Automatic test device and system of electron gun

Abstract

The utility model provides an automatic test device and system of an electron gun, and relates to the technical field of vacuum coating, the automatic test device comprises a controller, a signal acquisition module and a signal output module; the controller is connected with the signal output module, and the controller generates a test signal according to the received input signal and sends the test signal to the signal output module; the signal output module is connected with the plurality of electron guns, and the signal output module sends the test signal to the plurality of electron guns so as to control the plurality of electron guns by using the test signal; the plurality of electron guns are connected with the signal acquisition module, and the signal acquisition module acquires feedback signals of the plurality of electron guns for the test signals and sends the feedback signals to the controller, so that the controller determines test results of the plurality of electron guns according to the feedback signals. By adopting the automatic test device and system of the electronic gun, the problems of high test cost and low test efficiency when the function test is carried out on the electronic gun are solved.

Description

Technical Field

[0001] The present application relates to the technical field of vacuum coating, and specifically, to an automatic testing device and system for an electron gun. Background Art

[0002] Vacuum coating technology can deposit thin films of metals, semiconductors, insulators, alloys with different component ratios, compounds, and some organic polymers on the surfaces of metals, semiconductors, insulators, plastics, papers, fabrics, etc., and its application range is extremely wide. Since an electron gun is required during the vacuum coating process, and the electron gun generates a DC voltage of 10 kV during operation, which is somewhat dangerous to operators, it is necessary to perform functional tests on the electron gun under specific conditions to ensure that the electron gun can work safely and normally.

[0003] However, in the prior art, a vacuum coater is usually used to perform functional tests on an electron gun. The vacuum coater not only has a high price, but also tests one electron gun each time, resulting in high test costs and low test efficiency. Summary of the Utility Model

[0004] In view of this, the purpose of the present application is to provide an automatic testing device and an automatic testing system for an electron gun to solve the problems of high test costs and low test efficiency when performing functional tests on an electron gun.

[0005] In a first aspect, an embodiment of the present application provides an automatic testing device for an electron gun. The automatic testing device includes a controller, a signal acquisition module, and a signal output module;

[0006] The controller is connected to the signal output module. The controller generates a test signal according to the received input signal and sends the test signal to the signal output module;

[0007] The signal output module is connected to multiple electron guns. The signal output module sends the test signal to the multiple electron guns to control the multiple electron guns by using the test signal;

[0008] The multiple electron guns are connected to the signal acquisition module. The signal acquisition module acquires feedback signals of the multiple electron guns for the test signal and sends the feedback signals to the controller, so that the controller determines the test results of the multiple electron guns according to the feedback signals.

[0009] Optionally, the signal acquisition module includes a digital quantity signal acquisition module and an analog quantity signal acquisition module, and both the digital quantity signal acquisition module and the analog quantity signal acquisition module are multi-channel acquisition modules.

[0010] Optionally, the digital signal acquisition module and the analog signal acquisition module are respectively connected to the controller; the digital signal acquisition module acquires the digital feedback signals of multiple electron guns and sends the digital feedback signals to the controller; the analog signal acquisition module acquires the analog feedback signals of multiple electron guns and sends the analog feedback signals to the controller.

[0011] Optionally, the signal output module includes a digital signal output module and an analog signal output module, and both the digital signal output module and the analog signal output module are multi-channel output modules.

[0012] Optionally, the digital signal output module and the analog signal output module are respectively connected to the controller; the digital signal output module sends the received digital test signal to multiple electron guns so that the multiple electron guns work according to the above digital test signal; the analog signal output module sends the received analog test signal to multiple electron guns so that the multiple electron guns work according to the analog test signal.

[0013] Optionally, the automatic test device further includes an information display module; the information display module is connected to the controller, and the information display module receives the feedback signal sent by the controller and displays the working state information of multiple electron guns according to the feedback signal.

[0014] Optionally, the controller is of the CPU 1215C DC / DC / DC model.

