Empty material pipe pushing-out mechanism for semiconductor equipment
By designing empty pipe push mechanism for semiconductor equipment such as top rod limit blocks, buffer pads and light sensors, the problem of damage during the pushing of the material pipe is solved, and the protection and quality assurance of the material pipe is achieved.
Patent Information
- Application Number
- CN202422407700.4
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-09-30
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-09-30
AI Technical Summary
The existing pipe rollout mechanism lacks overload protection, resulting in the risk of damage to the pipe when rolling out, affecting quality and quality.
A hollow material pipe pushing mechanism for semiconductor equipment is designed, using components such as the pinch rod limiting block, buffer pad, light sensor and linear bearing. It is pushed through the pinch rod and the elastic telescopic protection tube by using the buffer pad and spring. Combined with the pinch sensor, it determines whether the material pipe reaches the working position to prevent excessive push.
Effectively protect the material pipe from damage, ensure the quality and quality of the material pipe during the roll-out process, and be able to detect and deal with the material pipe that has not reached the working position in a timely manner.
Smart Images
Figure CN223149647U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductor integrated circuit processing, and particularly relates to an empty tube pushing mechanism for semiconductor equipment. Background Art
[0002] In the tube loading system of a semiconductor die bonder and trimmer, most of them adopt the feeding method of tube loading to achieve. And due to the improvement of automation, it has gradually popularized from manual tube loading to automatic tube loading, greatly saving manpower and working hours. However, most of the existing tube pushing mechanisms do not adopt an overload protection device, and there is a risk of damage when the tube is pushed out, which affects the quality and quality of the tube. Summary of the Utility Model
[0003] The purpose of the utility model is to provide an empty tube pushing mechanism for semiconductor equipment to solve the problems mentioned in the above background art.
[0004] The main problems solved by the utility model are:
[0005] There is a risk of damage when the tube is pushed out, which affects the quality and quality of the tube.
[0006] The utility model can be realized by the following technical solutions:
[0007] An empty tube pushing mechanism for semiconductor equipment includes a mounting base plate. A cylinder support block is mounted on the upper surface of the mounting base plate. A pushing cylinder is fixedly arranged on the top surface of the cylinder support block. The pushing end of the pushing cylinder is fixedly installed with a rod limiting block, and the bottom surface of the pushing cylinder is perpendicular to the side surface of the cylinder support block. A rod mounting plate is fixedly arranged at the top end of the rod limiting block. Two rod mounting blocks are mounted on the bottom surface of the rod mounting plate adjacent to one side of the rod limiting block. Each rod is elastically mounted inside each rod mounting block. A push block for pushing the tube to the working position is installed at the end of each rod. A buffer pad is arranged on the side surface of the push block.
[0008] A further technical improvement of the utility model lies in that: two counterbores are arranged on the top side surface of the rod limiting block. A pin is installed at one end of each rod extending into the corresponding rod mounting block. A spring is fixedly sleeved outside the pin. One end of the spring is installed on the inner wall surface of the corresponding counterbore.
[0009] A further technical improvement of the utility model lies in that: a linear bearing is installed in the middle of the inner cavity of each rod mounting block. Each rod is slidably arranged with the corresponding linear bearing.
[0010] A further technical improvement of the present utility model lies in that: light sensors are installed on both sides of the ejector rod mounting plate, side through holes for the light beams of the corresponding light sensors to pass through are provided on the side surface of each dowel pin, and pin slot holes are provided on one side of the upper surface of each dowel pin adjacent to the side through holes.
[0011] A further technical improvement of the present utility model lies in that: two kidney-shaped holes penetrate through the upper surface of the ejector rod mounting plate, pins are embedded and installed in each pin slot hole, and the top end of each pin extends into the corresponding kidney-shaped hole in the ejector rod mounting plate.
[0012] A further technical improvement of the present utility model lies in that: convex blocks protruding outwards are provided at both ends of the bottom surface of the cylinder support block, mounting holes are provided on the convex blocks, a locating pin entering the mounting hole is provided on the surface of the mounting base plate, and a screw is installed in the locating pin by internal thread.
