Pressure partition type crimping device

Abstract

The utility model belongs to the technical field of semiconductor packaging, and particularly relates to a pressure partition type crimping device, which comprises a pressure head unit, at least two driving units and an upper die holder, the first driving unit comprises a plurality of first pistons for pressing down the pressure head unit, and the second driving unit comprises a plurality of second pistons for pressing down the pressure head unit. The total stress area of the first pistons is larger than that of the second pistons, so that the pressure applied to the pressure head unit by the first driving unit is larger than that applied to the pressure head unit by the second driving unit; the upper die base comprises a top plate, a first middle plate, a second middle plate and a bottom plate which are sequentially connected from top to bottom; according to the utility model, different quantities or different stress areas of the pistons in the driving units are utilized to enable the driving units to apply different pressures to the pressure head unit, so that the pressure partition arrangement of the pressure units is realized, and the packaging requirements of chips with different quantities and sizes can be met.

Description

Technical Field

[0001] The utility model belongs to the technical field of semiconductor packaging, and particularly relates to a pressure-zoned pressing device. Background Art

[0002] When packaging a chip, first place a carrier carrying the chip on a lower mold, and then the pressing head of an upper mold moves downward to apply pressure to the chip. The upper mold generally includes a pressing head for applying pressure to the chip and a driving mechanism for driving the pressing head to move downward. The driving mechanism is generally a piston, and a piston cavity for accommodating the piston and an air cavity communicating with the piston cavity and for ventilation are provided inside the upper mold. Gas enters the piston cavity from the air cavity to drive the piston to move downward, and then drives the pressing head to move downward.

[0003] Each time of packaging, the number and size of chips are different, and the required pressure is also different. However, in the prior art, there is only one set of driving mechanisms, which can only apply the same pressure to the chips and cannot meet the requirement of pressure-zoned setting. Summary of the Utility Model

[0004] The technical problem to be solved by the utility model is to provide a pressure-zoned pressing device to solve the problem that in the pressing device in the prior art, there is only one set of driving mechanisms, which can only apply the same pressure to the chips and cannot perform pressure-zoned setting according to the number and size of chips.

[0005] The technical solution adopted by the utility model to solve its technical problem is: a pressure-zoned pressing device, comprising:

[0006] A pressing head unit;

[0007] At least two driving units, including a first driving unit and a second driving unit. The first driving unit includes a plurality of first pistons for pressing down the pressing head unit, and the second driving unit includes a plurality of second pistons for pressing down the pressing head unit. The total stress area of the plurality of first pistons is greater than the total stress area of the plurality of second pistons so that the pressure applied by the first driving unit to the pressing head unit is greater than the pressure applied by the second driving unit to the pressing head unit;

[0008] And an upper mold base, which includes a top plate, a first intermediate plate, a second intermediate plate and a bottom plate connected in sequence from top to bottom. The top plate and the first intermediate plate enclose a plurality of first piston holes for accommodating the first pistons, and the top plate is provided with a first air cavity communicating with the plurality of first piston holes to drive the first pistons in the first piston holes to move downward when ventilated. The first intermediate plate and the second intermediate plate enclose a plurality of second piston holes for accommodating the second pistons, and the first intermediate plate is provided with a second air cavity for communicating with the second piston holes to drive the second pistons in the second piston holes to move downward when ventilated. The pressing head unit extends downward from the bottom plate.

[0009] Further, the force-bearing area of a single first piston is equal to that of a single second piston, and the number of first pistons is greater than that of second pistons;

[0010] Alternatively, the number of first pistons is equal to that of second pistons, and the force-bearing area of a single first piston is greater than that of a single second piston;

[0011] Alternatively, the force-bearing area of a single first piston is greater than that of a single second piston, and the number of first pistons is greater than that of second pistons.

[0012] Further, it further includes a third driving unit. The third driving unit includes a number of third pistons for pressing down the indenter unit. The first intermediate plate and the second intermediate plate enclose a number of third piston holes for accommodating the third pistons. The first intermediate plate is provided with a third air chamber for communicating with the third piston holes to drive the second pistons in the second piston holes to move downward when ventilated. The force-bearing area of the third piston holes is smaller than that of the second piston holes.

