed can be achieved, and two sets of connecting components are provided between the first connecting arc-shaped block 2 and the second connecting arc-shaped block 3.

[0046] Embodiment 2

[0047] Reference Figures 1-4 , on the basis of Embodiment 1, an improvement is made: on the arc-shaped inner walls of the first connecting arc-shaped block 2 and the second connecting arc-shaped block 3, two anti-slip pads 6 are respectively fixed to prevent sliding during the heating process.

[0048] Specifically, the anti-slip pads 6 can be metal pads or fiberglass anti-slip pads.

[0049] It includes a guiding block 7 fixed in the tail gas pipe 1, and a plurality of first resistance heating wires 8 are uniformly fixed in the guiding block 7 to directly heat the tail gas and improve the heating efficiency.

[0050] Specifically, the first resistance heating wire 8 is connected to a power source through a wire, and a power switch is generally connected to the wire to control the on / off of the circuit, facilitating the startup or shutdown of the heating system when needed. A temperature controller is used to monitor and control the temperature of the heating system to ensure its operation within a safe range. When the system starts up, the power source supplies power to the first resistance heating wire. After the first resistance heating wire 8 is energized, it quickly generates heat, converting electrical energy into thermal energy. The generated heat is transferred to the exhaust gas in the exhaust gas pipe through the guiding block. The design of the guiding block ensures that the heat can be evenly and quickly transferred to the exhaust gas.

[0051] However, as is well known to those skilled in the art, the working principles and wiring methods of the first resistance heating wire 8 and the second resistance heating wire 19 are common knowledge and fall within the scope of conventional means. Therefore, they will not be elaborated here. Those skilled in the art can make arbitrary selections according to their needs or convenience.

[0052] The above description is only the preferred specific embodiment of the present utility model, but the protection scope of the present utility model is not limited thereto. Any person skilled in the art within the technical scope disclosed by the present utility model, making equivalent substitutions or changes based on the technical solution and the inventive concept of the present utility model, shall be covered by the protection scope of the present utility model.

Claims

1. Exhaust gas pipeline heating system, characterized in that, Including: An exhaust gas pipeline (1), on both sides of the surface of the exhaust gas pipeline (1), a first connecting arc-shaped block (2) and a second connecting arc-shaped block (3) are respectively arranged; Wherein, a set of external heating components for heating the gas in the exhaust gas pipeline (1) are arranged in both the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3); Two sets of connecting components, both of the two sets of connecting components are arranged between the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3) for fixing the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3) on the surface of the exhaust gas pipeline (1); And an extrusion component used in cooperation with the two sets of connecting components, the extrusion component is used to release the connection between the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3); An internal heating component, the internal heating component is arranged in the exhaust gas pipeline (1) for heating the exhaust gas passing through the exhaust gas pipeline (1).

2. The exhaust gas pipeline heating system according to claim 1, characterized in that Each set of the external heating components includes an arc-shaped groove (18) opened in the first connecting arc-shaped block (2), and a plurality of second resistance heating wires (19) are uniformly fixed in the arc-shaped groove (18).

3. The exhaust gas pipeline heating system according to claim 2, characterized in that, A matching block (10) is fixed at the side end of the second connecting arc-shaped block (3), and a matching groove (9) matching with the matching block (10) is opened at the side end of the first connecting arc-shaped block (2).

4. The exhaust gas pipeline heating system according to claim 3, characterized in that Each set of the connecting components includes a second groove (15) opened in the matching block (10), two clamping blocks (12) slide in the second groove (15), two clamping springs (16) are fixed between the two clamping blocks (12), two clamping grooves (11) communicated with the matching groove (9) are opened in the first connecting arc-shaped block (2), and the two clamping blocks (12) are respectively clamped with the two clamping grooves (11).

5. The exhaust gas pipeline heating system according to claim 4, wherein The extrusion component includes a first groove (4) opened in the second connecting arc-shaped block (3), a pressing block (5) slides in the first groove (4), four extrusion rods (14) are fixed at the side end of the pressing block (5), extrusion grooves (13) are opened in the four clamping blocks (12), the four extrusion rods (14) respectively penetrate into the four extrusion grooves (13) movably, and the four extrusion rods (14) are respectively in extrusion contact with the inclined surfaces of the four extrusion grooves (13).

6. The exhaust gas pipeline heating system according to claim 5, characterized in that, A return spring (17) is fixed at the side end of the pressing block (5), and the side end of the return spring (17) is fixed in the first groove (4).

7. The exhaust gas pipeline heating system according to any one of claims 1-3, characterized in that Two anti-slip pads (6) are fixed on the arc-shaped inner walls of the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3), and the four anti-slip pads (6) are respectively arranged on the upper and lower sides of the arc-shaped inner walls of the first connecting arc-shaped block (2) and the second connecting arc-shaped block (3).

8. The exhaust gas pipeline heating system according to claim 1, characterized in that, The internal heating components each include a guiding block (7) fixed in the exhaust gas pipeline (1), and a plurality of first resistance heating wires (8) are uniformly fixed in the guiding block (7).

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