[0015] Optionally, the digital signal acquisition module is of the SM 1223DI16 / DQ16 model, and the analog signal acquisition module is of the SM 1231AI8 model.

[0016] Optionally, the digital signal output module is of the SM 1223DI16 / DQ16 model, and the analog signal output module is of the SM 1232AQ4 model.

[0017] In a second aspect, an embodiment of the present application further provides an automatic test system for an electron gun, and the system includes multiple electron guns and the automatic test device for an electron gun as described above.

[0018] The embodiments of the present application bring the following beneficial effects:

[0019] An automatic test device and system for an electron gun provided by an embodiment of the present application can automatically test an electron gun through an automatic test device composed of multiple modules. The entire automatic test process does not require the use of a vacuum coating machine, reducing the test cost. At the same time, the automatic test device can be used to test multiple electron guns simultaneously, improving the test efficiency. Compared with the test device for an electron gun in the prior art, the problems of high test cost and low test efficiency in functional testing of an electron gun are solved.

[0020] To make the above objects, features, and advantages of the present application more obvious and understandable, the following provides preferred embodiments in conjunction with the accompanying drawings and describes them in detail as follows. BRIEF DESCRIPTION OF THE DRAWINGS

[0021] To more clearly illustrate the technical solutions of the embodiments of the present application, the following briefly introduces the drawings required for use in the embodiments. It should be understood that the following drawings only show some embodiments of the present application and should not be regarded as limiting the scope. For those of ordinary skill in the art, without creative efforts, other related drawings can be obtained based on these drawings.

[0022] Figure 1 Shows a schematic structural diagram of an automatic test device for an electron gun provided by an embodiment of the present application;

[0023] Figure 2 Shows a schematic structural diagram of SM 1223DI16 / DQ16 provided by an embodiment of the present application;

[0024] Figure 3 Shows a schematic structural diagram of an automatic test system for an electron gun provided by an embodiment of the present application. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0025] To make the objects, technical solutions, and advantages of the embodiments of the present application clearer, the following will clearly and completely describe the technical solutions in the embodiments of the present application in conjunction with the drawings in the embodiments of the present application. Obviously, the described embodiments are only a part of the embodiments of the present application, rather than all of them. Usually, the components of the embodiments of the present application described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present application provided in the drawings is not intended to limit the scope of the present application to be protected, but only represents the selected embodiments of the present application. Based on the embodiments of the present application, every other embodiment obtained by those of ordinary skill in the art without creative efforts belongs to the scope of protection of the present application.

[0026] It should be noted that before the present application was proposed, vacuum coating technology could deposit thin films of metals, semiconductors, insulators, alloys with different component ratios, compounds, and some organic polymers on the surfaces of metals, semiconductors, insulators, plastics, papers, fabrics, etc., and its application scope was extremely wide. Since an electron gun needs to be used during the vacuum coating process, and the electron gun generates a DC voltage of 10 kV during operation, which is somewhat dangerous to operators, it is necessary to perform a function test on the electron gun under specific conditions to ensure that the electron gun can work safely and normally. The electron gun needs to meet conditions such as water flow, vacuum, and safety door to be normally turned on. In the prior art, usually a vacuum coating machine is used to meet the above conditions at the same time. After the electron gun is turned on, it is necessary to test whether the relevant performance of the electron gun is normal. For example, whether the high-voltage signal and beam current signal are normal. This requires a special person to operate the remote control box of the electron gun and manually check each function according to experience. At the same time, limited by conditions such as the space of the vacuum coating machine and the number of operators, only one electron gun can be tested at a time. If multiple electron guns need to be tested, only one can be tested first and then another electron gun can be replaced. It can be seen that the current electron gun test method has problems of high cost, high professional skill requirements for personnel, and low test efficiency.

[0027] Based on this, the embodiment of the present application provides an automatic test device for an electron gun to improve the test efficiency of the electron gun and reduce the test cost.