[0013] Further, a first seal for blocking the first air chamber from the outside, a second seal for blocking the second air chamber from the first air chamber, and a third seal for blocking the third air chamber from the first air chamber are installed between the top plate and the first intermediate plate.

[0014] Further, fourth seals are sleeved outside the first piston, the second piston, and the third piston. A depression area is formed by the depression of the central part of the upper end surface of the first intermediate plate. A pressing plate is provided in the depression area. The fourth seal sleeved outside the first piston is pressed between the first intermediate plate and the pressing plate. The fourth seals sleeved outside the second piston and the third piston are pressed between the first intermediate plate and the second intermediate plate.

[0015] Further, a first pressing rod is provided between the first piston and the indenter unit, a second pressing rod is provided between the second piston and the indenter unit, and a third pressing rod is provided between the third piston and the indenter unit. The tops of the first pressing rod, the first pressing rod, and the third pressing rod all protrude upward to form a first arc surface, and the middle parts all concave inward to form a second arc surface;

[0016] A heat insulation plate is provided between the bottom plate and the second intermediate plate. The heat insulation plate is provided with sliding grooves for the first pressing rod, the first pressing rod, and the third pressing rod to slide.

[0017] Further, the heat insulation plate includes a heat insulation area at the central part and a support area at the corner part. The thickness of the support area is greater than that of the heat insulation area. The sliding grooves are opened on the heat insulation area.

[0018] Further, the indenter unit includes a plurality of sub - indenters arranged side by side, and the lower surfaces of the plurality of sub - indenters are joined together to form a pressing surface for pressing the chip.

[0019] Further, each sub - indenter includes an upper pressing block, a lower pressing block and a connecting column located between the two. A connecting plate is provided between the bottom plate and the heat insulation plate. An upper sliding groove for the upper pressing block to slide is formed at the bottom of the connecting plate, and a middle sliding groove for the connecting column to slide and a lower sliding groove communicating with the middle sliding groove and for the lower pressing block to slide are formed in the bottom plate.

[0020] Further, the first intermediate plate protrudes towards the pressing plate to form a plurality of protruding parts. The number of protruding parts corresponds to the sum of the number of the second air chambers and the third air chambers. An air inlet flow channel communicating with the second air chamber or the third air chamber is formed at the central part of each protruding part, and the second seal and the third seal are both installed around the air inlet flow channel;

[0021] The pressing plate includes a plurality of sub - pressing blocks arranged side by side. Depressions are provided on one side of two adjacent sub - pressing blocks close to each other, and two oppositely - arranged depressions are joined together to form an embedding groove for the protruding part to be embedded.

[0022] The beneficial effects of the present utility model are as follows: The present utility model makes the driving units apply different pressures to the indenter unit by different numbers of pistons or different force - bearing areas in each driving unit, thereby realizing the pressure - zone setting of the pressure unit and meeting the packaging requirements of chips with different numbers and sizes.

[0023] Other features and advantages of the present application will become clear through the following detailed description of the exemplary embodiments of the present application with reference to the accompanying drawings. Description of the Drawings

[0024] The present utility model will be further described below in conjunction with the drawings and embodiments.

[0025] Figure 1 is the three - dimensional structure diagram of the present utility model;

[0026] Figure 2 is the top view of the present utility model;

[0027] Figure 3 is Figure 2 the cross - sectional view in the A - A direction of

[0028] Figure 4 is Figure 3 the partial enlarged view of part E in

[0029] Figure 5 is Figure 2 the cross - sectional view in the B - B direction of

[0030] Figure 6 isFigure 5 Partial enlarged view of part F in the middle;

[0031] Figure 7 is Figure 2 Cross-sectional view taken along the C-C direction in the middle;

[0032] Figure 8 is Figure 7 Partial enlarged view of part G in the middle;

[0033] Figure 9 Top view of the present utility model after removing the top plate;

[0034] Figure 10 Top view of the present utility model after removing the top plate, pressure plate and first intermediate plate;

