Gas inlet assembly and chemical vapor deposition equipment

Abstract

The utility model relates to an air inlet assembly and chemical vapor deposition equipment. In one aspect, the gas inlet assembly is used for being arranged on the wall of a cavity of the chemical vapor deposition equipment so as to provide gas for the cavity of the chemical vapor deposition equipment, the gas inlet assembly comprises a tubular first gas nozzle and a tubular second gas nozzle, the gas outlet end of the first gas nozzle can be inserted into the gas inlet end of the second gas nozzle, and the gas inlet end of the second gas nozzle is communicated with the gas inlet end of the first gas nozzle. At least one of the end face of the air outlet end and the end face of the air inlet end is an inclined face, and the inclined face is configured to guide the air outlet end to be inserted into the air inlet end. Therefore, the assembly time can be shortened, and damage to other parts caused by assembly can be avoided.

Description

Technical Field

[0001] The present disclosure relates to the field of semiconductor manufacturing technology, and more particularly, to an intake assembly and a chemical vapor deposition apparatus. Background Art

[0002] Chemical Vapor Deposition (CVD) is a common plating method in semiconductor manufacturing. In the CVD method, a substrate to be coated is placed in a chamber of a corresponding CVD apparatus, and a gas enters the chamber through an intake nozzle provided at the chamber wall to deposit a film on the substrate through a CVD reaction.

[0003] Generally, the intake nozzle is assembled from a metal nozzle and a graphite nozzle. The metal nozzle is provided outside the chamber of the CVD apparatus, and the graphite nozzle is provided inside the chamber. The metal nozzle is installed in place at the chamber wall and its outlet end passes through the chamber wall, and the inlet end of the graphite nozzle passes through a hard felt provided at the inner side of the chamber wall and is sleeved on the outlet end of the metal nozzle.

[0004] Since the opening for the graphite nozzle to pass through the hard felt is small, the movement space and the field of view are limited. Therefore, it is difficult to insert the inlet end of the graphite nozzle onto the outlet end of the metal nozzle from the inside of the chamber. In actual operation, since the opening for the metal nozzle to pass through the chamber wall is large, which can provide a larger movement space and a better field of view, the metal nozzle installed in place at the chamber wall is first removed. After inserting the graphite nozzle into the opening of the hard felt, the outlet end of the metal nozzle is inserted into the chamber wall from the outside of the chamber and then inserted into the inlet end of the graphite nozzle.

[0005] However, the disassembly and assembly of the metal nozzle will greatly increase the equipment assembly time, thereby reducing the production efficiency. Moreover, multiple disassembly and assembly may cause damage to other components such as seals, thereby increasing the production cost. Summary of the Utility Model

[0006] This section provides a general overview of the present disclosure, rather than a full disclosure of the entire scope or all features of the present disclosure.

[0007] An object of the present disclosure is to provide an intake assembly and a CVD apparatus that can reduce the assembly time and avoid damage to other components during assembly.

[0008] To achieve the above object, according to one aspect of the present disclosure, there is provided an intake assembly for being provided at a chamber wall of a CVD apparatus to supply a gas to the chamber of the CVD apparatus. The intake assembly includes a first nozzle and a second nozzle both in a tubular shape, and an outlet end of the first nozzle can be inserted into an inlet end of the second nozzle.

[0009] Wherein, at least one of the end face of the air outlet end and the end face of the air inlet end is an inclined surface, and the inclined surface is configured to guide the insertion of the air outlet end into the air inlet end.

[0010] In some embodiments, the inclined surface can be a flat inclined surface.

[0011] In some embodiments, both the end face of the air outlet end and the end face of the air inlet end can be flat inclined surfaces, and the shape of the end face of the air outlet end and the shape of the end face of the air inlet end are complementary.

[0012] In some embodiments, the inclined surface can be a convex arc-shaped inclined surface.

[0013] In some embodiments, both the end face of the air outlet end and the end face of the air inlet end can be inclined surfaces, and one of the end face of the air outlet end and the end face of the air inlet end is a convex arc-shaped inclined surface.

[0014] In some embodiments, the other of the end face of the air outlet end and the end face of the air inlet end can be a convex arc-shaped inclined surface, and the end face of the air outlet end and the end face of the air inlet end are configured such that when the end face of the air outlet end contacts the end face of the air inlet end, the front end of the end face of the air outlet end does not contact the arc-shaped portion of the end face of the air inlet end other than its front end, and the front end of the end face of the air inlet end does not contact the arc-shaped portion of the end face of the air outlet end other than its front end.

