Detection device
By using a movable chuck and an eccentric measuring mechanism in the crystal rod detection device, the problem of different centers after crystallization is solved, the precise measurement of the eccentricity of the crystal rod and the timely adjustment of the process parameters is achieved, the unrounded area is reduced, and the production yield of the crystal rod is improved.
Patent Information
- Application Number
- CN202422444856.X
- Authority / Receiving Office
- CN · China
- Patent Type
- Utility models(China)
- Current Assignee / Owner
- Filing Date
- 2024-10-10
- Publication Date
- 2025-07-25
- Estimated Expiration
- 2034-10-10
AI Technical Summary
During the crystal growth process, the crystal rod has different centers after crystal formation due to the shaking of the seed rope and the unvertical furnace floor, which leads to large areas of unroundedness during the outer diameter rolling, which increases production costs and reduces product yield.
A detection device is provided, including first and second chucks on the stage, which moves in the first direction to clamp or release the crystal rod, and moves in the first direction in conjunction with an eccentric measurement mechanism to detect the eccentricity of the crystal rod, and realizes eccentricity measurement of different positions in the length direction of the crystal rod by rotary driving module and lifting module in conjunction with the eccentricity measurement sensor.
By monitoring the eccentric data of the crystal rod, timely adjusting the process parameters, reducing the unrounded area, reducing production costs and improving the yield of the crystal rod.
Smart Images
Figure CN223154250U_ABST
Abstract
Description
Technical Field
[0001] The utility model relates to the technical field of semiconductors, in particular to a detection device. Background Art
[0002] Crystal Boule or Crystal Ingot plays a vital role in the semiconductor industry. It is a key raw material form in the semiconductor manufacturing process, especially the basic material used to manufacture microelectronic components such as integrated circuits (ICs) and microprocessors.
[0003] Since the crystal is affected by the shaking of the seed crystal rope and the non-vertical furnace floor during the crystal pulling process, the crystal rod is not concentric after crystallization. When the outer diameter of the crystal rod is rolled to the target diameter, a large area of unrounded crystal rod will remain, reducing the product yield. Crystal rods with a large area of unrounded crystal rods need to be rolled again or directly scrapped, which increases production costs.
[0004] Therefore, it is urgent to provide a detection device to solve the above problems. Utility Model Content
[0005] The utility model aims to provide a detection device for monitoring the eccentricity data of a crystal rod, so as to facilitate timely adjustment of relevant process parameters, reduce the unrounded area, thereby reducing production costs and improving the yield rate of the crystal rod.
[0006] In order to achieve the above objectives, the following technical solutions are provided:
[0007] The detection device comprises:
[0008] A carrying unit, comprising a carrier, and a first chuck and a second chuck arranged on the carrier, wherein the central axis of the first chuck is the same as the central axis of the second chuck, and the first chuck and / or the second chuck can be moved along a first direction to clamp or release the crystal rod;
[0009] The detection unit includes a mounting frame and an eccentricity measuring mechanism, wherein the eccentricity measuring mechanism is arranged on the mounting frame and can move along the first direction, and the eccentricity measuring mechanism is used to detect the eccentricity of the crystal rod.
[0010] As an optional solution for the detection device, the carrying unit also includes a rotation drive module, which is arranged on the first chuck or the second chuck and is transmission-connected to the crystal rod, and is used to drive the crystal rod to rotate at a set angle around the central axis of the first chuck and the second chuck.
[0011] As an alternative to the detection device, the eccentric measurement mechanism further includes a lifting module and an eccentric measurement sensor. The fixed seat of the lifting module is connected to the mounting frame, and the eccentric measurement sensor is disposed on the movable seat of the lifting module. The movable seat can drive the eccentric measurement sensor to move in the second direction.
[0012] As an alternative to the detection device, a plurality of mounting holes are spaced along the third direction on the movable seat of the lifting module. The eccentric measurement sensor is connected to the mounting holes through fasteners.
[0013] As an alternative to the detection device, a guiding track extending along the first direction is provided on the mounting frame, and a slider is provided on the lifting module. The slider is slidably connected to the guiding track.
[0014] As an alternative to the detection device, the detection device further includes a handling unit for conveying the ingot to the clamping area formed between the first chuck and the second chuck.
[0015] As an alternative to the detection device, the handling unit includes a mounting seat and at least two clamping jaws disposed on the mounting seat. The two clamping jaws can approach each other to clamp the ingot or move away from each other to release the ingot.
[0016] As an alternative to the detection device, the handling unit includes a first moving module and a second moving module. The first moving module is disposed on the stage and can move in the first direction. The second moving module is disposed on the first moving module and can move in the third direction. The mounting frame is disposed on the second moving module.
