Positioning jig
By designing positioning fixtures and using the combination of brackets and adjustment parts, the rapid and accurate alignment of racks in semiconductor manufacturing is achieved, and the problems of positioning accuracy deviation and long debugging time in the prior art are solved, thereby improving operational efficiency and maintenance convenience.
Patent Information
- Application Number
- CN202421972984.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-08-15
- Publication Date
- 2025-07-22
- Estimated Expiration
- 2034-08-15
AI Technical Summary
In the prior art, the alignment tools used in semiconductor manufacturing have problems such as deviation in positioning accuracy and long debugging time, which leads to inconvenient rack replacement and maintenance and affects the operation of the equipment.
A positioning fixture is designed, including a bracket, a fixing member, a positioning member and an adjusting member. A semi-enclosed structure is formed through the bracket. The protruding teeth of the positioning member are adapted to the rack groove. The adjusting member drives the positioning member to move in the rack direction to achieve rapid and accurate alignment.
It improves the accuracy and efficiency of rack alignment, reduces debugging time, is easy to repair and maintain, and reduces maintenance costs.
Smart Images
Figure CN223140747U_ABST
Abstract
Description
Technical Field
[0001] This application relates to the field of semiconductor manufacturing technology, and particularly to a positioning jig. Background Art
[0002] Today, with the rapid development of the semiconductor industry, intelligent warehousing and handling have emerged as the times require. The handling manipulator adopts a roller rack mechanism. Due to the long track, the corresponding transmission racks are also increased in number and length, and more than a dozen racks need to be connected together for use. In order to ensure the alignment and installation accuracy between the racks, a positioning tool is required for inspection and adjustment. This positioning tool can be manually clamped and fixed at the joint of two racks, and the two racks are fixed by pressing the steel block on the cylinder of the positioning tool.
[0003] Although this method is relatively simple, due to the need to manually press the positioning tool, there will be deviations in the inspection accuracy, and repeated debugging is required, resulting in a long debugging time. After the alignment is completed, a micrometer needs to be used to confirm repeatedly, which will consume a lot of time and energy. In addition, the racks need to be replaced after a certain period of use. Each time they are replaced, they need to be realigned, and then the accuracy is confirmed with a micrometer. The time for confirming the accuracy is relatively long, usually more than one day. For the replacement and maintenance of the racks, using the existing manual positioning tool for alignment takes a long time and is not convenient for maintenance. If the installation accuracy of the racks does not meet the design standard, noise and vibration will be generated, which will have a great impact on the equipment and products. Summary of the Utility Model
[0004] In view of the above-mentioned disadvantages of the prior art, the purpose of this application is to provide a positioning jig, which is used to improve the problems of deviation in the positioning accuracy of the positioning tool and long debugging time in the prior art.
[0005] An embodiment of this application provides a positioning jig for aligning between two adjacent racks, including: a bracket, the bracket is configured such that at least one bottom surface can be erected on the surface of the rack, and the bracket forms a semi-enclosing structure; a fixing member, both ends of the fixing member are fixedly connected to both ends of the bracket, forming an enclosing structure with the bracket, and a through hole is provided on the fixing member; a positioning member, both ends of the positioning member are slidably connected to the bracket, a blind hole is provided on the positioning member, the blind hole corresponds to the position of the through hole, at least two convex teeth are provided at the bottom of the positioning member, and the convex teeth are adapted to the grooves of the rack for respectively being clamped on the two racks; an adjusting member, the adjusting member passes through the through hole from the outside of the enclosing structure into the blind hole, and is configured to drive the positioning member to move in a direction perpendicular to the rack.
[0006] In some embodiments, the height of the convex teeth is not greater than the width of the groove of the rack.
[0007] In some embodiments, the convex teeth are symmetrically arranged on both sides of the positioning member.
[0008] In some embodiments, the bracket includes a first part, a second part, and a third part that are integrally connected. The first part and the second part are arranged opposite to each other. The third part is located between the ends of the first part and the second part. The bottom surface of the third part is used to be erected on the surface of the rack.
