Inclined plane reciprocating type flushing device

Abstract

The utility model relates to the technical field of semiconductor substrate material manufacturing, and particularly discloses an inclined plane reciprocating type flushing device which comprises a supporting seat, a linear motion module and a flushing part. An inclined surface is arranged on the supporting seat; a plurality of mounting grooves are formed in the inclined surface; the mounting groove is used for mounting a substrate sheet; a water flushing opening is formed in the water flushing piece, and the water flushing opening faces the inclined plane; the linear motion module is in transmission connection with the supporting base and used for driving the supporting base to reciprocate in the first direction. According to the inclined plane reciprocating type flushing device, in the process of flushing the substrate slice, the linear motion module can drive the supporting base to reciprocate in the first direction, the cleaning efficiency of the substrate slice is improved, meanwhile, the problem that the substrate slice has cleaning dead corners which cannot be covered by the flushing opening can be solved, and the cleaning efficiency of the substrate slice is improved. And the washing effect on the substrate slice is effectively improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor substrate material manufacturing, and in particular to an inclined reciprocating flushing device. Background Art

[0002] Indium phosphide substrates are widely used in the manufacture of high-frequency and high-power devices, optical fiber communications, wireless transmission, radio astronomy and other radio frequency devices. During the manufacturing process of the substrate sheet, particles will remain on the surface of the substrate sheet, so it needs to be cleaned to remove the particles.

[0003] The existing cleaning method is generally to fix the substrate sheet and then rinse it. At the same time, since the position of the flushing port is generally fixed, when flushing substrate sheets of different sizes, there may be cleaning dead corners on the substrate sheet that cannot be covered by the flushing port, resulting in poor flushing effect of the substrate sheet. Utility Model Content

[0004] In view of this, the purpose of the present application is to provide a sloped reciprocating washing device to improve the washing effect on the substrate sheet.

[0005] In order to achieve the above technical purpose, the present application provides an inclined reciprocating flushing device, comprising: a support seat, a linear motion module and a flushing member;

[0006] The support seat is provided with an inclined surface;

[0007] The inclined surface is provided with a plurality of mounting grooves;

[0008] The mounting groove is used for mounting the substrate sheet;

[0009] The flushing member is provided with a flushing port, and the flushing port faces the inclined surface;

[0010] The linear motion module is transmission-connected to the support base, and is used to drive the support base to reciprocate along a first direction.

[0011] Furthermore, the flushing members include a plurality of flushing members, which are arranged at intervals along the first direction.

[0012] Furthermore, the plurality of mounting grooves are distributed in a rectangular array from top to bottom along the inclined surface.

[0013] Furthermore, the mounting groove is arranged obliquely so that the substrate sheet on the mounting groove is placed obliquely.

[0014] Furthermore, the water outlet direction of the flushing port is perpendicular to the inclined direction of the mounting groove.

[0015] Furthermore, the linear motion module comprises: a motor, a fixed seat, a screw and a movable seat;

[0016] The movable seat is movably arranged on the fixed seat along the first direction, and the movable seat is fixedly connected to the support seat;

[0017] The screw rod is rotatably arranged on the fixed seat and is threadedly engaged with the movable seat;

[0018] The motor is drivingly connected to the screw rod and is used to drive the screw rod to rotate so that the movable seat moves along the first direction.

[0019] Further, the support seat includes: a bottom plate and a plurality of vertical plates;

[0020] The plurality of vertical plates are arranged on the bottom plate at intervals along the first direction;

[0021] The inclined surface is arranged on the vertical plate;

[0022] The bottom plate is drivingly connected to the linear motion module.

[0023] Further, an installation frame is arranged on the inclined surface;

[0024] The installation groove is arranged on the installation frame.

[0025] Further, the installation frame is detachably connected to the support seat.

[0026] Further, the installation frame is of a frame structure.

[0027] As can be seen from the above technical solutions, the present application provides an inclined surface reciprocating flushing device, including: a support seat, a linear motion module and a flushing member; an inclined surface is arranged on the support seat; a plurality of installation grooves are arranged on the inclined surface; the installation grooves are used for installing the substrate film; a flushing port is arranged on the flushing member, and the flushing port faces the inclined surface; the linear motion module is drivingly connected to the support seat and is used to drive the support seat to reciprocate along the first direction.

[0028] In the process of flushing the substrate film by the inclined surface reciprocating flushing device provided by this solution, the linear motion module can drive the support seat to reciprocate along the first direction, so as to improve the cleaning efficiency of the substrate film while avoiding the problem of cleaning dead corners where the substrate film cannot be covered by the flushing port, effectively improving the flushing effect on the substrate film. Description of the Drawings

[0029] To more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the accompanying drawings required for the description of the embodiments or the prior art. Obviously, the accompanying drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other accompanying drawings can also be obtained based on these drawings.