[0035] Figure 11 Structural schematic diagram of the heat insulation plate;

[0036] In the figure:

[0037] 1. Press head unit; 101. Sub-press head; 1011. Upper pressing block; 1012. Lower pressing block; 1013. Connecting column;

[0038] 2. First driving unit; 201. First piston; 202. First pressure rod; 2021. First arc surface; 2022. Second arc surface;

[0039] 3. Second driving unit; 301. Second piston; 302. Second pressure rod;

[0040] 4. Third driving unit; 401. Third piston; 402. Third pressure rod;

[0041] 5. Upper die base; 501. Top plate; 5011. First air cavity; 502. First intermediate plate; 5021. Second air cavity; 5022. Third air cavity; 5023. Protruding part; 5024. Air inlet flow channel; 503. Second intermediate plate; 504. Bottom plate; 5041. Lower sliding groove; 505. First piston hole; 506. Second piston hole; 507. Third piston hole; 508. First seal; 509. Second seal; 510. Third seal; 511. Fourth seal; 512. Pressure plate; 5121. Sub-pressing block; 5122. Embedded groove; 513. Heat insulation plate; 5131. Heat insulation area; 5132. Support area; 514. Connecting plate; 5141. Upper sliding groove. Specific embodiments

[0042] The present utility model will now be described in further detail with reference to the accompanying drawings. These drawings are all simplified schematic diagrams, only showing the basic structure of the present utility model in a schematic manner. Therefore, they only show the components related to the present utility model, and directions and references (such as up, down, left, right, etc.) can only be used to assist in the description of the features in the drawings. Therefore, the following specific embodiments are not adopted in a restrictive sense, and the scope of the claimed subject matter is only defined by the appended claims and their equivalents.

[0043] As Figure 1 and Figure 2 shown, a pressure-zoned crimping device for pressing a chip on a vehicle, which includes:

[0044] A punch unit 1;

[0045] At least two driving units, including a first driving unit 2 and a second driving unit 3. The first driving unit 2 includes a plurality of first pistons 201 for pressing down the punch unit 1, and the second driving unit 3 includes a plurality of second pistons 301 for pressing down the punch unit 1. The total force-bearing area of the plurality of first pistons 201 is greater than the total force-bearing area of the plurality of second pistons 301 so that the pressure exerted by the first driving unit 2 on the punch unit 1 is greater than the pressure exerted by the second driving unit 3 on the punch unit 1;

[0046] And an upper die base 5, which includes a top plate 501, a first intermediate plate 502, a second intermediate plate 503, and a bottom plate 504 connected in sequence from top to bottom. The top plate 501 and the first intermediate plate 502 enclose a plurality of first piston holes 505 for accommodating the first pistons 201, and the top plate 501 is provided with a first air cavity 5011 communicating with the plurality of first piston holes 505 to drive the first pistons 201 in the first piston holes 505 to move down when ventilated;

[0047] The first intermediate plate 502 and the second intermediate plate 503 enclose a plurality of second piston holes 506 for accommodating the second pistons 301, and the first intermediate plate 502 is provided with a second air cavity 5021 for communicating with the second piston holes 506 to drive the second pistons 301 in the second piston holes 506 to move down when ventilated. The first pistons 201 and the second pistons 301 are staggered in the up-down direction, with the first pistons 201 located above and the second pistons 301 located below, and the plurality of first pistons 201 and several second pistons 301 act on the punch unit 1 together. The punch unit 1 extends downward from the bottom plate 504, as Figures 3 - 6 shown.

[0048] The gas enters the first piston hole 505 and the second piston hole 506 through the first air chamber 5011 and the second air chamber 5021 respectively. According to the mechanical calculation formula F = PS, when the total force-bearing area of the plurality of first pistons 201 is larger than the total force-bearing area of the plurality of second pistons 301, the pressure exerted by the first driving unit 2 on the indenter unit 1 is greater than the pressure exerted by the second driving unit 3 on the indenter unit 1. Therefore, the pressure borne by the area of the indenter unit 1 corresponding to the first driving unit 2 is different from the pressure borne by the area of the indenter unit 1 corresponding to the second driving unit 3, such that the pressures exerted on the chip when pressing the chip in the two areas are different, thereby realizing the pressure zoning setting of the pressure unit and meeting the packaging requirements for chips of different quantities and sizes.