[0009] In some embodiments, the first part and the second part of the bracket respectively include a first protrusion and a second protrusion that are higher than the third part. The first protrusion and the second protrusion are respectively provided with a first groove and a second groove. The first groove and the second groove are arranged opposite to each other. The two ends of the positioning member respectively slide along the first groove and the second groove.
[0010] In some embodiments, the two ends of the positioning member respectively include a convex portion. The convex portion is adapted to the first groove and the second groove, and is used to be clamped in the first groove and the second groove and slide along the first groove and the second groove.
[0011] In some embodiments, the positioning member and the fixing member are parallel to the third part, and the blind hole and the through hole are respectively located in the middle of the positioning member and the fixing member.
[0012] In some embodiments, the adjusting member includes a lead screw and a bearing. The inner wall of the through hole is provided with an internal thread, which is matched with the external thread of the lead screw. The bearing is arranged in the blind hole and sleeved on the lead screw to enable the lead screw to rotate smoothly.
[0013] In some embodiments, a bearing retaining ring is arranged on the outer surface of the bearing outer ring.
[0014] As described above, the positioning jig of the present application has the following beneficial effects: The positioning jig includes: a bracket, a fixing member, a positioning member, and an adjusting member. Among them, the two ends of the fixing member are fixedly connected to the two ends of the bracket, forming an enclosing structure with the bracket, and a through hole is provided on the fixing member, and a blind hole corresponding to the position of the through hole is provided on the positioning member. The two ends of the positioning member are respectively slidably connected to the bracket. At least two convex teeth are provided at the bottom of the positioning member, and the convex teeth are adapted to the grooves of the rack to be respectively clamped on two adjacent racks. The adjusting member passes through the through hole from the outside of the enclosing structure to the blind hole, driving the positioning member to move in a direction perpendicular to the rack to clamp two adjacent racks for positioning. The positioning jig of the present application improves the problems of deviation in the positioning accuracy of the alignment tool and long debugging time in the prior art, can quickly position, and improves the operation efficiency. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] The following drawings detail exemplary embodiments disclosed in the present application. Wherein the same reference numerals denote similar structures in several views of the drawings. Those of ordinary skill in the art will understand that these embodiments are non - restrictive, exemplary embodiments, and the drawings are for illustrative and descriptive purposes only and are not intended to limit the scope of the present application. Embodiments in other ways may also achieve the inventive concept in the present application. It should be understood that the drawings are not drawn to scale.
[0016] Wherein:
[0017] Figure 1 is a perspective view of a positioning jig according to some embodiments of the present application;
[0018] Figure 2 is Figure 1 an exploded view of the shown positioning jig;
[0019] Figure 3 is a schematic view of a rack positioned using the Figure 1 positioning jig in;
[0020] Figure 4 is a schematic view of the positioning jig installed on the rack according to some embodiments of the present application;
[0021] Figure 5 is an exploded schematic view of the positioning jig installed on the rack according to some embodiments of the present application. Detailed Description of the Specific Embodiment
[0022] The following description provides specific application scenarios and requirements of the present application, aiming to enable those skilled in the art to manufacture and use the content in the present application. For those skilled in the art, various partial modifications to the disclosed embodiments are obvious, and without departing from the spirit and scope of the present application, the general principles defined here can be applied to other embodiments and applications. Therefore, the present application is not limited to the shown embodiments, but to the broadest scope consistent with the claims.
[0023] As Figure 1 and Figure 2 shown, in combination with Figure 3, an embodiment of the present application provides a positioning jig 1 for aligning adjacent racks 2, including: a bracket 11 configured such that at least one bottom surface can be mounted on the surface of the rack 2, and the bracket 11 forms a semi-enclosing structure; a fixing member 12, with both ends of the fixing member 12 fixedly connected to both ends of the bracket 11, forming an enclosing structure with the bracket 11, and a through hole 121 is provided on the fixing member 12; a positioning member 13, with both ends of the positioning member 13 slidably connected to the bracket 11 respectively, a blind hole 131 is provided on the positioning member 13, the blind hole 131 corresponds to the position of the through hole 121, and at least two convex teeth 132 are provided at the bottom of the positioning member 13, the convex teeth 132 are adapted to the grooves of the rack 2 for respectively being clamped on adjacent racks 2; an adjusting member 14, the adjusting member 14 passes through the through hole 121 from the outside of the enclosing structure into the blind hole 131, and is configured to drive the positioning member 13 to move in a direction perpendicular to the rack 2. The bracket 11 and the fixing member 12 are respectively provided with corresponding bolt holes, and are fixedly connected together by fixing member bolts 122 to form a frame, the positioning member 13 is arranged in the middle of the frame, and the adjusting member 14 drives the positioning member 13 to move within the frame to fasten adjacent two racks 2 so as to align the two racks 2.