[0015] In some embodiments, the first nozzle can be made of metal, and the second nozzle can be made of graphite.

[0016] In some embodiments, the outer diameter of the air outlet end can be equal to the inner diameter of the air inlet end.

[0017] According to another aspect of the present disclosure, there is also provided a CVD apparatus, which includes the air inlet assembly according to any one of the above embodiments.

[0018] In some embodiments, the first nozzle can be disposed outside the chamber wall of the CVD apparatus, and the second nozzle can be disposed inside the chamber wall.

[0019] According to the above technical solution, by making at least one of the end face of the air outlet end and the end face of the air inlet end an inclined surface, when the second nozzle is inserted from the inside of the chamber of the CVD apparatus towards the first nozzle, the inclined surface can guide the insertion of the air outlet end into the air inlet end, thereby enabling the air inlet end of the second nozzle to be more easily sleeved on the air outlet end of the first nozzle without removing the first nozzle from the chamber wall. Thus, the equipment assembly time is greatly reduced, the production efficiency is improved, and the damage that may be caused to other components due to multiple disassembly and assembly is avoided, reducing the production cost. Description of the Drawings

[0020] The features and advantages of the embodiments of the present disclosure will become more readily apparent from the following description with reference to the accompanying drawings. The drawings are not drawn to scale, and some features may be enlarged or reduced to show details of specific parts. In the drawings:

[0021] Figure 1 is a schematic cross-sectional view of an air inlet nozzle according to the related art.

[0022] Figure 2 schematically shows Figure 1 the assembly situation of the air inlet nozzle shown in at the chamber wall of the CVD apparatus.

[0023] Figure 3 is a schematic cross-sectional view of an air inlet assembly according to an embodiment of the present disclosure.

[0024] Figure 4 is a schematic cross-sectional view of an air inlet assembly according to another embodiment of the present disclosure.

[0025] Figure 5 is a schematic cross-sectional view of an air inlet assembly according to still another embodiment of the present disclosure.

[0026] Figure 6 is a schematic cross-sectional view of an air inlet assembly according to yet another embodiment of the present disclosure.

[0027] Figure 7 is a schematic cross-sectional view of an air inlet assembly according to yet another embodiment of the present disclosure.

[0028] Figure 8 is a schematic structural view of a CVD apparatus according to an embodiment of the present disclosure.

[0029] In the drawings, the same or corresponding technical features, parts or components are denoted by the same or corresponding reference numerals. Detailed Description of Specific Embodiments

[0030] The present disclosure will be described in detail below with reference to the accompanying drawings and by way of exemplary embodiments. It should be noted that the following detailed description of the present disclosure is for illustrative purposes only and is in no way a limitation of the present disclosure.

[0031] It should be noted that, for the sake of clarity, not all features of specific embodiments are described and shown in the specification and the drawings, and, in order to avoid obscuring the technical solutions of interest of the present disclosure with unnecessary details, only the device structures and parts closely related to the technical solutions of the present disclosure are described and shown in the specification and the drawings, while other details that are not closely related to the technical content of the present disclosure and are known to those skilled in the art are omitted.

[0032] First, referring to Figure 1 and Figure 2, a detailed description is given of the intake nozzle 10' according to the related art and the assembly of the intake nozzle 10' at the chamber wall 20' of the CVD apparatus.

[0033] As Figure 1 shown, the intake nozzle 10' is composed of a metal nozzle 11' and a graphite nozzle 12'. Both the metal nozzle 11' and the graphite nozzle 12' are tubular. The metal nozzle 11' includes an intake end 111' and an outlet end 112'. The graphite nozzle 12' also includes an intake end 121' and an outlet end 122'. And the outlet end 112' of the metal nozzle 11' can be inserted into the intake end 121' of the graphite nozzle 12' to assemble the intake nozzle 10'.