[0049] In some examples, the force-bearing area of a single first piston 201 is equal to the force-bearing area of a single second piston 301, and the number of first pistons 201 is greater than the number of second pistons 301;

[0050] Or, the number of first pistons 201 is equal to the number of second pistons 301, and the force-bearing area of a single first piston 201 is larger than the force-bearing area of a single second piston 301;

[0051] Or, the force-bearing area of a single first piston 201 is larger than the force-bearing area of a single second piston 301, and the number of first pistons 201 is greater than the number of second pistons 301,

[0052] In some examples, such as Figure 7 、 Figure 8 and Figure 10 shown, it further includes a third driving unit 4. The third driving unit 4 includes a number of third pistons 401 for pressing down the indenter unit 1. The first intermediate plate 502 and the second intermediate plate 503 enclose a number of third piston holes 507 for accommodating the third pistons 401, and the first intermediate plate 502 is provided with a third air chamber 5022 for communicating with the third piston holes 507 to drive the third pistons 401 in the third piston holes 507 to move downward when ventilated. The force-bearing area of a single third piston hole 507 is smaller than the force-bearing area of the second piston hole 506. On the premise that the number of pistons is certain, the pressure exerted by the third driving unit 4 on the indenter unit 1 is less than the pressure exerted by the second driving unit 3 on the indenter unit 1. At this time, the indenter unit 1 can output three kinds of pressures. Of course, a fourth driving unit, a fifth driving unit, etc. can also be set to output more different pressures by changing the number of pistons or the force-bearing area of the pistons.

[0053] In some examples, such as Figure 6 、 Figure 8 and Figure 9As shown, a first seal 508 for blocking the first air chamber 5011 from the outside, a second seal 509 for blocking the second air chamber 5021 from the first air chamber 5011, and a third seal 510 for blocking the third air chamber 5022 from the first air chamber 5011 are installed between the top plate 501 and the first intermediate plate 502. The first air chamber 5011 is located inside the first seal 508, the second air chamber 5021 is located below the second seal 509, and the third air chamber 5022 is located below the third seal 510. The first seal 508, the second seal 509, and the third seal 510 can be, but are not limited to, O-ring seals. The sealing effects of the first air chamber 5011, the second air chamber 5021, and the second air chamber 5021 can be improved by these three seals.

[0054] In some examples, such as Figure 4 , Figure 6 and Figure 8 shown, a fourth seal 511 is sleeved outside each of the first piston 201, the second piston 301, and the third piston 401. The fourth seal 511 can be, but is not limited to, an O-ring seal;

[0055] A recessed area is formed by the depression at the center of the upper end surface of the first intermediate plate 502. A pressing plate 512 is provided in the recessed area. The first intermediate plate 502 is provided with a sealing groove for installing the fourth seal 511 sleeved outside the first piston 201. The fourth seal 511 is pressed between the first intermediate plate 502 and the pressing plate 512. The pressing plate 512 can press the fourth seals 511 outside a plurality of first pistons 201 at the same time, improving the installation efficiency of the fourth seals 511;

[0056] The second intermediate plate 503 is also provided with a sealing groove for installing the fourth seal 511 sleeved outside the second piston 301 and the fourth seal 511 sleeved outside the third piston 401. The fourth seal 511 is pressed between the first intermediate plate 502 and the second intermediate plate 503.