[0030] Figure 1 Schematic diagram of the structure of an inclined surface reciprocating flushing device provided by an embodiment of the present application;

[0031] Figure 2 Schematic diagram of the structure of another perspective of an inclined surface reciprocating flushing device provided by an embodiment of the present application;

[0032] Figure 3 Schematic diagram of the mounting frame of an inclined surface reciprocating flushing device provided by an embodiment of the present application;

[0033] In the figure: 10, support base; 11, inclined surface; 12, mounting groove; 13, bottom plate; 14, vertical plate; 15, mounting frame; 16, extension rod; 20, linear motion module; 21, motor; 22, fixed seat; 23, screw; 24, moving seat; 30, flushing member; 31, flushing port; 40, lining piece. Detailed implementation manners

[0034] The following will clearly and completely describe the technical solutions of the embodiments of the present application in conjunction with the accompanying drawings. Obviously, the described embodiments are part of the embodiments of the present application, rather than all of them. Based on the embodiments in this specification of the present application, all other embodiments obtained by those of ordinary skill in the art without creative efforts fall within the scope of protection requested by the present application.

[0035] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore cannot be understood as a limitation to the embodiments of the present application. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be understood as indicating or implying relative importance.

[0036] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium; it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0037] Please refer to Figure 1 and Figure 2 A reciprocating inclined-plane flushing device provided in the embodiments of the present application includes a support base 10, a linear motion module 20, and a flushing member 30. Among them, the support base 10 is used to place the substrate film 40; the flushing member 30 is used to flush the substrate film 40 on the support base 10. The linear motion module 20 is used to drive the support base 10 to reciprocate in the first direction during the flushing process of the substrate film 40, so as to avoid the flushing dead corners that cannot be covered by the flushing member 30 on the substrate film 40, and improve the flushing efficiency of the substrate film 40.

[0038] In the embodiment provided by the present application, the first direction can be Figure 2 the x-axis direction in

[0039] In a more specific embodiment, please refer to Figure 1 . An inclined plane 11 is provided on the support base 10; a plurality of mounting grooves 12 are provided on the inclined plane 11; the mounting grooves 12 are used for mounting the substrate film 40; a flushing port 31 is provided on the flushing member 30, and the flushing port 31 faces the inclined plane 11.

[0040] Since the mounting grooves 12 are provided on the inclined plane 11, when the flushing port 31 flushes the substrate film 40 on the inclined plane 11, the flushing liquid will flow along the inclined plane 11 and sequentially flow through a plurality of substrate films 40 from top to bottom, which has the effect of improving the utilization rate of the flushing liquid.

[0041] Correspondingly, in this embodiment, the setting range of the flushing port 31 spans the mounting range of the mounting grooves 12 in the vertical direction, ensuring that the substrate film 40 on the lower mounting groove 12 can be directly flushed by the flushing liquid ejected from the lower flushing port 31, thereby improving the utilization rate of the flushing liquid ejected from the upper flushing port 31 while ensuring the cleaning effect of the lower substrate film 40.

[0042] It should be noted that in this solution, a second flushing port can be provided on the inclined plane 11, so that while the front side of the substrate film 40 can be flushed through the flushing port 31, the back side of the substrate film 40 can be flushed through the second flushing port.

[0043] In one embodiment, the flushing members 30 include a plurality of flushing members 30 and are arranged at intervals along the first direction. When the linear motion module 20 drives the support base 10 along the first direction, the substrate sheet 40 can be flushed by the plurality of flushing members 30, thereby improving the cleaning efficiency and cleaning effect.

[0044] In one embodiment, the plurality of mounting grooves 12 are distributed in a rectangular array from top to bottom along the inclined surface 11 to ensure that the rinse liquid flowing through the substrate sheet 40 located above can flow through the substrate sheet 40 located below.

[0045] In another embodiment, the mounting groove 12 is disposed at an angle, so that the substrate sheet 40 on the mounting groove 12 is placed at an angle.

[0046] The inclined substrate sheet 40 can prolong the time for the rinsing liquid to flow through, increase the friction between the rinsing liquid and the substrate sheet 40 , and help the rinsing liquid to carry away the particles on the substrate sheet 40 .

[0047] In one embodiment, the water outlet direction of the flushing port 31 is perpendicular to the inclination direction of the mounting groove 12, that is, after the substrate sheet 30 is placed in the mounting groove 12, the substrate sheet 30 is perpendicular to the water outlet direction of the flushing port 31, which can increase the impact force of the flushing liquid on the substrate sheet 40 on the mounting groove 12, and ensure the cleaning effect of the flushing liquid on the substrate sheet 40 during the reciprocating motion of the support seat 10.

[0048] In other embodiments, see Figure 2 The linear motion module 20 includes: a motor 21, a fixed seat 22, a screw 23 and a movable seat 24; the movable seat 24 is movably arranged on the fixed seat 22 along a first direction, and the movable seat 24 is fixedly connected to the support seat 10; the screw 23 is rotatably arranged on the fixed seat 22, and is threadedly engaged with the movable seat 24; the motor 21 is transmission-connected to the screw 23, and is used to drive the screw 23 to rotate so that the movable seat 24 moves along the first direction.