[0034] As previously mentioned, referring to Figure 2 the (a) and (b) in it, the cases where the graphite nozzle 12' is not inserted into the metal nozzle 11' and the cases where it is inserted into the metal nozzle 11' are respectively shown. When the intake nozzle 10' is arranged at the chamber wall 20' of the CVD apparatus, the metal nozzle 11' is located outside the chamber of the CVD apparatus, that is, on the outer side of the chamber wall 20' ( Figure 2 the right side in it), and the graphite nozzle 12' is located inside the chamber, that is, on the inner side of the chamber wall 20' ( Figure 2 the left side in it). The metal nozzle 11' is fixed to the chamber wall 20', and its outlet end 112' is inserted into the opening 201' of the chamber wall 20'. The graphite nozzle 12' is sleeved on the outlet end 112' of the metal nozzle 11' through its intake end 121'.

[0035] A hard felt 30' is also arranged on the inner side of the chamber wall 20'. The hard felt 30' can be made of graphite, for example, and the hard felt 30' can be laid around the entire circumference of the chamber to insulate and heat-preserve the chamber. The hard felt 30' is provided with an opening 301' thereon so that the graphite nozzle 12' can pass through the opening 301' and be sleeved on the metal nozzle 11'.

[0036] However, as Figure 2 shown in the (a) in it, considering its heat insulation and heat preservation function, the opening 301' of the hard felt 30' is usually small, and thus the movable space and installation vision it can provide for the inserted graphite nozzle 12' are both particularly limited. As Figure 2 shown in the (b) in it, in the case of inserting the graphite nozzle 12' from the inner side of the chamber wall 20' into the metal nozzle 11' that is fixed at the chamber wall 20', it is very difficult for the intake end 121' of the graphite nozzle 12' to be aligned with the outlet end 112' of the metal nozzle 11', and thus it is very difficult to be sleeved on the outlet end 112'.

[0037] In this regard, currently, the metal nozzle 11' is removed from the chamber wall 20', and the graphite nozzle 12' is first inserted into the opening 301' of the hard felt 30', and then the metal nozzle 11' is reinserted into the opening 201' of the chamber wall 20' and inserted into the graphite nozzle 12'. Since the opening 201' of the chamber wall 20' is larger, and thus the movable space and installation vision it can provide are larger, the gas outlet end 112' of the metal nozzle 11' can be more easily aligned with the gas inlet end 121' of the graphite nozzle 12', so that the gas outlet end 112' of the metal nozzle 11' can be more easily inserted into the gas inlet end 121' of the graphite nozzle 12'.

[0038] However, the disassembly and assembly of the metal nozzle will greatly increase the equipment assembly time, such as the assembly time during regular equipment maintenance, thus reducing the production efficiency. Moreover, multiple disassembly and assembly may cause damage to other components. For example, the sealing ring 40' provided between the metal nozzle 11' and the chamber wall 20' may be damaged due to multiple disassembly and assembly of the metal nozzle 11', thus increasing the production cost.

[0039] In this regard, the present disclosure provides an intake assembly for being disposed at the chamber wall of a CVD apparatus to supply gas to the chamber of the CVD apparatus. Hereinafter, with reference to Figures 3 to 7 , the intake assembly 10 according to an embodiment of the present disclosure will be described in detail.

[0040] The intake assembly 10 includes a first nozzle 11 and a second nozzle 12.

[0041] Both the first nozzle 11 and the second nozzle 12 are tubular. The first nozzle 11 includes a gas inlet end 111 and a gas outlet end 112, and the second nozzle 12 also includes a gas inlet end 121 and a gas outlet end 122. The gas outlet end 112 of the first nozzle 11 can be inserted into the gas inlet end 121 of the second nozzle 12.

[0042] That is to say, the first nozzle 11 is disposed outside the chamber wall 20 (see Figure 8 ) of the CVD apparatus 1, and the second nozzle 12 is disposed inside the chamber wall 20, and the outer diameter of the gas outlet end 112 of the first nozzle 11 is less than or equal to the inner diameter of the gas inlet end 121 of the second nozzle 12. Thus, gas can enter the first nozzle 11 from the gas inlet end 111 outside the chamber of the CVD apparatus 1, and while leaving from the gas outlet end 112, enter the second nozzle 12 through the gas inlet end 121, and finally leave the second nozzle 12, that is, leave the intake assembly 10 and enter the chamber.

[0043] In an embodiment of the present disclosure, at least one of the end face 112a of the gas outlet end 112 of the first nozzle 11 and the end face 121a of the gas inlet end 121 of the second nozzle 12 is an inclined surface, and the inclined surface is configured to guide the insertion of the gas outlet end 112 into the gas inlet end 121.