[0028] Please refer to Figure 1 , Figure 1 which is a schematic structural diagram of an automatic test device for an electron gun provided by the embodiment of the present application. As Figure 1 shown, the automatic test device 10 for an electron gun includes a controller 11, a signal acquisition module 12, and a signal output module 13.

[0029] The controller 11 is connected to the signal output module 13. The controller 11 generates a test signal according to the received input signal and sends the test signal to the signal output module 13. The signal output module 13 is connected to multiple electron guns. The signal output module 13 sends the test signal to the multiple electron guns to control the multiple electron guns by using the test signal. The multiple electron guns are connected to the signal acquisition module 12. The signal acquisition module 12 acquires the feedback signals of the multiple electron guns for the test signal and sends the feedback signals to the controller 11, so that the controller 11 determines the test results of the multiple electron guns according to the feedback signals.

[0030] In the embodiment of the present application, electrical control components such as programmable logic controllers (referred to as PLCs) are used to implement the automatic test device 10 of the electron gun. The controller 11 in the automatic test device 10 of the electron gun is a CPU (Central Processing Unit) of the Siemens CPU 1215CDC / DC / DC model. Among them, the first "DC" indicates that the power supply of this model of PLC is a direct current of 24V, the second "DC" indicates that the digital (switching) input of the PLC is a transistor-type signal input, and the digital input can only be of the transistor type. The third "DC" indicates that the digital output type of the PLC is of the transistor type. This means that the controller 11 is suitable for a direct current power supply environment, its digital input and output are both of the transistor type, suitable for high-speed pulse output, but the maximum current output capacity is 0.5A, and the load-carrying capacity is relatively weak.

[0031] Taking a single electron gun as an example, the following describes the function test process of the electron gun. The input signals include a vacuum signal, a water flow signal, and a safety door signal. The controller 11 receives the vacuum signal, the water flow signal, and the safety door signal input by the host computer, generates a start test signal, and the controller 11 sends the start test signal to the signal output module 13. After receiving the start test signal, the signal output module 13 sends the start test signal to the electron gun. After each electron gun receives the start test signal, all safety conditions are met, and thus it is normally turned on. After the electron gun is normally turned on, the controller 11 generates a switching quantity test signal according to the electron gun test process. The switching quantity test signal includes a remote control turn-on signal, a high-voltage turn-on signal, and a filament turn-on signal, and sends the remote control turn-on signal, the high-voltage turn-on signal, and the filament turn-on signal to the electron gun through the signal output module 13. After the electron gun receives the remote control turn-on signal, the high-voltage turn-on signal, and the filament turn-on signal, it generates a high-voltage feedback signal corresponding to the high-voltage turn-on signal and a filament feedback signal corresponding to the filament turn-on signal. Among them, the feedback signal includes the high-voltage feedback signal and the filament feedback signal; the vacuum signal, the water flow signal, and the safety door signal are respectively used to simulate the vacuum condition, the water flow condition, and the safety door condition.

[0032] The signal acquisition module 12 is connected to the electron gun. The signal acquisition module 12 acquires the high-voltage feedback signal and the filament feedback signal generated by the electron gun, and sends the high-voltage feedback signal and the filament feedback signal to the controller 11. The controller 11 determines whether the electron gun is working properly according to the received feedback signal.

[0033] After the electron gun is normally turned on, the controller 11 will generate analog test signals according to the electron gun test process. The analog test signals include a voltage turn-on signal and a beam current turn-on signal, and the voltage turn-on signal and the beam current turn-on signal are sent to the electron gun through the signal output module 13. After receiving the voltage turn-on signal and the beam current turn-on signal, the electron gun generates a voltage feedback signal corresponding to the voltage turn-on signal and a beam current feedback signal corresponding to the beam current turn-on signal. Among them, the feedback signal also includes a voltage feedback signal and a beam current feedback signal.

