Ion source filament power supply adapter mechanism

Abstract

The utility model provides an ion source filament power supply adapting mechanism, which comprises a bracket assembly component, a switching insulation component, a separation positioning component, a positive and negative adapting component and a grounding adapting component, and the bracket assembly component of the adapting mechanism integrates the switching insulation component, the separation positioning component, the positive and negative adapting component and the grounding adapting component into a whole. The complexity of connection and assembly is reduced, the stability and reliability of the equipment are improved, the components are convenient to mount, dismount, maintain and repair, the switching insulation component is made of polytetrafluoroethylene materials and has excellent electrical insulation performance and chemical stability, and the design of the separation positioning component and the inner side division bar is adopted, so that the reliability of the equipment is improved. Therefore, the positive and negative adapting member and the grounding adapting member can be accurately positioned at corresponding positions, the problems of dislocation and mutual interference are prevented, and stable operation of the ion source at high temperature, high voltage and high frequency is ensured.

Description

Technical Field

[0001] The utility model relates to integrated circuit production equipment, in particular to an ion source filament power supply connection mechanism. Background Art

[0002] Patent document CN219575557U discloses an ion source, which includes a filament assembly. The filament assembly is composed of a filament clip, a filament, a heat-resistant bolt and a filament energy supply rod. The main function of the filament assembly is to generate an original electron source under the action of a filament power supply, so as to bombard the cathode assembly. The main material of the filament is heat-resistant tungsten. The heat-resistant bolt fixes a pair of filament clips to the outside of the cathode insulator. The filament is connected to the filament clip, and corresponding energy is applied to the filament through the filament energy supply rod to complete filament heating and generate electrons. However, the filament clip adopted by it is a planar structure. After the filament is placed into the cathode assembly, its connecting end feet are exposed outside the cathode assembly, and there is no insulation isolation structure between the filament clips, so that the ion source is easily affected by the external environment during operation, resulting in a decline in the performance of the filament assembly or a malfunction. Therefore, it is necessary to optimize its structure to overcome the above defects. Summary of the Utility Model

[0003] The purpose of the utility model is to provide an ion source filament power supply connection mechanism to improve the operation stability of the ion source filament.

[0004] The technical solution adopted by the utility model to solve its technical problems is as follows:

[0005] An ion source filament power supply connection mechanism includes:

[0006] A support assembly member, which is installed on the ion source support and has an assembly space inside;

[0007] An adapter insulation member, which is installed on the support assembly member and is made of an insulating material;

[0008] A partition and positioning member, which is made of an insulating material and is formed in the adapter insulation member and has a positioning space inside;

[0009] A positive and negative connection member, which is made of a conductive material, is installed on the adapter insulation member and cooperates with the partition and positioning member. The partition and positioning member isolates and positions it. The positive and negative connection member is connected to the ion source filament and the ion source power supply device. The ion source power supply device supplies power to the ion source filament through the positive and negative connection member;

[0010] The grounding matching component is made of conductive material, which is installed on the transfer insulating component and cooperates with the separation and positioning component. The separation and positioning component isolates and positions the grounding matching component, which is connected to the ion source filament and the ground to provide a reference potential to the ion source filament.

[0011] Specifically, the support assembly component includes:

[0012] A support seat plate, which is arranged in the transverse direction and has an assembly top surface on the top, and the transfer insulating component is installed on the assembly top surface;

[0013] A group of support legs are provided, each support leg is formed on the edge of the support base plate and protrudes below the support base plate. A locking through hole is provided inside the support leg and runs axially therethrough. The support leg can be connected and fixed to the ion source support by a locking bolt adapted thereto.

[0014] The transfer insulating component comprises:

[0015] The transfer lining plate is made of polytetrafluoroethylene and is attached to the assembly top surface. A locking through hole is opened on its edge, and the transfer lining plate can be connected and fixed to the support seat plate by matching locking bolts.

[0016] The separation and positioning components include:

[0017] A pair of outer spacers are provided, each outer spacer is formed at two ends of the top surface of the transfer liner and protrudes above the transfer liner to form a positioning space between the outer spacers;

[0018] An inner spacer is provided with a pair, each inner spacer is formed in the middle of the top surface of the transfer liner, is located between the outer spacers, and protrudes above the transfer liner, and positive and negative embedding grooves adapted to the shape of the positive and negative matching components are formed between the inner spacers and the outer spacers, and grounding embedding grooves adapted to the shape of the grounding matching components are formed between the inner spacers.

