Detection device for semiconductor production

Abstract

The utility model discloses a detection device for semiconductor production, which comprises a shell, the front surface and the back surface of the shell are fixedly connected with support plates, the upper surfaces of the two support plates are fixedly provided with electric push rods, the telescopic ends of the two electric push rods are fixedly provided with a movable plate together, and the movable plate is fixedly provided with a movable plate. A visual sensor is fixedly installed on the bottom face of the movable plate, and square openings are formed in the front face and the back face of the shell correspondingly. The two electric push rods drive the moving plate to move up and down, the visual sensor can be rapidly adjusted to a proper position, the servo motor drives the two rotating rods and the conveying belt to rotate, and then semiconductors can be continuously conveyed to the position below the visual sensor to be detected. And a forward and reverse motor is arranged to drive a screw rod to rotate, and a screw block, a connecting rod and a push plate can be driven to move forwards, so that unqualified products can be automatically pushed out.

Description

Technical Field

[0001] This application relates to the technical field of semiconductor production, and particularly relates to a detection device for semiconductor production. Background Art

[0002] A semiconductor refers to a material whose electrical conductivity at room temperature is between that of a conductor and an insulator. Semiconductors are used in integrated circuits, consumer electronics, communication systems, photovoltaic power generation, lighting, high-power power conversion and other fields. For example, a diode is a device made of a semiconductor.

[0003] However, the current detection device for semiconductor production cannot continuously detect it. And when detecting unqualified products, it is necessary for staff to take the unqualified products, and it is difficult to automatically eject them, thereby reducing the detection efficiency of semiconductors. For this reason, we propose a detection device for semiconductor production to solve the above problems. Summary of the Utility Model

[0004] The purpose of the present utility model is to provide a detection device for semiconductor production to solve the problems raised in the above background art.

[0005] The embodiments of this application adopt the following technical solutions:

[0006] A detection device for semiconductor production includes a housing. Both the front and the back of the housing are fixedly connected with support plates. Electric push rods are fixedly installed on the upper surfaces of the two support plates. A moving plate is fixedly installed on the telescopic ends of the two electric push rods. A visual sensor is fixedly installed on the bottom surface of the moving plate. Square openings are provided on both the front and the back of the housing. Placing plates are fixedly installed on the inner walls of the two square openings. Two connecting plates are fixedly connected to the upper surface of the housing. A box body is fixedly installed on the left side surfaces of the two connecting plates. A through opening is provided on the bottom surface of the box body. Two first bearings are fixedly embedded in the inner wall of the box body. A screw rod is fixedly connected to the inner rings of the two first bearings. A screw block is threadedly connected to the outer surface of the screw rod. A connecting rod is fixedly installed on the bottom surface of the screw block. A push plate is fixedly installed at the bottom end of the connecting rod. A servo motor is fixedly installed on the back of the housing. Two groups of second bearings are fixedly embedded in the inner wall of the housing. The inner rings of the two groups of second bearings are fixedly connected with rotating rods. A conveyor belt is commonly drivenly connected to the outer surfaces of the two rotating rods. The rear end of one of the rotating rods is fixedly connected to the output end of the servo motor.

[0007] Preferably, an auxiliary plate is fixedly installed on the inner wall of the housing, and the auxiliary plate is located to the left of the conveyor belt.

[0008] Preferably, two groups of support legs are fixedly connected to the bottom surface of the housing, and support seats are fixedly connected to the bottom surfaces of the two groups of support legs.

[0009] Preferably, a PLC controller is fixedly installed on the front surface of the housing, and the rear end of the screw rod is fixedly connected to the output end of the forward and reverse motor.

[0010] Preferably, reinforcing blocks are fixedly installed on the left side surfaces of the two connecting plates, and the outer surfaces of the two reinforcing blocks are fixedly installed on the right side surface of the box body.

[0011] Preferably, a tool bucket is fixedly installed on the back surface of the housing, and the outer surface of the screw block is slidably connected to the inner wall of the through port.

[0012] The above at least one technical solution adopted in the embodiment of the present application can achieve the following beneficial effects:

[0013] For the semiconductor production detection device, by driving the moving plate to move up and down through the two electric push rods provided, the visual sensor can be quickly adjusted to a suitable position. By driving the two rotating rods and the conveyor belt to rotate by the servo motor provided, the semiconductor can be continuously conveyed to the lower part of the visual sensor for detection. By driving the screw rod to rotate by the forward and reverse motor provided, the screw block, the connecting rod and the push plate can be driven to move forward, so that the unqualified products can be automatically pushed out, improving the detection efficiency of the semiconductor. Description of the Drawings

[0014] The drawings described herein are used to provide a further understanding of the present application and constitute a part of the present application. The schematic embodiments of the present application and their descriptions are used to explain the present application and do not constitute an improper limitation to the present application. In the drawings:

[0015] Figure 1 It is: the front view structural schematic diagram of the semiconductor production detection device of the present utility model;

[0016] Figure 2 It is: the side sectional view of the semiconductor production detection device of the present utility model;

[0017] Figure 3 It is: the top sectional view of the semiconductor production detection device of the present utility model;

[0018] Figure 4 It is: the rear view structural schematic diagram of the semiconductor production detection device of the present utility model.

