Control wafer deposition tool
Through the design of the clamping shaft and clamping groove of the control panel deposition tool, the contact area of the graphite matrix is reduced, the problem of excessive contact area between the deposition device and the graphite matrix is solved, and the integrity and utilization of the silicon carbide layer are improved.
Patent Information
- Application Number
- CN202421296549.5
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-06-06
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-06-06
AI Technical Summary
During the chip manufacturing process, it is difficult for the prior art to effectively reduce the contact area between the deposition device and the graphite matrix, affecting the integrity and utilization of the silicon carbide control sheet.
A control panel deposition tool is adopted, including mounting components and rotating components. Through the design of the clamping shaft and the slot, the contact area between the clamping shaft and the graphite substrate is reduced, and the rotating components are used to ensure the uniformity of the deposition.
The integrity and utilization of the silicon carbide layer are improved, the uniformity of the deposition process is ensured, and the performance of subsequent use is enhanced.
Smart Images
Figure CN223150647U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the field of coating deposition, and specifically relates to a control chip deposition tooling. Background Art
[0002] During the chip manufacturing process, it is necessary to monitor the stability and reliability of machine equipment, and for this purpose, silicon carbide control chips are required. The preparation of silicon carbide control chips requires the use of chemical vapor deposition methods. Generally, the CVD method is used to prepare silicon carbide control chips. First, graphite plates are used as the substrate, and a certain thickness of silicon carbide layer is deposited on the graphite substrate by chemical deposition method. Then, the graphite substrate is removed through processing to obtain a pure CVD-SiC chip. During the deposition process, corresponding deposition devices are required. The deposition device is mainly used to place the graphite substrate. In order to ensure the deposition effect on the graphite substrate, it is necessary to minimize the contact area between the deposition device and the graphite, improve the integrity of the prepared CVD-SiC chip, and thereby improve the utilization rate of the CVD-SiC chip in the subsequent process. Summary of the Utility Model
[0003] The purpose of the utility model is to provide a control chip deposition tooling, aiming to reduce the contact area between the control chip deposition tooling and the graphite base, and improve the deposition uniformity.
[0004] To achieve the above purpose, the utility model adopts the following technical solutions:
[0005] A control chip deposition tooling includes an installation component. The installation component includes an installation plate and a plurality of clamping shafts arranged on the installation plate. The plurality of clamping shafts are used to jointly hold the installation plate. A clamping part is arranged on the installation plate, and the clamping part is used to adjust the position of the clamping shaft on the installation plate. A plurality of clamping grooves are formed on the outer surface of the clamping shaft. The clamping grooves are arranged in a strip shape along the length direction of the clamping shaft, and the plurality of clamping grooves are evenly spaced along the outer wall of the clamping shaft with the central axis of the clamping shaft as the center of the circle.
[0006] The beneficial effect is that when it is necessary to deposit a workpiece (generally a sheet-shaped graphite base), the graphite substrate is placed between the plurality of clamping shafts, and the graphite substrate is clamped and fixed by the clamping shafts. At the same time, since a plurality of clamping grooves are formed on the outer surface of the clamping shaft, protrusions are formed between the clamping grooves, and the protrusions are in contact with the graphite substrate during clamping. The arrangement of the clamping grooves reduces the contact area between the clamping shaft and the graphite substrate. Since the deposition will not occur at the contact position between the clamping shaft and the graphite substrate during the deposition of the graphite substrate, the reduction of the contact area also makes the prepared silicon carbide layer more complete, and improves the utilization efficiency of the prepared silicon carbide layer, making it more convenient to use in the subsequent process.
[0007] A further technical solution of the utility model is that a rotating component is connected to the installation plate, and the rotating component is used to drive the installation component to rotate.
[0008] A further technical solution of the present utility model is that a plurality of receiving grooves are provided on the clamping shaft, the receiving grooves are provided in a circle along the circumferential direction of the clamping shaft, and the plurality of receiving grooves are evenly distributed along the length direction of the clamping shaft.
[0009] A further technical solution of the present utility model is that the rotating assembly includes a rotating shaft and a connecting member. One end of the connecting member is fixedly connected to the rotating shaft, and the other end is fixedly connected to the mounting plate; a driving member for driving the rotating shaft to rotate is connected to the rotating shaft.