[0019] The positive and negative matching components include:

[0020] A pair of matching beams and columns are provided, the rear section of each matching beam and column is placed in the positive and negative embedding grooves respectively, and a locking through hole is opened, and the matching beam and column can be connected and fixed to the transfer liner by a locking bolt adapted thereto, and the front section thereof is exposed from the front of the positive and negative embedding grooves;

[0021] A transition end block, which is formed at the front end of the matching beam column and is bent downwards toward the matching beam column;

[0022] The matching terminal post is formed at the lower end of the transition end block, is bent toward the front of the transition end block, and extends to the ion source filament. The positive and negative end pins of the ion source filament can be connected to the matching terminal post.

[0023] The positive and negative mating components further include:

[0024] A buffer slot, which penetrates through the middle part of the mating beam-column and the transition end block and extends to the front end of the mating end column, dividing the transition end block and the mating end column into two parts;

[0025] A mating notch, which is formed on the inner wall of the buffer slot and is located at the front end of the mating end column. The positive and negative end feet of the ion source filament can be embedded into the mating notch.

[0026] The grounding mating component includes:

[0027] A grounding beam-column, which is placed in the grounding slot. The rear section part thereof is placed in the grounding slot and is provided with a locking through hole. The grounding beam-column can be connected and fixed to the adapter lining plate through a locking bolt adapted thereto. The front section part thereof is exposed from the front of the grounding slot;

[0028] A folding end block, which is formed at the front end of the grounding beam-column and bends downward with respect to the grounding beam-column;

[0029] A grounding end column, which is formed at the lower end of the folding end block, bends forward with respect to the folding end block and extends to the ion source filament. The grounding end foot of the ion source filament can cooperate with the grounding end column.

[0030] The grounding mating component further includes:

[0031] An opening and closing slot, which penetrates through the middle part of the grounding beam-column and the folding end block and extends to the front end of the grounding end column, dividing the folding end block and the grounding end column into two parts;

[0032] A clamping notch, which is formed on the inner wall of the opening and closing slot and is located at the front end of the grounding end column. The grounding end foot of the ion source filament can be embedded into the clamping notch.

[0033] The advantages of the present utility model are as follows:

[0034] The supporting and assembling component of the mating mechanism integrates the adapter insulating component, the separating and positioning component, the positive and negative mating components and the grounding mating component into a whole, reducing the complexity of connection and assembly, improving the stability and reliability of the equipment. The installation and disassembly of each component are convenient, which is conducive to maintenance and repair. The adapter insulating component adopts polytetrafluoroethylene material, which has excellent electrical insulation performance and chemical stability. The design of the separating and positioning component and the inner separating strip enables the positive and negative mating components and the grounding mating component to be accurately positioned at corresponding positions, preventing the problems of dislocation and mutual interference. The setting of the transition end block and the folding end block enables the mating end column and the grounding end column to be close to the cathode assembly, avoiding the long-distance exposure of the connecting end feet of the filament assembly outside the cathode assembly, and ensuring the stable operation of the ion source under high temperature, high voltage and high frequency. BRIEF DESCRIPTION OF THE DRAWINGS

[0035] Figure 1 It is a structural schematic diagram of the ion source filament power supply matching mechanism proposed by the utility model;

[0036] Figure 2 This is one of the exploded views of the matching mechanism;

[0037] Figure 3 This is the second exploded view of the matching mechanism. DETAILED DESCRIPTION

[0038] In order to make the purpose, technical scheme and advantages of the embodiment of the utility model clearer, the technical scheme in the embodiment of the utility model will be clearly and completely described below in conjunction with the drawings in the embodiment of the utility model. Obviously, the described embodiment is a part of the embodiment of the utility model, not all of the embodiments. The components of the embodiment of the utility model generally described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiment of the utility model provided in the drawings is not intended to limit the scope of the utility model claimed for protection, but merely represents the selected embodiment of the utility model. Based on the embodiments in the utility model, all other embodiments obtained by ordinary technicians in this field without making creative work belong to the scope of protection of the utility model.

[0039] like Figures 1 to 3 As shown, the ion source filament power supply matching mechanism proposed by the utility model includes a supporting assembly component, a transfer insulating component, a separation and positioning component, a positive and negative matching component and a ground matching component. The supporting assembly component is installed on the ion source support and has an assembly space inside. The transfer insulating component is installed on the supporting assembly component and is made of insulating material. The separation and positioning component is made of insulating material and is formed in the transfer insulating component and has a positioning space inside. The positive and negative matching components are made of conductive material, which is installed on the transfer insulating component and cooperates with the separation and positioning component to isolate and position them. The positive and negative matching components are connected with the ion source filament and the ion source power supply device, and the ion source power supply device supplies power to the ion source filament through the positive and negative matching components. The ground matching component is made of conductive material, which is installed on the transfer insulating component and cooperates with the separation and positioning component to isolate and position them. The ground matching component is connected with the ion source filament and the ground to provide a reference potential to the ion source filament.