[0034] The signal acquisition module 12 acquires the voltage feedback signal and the beam current feedback signal generated by the electron gun, and sends the voltage feedback signal and the beam current feedback signal to the controller 11. The controller 11 determines whether the electron gun is working normally according to the received feedback signal.

[0035] The automatic test device further includes an information display module 14. The information display module 14 is connected to the controller 11. The information display module 14 receives the feedback signal sent by the controller 11 and displays the working state information of multiple electron guns according to the feedback signal. For example: when the high-voltage feedback signal or the filament feedback signal of a certain electron gun is abnormal, the controller 11 sends the abnormal signal to the information display module 14 to display the abnormal working state information of the electron gun on the information display module 14.

[0036] Among them, the working state information includes normal working state information and abnormal working state information. The working state information is used to indicate the specific working state of the electron gun. Specifically, the abnormal working state information includes high-voltage state abnormal information and filament state abnormal information.

[0037] In a feasible implementation scheme of the present application, the signal acquisition module includes a digital quantity signal acquisition module and an analog quantity signal acquisition module. Both the digital quantity signal acquisition module and the analog quantity signal acquisition module are multi-channel acquisition modules. The digital quantity signal acquisition module is of the SM 1223DI16 / DQ16 model, and the analog quantity signal acquisition module is of the SM 1231AI8 model. SM1223DI16 / DQ16 is a 16-channel digital input / output hybrid module, and SM 1231AI8 is an 8-channel analog input module. Among them, the digital quantity signal acquisition module and the analog quantity signal acquisition module are respectively connected to the controller 11. The digital quantity signal acquisition module acquires the digital quantity feedback signals of multiple electron guns and sends the digital quantity feedback signals to the controller 11. The digital quantity feedback signals include high-voltage feedback signals and filament feedback signals. The analog quantity signal acquisition module acquires the analog quantity feedback signals of multiple electron guns and sends the analog quantity feedback signals to the controller 11. The analog quantity feedback signals include voltage feedback signals and beam current feedback signals.

[0038] Next, refer to Figure 2To introduce the SM 1223DI16 / DQ16 module.

[0039] Figure 2 The structural schematic diagram of the SM 1223DI16 / DQ16 provided by the embodiment of the present application is shown. As Figure 2 shown, the I2.1 pin in the SM 1223DI16 / DQ16 is used as the remote start pin, the I2.2 pin is used as the remote shutdown pin corresponding to the first electron gun, the I2.3 pin is used as the high-voltage start pin corresponding to the first electron gun, the I2.4 pin is used as the filament start pin corresponding to the first electron gun, the I2.5 pin is used as the high-voltage & filament shutdown pin corresponding to the first electron gun, the I3.1 pin is used as the remote start pin corresponding to the second electron gun, and so on. Multiple electron guns can be connected to the automatic test device. At the same time, a remote start signal is sent through the remote start pin, a remote shutdown signal is sent through the remote shutdown pin, a high-voltage start signal is sent through the high-voltage start pin, a filament start signal is sent through the filament start pin, and a high-voltage & filament shutdown signal is sent through the high-voltage & filament shutdown pin to detect whether the functions of the electron guns are normal through each signal respectively.

[0040] The pins of the SM 1231AI8 module include: IW100+, IW100-, IW102+, IW102-, IW104+, IW104-, IW106+, IW106-, IW108+, IW108-, IW110+, IW110-, IW112+, IW112-, IW114+, IW114-.

[0041] In a feasible implementation of the present application, the signal output module includes a digital quantity signal output module and an analog quantity signal output module. Both the digital quantity signal output module and the analog quantity signal output module are multi-channel output modules. The digital quantity signal output module is of the SM 1223DI16 / DQ16 model, and the analog quantity signal output module is of the SM 1232AQ4 model. The SM1223DI16 / DQ16 is a 16-channel digital input / output hybrid module, and the SM 1232AQ4 is a four-channel analog output module. Among them, the digital quantity signal output module and the analog quantity signal output module are respectively connected to the controller. The digital quantity signal output module sends the received digital quantity test signal to multiple electron guns to make the multiple electron guns work according to the above digital quantity test signal. The digital quantity test signal includes a remote control start signal, a high-voltage start signal, and a filament start signal. The analog quantity signal output module sends the received analog quantity test signal to multiple electron guns to make the multiple electron guns work according to the analog quantity test signal. The analog quantity test signal includes a voltage start signal and a beam current start signal.