[0013] Compared with the prior art, the present utility model has the following beneficial effects:
[0014] 1. The push block at the end of the ejector rod contacts the tail end of the material pipe, that is, the buffer pad fits with the tail end of the material pipe. The push cylinder is pushed to move the ejector rod limiting block towards the working position, driving the two ejector rods to move together. Due to the abutment of the push block and the material pipe, the material pipe is driven into the working position. Among them, the ejector rod slides in the ejector rod mounting block, that is, the end of the ejector rod away from the push block elastically expands and contracts with one side surface of the ejector rod limiting block. With the use of the buffer pad, the tail of the material pipe is not subjected to a large force, ensuring that the material pipe is not damaged, reducing the risk of damage to the material pipe during ejection, and ensuring the quality and quality of the material pipe;
[0015] 2. During the pushing operation, the ejector rod slides in the linear bearing, driving the pin slot holes on the dowel pins and their pins to move together. The pins slide in the kidney-shaped holes, thereby limiting the movement distance of the ejector rod. When the material pipe is pushed into the working position by the push block, at this time, the light beam of the light sensor just passes through the side through hole on the side surface of the dowel pin, thereby determining whether the material pipe reaches the working position; when the material pipe is not pushed into the working position, within the set stroke of the push cylinder, the ejector rod will further compress the spring. At this time, the light beam emitted by the light sensor cannot pass through the side through hole on the side surface of the dowel pin, so an instruction is sent to retract the push cylinder, facilitating the replacement of the problematic material pipe. BRIEF DESCRIPTION OF THE DRAWINGS
[0016] For the convenience of those skilled in the art to understand, the present utility model will be further described below in conjunction with the accompanying drawings.
[0017] Figure 1 is the three-dimensional structural schematic diagram of the present utility model;
[0018] Figure 2 is the planar structural schematic diagram of the present utility model;
[0019] Figure 3 is a top view structural schematic diagram of the present utility model;
[0020] Figure 4 of the present utility model Figure 2 a cross-sectional view of part A in it.
[0021] In the figure: 1, mounting base plate; 2, cylinder support block; 3, pushing cylinder; 4, ejector rod limit block; 5, ejector rod mounting plate; 6, light sensor; 7, second ejector rod mounting block; 8, linear bearing; 9, ejector rod; 10, spring; 11, pin; 12, pushing block; 13, dowel pin. Specific embodiments
[0022] To further elaborate on the technical means and effects adopted by the present utility model to achieve the predetermined utility model purpose, the following, in conjunction with the accompanying drawings and preferred embodiments, details the specific embodiments, structures, features and their effects of the present utility model as follows.
[0023] Please refer to Figures 1-4 As shown, the present utility model provides a blank tube pushing mechanism for semiconductor equipment, including a mounting base plate 1. A cylinder support block 2 is installed on the upper surface of the mounting base plate 1. A pushing cylinder 3 is fixedly arranged on the top surface of the cylinder support block 2. An ejector rod limit block 4 is fixedly installed at the pushing end of the pushing cylinder 3, and the bottom surface of the pushing cylinder 3 is perpendicular to the side surface of the cylinder support block 2. An ejector rod mounting plate 5 is fixedly arranged at the end of the top surface of the ejector rod limit block 4. Two ejector rod mounting blocks 7 are installed on the bottom surface of the ejector rod mounting plate 5 adjacent to one side of the ejector rod limit block 4. An ejector rod 9 is elastically installed inside each ejector rod mounting block 7. A pushing block 12 for pushing the tube to the working position is installed at the end of each ejector rod 9. A buffer pad is arranged on the side surface of the pushing block 12. During use, the pushing block 12 at the end of the ejector rod 9 contacts the tail end of the tube, that is, the buffer pad fits with the tail end of the tube. The pushing cylinder 3 is used to push the ejector rod limit block 4 towards the working position direction, driving the two ejector rods 9 to move together. Due to the abutment of the pushing block 12 and the tube, the tube is driven into the working position. Among them, during this process, the ejector rod 9 slides in the ejector rod mounting block 7, that is, the end of the ejector rod 9 away from the pushing block 12 elastically expands and contracts with one side surface of the ejector rod limit block 4. With the use of the buffer pad, the tail of the tube is not subjected to a large acting force, ensuring that the tube is not damaged.