[0040] In Example 1, the support assembly component includes a support base plate 110 and a support foot 120. The support base plate is arranged horizontally and has an assembly top surface on the top. The transition insulating component is installed on the assembly top surface. A group of support feet are provided. Each support foot is formed on the edge of the support base plate and protrudes downward from the support base plate. A locking through hole is opened in the interior thereof and passes through the axial direction. The support foot can be connected and fixed to the ion source support by a locking bolt adapted thereto.

[0041] The transition insulating component includes a transition liner 200, which is made of polytetrafluoroethylene and attached to the assembly top surface. A locking through hole is opened on its edge, and the transition liner can be connected and fixed to the support base plate by a locking bolt adapted thereto.

[0042] The separating and positioning components include an outer spacer 310 and an inner spacer 320. A pair of outer spacers are provided, each of which is formed at the two ends of the top surface of the transfer liner and protrudes above the transfer liner to form a positioning space between the outer spacers. A pair of inner spacers are provided, each of which is formed in the middle of the top surface of the transfer liner, located between the outer spacers and protrudes above the transfer liner, positive and negative embedding grooves that match the shape of the positive and negative matching components are formed between the inner spacers and the outer spacers, and grounding embedding grooves that match the shape of the grounding matching components are formed between the inner spacers.

[0043] The positive and negative matching components include a matching beam 410, a transition end block 420 and a matching end column 430. A pair of matching beams are provided. The rear section of each matching beam is respectively placed in the positive and negative embedding grooves, and a locking through hole is opened. The matching beam and the adapter liner can be connected and fixed by a locking bolt adapted thereto. The front section thereof is exposed from the front of the positive and negative embedding grooves. The transition end block is formed at the front end of the matching beam and is bent downwardly from the matching beam. The matching end column is formed at the lower end of the transition end block, which is bent forwardly of the transition end block and extends to the ion source filament. The positive and negative end legs of the ion source filament can be engaged with the matching end column.

[0044] The positive and negative matching components also include a buffer slot 440 and a matching recess 450. The buffer slot passes through the transition end block from the middle of the matching beam column and extends to the front end of the matching end column, dividing the transition end block and the matching end column into two parts. The matching recess is opened on the inner wall of the buffer slot and is located at the front end of the matching end column. The positive and negative end pins of the ion source filament can be embedded in the matching recess.

[0045] The grounding connection component includes a grounding beam-column 510, a folding end block 520, and a grounding end column 530. The grounding beam-column is placed in the grounding slot, and its rear section is placed in the grounding slot and is provided with a locking through-hole. The grounding beam-column can be connected and fixed to the adapter lining plate through a locking bolt adapted thereto. Its front section protrudes from the front of the grounding slot. The folding end block is formed at the front end of the grounding beam-column and bends downward to the grounding beam-column. The grounding end column is formed at the lower end of the folding end block, bends forward to the folding end block, and extends to the ion source filament. The grounding end foot of the ion source filament can cooperate with the grounding end column.

[0046] The grounding connection component further includes an opening and closing slot 540 and a clamping notch 550. The opening and closing slot penetrates through the folding end block from the middle of the grounding beam-column and extends to the front end of the grounding end column, dividing the folding end block and the grounding end column into two parts. The clamping notch is opened on the inner wall of the opening and closing slot and is located at the front end of the grounding end column. The grounding end foot of the ion source filament can be embedded in the clamping notch.

[0047] In Embodiment 2, the support assembly component includes a support seat plate 110 and support upright feet 120. The support seat plate is arranged horizontally and has an assembly top surface on the top. The adapter insulating component is installed on the assembly top surface. There is a group of support upright feet. Each support upright foot is respectively formed at the edge of the support seat plate and protrudes downward from the support seat plate. A locking through-hole axially penetrating is opened inside it. The support upright foot can be connected and fixed to the ion source support through a locking bolt adapted thereto.

[0048] The adapter insulating component includes an adapter lining plate 200. The adapter lining plate is made of polytetrafluoroethylene and is attached to the assembly top surface. A locking through-hole is opened at its edge. The adapter lining plate can be connected and fixed to the support seat plate through a locking bolt adapted thereto.