[0049] In this solution, the forward and reverse rotation of the motor 21 can drive the moving seat 24 and the supporting seat 10 to reciprocate along the first direction.

[0050] It should be noted that, in actual application, when the flushing member 30 flushes water, the support seat 10 can also remain stationary. Specifically, before flushing, the position of the support seat 10 is adjusted by the motor 21 to ensure that the substrate sheet 30 can be covered by the flushing range of the flushing port.

[0051] As a further improvement, the support seat 10 includes: a base plate 13 and a plurality of vertical plates 14 ; the plurality of vertical plates 14 are arranged on the base plate 13 at intervals along the first direction; the inclined surface 11 is arranged on the vertical plates 14 ; and the base plate 13 is transmission-connected to the linear motion module 20 .

[0052] The structure of multiple vertical plates 14 helps to reduce the overall weight of the support base 10, facilitating the displacement of the support base 10 driven by the linear motion module 20.

[0053] In another embodiment, a mounting frame 15 is provided on the inclined surface 11; the mounting groove 12 is provided on the mounting frame 15.

[0054] That is, during production, the mounting groove 12 can be first provided on the mounting frame 15, and then the mounting frame 15 can be provided on the support base 10, facilitating the fabrication of the overall structure. Among them, the mounting frame 15 is detachably connected to the support base 10, enabling the replacement of the mounting frame 15 when necessary.

[0055] In this embodiment, the mounting frame 15 can be of a frame structure, which helps to reduce the contact area between the mounting frame 15 and the lining film 30.

[0056] As an implementation manner, the mounting frame 15 can be in a U shape, which includes two protruding extension rods 16; the mounting groove 12 is provided on the extension rods 16 and penetrates the extension rods 16 along the first direction, enabling the mounting frame 15 to place lining films 40 of different sizes and improving the applicability of the device.

[0057] The above are the preferred embodiments of the present application and are not used to limit the present invention. Although the present application has been described in detail with reference to the examples, for those skilled in the art, they can still modify the technical solutions recorded in the foregoing examples, or perform equivalent replacements on some of the technical features. However, any modifications, equivalent replacements, improvements, etc. made within the spirit and principle of the present application shall be included within the protection scope of the present application.

Claims

1. An inclined surface reciprocating flushing device, characterized in that, Including: A support base (10), a linear motion module (20), and a flushing member (30); A slope (11) is provided on the support base (10); A plurality of mounting grooves (12) are provided on the slope (11); The mounting grooves (12) are used for mounting the lining wafers (40); A flushing port (31) is provided on the flushing member (30), and the flushing port (31) faces the slope (11); The linear motion module (20) is drivingly connected to the support base (10) and is used to drive the support base (10) to reciprocate in a first direction.

2. The reciprocating inclined-plane flushing device according to claim 1, wherein There are a plurality of the flushing members (30), which are arranged at intervals along the first direction.

3. The reciprocating inclined-plane flushing device according to claim 1 or 2, characterized in that, The plurality of mounting grooves (12) are distributed in a rectangular array from top to bottom along the slope (11).

4. The reciprocating inclined plane flushing device according to claim 3, characterized in that, The mounting grooves (12) are inclined so that the lining wafers (40) on the mounting grooves (12) are placed obliquely.

5. The reciprocating inclined-plane flushing device according to claim 3, wherein, The water outlet direction of the flushing port (31) is perpendicular to the inclination direction of the mounting groove (12).

6. The reciprocating inclined-plane flushing device according to claim 1, wherein The linear motion module (20) includes: a motor (21), a fixed seat (22), a screw rod (23), and a moving seat (24); The moving seat (24) is movably arranged on the fixed seat (22) along the first direction, and the moving seat (24) is fixedly connected to the support base (10); The screw rod (23) is rotatably arranged on the fixed seat (22) and is threadedly engaged with the moving seat (24); The motor (21) is drivingly connected to the screw rod (23) and is used to drive the screw rod (23) to rotate so that the moving seat (24) moves along the first direction.

7. The reciprocating inclined-plane flushing device according to claim 1 or 6, characterized in that, The support base (10) includes: a bottom plate (13) and a plurality of vertical plates (14); The plurality of vertical plates (14) are arranged at intervals on the bottom plate (13) along the first direction; The slope (11) is provided on the vertical plates (14); The bottom plate (13) is drivingly connected to the linear motion module (20).

8. The reciprocating inclined-plane flushing device according to claim 1, wherein, A mounting frame (15) is provided on the slope (11); The mounting grooves (12) are provided on the mounting frame (15).

9. The reciprocating inclined plane flushing device according to claim 8, characterized in that, The mounting frame (15) is detachably connected to the support base (10).

10. The reciprocating inclined-plane flushing device according to claim 8, wherein, The mounting frame (15) is a frame structure.

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