Capacitor film vacuum gauge detection device

Abstract

The utility model discloses a capacitance film vacuum gauge detection device which is characterized in that the upper surface of a base is fixedly connected with a hydraulic rod I, the output end of the hydraulic rod I is fixedly connected with a sliding frame, the outer surface of the sliding frame is fixedly connected with a lead screw motor, and the output end of the lead screw motor is in threaded connection with a detection device main body; the lower surface of the detection device body is slidably connected with the sliding frame through a sliding rail, the upper surface of the base is fixedly connected with a first fixing block, the outer surface of the first fixing block is fixedly connected with a first guide rod, and one end of the first guide rod is fixedly connected with a second fixing block. The detection device main body is convenient to detect and maintain, and the detection device main body moves on the sliding frame through rotation of the screw rod motor, so that maintenance personnel do not need to move frequently; and through the slidable part containing box and the slidable tool containing box on the base, the disorder of a working area is reduced, and the cleanliness of the working environment is improved.

Description

Technical Field

[0001] The utility model relates to the technical field of detection, and particularly relates to a detection device for a capacitance thin-film vacuum gauge. Background Art

[0002] The capacitance thin-film vacuum gauge is made according to the principle that an elastic film generates strain under the action of a pressure difference, causing a change in capacitance. When the diaphragm is subjected to a pressure difference, the diaphragm will deflect, resulting in a change in capacitance. Finally, the change in capacitance is converted into a voltage signal through a measurement conversion circuit. The capacitance thin-film vacuum gauge and the electronic display unit are often used as metrological standard instruments in the low-vacuum range, with the characteristics of high measurement accuracy, good linearity, high sensitivity, and measurement results being independent of the gas type. It is widely used in many fields such as aerospace, semiconductors, medicine, and chemical engineering. However, in the prior art, the detection devices for common capacitance thin-film gauges are relatively complex and require a large amount of space, making detection inconvenient. Maintenance personnel need to move around the detection device, and during maintenance, the working area is relatively messy. Content of the Utility Model

[0003] An object of the utility model is to solve at least one of the technical problems existing in the prior art, and provide a detection device for a capacitance thin-film vacuum gauge. By using a hydraulic rod to lift the detection device body on the sliding frame, the detection device body is convenient for detection and maintenance. By rotating the screw motor, the detection device body moves on the sliding frame, so that maintenance personnel do not need to move frequently. Through the slidable part placement box and tool placement box on the base, the mess in the working area is reduced, and the cleanliness of the working environment is improved.

[0004] The utility model also provides a detection device for a capacitance thin-film vacuum gauge as described above, including: a base, on the upper surface of the base is fixedly connected a hydraulic rod I, the output end of the hydraulic rod I is fixedly connected with a sliding frame, on the outer surface of the sliding frame is fixedly connected a screw motor, the output end of the screw motor is threadedly connected with a detection device body, the lower surface of the detection device body is slidably connected with the sliding frame through a slide rail, on the upper surface of the base is fixedly connected a fixing block I, on the outer surface of the fixing block I is fixedly connected a guide rod I, one end of the guide rod I is fixedly connected with a fixing block II, the outer surface of the guide rod I is slidably connected with a sliding plate, on the upper surface of the sliding plate is fixedly connected a tool placement box, and on the upper surface of the sliding plate is fixedly connected a part placement box.

[0005] According to the detection device for a capacitance thin-film vacuum gauge of the utility model, the lower surface of the sliding plate abuts against the upper surface of the base, and both the lower surface of the sliding plate and the upper surface of the base are smooth surfaces, which can significantly reduce the friction during sliding, making the sliding plate move more smoothly on the base, helping to maintain the stability of the sliding plate, and avoiding jamming or imbalance during use.

[0006] A capacitance film vacuum gauge detection device according to the present utility model, the outer surface of the tool placement box is fixedly connected to the part placement box, the outer surface of the sliding plate is fixedly connected with a handle. The fixed connection between the tool placement box and the part placement box enhances the stability of the overall structure and optimizes the utilization of space. The design of the handle makes the operation of the sliding plate more convenient. The operator can easily pull or push the sliding plate, improving work efficiency.

[0007] A capacitance film vacuum gauge detection device according to the present utility model, the inner surface of the sliding frame is fixedly connected with a second guide rod, and the outer surface of the second guide rod is slidably connected to the detection device main body. The design of the second guide rod ensures the stability and precision of the sliding, improving the flexibility of the device.