[0044] Specifically, when the end surface 112a of the gas outlet end 112 of the first gas nozzle 11 is the inclined surface, the inclined surface is an inclined surface that gradually contracts toward the gas outlet end side of the first gas nozzle 11 along the axial direction of the first gas nozzle 11, wherein the gas outlet end side refers to the side where the gas outlet end 112 is located, that is, Figure 4 On the left side of the first air nozzle 11 , the inclined surface, namely the end surface 112 a at this time, is actually a tapered surface that gradually contracts toward the air outlet end side of the first air nozzle 11 .

[0045] When the end surface 121a of the air inlet end 121 of the second air nozzle 12 is the inclined surface, the inclined surface is an inclined surface that gradually expands toward the air inlet end side of the second air nozzle 12 along the axial direction of the second air nozzle 12, wherein the air inlet end side refers to the side where the air inlet end 121 is located, that is, Figure 4 On the right side of the second air nozzle 12 , the inclined surface, that is, the end surface 121 a at this time, is actually a conical surface that gradually expands toward the air inlet end side of the second air nozzle 12 .

[0046] Therefore, when the second gas nozzle 12 is inserted into the first gas nozzle 11 from the inside of the chamber of the CVD apparatus 1 to assemble the two, when the end surface 112a of the first gas nozzle 11 is the inclined surface, as shown in FIG. Figure 5 As shown in , if the air inlet end 121 of the second air nozzle 12 is not aligned or offset with the air outlet end 112 of the first air nozzle 11, the end surface 112a of the first air nozzle 11 can allow the air inlet end 121 of the second air nozzle 12 to move relative to the air outlet end 112 of the first air nozzle 11 to guide the air inlet end 121 of the second air nozzle 12 to be mounted on the air outlet end 112 of the first air nozzle 11.

[0047] When the end surface 121a of the second air nozzle 12 is the inclined surface, Figure 3 As shown in , if the air inlet end 121 of the second air nozzle 12 is not aligned with the air outlet end 112 of the first air nozzle 11, the end surface 121a of the second air nozzle 12 can allow the air inlet end 121 of the second air nozzle 12 to move relative to the air outlet end 112 of the first air nozzle 11 to guide the air inlet end 121 of the second air nozzle 12 to be mounted on the air outlet end 112 of the first air nozzle 11.

[0048] When the end surface 112a of the first gas nozzle 11 and the end surface 121a of the second gas nozzle 12 are both the inclined surfaces, as shown in FIG. Figure 4 As shown in , if the air inlet end 121 of the second air nozzle 12 is not aligned with the air outlet end 112 of the first air nozzle 11, either the end surface 112a of the first air nozzle 11 or the end surface 121a of the second air nozzle 12 can allow the air inlet end 121 of the second air nozzle 12 to move relative to the air outlet end 112 of the first air nozzle 11 to guide the air inlet end 121 of the second air nozzle 12 to be mounted on the air outlet end 112 of the first air nozzle 11.

[0049] In this way, when the second nozzle 12 is inserted from the inside of the chamber of the CVD apparatus 1 towards the first nozzle 11, the intake end 121 of the second nozzle 12 can be more easily sleeved on the outlet end 112 of the first nozzle 11 without removing the first nozzle 11 from the chamber wall 20. Thereby, the equipment assembly time is greatly reduced, the production efficiency is improved, and the damage that may be caused to other components due to multiple disassembly and assembly is avoided, reducing the production cost.

[0050] It should be noted that when both the end face 112a and the end face 121a are this inclined surface, as long as they are in contact with each other, regardless of the direction in which the second nozzle 12 is offset relative to the first nozzle 11, the above-mentioned guiding can be achieved. That is to say, by making both the end face 112a and the end face 121a be this inclined surface, the tolerance space in the assembly process is increased. That is, there is a tolerance space for the sum of the wall thicknesses of the first nozzle 11 and the second nozzle 12 in any direction, for example, upward or downward. For example, this tolerance space can be greater than 2 mm, so that regardless of whether the second nozzle 12 is offset upward or downward in the opposite direction relative to the first nozzle 11, the above-mentioned guiding can be achieved.

[0051] In some embodiments, as Figure 3 and Figure 4 shown in, this inclined surface can be a flat inclined surface.