[0042] The pins of the SM 1232AQ4 module include: QW100+, QW100-, QW102+, QW102-, QW104+, QW104-, QW106+, QW106-.

[0043] Since the digital signal acquisition module, analog signal acquisition module, digital signal output module, and analog signal output module are all multi-channel modules, they can simultaneously connect to multiple electron guns and perform performance tests on these electron guns, improving the test efficiency of the electron guns.

[0044] In addition, the test signals include not only the start test signal, digital test signal, and analog test signal, but also the electron beam test signal. After obtaining the voltage feedback signal and beam current feedback signal, the controller 11 will also generate an electron beam test signal, which is used to test whether the electron beam emitted by the electron gun is accurate. Among them, the electron beam test signals include, but are not limited to: horizontal electron beam test signal XP, vertical electron beam test signal YP, range scaling electron beam test signal XS, and shape electron beam test signal YS. XP is used to test whether the electron beam emitted by the electron gun can move correctly in the horizontal direction, YP is used to test whether the electron beam emitted by the electron gun can move correctly in the vertical direction, XS is used to test whether the size of the electron beam emitted by the electron gun can be correctly changed, and YS is used to test whether the shape of the electron beam emitted by the electron gun can be correctly changed.

[0045] It should be noted that the digital signal acquisition module and the digital signal output module are actually the same module, which can be implemented by a Siemens module of the SM 1223DI16 / DQ16 model. Moreover, the digital signal acquisition module, digital signal output module, analog signal acquisition module, and analog signal output module are all directly connected to the controller through the card slot, similar to inserting a memory module into the card slot on the computer motherboard when adding memory to a computer. In addition, the test device of the electron gun and multiple electron guns are connected through male and female plugs, so that the remote control enable pin, remote control disable pin, high voltage enable pin, filament enable pin, and high voltage & filament enable pin of the SM 1223DI16 / DQ16 in the test device are respectively connected to the remote control enable pin, remote control disable pin, high voltage enable pin, filament enable pin, and high voltage & filament enable pin of the electron gun through male and female plugs.

[0046] The male and female plugs include a male plug and a female plug. In the female plug, pin 8 of the EXT SIG-1 module is the READY pin, pin 9 is the EXT SW ON pin, pin 10 is the EXT EMN ON pin, pin 26 is the EXT ACC ON pin, pin 31 is the EXTFIL ON pin, pin 7 is the SIG COMMON pin, pin 2 is the remote control ON pin, pin 3 is the remote control OFF pin, pin 4 is the FW-COMMON pin, pin 19 is the high voltage ON pin, pin 20 is the filament ON pin, pin 21 is the high voltage & filament OFF pin, pin 1 is the HV-COMMON pin, pin 35 is the RESET pin, pin 36 is the R-COMMON pin, pin 17 is the EMN MON pin, pin 33 is the ACCMON pin, and pin 15 is the FB COMMON pin. Pin 2 is connected to pin I2.1, pin 3 is connected to pin I2.2, pin 4 is connected to 24Va, pin 19 is connected to pin I2.3, pin 20 is connected to pin I2.4, pin 21 is connected to pin I2.5, pin 1 is connected to 24Va, pin 35 is connected to pin I2.6, pin 36 is connected to 24Va, pin 17 is connected to pin QW100+, pin 33 is connected to pin QW102+, and pin 15 is connected to pin QW100-, QW102-.