[0017] As an alternative to the detection device, a rotating shaft extending along the first direction is rotatably provided on the second moving module. One end of the mounting seat is fixedly sleeved on the rotating shaft, and the rotating shaft is used to drive the mounting seat to flip by a set angle.
[0018] As an alternative to the detection device, the bearing unit further includes a lead screw module. The first chuck or the second chuck is in threaded transmission connection with the lead screw module.
[0019] Compared with the prior art, the beneficial effects of the present utility model:
[0020] The detection device provided by the present utility model is equipped with a first chuck and a second chuck having the same central axis on a stage. Among them, the first chuck and / or the second chuck can move relative to the stage along a first direction to clamp or release the ingot. The eccentric measurement mechanism is assembled onto the mounting frame. The eccentric measurement mechanism is not only used to detect the eccentricity of the ingot, but also can move along the first direction to measure the eccentricity at different positions in the length direction of the ingot, thereby monitoring the eccentric data of the ingot, facilitating timely adjustment of relevant process parameters, reducing the unrounded area, thus reducing production costs and improving the yield of the ingot. BRIEF DESCRIPTION OF THE DRAWINGS
[0021] In order to more clearly illustrate the technical solutions in the embodiments of the present utility model, the following will briefly introduce the drawings required for description in the embodiments of the present utility model. Obviously, the following-described drawings are only some embodiments of the present utility model. For those of ordinary skill in the art, without creative efforts, other drawings can also be obtained based on the content of the embodiments of the present utility model and these drawings.
[0022] Figure 1 It is an assembly schematic diagram of the detection device in the embodiment of the present utility model;
[0023] Figure 2 It is an exploded schematic diagram of the detection device in the embodiment of the present utility model;
[0024] Figure 3 It is an exploded schematic diagram of the handling unit in the embodiment of the present utility model.
[0025] Reference Numerals:
[0026] 100, ingot;
[0027] 1, bearing unit; 2, detection unit; 3, handling unit; 4, control module;
[0028] 11, stage; 12, first chuck; 13, second chuck; 14, rotation drive module; 15, lead screw module;
[0029] 21, mounting frame; 211, guide rail; 22, eccentric measurement mechanism; 221, lifting module; 2211, fixed seat; 2212, movable seat; 2213, mounting hole; 222, eccentric measurement sensor;
[0030] 31, mounting seat; 32, jaw; 33, first moving module; 34, second moving module; 35, rotating shaft. DETAILED DESCRIPTION OF THE EMBODIMENTS
[0031] To make the objectives, technical solutions, and advantages of the embodiments of the present utility model clearer, the technical solutions in the embodiments of the present utility model will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present utility model. Apparently, the described embodiments are some, but not all, of the embodiments of the present utility model. The components of the embodiments of the present utility model usually described and illustrated in the accompanying drawings herein can be arranged and designed in various different configurations.
[0032] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the accompanying drawings, or the orientation or positional relationship in which the utility model product is usually placed during use. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first", "second", "third", etc. are only used for descriptive distinction and should not be construed as indicating or implying relative importance. In the description of the present utility model, unless otherwise specified, the meaning of "a plurality" is two or more.
[0033] In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, the terms "set" and "connect" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.
[0034] The embodiments of the present utility model will be described in detail below. The examples of the embodiments are shown in the accompanying drawings, where the same or similar reference numerals represent the same or similar elements or elements with the same or similar functions from beginning to end. The embodiments described below with reference to the accompanying drawings are exemplary and are only used to explain the present utility model and should not be construed as a limitation of the present utility model.
[0035] In order to monitor the eccentricity data of the ingot, facilitate timely adjustment of relevant process parameters, reduce the unrounded area, thereby reducing production costs and improving the ingot yield, this embodiment provides a detection device. The following combines Figures 1 to 3 to describe the specific content of this embodiment in detail. It should be noted that the first direction and the length direction mentioned in this embodiment are both Figure 1 the X direction in Figure 1 and the second direction mentioned in this embodiment is Figure 1 the Z direction in
[0036] such asFigure 1 Combined with Figure 2 As shown, the detection device in this embodiment includes a carrier unit 1 and a detection unit 2. The carrier unit 1 includes a stage 11, a first chuck 12 and a second chuck 13 disposed on the stage 11. The central axes of the first chuck 12 and the second chuck 13 are the same. The first chuck 12 and / or the second chuck 13 can move in a first direction to clamp or release the ingot 100. The detection unit 2 includes a mounting bracket 21 and an eccentricity measurement mechanism 22. The eccentricity measurement mechanism 22 is disposed on the mounting bracket 21 and can move in the first direction. The eccentricity measurement mechanism 22 is used to detect the eccentricity of the ingot 100.