[0052] In the case where the inclined surface is actually a conical surface as described above, the fact that the inclined surface is flat means that the generatrix of the cone corresponding to this conical surface is a straight line, and the cone can be formed by rotating this straight generatrix around the axis of the cone.

[0053] In this way, when the intake end 121 of the second nozzle 12 moves relative to the outlet end 112 of the first nozzle 11 by means of this flat inclined surface, this movement can be continuously carried out along a smooth flat path, so that it can be carried out more smoothly, making it easier to sleeve the intake end 121 of the second nozzle 12 on the outlet end 112 of the first nozzle 11.

[0054] In some embodiments, as Figure 4 shown in, the end face 112a of the outlet end 112 of the first nozzle 11 and the end face 121a of the intake end 121 of the second nozzle 12 can both be flat inclined surfaces, and the shape of the end face 112a of the outlet end 112 and the shape of the end face 121a of the intake end 121 are complementary.

[0055] When both the end face 112a and the end face 121a are flat inclined planes, the shape of the end face 112a of the air outlet end 112 is actually a tapered shape with a straight generatrix, and the shape of the end face 121a of the air inlet end 121 is actually a tapered shape with an expanding straight generatrix. The complementary shapes of the two mean that these two tapered shapes can be perfectly matched, so that when the two tapered shapes are fitted together, there is no gap between them, or rather, the generatrices of the two tapered shapes are parallel. Thus, when the air inlet end 121 of the second nozzle 12 moves relative to the air outlet end 112 of the first nozzle 11 by means of the flat inclined plane, the end face 121a of the air inlet end 121 that is a flat inclined plane and the end face 112a of the air outlet end 112 that is a flat inclined plane will always maintain surface-to-surface contact and will not have point-to-surface contact.

[0056] In this way, on the one hand, the movement of the air inlet end 121 of the second nozzle 12 relative to the air outlet end 112 of the first nozzle 11 can be made smoother, so that the air inlet end 121 of the second nozzle 12 can be easily sleeved on the air outlet end 112 of the first nozzle 11; on the other hand, it can also avoid damage to the first nozzle 11 and the second nozzle 12 caused by point-to-surface contact.

[0057] In some embodiments, as Figures 5 to 7 shown, the inclined plane can be a convex arc-shaped inclined plane.

[0058] When the inclined plane is actually a conical surface as described above, the fact that the inclined plane is a convex arc means that the generatrix of the cone corresponding to the conical surface is arc-shaped, and the cone can be formed by rotating the arc-shaped generatrix around the axis of the cone. Specifically, for the first nozzle 11, the fact that the inclined plane is a convex arc means that the generatrix of the cone corresponding to the conical surface is a convex arc; for the second nozzle 11, the fact that the inclined plane is a convex arc means that the generatrix of the cone corresponding to the conical surface is a concave arc.

[0059] In this way, when the air inlet end 121 of the second nozzle 12 moves relative to the air outlet end 112 of the first nozzle 11 by means of the convex arc-shaped inclined plane, the movement can be continuously carried out along a smooth arc path, and the arc-shaped inclined plane can make the contact pressure more evenly distributed, thereby reducing the friction force, so that the movement can be carried out more smoothly, and thus it is easier to sleeve the air inlet end 121 of the second nozzle 12 on the air outlet end 112 of the first nozzle 11.

[0060] It can be envisaged that, as Figure 6 and Figure 7 shown, the end face 112a of the air outlet end 112 and the end face 121a of the air inlet end 121 can both be inclined planes, and one of the end face 112a of the air outlet end 112 and the end face 121a of the air inlet end 121 can be a convex arc-shaped inclined plane.

[0061] In this way, when the intake end 121 of the second nozzle 12 moves relative to the outlet end 112 of the first nozzle 11 by means of the convex arc-shaped inclined surface, before the front end of the end surface of the convex arc-shaped inclined surface contacts the other end surface of the inclined surface, the arc surface of this end surface will contact the other end surface, so that the relatively sharp front end will not contact the other end surface, thereby reducing the risk of damage to the first nozzle 11 and the second nozzle 12 that may be caused by the contact between the relatively sharp front end and the other end surface, i.e., point-surface contact.

[0062] It is conceivable that, as Figure 6 shown in Figure 7 , the other end surface can be a flat inclined surface, or, as

[0063] shown in

[0064] , the other end surface can be a convex arc-shaped inclined surface.