[0008] A capacitance film vacuum gauge detection device according to the present utility model, the outer surface of the base is equipped with wheels, and the lower surface of the base is fixedly connected with a second hydraulic rod. The wheels installed on the base enable the entire detection device to be easily moved, facilitating transfer between different working areas.

[0009] A capacitance film vacuum gauge detection device according to the present utility model, the lower surface of the second hydraulic rod is fixedly connected with a fixing pad, and the material of the fixing pad is rubber. When the wheels are not in use, the fixing pad is lowered to prevent the device from moving. The rubber fixing pad provides good grip, preventing the device from sliding or moving during use and ensuring the safety of the operation.

[0010] A capacitance film vacuum gauge detection device according to the present utility model, the tool placement box and the part placement box are located below the detection device main body, and the fixing pad is located outside the wheels. Setting the tool and part placement boxes below the detection device main body optimizes the space layout, making the working area cleaner. The fixing pad located outside the wheels increases the stability of the device and reduces the risk of accidental movement during use.

[0011] Beneficial effects

[0012] 1. Compared with the prior art, for this capacitance film vacuum gauge detection device, by using the first hydraulic rod to lift and lower the detection device main body on the sliding frame, the detection device main body is convenient for detection and maintenance. By rotating the screw motor, the detection device main body moves on the sliding frame, so that the maintenance personnel do not need to move frequently.

[0013] 2. Compared with the prior art, for this capacitance film vacuum gauge detection device, through the slidable part placement box and tool placement box on the base, the clutter in the working area is reduced, and the cleanliness of the working environment is improved. Description of the drawings

[0014] The present utility model will be further described below in conjunction with the accompanying drawings and embodiments:

[0015] Figure 1 It is the overall structure diagram of a capacitance film vacuum gauge detection device of the present utility model;

[0016] Figure 2 It is the bottom view of a capacitance film vacuum gauge detection device of the present utility model;

[0017] Figure 3 It is the schematic connection diagram of the sliding frame of a capacitance film vacuum gauge detection device of the present utility model;

[0018] Figure 4 It is the schematic connection diagram of the base of a capacitance film vacuum gauge detection device of the present utility model.

[0019] Legend description:

[0020] 1. Base; 2. First hydraulic rod; 3. Sliding frame; 4. Lead screw motor; 5. Detection device main body; 6. First fixing block; 7. First guide rod; 8. Second fixing block; 9. Sliding plate; 10. Tool placement box; 11. Part placement box; 12. Handle; 13. Second guide rod; 14. Wheel; 15. Second hydraulic rod; 16. Fixed pad. Specific implementation manners

[0021] This part will describe in detail the specific embodiments of the present utility model. The preferred embodiments of the present utility model are shown in the accompanying drawings. The function of the drawings is to supplement the description of the text part of the specification, enabling people to intuitively and vividly understand each technical feature and the overall technical solution of the present utility model, but it cannot be construed as a limitation on the protection scope of the present utility model.

[0022] Refer to Figures 1-4, an inspection device for a capacitive thin-film vacuum gauge in an embodiment of the present utility model, which includes: a base 1 that provides basic support for the entire device. A first hydraulic rod 2 is fixedly connected to the upper surface of the base 1 to provide a lifting function for the inspection device main body 5 on the sliding frame 3. The output end of the first hydraulic rod 2 is fixedly connected to a sliding frame 3 to support the inspection device main body 5 and at the same time enable the inspection device main body 5 to slide. A screw motor 4 is fixedly connected to the outer surface of the sliding frame 3. By rotating, the inspection device main body 5 can be moved. The output end of the screw motor 4 is threadedly connected to the inspection device main body 5 to inspect the capacitive thin-film vacuum gauge. The lower surface of the inspection device main body 5 is slidably connected to the sliding frame 3 through a slide rail. A first fixing block 6 is fixedly connected to the upper surface of the base 1 and cooperates with a second fixing block 8 to fix a first guide rod 7. A first guide rod 7 is fixedly connected to the outer surface of the first fixing block 6 to provide a sliding function for the sliding plate 9. One end of the first guide rod 7 is fixedly connected to a second fixing block 8, which cooperates with the first fixing block 6 to fix the first guide rod 7. A sliding plate 9 is slidably connected to the outer surface of the first guide rod 7 to fix the positions of the tool placement box 10 and the part placement box 11. A tool placement box 10 is fixedly connected to the upper surface of the sliding plate 9 to place tools for inspecting and maintaining the inspection device main body 5. A part placement box 11 is fixedly connected to the upper surface of the sliding plate 9 to place parts required by the inspection device main body 5.