[0024] Please refer to Figure 2As shown, two counterbores are provided on the top side surface of the ejector rod limit block 4. At one end of each ejector rod 9 extending into the corresponding ejector rod mounting block 7, a dowel pin 13 is installed. A spring 10 is fixedly sleeved outside the dowel pin 13. One end of the spring 10 is installed on the inner wall surface of the corresponding counterbore. During specific pushing, the push block 12 at the end of the ejector rod 9 pushes the material pipe towards the working position. During pushing, the dowel pin 13 at the other end of the ejector rod 9 squeezes the spring 10, causing the spring 10 to undergo elastic compression in the counterbore, so that the tail of the material pipe is not subjected to a large force.
[0025] Please refer to Figure 1 and Figure 4 As shown, a linear bearing 8 is installed in the middle of the inner cavity of each ejector rod mounting block 7. Each ejector rod 9 is slidably arranged with the corresponding linear bearing 8. The ejector rod 9 axially slides in the linear bearing 8 to ensure the smooth and stable sliding of the ejector rod 9.
[0026] Please refer to Figure 1 , Figure 2 and Figure 3 As shown, light sensors 6 are installed on both sides of the ejector rod mounting plate 5. The light sensors 6 are photoelectric sensors, which are prior art and their working principles are not described in detail in this application. A side through hole for the beam of the corresponding light sensor 6 to pass through is provided on the side surface of each dowel pin 13, and a pin slot hole is provided on the upper surface of each dowel pin 13 adjacent to the side through hole; two kidney-shaped holes penetrate through the upper surface of the ejector rod mounting plate 5. A pin 11 is embedded and installed in each pin slot hole, and the top end of the pin 11 extends into the corresponding kidney-shaped hole in the ejector rod mounting plate 5. During use, the ejector rod 9 slides in the linear bearing 8, driving the pin slot hole on the dowel pin 13 and its pin 11 to move together. The pin 11 slides in the kidney-shaped hole, thereby limiting the movement distance of the ejector rod 9. When the material pipe is pushed into the working position by the push block 12, at this time, the beam of the light sensor 6 just passes through the side through hole on the side surface of the dowel pin 13, thereby determining whether the material pipe reaches the working position; when the material pipe is not pushed into the working position, under the set stroke of the pushing cylinder 3, the ejector rod 9 will further compress the spring 10. At this time, the beam emitted by the light sensor 6 cannot pass through the side through hole on the side surface of the dowel pin 13, so as to issue an instruction to retract the pushing cylinder 3, facilitating the replacement of the problematic material pipe.
[0027] Please refer to Figure 1 and Figure 2 As shown, convex blocks protruding outwards are provided at both ends of the bottom surface of the cylinder support block 2. Mounting holes are provided on the convex blocks, and dowel pins entering the mounting holes are provided on the surface of the mounting base plate 1. Screws are threadedly installed in the dowel pins.