[0037] In short, for the detection device provided by the present utility model, a first chuck 12 and a second chuck 13 with the same central axis are installed on the stage 11. Among them, the first chuck 12 and / or the second chuck 13 can move relative to the stage 11 in the first direction to clamp or release the ingot 100. The eccentricity measurement mechanism 22 is assembled on the mounting bracket 21. The eccentricity measurement mechanism 22 is not only used to detect the eccentricity of the ingot 100, but also the eccentricity measurement mechanism 22 can move in the first direction to measure the eccentricity at different positions in the length direction of the ingot 100, so as to monitor the eccentricity data of the ingot 100, facilitate timely adjustment of relevant process parameters, reduce the unrounded area, thereby reducing production costs and improving the yield of the ingot 100.
[0038] Furthermore, the carrier unit 1 further includes a rotation driving module 14. The rotation driving module 14 is disposed on the first chuck 12 or the second chuck 13 and is in transmission connection with the ingot 100. The rotation driving module 14 is used to drive the ingot 100 to rotate a set angle around the central axes of the first chuck 12 and the second chuck 13. By adding the rotation driving module 14, the rotation driving module 14 can drive the ingot 100 to rotate. The detection device in this embodiment can measure data at any equal-diameter point in the length direction of the ingot 100. Exemplarily, 4 groups of data can be measured at any equal-diameter point of the ingot 100, and a group of data is measured every 90° to present the eccentricity data of the ingot 100, feedback the specific position and eccentricity of the ingot 100, provide a basis for the crystal pulling team, provide real-time feedback on the state of the furnace platform, control the eccentricity of the ingot 100 within the target range, and reduce costs and increase efficiency.
[0039] Further, the eccentric measurement mechanism 22 further includes a lifting module 221 and an eccentric measurement sensor 222. The fixed seat 2211 of the lifting module 221 is connected to the mounting bracket 21. The eccentric measurement sensor 222 is disposed on the movable seat 2212 of the lifting module 221, and the movable seat 2212 can drive the eccentric measurement sensor 222 to move along the second direction. After the ingot 100 is clamped between the first chuck 12 and the second chuck 13, the eccentric measurement sensor 222 descends under the drive of the movable seat 2212 of the lifting module 221 and approaches the outer wall surface of the ingot 100 for measuring the eccentricity of the ingot 100. After the measurement is completed, the lifting module 221 raises the eccentric measurement sensor 222 and moves it away from the ingot 100 to avoid structural interference between the rotating ingot 100 and the eccentric measurement sensor 222.
[0040] Further, a plurality of mounting holes 2213 are arranged at intervals along the third direction on the movable seat 2212 of the lifting module 221. The eccentric measurement sensor 222 is connected to the mounting holes 2213 through fasteners. By adding a plurality of mounting holes 2213, it is convenient to adjust the mounting position of the eccentric measurement sensor 222 along the third direction to meet the measurement of different types of ingots 100 and expand the application range of the detection device.
[0041] Further, a guiding track 211 extending along the first direction is provided on the mounting bracket 21, and a sliding block is provided on the lifting module 221. The sliding block is slidably connected to the guiding track 211. By adding the guiding track 211 and the sliding block, it is convenient to guide the lifting module 221 to move relative to the mounting bracket 21 along the first direction for changing the measurement position of the eccentric measurement sensor 222 with respect to the ingot 100.
[0042] Further, the detection device further includes a handling unit 3. The handling unit 3 is used to convey the ingot 100 to the clamping area formed between the first chuck 12 and the second chuck 13. When the ingot 100 needs to be measured, the handling unit 3 is used for loading and unloading, eliminating the need for manual handling and improving the automation and working efficiency of the operation.
[0043] Exemplarily, the handling unit 3 includes a mounting seat 31 and at least two clamping jaws 32 disposed on the mounting seat 31. The two clamping jaws 32 can approach each other to clamp the ingot 100 or move away from each other to release the ingot 100. The cooperation of the two clamping jaws 32 is used to clamp the ingot 100, avoiding the risk of the ingot 100 falling during handling. It can be understood that, in order to improve the clamping stability of the ingot 100, the number of clamping jaws 32 can be increased on the mounting seat 31 according to the actual use situation, and no excessive limitation is imposed here.
[0044] Further, the handling unit 3 includes a first moving module 33 and a second moving module 34. The first moving module 33 is disposed on the stage 11 and can move along a first direction. The second moving module 34 is disposed on the first moving module 33 and can move along a third direction. The mounting bracket 21 is disposed on the second moving module 34. By adding the first moving module 33 and the second moving module 34, it is convenient to move the ingot 100 along the first direction and the third direction after placing it on the gripper 32 and transport it to the target position. Optionally, both the detection unit 2 and the handling unit 3 are electrically connected to the control module 4, and the control module 4 is used to control the operations of the detection unit 2 and the handling unit 3.