[0047] In the female plug, pin 14 of the EXT SIG-2 module is the YP input pin, pin 17 of this module is the XP input pin, pin 43 of this module is the XS input pin, and pin 47 of this module is the YS input pin. Pin 19 of this module is the YP GND pin, pin 16 of this module is the XP GND pin, pin 46 of this module is the XS GND pin, and pin 50 of this module is the YS GND pin. Pin 14 is connected to pin IW100+, pin 17 is connected to pin IW102+, pin 43 is connected to pin IW104+, pin 47 is connected to pin IW106+, pin 19 is connected to pin IW100-, pin 16 is connected to pin IW102-, pin 46 is connected to pin IW104-, and pin 50 is connected to pin IW106-.

[0048] In the INTER LOCK module of the female plug, pin 1 is the WAT pin, pin 2 is the VAC pin, pin 3 is the AUX pin, and pin 4 is the COM pin. Pin 1 is connected to pin I2.0, pin 3 is connected to pin I2.7, and pin 4 is connected to 24Va.

[0049] Pin E in the beam current module of the female plug is used as the WAT pin, and pin IEM in this module is used as the VAC pin. Pin E is connected to pin IW132-, and pin VAC is connected to pin IW132+.

[0050] Compared with the prior art test device for an electron gun, the present application can automatically test the electron gun through an automatic test device composed of multiple modules. The entire automatic test process does not require the use of a vacuum coating machine, reducing the test cost. At the same time, the automatic test device can test multiple electron guns simultaneously, improving the test efficiency and solving the problems of high test cost and low test efficiency when performing functional tests on electron guns.

[0051] Based on the same inventive concept, an automatic test system for an electron gun corresponding to the automatic test device for an electron gun is also provided in an embodiment of the present application. Since the principle of solving problems in the system in the embodiment of the present application is similar to that of the above-mentioned automatic test device for an electron gun in the embodiment of the present application, the implementation of the system can refer to the implementation of the device, and the repeated parts will not be elaborated.

[0052] Please refer to Figure 3 , Figure 3 which is a schematic structural diagram of an automatic test system for an electron gun provided in an embodiment of the present application. As Figure 3 shown in, the automatic test system 1 for an electron gun includes the above-mentioned automatic test device 10 for an electron gun and multiple electron guns 20.

[0053] Here, each electron gun can be an actual electron gun or a simulated electron gun, that is, an electron gun simulated by a PLC. Before obtaining an actual electron gun, the simulated electron gun can be used to test whether the automatic test device is normal, so as to use the normal automatic test device to perform functional tests on the actual electron gun. Among them, the simulated electron gun includes an SM1231AI8 module, and the control of XP, YP, XS, and YS in the electron gun is simulated through the SM1231AI8 module.

[0054] Those skilled in the art can clearly understand that for the convenience and simplicity of description, the specific working processes of the above-described systems, devices, and units can refer to the corresponding processes in the foregoing method embodiments, and will not be elaborated herein.

[0055] In several embodiments provided by the present application, it should be understood that the disclosed systems, devices, and methods can be implemented in other ways. The device embodiments described above are merely illustrative. For example, the division of the units is only a logical function division. In actual implementation, there may be other division methods. For another example, multiple units or components can be combined or integrated into another system, or some features can be ignored or not executed. Another point is that the displayed or discussed coupling or direct coupling or communication connection between each other can be through some communication interfaces. The indirect coupling or communication connection of the devices or units can be in electrical, mechanical, or other forms.

[0056] The units described as separate components may or may not be physically separated. The components displayed as units may or may not be physical units, that is, they can be located in one place or distributed to multiple network units. Some or all of the units can be selected according to actual needs to achieve the purpose of the solution of this embodiment.

[0057] In addition, in each embodiment of the present application, the functional units can be integrated in a processing unit, or each unit can exist physically alone, or two or more units can be integrated in one unit.