[0028] When the utility model is in use, the push block 12 at the end of the ejector rod 9 contacts the tail end of the material pipe, that is, the buffer pad fits with the tail end of the material pipe. The push cylinder 3 is used to push the ejector rod limit block 4 to move towards the working position, driving the two ejector rods 9 to move together. Due to the abutment of the push block 12 against the material pipe, the material pipe is driven into the working position. The ejector rod 9 slides in the ejector rod mounting block 7, that is, the end of the ejector rod 9 away from the push block 12 elastically expands and contracts with one side surface of the ejector rod limit block 4. With the use of the buffer pad, the tail of the material pipe is not subjected to a large force, ensuring that the material pipe is not damaged;
[0029] During the pushing operation, the ejector rod 9 slides in the linear bearing 8, driving the pin slot hole on the dowel pin 13 and its pin 11 to move together. The pin 11 slides in the kidney-shaped hole, thereby limiting the moving distance of the ejector rod 9. When the material pipe is pushed into the working position by the push block 12, at this time, the light beam of the optical sensor 6 just passes through the side through hole on the side of the dowel pin 13, thereby determining whether the material pipe reaches the working position; when the material pipe is not pushed into the working position, within the set stroke of the push cylinder 3, the ejector rod 9 will further compress the spring 10. At this time, the light beam emitted by the optical sensor 6 cannot pass through the side through hole on the side of the dowel pin 13, so an instruction is sent to retract the push cylinder 3, facilitating the replacement of the problematic material pipe.
[0030] The above is only a preferred embodiment of the present utility model and does not impose any form of limitation on the present utility model. Although the present utility model has been disclosed as above with the preferred embodiment, it is not intended to limit the present utility model. Any person skilled in the art can make some changes or modifications to it as equivalent embodiments within the scope of the technical solution of the present utility model. However, as long as it does not depart from the content of the technical solution of the present utility model, any simple modification, equivalent change and modification made to the above embodiments according to the technical essence of the present utility model still fall within the scope of the technical solution of the present utility model.
Claims
1. A blank tube pushing mechanism for a semiconductor device, comprising a mounting base plate (1), and a cylinder support block (2) is mounted on the upper surface of the mounting base plate (1), characterized in that: A push cylinder (3) is fixedly arranged on the top surface of the cylinder support block (2). A push rod limit block (4) is fixedly installed at the push end of the push cylinder (3), and the bottom surface of the push cylinder (3) is perpendicular to the side surface of the cylinder support block (2). A push rod mounting plate (5) is fixedly arranged at the top end of the top surface of the push rod limit block (4). Two push rod mounting blocks (7) are installed on the bottom surface of the push rod mounting plate (5) adjacent to one side of the push rod limit block (4). A push rod (9) is elastically installed inside each push rod mounting block (7). A push block (12) for pushing the material pipe to the working position is installed at the end of each push rod (9). A buffer pad is arranged on the side surface of the push block (12).
2. The empty tube pushing mechanism for a semiconductor device according to claim 1, wherein, Two counterbores are arranged on the top side surface of the push rod limit block (4). A dowel pin (13) is installed at one end of each push rod (9) extending into the corresponding push rod mounting block (7). A spring (10) is fixedly sleeved outside the dowel pin (13), and one end of the spring (10) is installed on the inner wall surface of the corresponding counterbore.
3. A blank tube pushing mechanism for a semiconductor device according to claim 1, characterized in that, A linear bearing (8) is installed in the middle of the inner cavity of each push rod mounting block (7). Each push rod (9) is slidably arranged with the corresponding linear bearing (8).
4. A blank tube pushing mechanism for a semiconductor device according to claim 2, characterized in that, Light sensors (6) are installed on both sides of the push rod mounting plate (5). A side through hole for the light beam of the corresponding light sensor (6) to pass through is arranged on the side surface of each dowel pin (13), and a pin slot hole is arranged on the upper surface of each dowel pin (13) adjacent to one side of the side through hole.
5. A blank tube pushing mechanism for a semiconductor device according to claim 4, characterized in that, Two kidney-shaped holes penetrate through the upper surface of the push rod mounting plate (5). A pin (11) is embedded and installed in each pin slot hole, and the top end of the pin (11) extends into the corresponding kidney-shaped hole in the push rod mounting plate (5).
6. The empty tube pushing mechanism for a semiconductor device according to claim 1, characterized in that, Convex blocks protruding outwards are arranged at both ends of the bottom surface of the cylinder support block (2). Mounting holes are arranged on the convex blocks. A locating pin entering the mounting holes is arranged on the surface of the mounting bottom plate (1), and a screw is installed inside the locating pin by internal thread.