[0023] The lower surface of the sliding plate 9 abuts against the upper surface of the base 1. Both the lower surface of the sliding plate 9 and the upper surface of the base 1 are smooth surfaces. The outer surface of the tool placement box 10 is fixedly connected to the part placement box 11. A handle 12 is fixedly connected to the outer surface of the sliding plate 9 to make it more convenient to pull or push in the sliding plate 9. A second guide rod 13 is fixedly connected to the inner surface of the sliding frame 3 to make the movement of the inspection device main body 5 more stable. The outer surface of the second guide rod 13 is slidably connected to the inspection device main body 5. Wheels 14 are installed on the outer surface of the base 1 to facilitate the movement of the inspection device main body 5 in different areas. A second hydraulic rod 15 is fixedly connected to the lower surface of the base 1 to provide a lifting function for the fixing pad 16. A fixing pad 16 is fixedly connected to the lower surface of the second hydraulic rod 15 to prevent the equipment from moving. The material of the fixing pad 16 is rubber. The tool placement box 10 and the part placement box 11 are located below the inspection device main body 5, and the fixing pad 16 is located outside the wheels 14.

[0024] Working principle: When maintenance and repair are required, first use the hydraulic rod 2 on the base 1 to raise the sliding frame 3, and then the staff can sit on the base 1 and start the maintenance and repair of the detection device main body 5 on the sliding frame 3. When maintenance and repair are required on the front and back sides of the detection device main body 5, the staff does not need to move. Just use the screw motor 4 to rotate, so that the detection device main body 5 moves on the sliding frame 3; when using tools and placing parts, the sliding plate 9 can be directly pulled by the handle 12 to move the tool placement box 10 and the part placement box 11 on it. When not in use, the sliding plate 9 can be directly pushed back by the handle 12 without affecting the staff's maintenance and repair.

[0025] The embodiments of the present invention have been described in detail above in conjunction with the accompanying drawings. However, the present invention is not limited to the above embodiments. Within the scope of knowledge possessed by those of ordinary skill in the art, various changes can also be made without departing from the purpose of the present invention.

Claims

1. A capacitance film vacuum gauge detection device, characterized in that, Including: A base (1), on the upper surface of the base (1) is fixedly connected with a first hydraulic rod (2), the output end of the first hydraulic rod (2) is fixedly connected with a sliding frame (3), on the outer surface of the sliding frame (3) is fixedly connected with a lead screw motor (4), the output end of the lead screw motor (4) is threadedly connected with a main body of the detection device (5), the lower surface of the main body of the detection device (5) is slidably connected with the sliding frame (3) through a slide rail, on the upper surface of the base (1) is fixedly connected with a first fixing block (6), on the outer surface of the first fixing block (6) is fixedly connected with a first guide rod (7), one end of the first guide rod (7) is fixedly connected with a second fixing block (8), on the outer surface of the first guide rod (7) is slidably connected with a sliding plate (9), on the upper surface of the sliding plate (9) is fixedly connected with a tool placement box (10), and on the upper surface of the sliding plate (9) is fixedly connected with a part placement box (11).

2. The capacitance thin-film vacuum gauge detection device according to claim 1, characterized in that, The lower surface of the sliding plate (9) abuts against the upper surface of the base (1), and both the lower surface of the sliding plate (9) and the upper surface of the base (1) are smooth surfaces.

3. The capacitance thin-film vacuum gauge detection device according to claim 1, characterized in that, The outer surface of the tool placement box (10) is fixedly connected with the part placement box (11), and on the outer surface of the sliding plate (9) is fixedly connected with a handle (12).

4. The capacitance thin-film vacuum gauge detection device according to claim 1, wherein, On the inner surface of the sliding frame (3) is fixedly connected with a second guide rod (13), and the outer surface of the second guide rod (13) is slidably connected with the main body of the detection device (5).

5. The capacitance thin-film vacuum gauge detection device according to claim 1, wherein On the outer surface of the base (1) are installed wheels (14), and on the lower surface of the base (1) is fixedly connected with a second hydraulic rod (15).

6. The capacitance film vacuum gauge detection device according to claim 5, wherein, On the lower surface of the second hydraulic rod (15) is fixedly connected with a fixing pad (16), and the material of the fixing pad (16) is rubber.

7. The capacitance thin-film vacuum gauge detection device according to claim 6, wherein The tool placement box (10) and the part placement box (11) are located below the main body of the detection device (5), and the fixing pad (16) is located outside the wheels (14).

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