[0010] A further technical solution of the present utility model is that multiple groups of mounting assemblies are provided, and a plurality of connecting members are provided and correspond to the number of mounting assemblies; the multiple groups of mounting assemblies are evenly distributed along the circumferential direction with the rotating shaft as the center.
[0011] A further technical solution of the present utility model is that the mounting plate is circular, and a plurality of clamping shafts are evenly distributed along the circumferential direction of the mounting plate.
[0012] A further technical solution of the present utility model is that a connecting hole is provided on the mounting plate. The connecting hole is elongated along the direction close to the center of the mounting plate. One end of the clamping shaft is provided with a thread and penetrates through the connecting hole. A pair of the clamping members are provided on each clamping shaft. The clamping members are both threadedly connected to the clamping shaft and are distributed on both sides of the mounting plate. The clamping members are used to abut against the mounting plate.
[0013] A further technical solution of the present utility model is that the driving member is a motor.
[0014] The beneficial effects are as follows: By placing the graphite matrix between the clamping shafts, then moving the clamping shafts in the connecting holes to abut against the edge of the graphite matrix, and then through the threaded connection between the clamping members and the clamping shafts, a pair of clamping members on each clamping shaft respectively abut against both sides of the mounting plate, so that the clamping shafts are stably arranged on the mounting plate. After the positions of the clamping shafts are fixed, the clamping shafts stably clamp the graphite matrix. The setting of the card slots reduces the contact area between the clamping shafts and the graphite matrix, reduces the influence of the clamping shafts on the deposition of the graphite matrix, and cooperates with the rotation of the mounting plate by the rotating assembly, so that the surface of the graphite matrix is deposited more evenly, the formed silicon carbide coating is more complete, and the subsequent utilization efficiency is higher. BRIEF DESCRIPTION OF THE DRAWINGS
[0015] Figure 1 is the overall structural schematic diagram of the present utility model.
[0016] Figure 2 is Figure 1 the partial enlarged view at A in
[0017] Figure 3 is Figure 1A partial enlarged view of point B in the middle;
[0018] In the figure: 1-rotation assembly, 11-driving member, 12-rotation shaft, 13-connecting member, 2-mounting assembly, 21-mounting plate, 22-clamping shaft, 23-clamping groove, 3-accommodating groove, 4-connecting hole, 5-clamping member. DETAILED DESCRIPTION
[0019] The following is combined with Figures 1-3 The specific implementation methods of the utility model are further described.
[0020] like Figure 1 and Figure 2 As shown, the utility model discloses a control film deposition tooling, which includes a rotating assembly 1 and a mounting assembly 2. The rotating assembly 1 includes a rotating shaft 12 and a driving member 11. In this embodiment, the driving member 11 is set as a motor, and the output end of the motor is coaxially welded on the rotating shaft 12 and is used to drive the rotating shaft 12 to rotate; a plurality of connecting members 13 are arranged on the connecting shaft 12, and the plurality of connecting members 13 are welded to one end of the rotating shaft 12 away from the driving member 11, and the connecting member 13 is arranged perpendicular to the length direction of the rotating shaft 12. In this embodiment, the connecting member 13 is arranged perpendicular to the length direction of the rotating shaft 12. The number of the parts 13 is set to three, and the multiple connecting parts 13 are evenly distributed with the rotating shaft 12 as the central axis; each connecting part 13 is connected to a group of mounting components 2, and the mounting component 2 includes a mounting plate 21 and a clamping shaft 22. The mounting plate 21 is set to a circular plate, and the mounting plate 21 is welded to the end of the connecting part 13 away from the rotating shaft 12. The number of the clamping shafts 22 on each mounting plate 21 is set to multiple. In this embodiment, the number of the clamping shafts 22 is set to three, and the three clamping shafts 22 are evenly distributed along the circumferential side direction of the mounting plate 21. The clamping shaft 22 is used to abut against the graphite substrate. A long strip-shaped connecting hole 4 is opened on the mounting plate 21 along the diameter direction. The clamping shaft 22 is slidably connected to the mounting plate 21 along the length direction of the connecting hole 4. The number and position of the connecting holes 4 correspond to the clamping shaft 22. Each clamping shaft 22 is connected with a clamping piece 5 for fixing the clamping shaft 22 on the mounting plate 21. One end of the clamping shaft 22 passing through the connecting hole 4 is provided with a thread. In this embodiment, the clamping piece 5 is provided as a nut. There are two clamping pieces 5 on each clamping shaft 22, and the two clamping pieces 5 are provided. The three clamping members 5 are respectively arranged on the upper and lower sides of the mounting plate 21 and are all threadedly connected to the clamping members 5. When the graphite substrate needs to be deposited, the graphite substrate is placed between the three clamping shafts 22. The clamping shafts 22 are slid in the corresponding connecting holes 4 so that the side walls of the clamping shafts 22 abut against the graphite substrate. Then, the clamping members 5 are rotated so that the two clamping members 5 move relatively to clamp the mounting plate 21, so that the clamping shafts 22 are fixed on the mounting plate 21, and the graphite substrate is stably placed on the clamping shafts 22.