[0019] In the figure: 1. housing; 2. support plate; 3. electric push rod; 4. moving plate; 5. vision sensor; 6. square opening; 7. placement plate; 8. connecting plate; 9. box body; 10. through opening; 11. forward and reverse motor; 12. first bearing; 13. screw rod; 14. screw block; 15. connecting rod; 16. push plate; 17. servo motor; 18. second bearing; 19. rotating rod; 20. conveyor belt; 21. auxiliary plate; 22. PLC controller; 23. support leg; 24. support seat; 25. reinforcement block; 26. tool bucket. Detailed implementation manners

[0020] To make the objectives, technical solutions and advantages of this application clearer, the technical solutions of this application will be clearly and completely described below in conjunction with the specific embodiments of this application and the corresponding drawings. Obviously, the described embodiments are only a part of the embodiments of this application, rather than all of the embodiments. Based on the embodiments in this application, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the scope of protection of this application.

[0021] The following will, with reference to the drawings, detail the technical solutions provided by the embodiments of this application.

[0022] Please refer to Figures 1-4 , the present utility model provides a technical solution for a detection device used in semiconductor production:

[0023] A detection device for semiconductor production, including a housing 1. Both the front and the back of the housing 1 are fixedly connected with support plates 2. Electric push rods 3 are fixedly installed on the upper surfaces of the two support plates 2. The telescopic ends of the two electric push rods 3 are jointly fixedly installed with a moving plate 4. A vision sensor 5 is fixedly installed on the bottom surface of the moving plate 4. Square openings 6 are opened on both the front and the back of the housing 1. Placing plates 7 are fixedly installed on the inner walls of the two square openings 6. Two connecting plates 8 are fixedly connected to the upper surface of the housing 1. A box body 9 is jointly fixedly installed on the left side surfaces of the two connecting plates 8. A through opening 10 is opened on the bottom surface of the box body 9. Two first bearings 12 are fixedly embedded in the inner wall of the box body 9. A screw rod 13 is jointly fixedly connected to the inner rings of the two first bearings 12. A screw block 14 is threadedly connected to the outer surface of the screw rod 13. A connecting rod 15 is fixedly installed on the bottom surface of the screw block 14. A push plate 16 is fixedly installed at the bottom end of the connecting rod 15. A servo motor 17 is fixedly installed on the back of the housing 1. Two groups of second bearings 18 are fixedly embedded in the inner wall of the housing 1. The inner rings of the two groups of second bearings 18 are jointly fixedly connected to a rotating rod 19. A conveyor belt 20 is jointly drivenly connected to the outer surfaces of the two rotating rods 19. The rear end of one of the rotating rods 19 is fixedly connected to the output end of the servo motor 17; Specifically, the vision sensor 5 can be quickly adjusted to a suitable position by the two electric push rods 3. The unqualified products can be automatically pushed out by using the through opening 10, the two first bearings 12, the screw rod 13, the screw block 14, the connecting rod 15 and the push plate 16. The semiconductor can be continuously conveyed below the vision sensor 5 for detection by the servo motor 17, the two groups of second bearings 18, the two rotating rods 19 and the conveyor belt 20;

[0024] In this embodiment, an auxiliary plate 21 is fixedly installed on the inner wall of the housing 1, and the auxiliary plate 21 is located to the left of the conveyor belt 20; Two groups of support legs 23 are fixedly connected to the bottom surface of the housing 1, and support seats 24 are fixedly connected to the bottom surfaces of the two groups of support legs 23; A PLC controller 22 is fixedly installed on the front of the housing 1, and the rear end of the screw rod 13 is fixedly connected to the output end of the forward and reverse motor 11; Specifically, the qualified semiconductors can be assisted in sliding and collecting materials by the auxiliary plate 21. The device can be stably supported by using the two groups of support legs 23 and the two groups of support seats 24. The device can be quickly controlled by the PLC controller 22;

[0025] In this embodiment, reinforcing blocks 25 are fixedly installed on the left side surfaces of the two connecting plates 8, and the outer surfaces of the two reinforcing blocks 25 are fixedly installed with the right side surface of the box body 9; A tool bucket 26 is fixedly installed on the back of the housing 1, and the outer surface of the screw block 14 is slidably connected to the inner wall of the through opening 10; Specifically, the box body 9 can be made more stable by using the two reinforcing blocks 25. Maintenance tools can be placed through the tool bucket 26.