[0045] Further, a rotating shaft 35 extending along the first direction is rotatably disposed on the second moving module 34. One end of the mounting seat 31 is fixedly sleeved on the rotating shaft 35, and the rotating shaft 35 is used to drive the mounting seat 31 to flip by a set angle. By adding the rotating shaft 35, it is convenient to put the ingot 100 in or take it out by flipping, increasing the handling methods of the ingot 100.
[0046] Further, the bearing unit 1 further includes a lead screw module 15, and the first chuck 12 or the second chuck 13 is in threaded transmission connection with the lead screw module 15. By rotating the lead screw in the lead screw module 15, the first chuck 12 or the second chuck 13 moves along the first direction, thereby reducing the material clamping area between the first chuck 12 and the second chuck 13.
[0047] Note that the above is only the preferred embodiment of the present invention and the applied technical principle. Those skilled in the art will understand that the present invention is not limited to the specific embodiments described here. Various obvious changes, re-adjustments and substitutions can be made by those skilled in the art without departing from the protection scope of the present invention. Therefore, although the present invention has been described in detail through the above embodiments, the present invention is not limited to the above embodiments. Without departing from the concept of the present invention, more other equivalent embodiments can be included, and the scope of the present invention is determined by the scope of the appended claims.
Claims
1. Detection device, characterized in that, Comprising: A carrying unit (1), including a stage (11) and a first chuck (12) and a second chuck (13) disposed on the stage (11). The central axis of the first chuck (12) is the same as that of the second chuck (13). The first chuck (12) and / or the second chuck (13) can move in a first direction to clamp or release a crystal bar (100); A detection unit (2), including a mounting frame (21) and an eccentricity measurement mechanism (22). The eccentricity measurement mechanism (22) is disposed on the mounting frame (21) and can move in the first direction. The eccentricity measurement mechanism (22) is used to detect the eccentricity of the crystal bar (100).
2. The detection device according to claim 1, wherein The carrying unit (1) further includes a rotation driving module (14). The rotation driving module (14) is disposed on the first chuck (12) or the second chuck (13) and is in transmission connection with the crystal bar (100). The rotation driving module (14) is used to drive the crystal bar (100) to rotate by a set angle around the central axis of the first chuck (12) and the second chuck (13).
3. The detection device according to claim 1, characterized in that, The eccentricity measurement mechanism (22) further includes a lifting module (221) and an eccentricity measurement sensor (222). The fixed seat (2211) of the lifting module (221) is connected to the mounting frame (21). The eccentricity measurement sensor (222) is disposed on the movable seat (2212) of the lifting module (221). The movable seat (2212) can drive the eccentricity measurement sensor (222) to move in a second direction.
4. The detection device according to claim 3, wherein A plurality of mounting holes (2213) are spaced along a third direction on the movable seat (2212) of the lifting module (221). The eccentricity measurement sensor (222) is connected to the mounting holes (2213) through fasteners.
5. The detection device according to claim 3, wherein A guiding track (211) extending along the first direction is disposed on the mounting frame (21). A slider is disposed on the lifting module (221). The slider is slidably connected to the guiding track (211).
6. The detection device according to claim 1, characterized in that, The detection device further includes a handling unit (3). The handling unit (3) is used to convey the crystal bar (100) to a clamping area formed between the first chuck (12) and the second chuck (13).
7. The detection device according to claim 6, characterized in that, The handling unit (3) includes a mounting seat (31) and at least two jaws (32) disposed on the mounting seat (31). The two jaws (32) can approach each other to clamp the crystal bar (100) or move away from each other to release the crystal bar (100).
8. The detection device according to claim 7, characterized in that, The handling unit (3) includes a first moving module (33) and a second moving module (34). The first moving module (33) is disposed on the stage (11) and can move in the first direction. The second moving module (34) is disposed on the first moving module (33) and can move in the third direction. The mounting frame (21) is disposed on the second moving module (34).
9. The detection device according to claim 8, characterized in that, A rotating shaft (35) extending along the first direction is rotatably arranged on the second moving module (34), and one end of the mounting base (31) is fixedly sleeved on the rotating shaft (35). The rotating shaft (35) is used to drive the mounting base (31) to flip by a set angle.
10. The detection device according to any one of claims 1-9, characterized in that, The carrying unit (1) further includes a lead screw module (15), and the first chuck (12) or the second chuck (13) is in threaded driving connection with the lead screw module (15).