[0058] If the function is implemented in the form of a software functional unit and sold or used as an independent product, it can be stored in a non-volatile computer-readable storage medium executable by a processor. Based on such an understanding, the technical solution of the present application, in essence, or the part that contributes to the prior art, or a part of this technical solution, can be embodied in the form of a software product. This computer software product is stored in a storage medium and includes several instructions to enable a computer device (which can be a personal computer, a server, or a network device, etc.) to execute all or part of the steps of the methods described in each embodiment of the present application. The aforementioned storage medium includes: various media such as USB flash drives, mobile hard disks, read-only memory (ROM), random access memory (RAM), magnetic disks, or optical discs that can store program codes.

[0059] Finally, it should be noted that the above-described embodiments are only specific embodiments of the present application, which are used to illustrate the technical solutions of the present application, rather than limiting it. The protection scope of the present application is not limited thereto. Although the present application has been described in detail with reference to the foregoing embodiments, those of ordinary skill in the art should understand that any person skilled in the art within the technical scope disclosed in the present application can still modify the technical solutions recorded in the foregoing embodiments, or can easily think of changes, or perform equivalent replacements on some of the technical features; and these modifications, changes or replacements do not make the essence of the corresponding technical solutions deviate from the spirit and scope of the technical solutions of the embodiments of the present application, and should all be covered by the protection scope of the present application. Therefore, the protection scope of the present application shall be subject to the protection scope of the claims.

Claims

1. An automatic test device for an electron gun, characterized in that The automatic test device includes a controller, a signal acquisition module, and a signal output module; The controller is connected to the signal output module. The controller generates a test signal according to the received input signal and sends the test signal to the signal output module; The signal output module is connected to multiple electron guns. The signal output module sends the test signal to the multiple electron guns to control the multiple electron guns by using the test signal; The multiple electron guns are connected to the signal acquisition module. The signal acquisition module obtains the feedback signals of the multiple electron guns for the test signal and sends the feedback signals to the controller, so that the controller determines the test results of the multiple electron guns according to the feedback signals.

2. The device according to claim 1, characterized in that, The signal acquisition module includes a digital quantity signal acquisition module and an analog quantity signal acquisition module. Both the digital quantity signal acquisition module and the analog quantity signal acquisition module are multi-channel acquisition modules.

3. The device according to claim 2, characterized in that, The digital quantity signal acquisition module and the analog quantity signal acquisition module are respectively connected to the controller; The digital quantity signal acquisition module acquires the digital quantity feedback signals of the multiple electron guns and sends the digital quantity feedback signals to the controller; The analog quantity signal acquisition module acquires the analog quantity feedback signals of the multiple electron guns and sends the analog quantity feedback signals to the controller.

4. The device according to claim 1, characterized in that, The signal output module includes a digital quantity signal output module and an analog quantity signal output module. Both the digital quantity signal output module and the analog quantity signal output module are multi-channel output modules.

5. The device according to claim 4, characterized in that, The digital quantity signal output module and the analog quantity signal output module are respectively connected to the controller; The digital quantity signal output module sends the received digital quantity test signal to the multiple electron guns to make the multiple electron guns work according to the digital quantity test signal; The analog quantity signal output module sends the received analog quantity test signal to the multiple electron guns to make the multiple electron guns work according to the analog quantity test signal.

6. The device according to claim 1, characterized in that, The automatic test device further includes an information display module; The information display module is connected to the controller. The information display module receives the feedback signal sent by the controller and displays the working state information of the multiple electron guns according to the feedback signal.

7. The device according to claim 1, characterized in that, The controller is of the CPU 1215C DC / DC / DC model.

8. The device according to claim 2, characterized in that The digital quantity signal acquisition module is of the SM 1223DI16 / DQ16 model, and the analog quantity signal acquisition module is of the SM 1231AI8 model.

9. The device according to claim 4, characterized in that, The digital quantity signal output module is of the SM 1223DI16 / DQ16 model, and the analog quantity signal output module is of the SM 1232AQ4 model.

10. An automatic test system for an electron gun, characterized in that, The automatic test system includes multiple electron guns and the automatic test device for the electron guns according to any one of claims 1 to 9.

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