[0026] Working principle: When this detection device for semiconductor production is in use, the user first starts two electric push rods 3 to drive the moving plate 4 to move up and down, adjusts the vision sensor 5 to a suitable detection position, and places the semiconductor in the middle position of the conveyor belt 20. Then, the user starts the servo motor 17 to drive the two rotating rods 19 and the conveyor belt 20 to rotate, continuously conveys the semiconductor under the vision sensor 5 for detection. When unqualified products are detected, the PLC controller 22 electrically controls the servo motor 17 to stop, stops the unqualified products in the middle of the square opening 6, and electrically controls the forward and reverse motor 11 by the PLC controller 22 to drive the screw rod 13 to rotate, drives the screw block 14, the connecting rod 15 and the push plate 16 to move forward, and then the unqualified products can be pushed out.

[0027] It should also be noted that the term "comprising", "including" or any other variation thereof is intended to cover non-exclusive inclusion, so that a process, method, commodity or device comprising a series of elements not only includes those elements, but also includes other elements not expressly listed, or further includes elements inherent to such process, method, commodity or device. Without further limitation, an element defined by the statement "comprising one..." does not exclude the existence of additional identical elements in the process, method, commodity or device comprising said element.

[0028] The above are only the embodiments of the present application and are not used to limit the present application. For those skilled in the art, various changes and modifications can be made to the present application. Any modification, equivalent replacement, improvement, etc. made within the spirit and principle of the present application shall be included within the scope of the claims of the present application.

Claims

1. A detection device for semiconductor production, comprising a housing (1), characterized in that: On both the front and back surfaces of the housing (1), support plates (2) are fixedly connected. On the upper surfaces of the two support plates (2), electric push rods (3) are fixedly installed. The telescopic ends of the two electric push rods (3) are jointly fixedly installed with a moving plate (4). A vision sensor (5) is fixedly installed on the bottom surface of the moving plate (4). Square openings (6) are formed on both the front and back surfaces of the housing (1). On the inner walls of the two square openings (6), placement plates (7) are fixedly installed. Two connecting plates (8) are fixedly connected to the upper surface of the housing (1). On the left side surfaces of the two connecting plates (8), a box body (9) is jointly fixedly installed. A through opening (10) is formed on the bottom surface of the box body (9). Two first bearings (12) are fixedly embedded in the inner wall of the box body (9). The inner rings of the two first bearings (12) are jointly fixedly connected with a screw rod (13). A screw block (14) is threadedly connected to the outer surface of the screw rod (13). A connecting rod (15) is fixedly installed on the bottom surface of the screw block (14). A push plate (16) is fixedly installed at the bottom end of the connecting rod (15). A servo motor (17) is fixedly installed on the back surface of the housing (1). Two groups of second bearings (18) are fixedly embedded in the inner wall of the housing (1). The inner rings of the two groups of second bearings (18) are fixedly connected with rotating rods (19). A conveyor belt (20) is jointly drivenly connected to the outer surfaces of the two rotating rods (19). The rear end of one of the rotating rods (19) is fixedly connected to the output end of the servo motor (17).

2. The inspection device for semiconductor production according to claim 1, wherein: An auxiliary plate (21) is fixedly installed on the inner wall of the housing (1), and the auxiliary plate (21) is located to the left of the conveyor belt (20).

3. The inspection device for semiconductor production according to claim 1, characterized in that: Two groups of support legs (23) are fixedly connected to the bottom surface of the housing (1), and support seats (24) are fixedly connected to the bottom surfaces of the two groups of support legs (23).

4. A detection device for semiconductor production according to claim 1, characterized in that: A PLC controller (22) is fixedly installed on the front surface of the housing (1), and the rear end of the screw rod (13) is fixedly connected to the output end of a reversible motor (11).

5. The inspection device for semiconductor production according to claim 1, characterized in that: Reinforcing blocks (25) are fixedly installed on the left side surfaces of the two connecting plates (8), and the outer surfaces of the two reinforcing blocks (25) are fixedly installed with the right side surface of the box body (9).

6. The inspection device for semiconductor production according to claim 1, characterized in that: A tool bucket (26) is fixedly installed on the back surface of the housing (1), and the outer surface of the screw block (14) is slidably connected to the inner wall of the through opening (10).

Images