[0057] In some examples, such as Figure 6 and Figure 8 shown, a first pressure rod 202 is provided between the first piston 201 and the pressing head unit 1, a second pressure rod 302 is provided between the second piston 301 and the pressing head unit 1, and a third pressure rod 402 is provided between the third piston 401 and the pressing head unit 1. The tops of the first pressure rod 202, the first pressure rod 202, and the third pressure rod 402 are all convex to form a first arc surface 2021, and the middle parts are all concave to form a second arc surface 2022. The first pressure rod 202, the second pressure rod 302, and the third pressure rod 402 respectively transmit the pressures received by the first piston 201, the second piston 301, and the third piston 401 to the pressing head unit 1;

[0058] A heat insulating plate 513 is provided between the bottom plate 504 and the second middle plate 503. The heat insulating plate 513 is made of a material with a low thermal conductivity coefficient and is used to isolate the heat generated by the sintering of the chip. The heat insulating plate 513 is provided with a slide groove for the first pressure rod 202, the first pressure rod 202 and the third pressure rod 402 to slide. The pressure rod can reduce its contact area with the piston through the first curved surface 2021, and at the same time reduce its contact area with the heat insulating plate 513 through the second curved surface 2022, thereby reducing heat transfer and making the fourth seal 511 not prone to high temperature aging.

[0059] In some examples, such as Figure 11 As shown, the heat insulation board 513 includes a heat insulation area 5131 located at the center and a support area 5132 located at the corner, the slide groove is opened on the heat insulation area 5131, the thickness of the support area 5132 is greater than the thickness of the heat insulation area 5131, and the area of the support area 5132 is smaller than the area of the heat insulation area 5131, the support area 5132 is supported between the bottom plate 504 and the second middle plate 503, and the heat insulation area 5131 is separated from the bottom plate 504, thereby further reducing the heat transfer;

[0060] In some examples, such as Figure 1 As shown, the pressure head unit 1 includes a plurality of sub-pressure heads 101 arranged side by side, and the lower surfaces of the plurality of sub-pressure heads 101 are pieced together to form a pressure surface for applying pressure to the chip. The pressure head unit 1 generally applies pressure to the chip through a film material covering the chip. The split pressure surface can reduce the uneven pressure phenomenon caused by the unevenness of the film material and improve the packaging quality of the chip.

[0061] In some examples, such as Figure 3 As shown, each sub-pressing head 101 includes an upper pressing block 1011, a lower pressing block 1012 and a connecting column 1013 located therebetween, forming an I-shaped structure, and the lower pressing blocks 1012 of two adjacent sub-pressing heads 101 have a protrusion or a depression on one side close to each other, so that the two adjacent lower pressing blocks 1012 form a nested structure.

[0062] A connecting plate 514 is provided between the bottom plate 504 and the heat insulation plate 513, and an upper sliding groove 5141 is provided at the bottom of the connecting plate 514 for the upper pressure block 1011 to slide. The bottom plate 504 is provided with a middle sliding groove for the connecting column 1013 to slide and a lower sliding groove 5041 connected with the middle sliding groove and for the lower pressure block 1012 to slide.

[0063] In some examples, such as Figure 6 and Figure 8As shown, a plurality of protruding portions 5023 are formed on the first intermediate plate 502 protruding towards the pressing plate 512. The number of the protruding portions 5023 corresponds to the sum of the numbers of the second air chamber 5021 and the third air chamber 5022. An air inlet flow channel 5024 communicating with the second air chamber 5021 or the third air chamber 5022 is provided at the central portion of each protruding portion 5023. A sliding groove is provided around each air inlet flow channel 5024 for installing the second seal 509 or the third seal 510. After the gas is split from the air inlet flow channel 5024 and enters the second air chamber 5021 and the third air chamber 5022, the gas in the second air chamber 5021 enters the second piston hole 506 to drive the second piston 301 to move downward, and the gas in the third air chamber 5022 enters the third piston hole 507 to drive the third piston 401 to move downward.

[0064] As Figure 9 shown, the pressing plate 512 includes a plurality of sub-pressing blocks 5121 arranged side by side. Concavities are provided on the sides of two adjacent sub-pressing blocks 5121 close to each other. Two oppositely arranged concavities are combined to form an embedding groove 5122 for the protruding portion 5023 to be embedded.