[0049] The separation and positioning component includes an outer partition strip 310 and an inner partition strip 320. There are a pair of outer partition strips. Each outer partition strip is respectively formed at both ends of the top surface of the adapter lining plate and protrudes upward from the adapter lining plate. A positioning space is formed between the outer partition strips. There are a pair of inner partition strips. Each inner partition strip is respectively formed in the middle of the top surface of the adapter lining plate. It is located between the outer partition strips and protrudes upward from the adapter lining plate. A positive and negative slot adapted to the shape of the positive and negative connection component is formed between the inner partition strip and the outer partition strip, and a grounding slot adapted to the shape of the grounding connection component is formed between the inner partition strips.

[0050] The positive and negative mating components include mating beam-columns 410, transition end blocks 420, and mating end columns 430. There are a pair of mating beam-columns. The rear sections of each mating beam-column are respectively placed in the positive and negative slots, and locking through-holes are provided. The mating beam-columns can be connected and fixed to the adapter liner through locking bolts adapted thereto. The front sections thereof protrude from the front of the positive and negative slots. The transition end blocks are formed at the front ends of the mating beam-columns and bend downward from the mating beam-columns. The mating end columns are formed at the lower ends of the transition end blocks, bend forward from the transition end blocks, and extend to the ion source filament. The positive and negative end feet of the ion source filament can be joined to the mating end columns.

[0051] In this embodiment, the mating beam-columns, transition end blocks, and mating end columns are made of copper alloy.

[0052] The positive and negative mating components further include buffer slot seams 440 and mating notches 450. The buffer slot seams penetrate through the transition end blocks from the middle of the mating beam-columns and extend to the front ends of the mating end columns, dividing the transition end blocks and the mating end columns into two parts. The mating notches are opened on the inner walls of the buffer slot seams and are located at the front ends of the mating end columns. The positive and negative end feet of the ion source filament can be embedded in the mating notches.

[0053] The grounding mating components include grounding beam-columns 510, turning end blocks 520, and grounding end columns 530. The grounding beam-columns are placed in the grounding slots. The rear sections thereof are placed in the grounding slots, and locking through-holes are provided. The grounding beam-columns can be connected and fixed to the adapter liner through locking bolts adapted thereto. The front sections thereof protrude from the front of the grounding slots. The turning end blocks are formed at the front ends of the grounding beam-columns and bend downward from the grounding beam-columns. The grounding end columns are formed at the lower ends of the turning end blocks, bend forward from the turning end blocks, and extend to the ion source filament. The grounding end feet of the ion source filament can cooperate with the grounding end columns.

[0054] In this embodiment, the grounding beam-columns, turning end blocks, and grounding end columns are made of copper alloy.

[0055] The grounding mating components further include opening and closing slot seams 540 and clamping notches 550. The opening and closing slot seams penetrate through the turning end blocks from the middle of the grounding beam-columns and extend to the front ends of the grounding end columns, dividing the turning end blocks and the grounding end columns into two parts. The clamping notches are opened on the inner walls of the opening and closing slot seams and are located at the front ends of the grounding end columns. The grounding end feet of the ion source filament can be embedded in the clamping notches.

[0056] In this embodiment, clamping notches are respectively opened at the front ends of the mating beam-columns and the grounding beam-columns. Clamping bolts are arranged in the clamping notches. The clamping bolts penetrate through the mating beam-columns and the grounding beam-columns and pass through the buffer slot seams and the opening and closing slot seams, and can control the widths of the buffer slot seams and the opening and closing slot seams to clamp and position the positive and negative end feet and the grounding end feet of the ion source filament.

[0057] In this embodiment, wiring pressure plates and mating pressing bolts are respectively provided at the rear ends of the mating beam columns and grounding beam columns, and the positive and negative power supply lines and the grounding line can be connected and fixed through the wiring pressure plates.

[0058] In the description of the present utility model, it should be noted that when terms indicating orientation or positional relationship such as "upper", "lower", "inner", "outer", "left", "right", etc. appear, it should be understood as based on the orientation or positional relationship shown in the drawings, or the orientation or positional relationship in which the product of the present utility model is usually placed during use, or the orientation or positional relationship commonly understood by those skilled in the art. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or component referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, when terms such as "first" and "second" appear, they are only used for distinguishing descriptions and cannot be understood as indicating or implying relative importance. In the description of the present utility model, it should also be noted that unless otherwise clearly specified and defined, terms such as "installation", "setting", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be a direct connection or an indirect connection through an intermediate medium, and it can be the communication inside two components. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