[0024] As Figure 3 shown, a number of racks 2 need to be connected, the racks 2 are placed on a base 3, and the racks 2 are fixed with rack screws 21. Among them, the x direction is the length direction of the rack 2, the y direction is the width direction of the rack 2, and the z direction is the thickness direction of the rack 2. The rack 2 needs to be replaced after being used for a certain period of time. Each time it is replaced, the positioning jig 1 needs to be used for alignment, and then a dial indicator 4 (see Figure 4 ) is placed at the corresponding positions of two adjacent racks 2 for measurement to confirm whether the accuracy meets the requirements. The time for confirming the accuracy is relatively long, usually more than 1 day. Calibration and adjustment are required for initial installation and replacement of the rack 2. After the rack 2 is installed, noise tests and vibration tests will also be carried out. The tests need to meet the standards. If they do not meet the standards, noise and vibration will occur when the rack 2 meshes with a gear (not shown).
[0025] As Figure 4 shown, in combination with Figure 2 , in some embodiments, the convex teeth 132 are symmetrically arranged on both sides of the positioning member 13. Preferably, two convex teeth 132 are symmetrically arranged on each side of the positioning member 13, and the two convex teeth 132 on each side can respectively clamp a rack 2.
[0026] In some embodiments, the bracket includes a first part 111, a second part 112 and a third part 113 connected in an integral manner, the first part 111 and the second part 112 are arranged opposite to each other, the third part 113 is located between the ends of the first part 111 and the second part 112, and the bottom surface 1131 of the third part is used to be mounted on the surface of the rack 2, and cooperates with the convex teeth 132 to limit the position of the rack 2 in the z direction. In some embodiments, the height of the convex teeth 132 is not greater than the width of the groove of the rack 2. The convex teeth 132 are smaller than the width of the rack 2, and cooperate with the base 3 so that the bottom surface 1113 of the first part of the bracket 11 of the positioning fixture 1 and the bottom surface 1123 of the second part 112 can be mounted on the rack 2, and limit the rack 2 in the y direction. The base 3, the bottom surface 1113 of the first part, the bottom surface 1123 of the second part 112, the bottom surface 1131 of the third part and the convex teeth 132 work together to limit and fix the rack 2.
[0027] In some embodiments, the first part 111 and the second part 112 of the bracket 11 respectively include a first protrusion 1111 and a second protrusion 1121 higher than the third part 113, the first protrusion 1111 and the second protrusion 1121 are respectively provided with a first groove 1112 and a second groove 1122, the first groove 1112 and the second groove 1122 are arranged opposite to each other, and the two ends of the positioning member 13 slide along the first groove 1112 and the second groove 1122 respectively. In some embodiments, the two ends of the positioning member 13 respectively include a protrusion 133, the protrusion 133 is adapted to the first groove 1112 and the second groove 1122, and is used to be clamped in the first groove 1112 and the second groove 1122, and slide along the first groove 1112 and the second groove 1122. The positioning member 13 can slide on the bracket 11 driven by the adjusting member 14 to fasten two adjacent racks 2.
[0028] In some embodiments, the positioning member 13 and the fixing member 12 are parallel to the third portion 113, and the blind hole 131 and the through hole 121 are respectively located between the positioning member 13 and the fixing member 12. Therefore, the adjusting member 14 can pass through the fixing member 12 and hold the positioning member 13 to fix the rack 2, evenly clamping the joints of two adjacent racks 2 that need to be positioned, and due to the blocking effect of the blind hole 131, the positioning member 13 can hold two adjacent racks 2 at the same time, so that the positioning member 13 and the fixing member 12 clamp the two adjacent racks 2 together.