[0065] Now, taking a crimping device with three driving units as an example to illustrate the working principle:

[0066] First, the compressed gas enters the first piston hole 505, the second piston hole 506 and the third piston hole 507 through the first air chamber 5011, the second air chamber 5021 and the third air chamber 5022 respectively, and pushes the first piston 201, the second piston 301 and the third piston 401 to move downward synchronously. The first piston 201 pushes the first pressure rod 202 to move downward, the second piston 301 pushes the second pressure rod 302 to move downward, and the third piston 401 pushes the third pressure rod 402 to move downward. The first pressure rod 202, the first pressure rod 202 and the third pressure rod 402 act on the pressing head unit 1 simultaneously, thereby driving the pressing head unit 1 to apply pressure to the chip;

[0067] The force-bearing area of the first piston 201 is larger than that of the second piston 301 (here is the comparison between single pistons), and the number of the first pistons 201 is larger than that of the second pistons 301. According to the mechanical calculation formula F = PS, the larger the force-bearing area of a single piston and the more the number of pistons, the larger the total force-bearing area and the greater the pressure. Therefore, the pressure in the area corresponding to the pressing head unit 1 and the first driving unit 2 is greater than the pressure in the area corresponding to the pressing head unit 1 and the second driving unit 3;

[0068] Meanwhile, the force-bearing area of the third piston 401 is smaller than that of the second piston 301 (this is also a comparison between individual pistons), and the number of the third pistons 401 is equal to that of the second pistons 301. On the premise that the number of pistons is fixed, the larger the force-bearing area of an individual piston, the larger the total force-bearing area and the greater the pressure. Therefore, the pressure in the corresponding area between the indenter unit 1 and the second driving unit 3 is greater than the pressure in the corresponding area between the indenter unit 1 and the third driving unit 4. At this time, the indenter unit 1 can output three kinds of pressures.

[0069] Based on the ideal embodiments of the present invention as the inspiration, through the above description, relevant staff can completely make various changes and modifications without departing from the technical idea of this invention. The technical scope of this invention is not limited to the content in the specification, and its technical scope must be determined according to the scope of the claims.

Claims

1. A pressure-zoned crimping device, characterized in that: Comprising: A punch unit (1); At least two driving units, including a first driving unit (2) and a second driving unit (3). The first driving unit (2) includes a plurality of first pistons (201) for pressing down the punch unit (1), and the second driving unit (3) includes a plurality of second pistons (301) for pressing down the punch unit (1). The total force-bearing area of the plurality of first pistons (201) is greater than the total force-bearing area of the plurality of second pistons (301) so that the pressure exerted by the first driving unit (2) on the punch unit (1) is greater than the pressure exerted by the second driving unit (3) on the punch unit (1); And an upper die holder (5), which includes a top plate (501), a first intermediate plate (502), a second intermediate plate (503) and a bottom plate (504) connected in sequence from top to bottom. The top plate (501) and the first intermediate plate (502) enclose a plurality of first piston holes (505) for accommodating the first pistons (201), and the top plate (501) is provided with a first air cavity (5011) communicating with the plurality of first piston holes (505) to drive the first pistons (201) in the first piston holes (505) to move down when ventilated. The first intermediate plate (502) and the second intermediate plate (503) enclose a plurality of second piston holes (506) for accommodating the second pistons (301), and the first intermediate plate (502) is provided with a second air cavity (5021) for communicating with the second piston holes (506) to drive the second pistons (301) in the second piston holes (506) to move down when ventilated. The punch unit (1) extends downward from the bottom plate (504).

2. The pressure-zoned crimping device according to claim 1, characterized in that: The force-bearing area of a single first piston (201) is equal to the force-bearing area of a single second piston (301), and the number of first pistons (201) is greater than the number of second pistons (301); Or, the number of first pistons (201) is equal to the number of second pistons (301), and the force-bearing area of a single first piston (201) is greater than the force-bearing area of a single second piston (301); Or, the force-bearing area of a single first piston (201) is greater than the force-bearing area of a single second piston (301), and the number of first pistons (201) is greater than the number of second pistons (301).