Claims

1. An ion source filament power supply connection mechanism, characterized in that, Comprising: A support assembly member, which is installed on the ion source support, and has an assembly space inside; An adapter insulating member, which is installed on the support assembly member and is made of insulating material; A partition and positioning member, which is made of insulating material and is formed in the adapter insulating member, and has a positioning space inside; A positive and negative mating member, which is made of conductive material, is installed on the adapter insulating member, and cooperates with the partition and positioning member. The partition and positioning member isolates and positions it. The positive and negative mating member is connected to the ion source filament and the ion source power supply device. The ion source power supply device supplies power to the ion source filament through the positive and negative mating member; A grounding mating member, which is made of conductive material, is installed on the adapter insulating member, and cooperates with the partition and positioning member. The partition and positioning member isolates and positions it. The grounding mating member is connected to the ion source filament and the ground, and provides a reference potential to the ion source filament.

2. The ion source filament power supply connection mechanism according to claim 1, characterized in that The support assembly member includes: A support seat plate, which is arranged horizontally and has an assembly top surface at the top. The adapter insulating member is installed on the assembly top surface; Support legs, there is a group of support legs. Each support leg is formed at the edge of the support seat plate and protrudes downward from the support seat plate. There is a locking through hole axially penetrating inside it, and the support leg can be connected and fixed to the ion source support through a matching locking bolt.

3. The ion source filament power supply connection mechanism according to claim 2, characterized in that The adapter insulating member includes: An adapter lining plate, which is made of polytetrafluoroethylene and is attached to the assembly top surface. There is a locking through hole at its edge, and the adapter lining plate can be connected and fixed to the support seat plate through a matching locking bolt.

4. An ion source filament power supply connection mechanism according to claim 3, characterized in that The partition and positioning member includes: Outer partition strips, there are a pair of outer partition strips. Each outer partition strip is formed at both ends of the top surface of the adapter lining plate and protrudes upward from the adapter lining plate. A positioning space is formed between the outer partition strips; Inner partition strips, there are a pair of inner partition strips. Each inner partition strip is formed in the middle of the top surface of the adapter lining plate. It is located between the outer partition strips and protrudes upward from the adapter lining plate. A positive and negative slot adapted to the shape of the positive and negative mating member is formed between the inner partition strip and the outer partition strip, and a grounding slot adapted to the shape of the grounding mating member is formed between the inner partition strips.

5. An ion source filament power supply connection mechanism according to claim 4, characterized in that, The positive and negative mating member includes: Mating beam columns, there are a pair of mating beam columns. The rear section parts of each mating beam column are respectively placed in the positive and negative slots, and there are locking through holes. The mating beam column can be connected and fixed to the adapter lining plate through a matching locking bolt, and its front section part protrudes from the front of the positive and negative slots; A transition end block, which is formed at the front end of the mating beam column and bends downward from the mating beam column; A mating end column, which is formed at the lower end of the transition end block, bends forward from the transition end block, and extends to the ion source filament. The positive and negative end feet of the ion source filament can be joined to the mating end column.

6. An ion source filament power supply connection mechanism according to claim 5, characterized in that The positive and negative mating member further includes: A buffer slot, which penetrates through the transition end block from the middle of the mating beam column and extends to the front end of the mating end column, dividing the transition end block and the mating end column into two parts; The matching recess is formed on the inner wall of the buffer slot and is located at the front end of the matching terminal column. The positive and negative end pins of the ion source filament can be embedded in the matching recess.

7. An ion source filament power supply connection mechanism according to claim 5, characterized in that, The grounding adapter includes: A grounding beam column, which is placed in the grounding groove, with its rear section placed in the grounding groove and provided with a locking through hole, so that the grounding beam column and the transfer liner can be connected and fixed by a locking bolt adapted thereto, and its front section is exposed from the front of the grounding groove; A folded end block, which is formed at the front end of the grounding beam and is bent toward the bottom of the grounding beam; A grounding terminal post is formed at the lower end of the folded end block, is bent forward of the folded end block, and extends to the ion source filament. The grounding terminal pin of the ion source filament can cooperate with the grounding terminal post.

8. An ion source filament power supply connection mechanism according to claim 7, characterized in that, The ground connection member also includes: An opening and closing slot, which passes through the folded end block from the middle of the grounding beam column and extends to the front end of the grounding end column, dividing the folded end block and the grounding end column into two parts; The clamping notch is arranged on the inner wall of the opening and closing slot and is located at the front end of the grounding terminal column. The grounding terminal pin of the ion source filament can be embedded in the clamping notch.

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