[0021] Combination Figure 1 andFigure 3 , in the present application, a plurality of card slots 23 are provided on the card connection shaft 22. The card slots 23 extend along the length direction of the card connection shaft 22 and are opened on the shaft surface of the card connection shaft 22. The plurality of card slots 23 are evenly and spacedly distributed along the circumferential direction of the card connection shaft 22. Protrusions are formed between the evenly spaced card slots 23 for abutting against the graphite base. This reduces the abutting area between the graphite base and the card connection shaft 22, makes the silicon carbide layer deposited on the graphite base more complete, and the subsequent use performance is better. A receiving groove 3 is opened along the circumferential direction on the card connection shaft 22. The number of the receiving grooves 3 is set to be a plurality. The plurality of receiving grooves 3 are evenly distributed along the length direction of the card connection shaft 22. The provision of the receiving groove 3 enables the edge of the graphite base to be inserted into the groove of the receiving groove 3 when the card connection shaft 22 is connected to the graphite base. Through the limiting action of the receiving groove 3, the graphite base is installed more stably. As a result, when it is subsequently deposited, the uniformity of deposition is ensured and the utilization rate of the coating is improved.
Claims
1. A control film deposition tooling, characterized in that It includes an installation component. The installation component includes an installation plate and a plurality of clamping shafts arranged on the installation plate. The plurality of clamping shafts are used to jointly clamp a workpiece and are slidably connected to the installation plate. A clamping member is arranged on the installation plate, and the clamping member is used to fix the clamping shafts on the installation plate. A plurality of card slots are formed on the outer surface of the clamping shaft, and the card slots extend along the length direction of the clamping shaft. The plurality of card slots are evenly spaced along the outer wall of the clamping shaft.
2. The control film deposition tooling according to claim 1, characterized in that, A plurality of receiving grooves are formed on the clamping shaft. The receiving grooves are formed in a circle along the circumferential direction of the clamping shaft, and the plurality of receiving grooves are evenly distributed along the length direction of the clamping shaft.
3. The control film deposition tooling according to claim 1, characterized in that, A rotating component is connected to the installation plate, and the rotating component is used to drive the installation component to rotate.
4. The control film deposition tooling according to claim 3, characterized in that, The rotating component includes a rotating shaft and a connecting member. One end of the connecting member is fixedly connected to the rotating shaft, and the other end is fixedly connected to the installation plate; a driving member for driving the rotating shaft to rotate is connected to the rotating shaft.
5. The controlled film deposition tooling according to claim 4, characterized in that, A plurality of groups of installation components are provided, and a plurality of the connecting members are provided and correspond to the number of installation components; the plurality of groups of installation components are evenly distributed along the circumferential direction with the rotating shaft as the center.
6. The control film deposition tooling according to claim 1, characterized in that, The installation plate is circular, and a plurality of clamping shafts are evenly distributed along the circumferential direction of the installation plate.
7. The control sheet deposition tooling according to claim 6, characterized in that, A connection hole is formed on the installation plate. The connection hole is elongated in the direction close to the center of the installation plate. One end of the clamping shaft is provided with a thread and is inserted into the connection hole. A pair of the clamping members are arranged on each clamping shaft. The clamping members are both threadedly connected to the clamping shaft and are distributed on both sides of the installation plate, and the clamping members are used to abut against the installation plate.
8. The control sheet deposition tooling according to claim 4, wherein, The driving member is a motor.