[0029] In some embodiments, the adjusting member 14 includes a lead screw 141 and a bearing 142. The inner wall of the through hole 121 is provided with an internal thread, which cooperates with the external thread of the lead screw 141. The bearing 142 is arranged in the blind hole 131 and sleeved outside the lead screw 141, so that the lead screw 141 can rotate smoothly. The bearing 142 can reduce the friction coefficient during the rotation of the lead screw 141, and maintain the rotation accuracy and smoothness of the lead screw 141. The lead screw 141 rotates in the bearing 142 in the blind hole 131 of the positioning member 13, and the through hole 121 and the lead screw 141 cooperate to enable the positioning member 13 to accurately clamp two adjacent racks 2.
[0030] In some embodiments, a bearing retaining ring 143 is disposed on the outer ring surface of the bearing 142. The bearing retaining ring 143 is used to maintain the correct position of the bearing 142, prevent the bearing 142 from being displaced or loosened during operation, play a role in protecting the bearing 142, and can also effectively reduce the damage of the bearing 142 caused by excessive operating load.
[0031] like Figure 4 and Figure 5 As shown, when installing and debugging the rack, first place two adjacent racks 2 on the base 3, use bolts 21 to pre-install the racks 2, do not tighten the bolts 21, and then place the positioning fixture 1 between the two racks 2 to ensure that the positioning fixture 1 is tightly engaged with the rack 2. Next, adjust the screw 141 to tighten the positioning member 13 so that the two adjacent racks 2 are accurately aligned. Then use the micrometer 4 to measure at the symmetrical positions of the two racks 2 to ensure that the accuracy meets the requirements. Finally, tighten the bolts 21 on the rack 2 to fix the position of the rack 2. In this way, it is possible to quickly align and ensure that the accuracy and position between the racks are consistent. In order to confirm whether the position is aligned, a micrometer is used for measurement. Preferably, the parallelism between the racks does not exceed ±0.02mm. Using the positioning fixture 1 and the above method to position all racks is highly accurate and time-saving.
[0032] The beneficial effects that may be brought about by the embodiments of the present application include, but are not limited to: the positioning fixture of the present application utilizes the meshing characteristics of the convex teeth and the rack, and can quickly align two adjacent racks by adjusting the screw to tighten the positioning piece of the positioning fixture, and ensure the accuracy and position consistency between the racks. Therefore, the positioning fixture of the present application solves the problem of deviation in the positioning accuracy of the alignment tool in the prior art, and can also quickly locate and clamp the alignment, improve operating efficiency, and enhance the efficiency of positioning operations. In addition, the positioning fixture of the present application is easy to repair and maintain later, reducing maintenance costs and time.
[0033] It should be noted that different embodiments may produce different beneficial effects. In different embodiments, the beneficial effects that may be produced may be any one or a combination of the above, or any other beneficial effects that may be obtained.
[0034] The basic concepts have been described above. Obviously, for those skilled in the art, the above detailed disclosure is only an example and does not constitute a limitation to this specification. Although not explicitly stated here, those skilled in the art may make various modifications, improvements, and corrections to this application. Such modifications, improvements, and corrections are suggested in this specification, so such modifications, improvements, and corrections still fall within the spirit and scope of the exemplary embodiments of this application.
[0035] It should be noted that in the description of this application, unless otherwise clearly specified and limited, the terms "installed", "connected", "connected to", and "fixed" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection or an electrical connection; it can be a rotational connection or a sliding connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two components or the interaction relationship between two components. For those of ordinary skill in the art, the specific meanings of the above terms in this application can be understood in combination with specific situations.
[0036] In addition, when terms such as "first", "second", "third", etc. are used in this application specification to describe various features, these terms are only used to distinguish these features and cannot be understood as indicating or implying the relevance, relative importance, or implicitly indicating the number of the indicated features.