[0065] In this way, the probability of the front end of one end surface contacting the other end surface can be further reduced, thereby further reducing the risk of damage to the first nozzle 11 and the second nozzle 12 that may be caused by the contact between the relatively sharp front end and the other end surface.

[0066] The first nozzle 11 and the second nozzle 12 can be made of the same material or different materials. In some embodiments, the first nozzle 11 can be made of metal, and the second nozzle 12 can be made of graphite.

[0067] In addition, the outer diameter of the outlet end 112 of the first nozzle 11 can be equal to the inner diameter of the intake end 121 of the second nozzle 12. It should be noted that the equality here means that the outlet end 112 of the first nozzle 11 can just be inserted into the intake end 121 of the second nozzle 12, so that there is basically no gap between the outlet end 112 and the intake end 121 to obtain better airtightness.

[0068] According to another aspect of the present disclosure, referring to Figure 8, a CVD device 1 is also provided. The CVD device 1 includes an intake component 10.

[0069] The intake component 10 is disposed at the chamber wall 20 of the CVD device 1. Specifically, as previously discussed, the first nozzle 11 of the intake component 10 is disposed outside the chamber wall 20 of the CVD device 1, and the second nozzle 12 is disposed inside the chamber wall 20. By inserting the intake end 121 of the second nozzle 12 from the inside of the chamber of the CVD device 1 onto the outlet end 112 of the first nozzle 11 fixed to the chamber wall 20, the intake component 10 is assembled and the intake component 10 is mounted at the chamber wall 20.

[0070] In the present disclosure, although the present disclosure has been described with reference to exemplary embodiments, it should be understood that the present disclosure is not limited to the specific embodiments detailed and illustrated herein. Without departing from the scope defined by the claims of the present disclosure, those skilled in the art can make various changes to the exemplary embodiments.

[0071] The features mentioned and / or illustrated in the above description of the exemplary embodiments of the present disclosure can be combined in the same or similar manner into one or more other embodiments, combined with the features in other embodiments or replace the corresponding features in other embodiments. The technical solutions obtained by such combination or replacement should also be regarded as being included within the protection scope of the present disclosure.

Claims

1. An intake assembly for being disposed at a chamber wall of a chemical vapor deposition apparatus to supply gas to a chamber of the chemical vapor deposition apparatus, characterized in that, The intake assembly includes a first nozzle and a second nozzle both in tubular shape. The outlet end of the first nozzle can be inserted into the inlet end of the second nozzle. Wherein, at least one of the end face of the outlet end and the end face of the inlet end is an inclined surface, and the inclined surface is configured to guide the insertion of the outlet end into the inlet end.

2. The intake assembly according to claim 1, characterized in that, The inclined surface is a straight inclined surface.

3. The intake assembly according to claim 2, wherein Both the end face of the outlet end and the end face of the inlet end are the inclined surfaces, and the shape of the end face of the outlet end is complementary to the shape of the end face of the inlet end.

4. The intake assembly according to claim 1, characterized in that, The inclined surface is a convex arc-shaped inclined surface.

5. The intake assembly according to claim 1, characterized in that, Both the end face of the outlet end and the end face of the inlet end are the inclined surfaces, and one of the end face of the outlet end and the end face of the inlet end is a convex arc-shaped inclined surface.

6. The intake assembly according to claim 5, wherein The other of the end face of the outlet end and the end face of the inlet end is a convex arc-shaped inclined surface, and the end face of the outlet end and the end face of the inlet end are configured such that when the end face of the outlet end contacts the end face of the inlet end, the front end of the end face of the outlet end does not contact the arc-shaped portion of the end face of the inlet end other than its front end, and the front end of the end face of the inlet end does not contact the arc-shaped portion of the end face of the outlet end other than its front end.

7. The intake assembly according to any one of claims 1 to 6, characterized in that The first nozzle is made of metal, and the second nozzle is made of graphite.

8. The intake assembly according to any one of claims 1 to 6, characterized in that The outer diameter of the outlet end is equal to the inner diameter of the inlet end.

9. A chemical vapor deposition device, characterized in that, Comprising the intake assembly according to any one of claims 1 to 8.

10. The chemical vapor deposition apparatus according to claim 9, wherein The first nozzle is arranged outside the chamber wall of the chemical vapor deposition device, and the second nozzle is arranged inside the chamber wall.

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