3. The pressure-zoned crimping device according to claim 1, wherein: It further includes a third driving unit (4). The third driving unit (4) includes a number of third pistons (401) for pressing down the punch unit (1). The first intermediate plate (502) and the second intermediate plate (503) enclose a plurality of third piston holes (507) for accommodating the third pistons (401), and the first intermediate plate (502) is provided with a third air cavity (5022) for communicating with the third piston holes (507) to drive the third pistons (401) in the third piston holes (507) to move down when ventilated. The force-bearing area of the third piston holes (507) is smaller than the force-bearing area of the second piston holes (506).

4. The pressure zoning type crimping device according to claim 3, wherein: A first seal (508) for blocking the first air cavity (5011) from the outside, a second seal (509) for blocking the second air cavity (5021) from the first air cavity (5011), and a third seal (510) for blocking the third air cavity (5022) from the first air cavity (5011) are installed between the top plate (501) and the first intermediate plate (502).

5. The pressure-zoned crimping device according to claim 4, wherein: A fourth seal (511) is sleeved outside each of the first piston (201), the second piston (301), and the third piston (401); A depression area is formed by the depression of the central part of the upper end surface of the first intermediate plate (502). A pressing plate (512) is arranged in the depression area. The fourth seal (511) sleeved outside the first piston (201) is pressed between the first intermediate plate (502) and the pressing plate (512). The fourth seal (511) sleeved outside the second piston (301) and the fourth seal (511) sleeved outside the third piston (401) are pressed between the first intermediate plate (502) and the second intermediate plate (503).

6. The pressure-zoned crimping device according to claim 3, characterized in that: A first pressure rod (202) is arranged between the first piston (201) and the pressing head unit (1), a second pressure rod (302) is arranged between the second piston (301) and the pressing head unit (1), and a third pressure rod (402) is arranged between the third piston (401) and the pressing head unit (1). The tops of the first pressure rod (202), the first pressure rod (202), and the third pressure rod (402) all protrude upward to form a first arc surface (2021), and the middle parts of them all concave inward to form a second arc surface (2022); A heat insulation plate (513) is arranged between the bottom plate (504) and the second intermediate plate (503). The heat insulation plate (513) is provided with sliding grooves for the first pressure rod (202), the first pressure rod (202), and the third pressure rod (402) to slide through.

7. The pressure-zoned crimping device according to claim 6, characterized in that: The heat insulation plate (513) includes a heat insulation area (5131) at the central part and a support area (5132) at the corner part. The thickness of the support area (5132) is greater than that of the heat insulation area (5131). The sliding grooves are opened on the heat insulation area (5131).

8. A pressure-zoned crimping device according to claim 1, characterized in that: The pressing head unit (1) includes a plurality of sub-pressing heads (101) arranged side by side, and the lower surfaces of the plurality of sub-pressing heads (101) are combined to form a pressing surface for pressing the chip.

9. The pressure-zoned crimping device according to claim 8, wherein: Each sub-pressing head (101) includes an upper pressing block (1011), a lower pressing block (1012), and a connecting column (1013) located between the two. A connecting plate (514) is arranged between the bottom plate (504) and the heat insulation plate (513). The upper part of the connecting plate (514) is provided with an upper sliding groove (5141) for the upper pressing block (1011) to slide through. The bottom plate (504) is provided with a middle sliding groove for the connecting column (1013) to slide through and a lower sliding groove (5041) communicated with the middle sliding groove and for the lower pressing block (1012) to slide through.

10. A pressure-zoned crimping device according to claim 5, characterized in that: The first intermediate plate (502) is convex in the direction of the pressing plate (512) to form a plurality of protruding portions (5023). The number of the protruding portions (5023) corresponds to the sum of the numbers of the second air cavity (5021) and the third air cavity (5022). An air inlet flow channel (5024) communicating with the second air cavity (5021) or the third air cavity (5022) is provided at the central part of each protruding portion (5023). The second seal (509) and the third seal (510) are both installed around the air inlet flow channel (5024); The pressing plate (512) includes a plurality of sub-pressing blocks (5121) arranged side by side. One side of two adjacent sub-pressing blocks (5121) close to each other has a depression, and two oppositely arranged depressions are combined to form a slot (5122) for the protruding portion (5023) to be embedded.

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