[0037] In addition, this application specification describes exemplary embodiments by referring to idealized exemplary cross-sectional views and / or plan views and / or three-dimensional views. Therefore, differences from the illustrated shapes due to, for example, manufacturing techniques and / or tolerances are foreseeable. Therefore, the exemplary embodiments should not be construed as limited to the shapes of the regions shown here, but should include deviations in the shapes caused by, for example, manufacturing. Therefore, the regions shown in the figures are substantially schematic, and their shapes are not for showing the actual shapes of the regions of the device nor for limiting the scope of the exemplary embodiments.
[0038] At the same time, this application uses specific words to describe the embodiments of this specification. Such as "one embodiment", "an embodiment", and / or "some embodiments" mean a certain feature, structure, or characteristic related to at least one embodiment of this application. Therefore, it should be emphasized and noted that the "one embodiment" or "an embodiment" or "an alternative embodiment" mentioned twice or more at different positions in this application does not necessarily refer to the same embodiment. In addition, certain features, structures, or characteristics in one or more embodiments of this application can be appropriately combined.
[0039] Similarly, it should be noted that, in order to simplify the description disclosed in this application and thus help the understanding of one or more embodiments of the invention, in the foregoing description of the embodiments of this application, sometimes multiple features are merged into one embodiment, drawing or description thereof. However, this method of disclosure does not mean that the features required by the subject matter of this application are more than those mentioned in the claims. In fact, the features of the embodiments are fewer than all the features of the single embodiments disclosed above.
[0040] Finally, it should be understood that the embodiments described in this application are only used to illustrate the principles of the embodiments of this application. Other variations may also fall within the scope of this application. Therefore, by way of example and not limitation, alternative configurations of the embodiments of this application may be regarded as consistent with the teachings of this application. Accordingly, the embodiments of this application are not limited to the embodiments explicitly introduced and described in this application.
Claims
1. A positioning jig for aligning between two adjacent racks, characterized in that Comprising: A bracket configured such that at least one bottom surface can be erected on the surface of the rack, and the bracket forms a semi-enclosing structure; A fixing member, both ends of which are fixedly connected to both ends of the bracket, forming an enclosing structure with the bracket, and a through hole is provided on the fixing member; A positioning member, both ends of which are respectively slidably connected to the bracket, a blind hole is provided on the positioning member, the blind hole corresponds to the position of the through hole, at least two convex teeth are provided at the bottom of the positioning member, and the convex teeth are adapted to the grooves of the rack for respectively being clamped on two of the racks; An adjusting member passing from the outside of the enclosing structure through the through hole into the blind hole and configured to drive the positioning member to move in a direction perpendicular to the rack.
2. The positioning jig according to claim 1, wherein The height of the convex teeth is not greater than the width of the groove of the rack.
3. The positioning jig according to claim 2, wherein The convex teeth are symmetrically arranged on both sides of the positioning member.
4. The positioning jig according to claim 1, wherein The bracket includes a first part, a second part and a third part integrally connected. The first part and the second part are arranged oppositely, the third part is located between the ends of the first part and the second part, and the bottom surface of the third part is used for being erected on the surface of the rack.
5. The positioning jig according to claim 4, wherein The first part and the second part of the bracket respectively include a first protruding part and a second protruding part higher than the third part. The first protruding part and the second protruding part are respectively provided with a first groove and a second groove. The first groove and the second groove are arranged oppositely, and both ends of the positioning member respectively slide along the first groove and the second groove.
6. The positioning jig according to claim 5, wherein Both ends of the positioning member respectively include a protruding part, and the protruding part is adapted to the first groove and the second groove for being clamped in the first groove and the second groove and sliding along the first groove and the second groove.
7. The positioning jig according to claim 5, wherein, The positioning member and the fixing member are parallel to the third part, and the blind hole and the through hole are respectively located in the middle of the positioning member and the fixing member.
8. The positioning jig according to claim 1, wherein The adjusting member includes a lead screw and a bearing. The inner wall of the through hole is provided with an internal thread which is matched with the external thread of the lead screw. The bearing is arranged in the blind hole and sleeved on the lead screw to enable the lead screw to rotate smoothly.
9. The positioning jig according to claim 8, characterized in that, A bearing retaining ring is arranged on the outer surface of the bearing outer ring.