Sample feeding mechanism for scanning electron microscope

Abstract

The utility model discloses a sample feeding mechanism for a scanning electron microscope, which belongs to the technical field of electron microscopes and structurally comprises a main machine body, a sample table, an electron microscope cabin, a transition cabin and an electric cabin door, a lifting plate is matched in the transition cabin in a sliding manner, and the side surface of the transition cabin is fixedly communicated with a transmission case for controlling the lifting plate to lift vertically; a back plate and a driving plate are fixed on one side of the fixed seat; two transverse plates are fixed on one side of the back plate; two sliding rods penetrate through the transverse plates in a sliding manner; a lower pressing plate is fixed at the bottom ends of the sliding rods; and one side of the driving plate is in transmission connection with two bearing plates. According to the sample feeding mechanism for the scanning electron microscope, samples can be automatically put in or taken out, the steps of manual operation are saved, and the sample feeding mechanism is more convenient to use.

Description

Technical Field

[0001] The utility model relates to the technical field of electron microscopes, in particular to a sample feeding mechanism for a scanning electron microscope. Background Art

[0002] Scanning electron microscope (SEM) is an observation method between transmission electron microscope and optical microscope. It uses a focused narrow high-energy electron beam to scan the sample, and stimulates various physical information through the interaction between the beam and the material. This information is collected, amplified, and re-imaged to achieve the purpose of characterizing the microscopic morphology of the material. At present, when using a scanning electron microscope, it is usually necessary to place the sample on the sample stage first, and then put the sample stage into the transition chamber, and then push it into the electron microscope chamber through the transition chamber.

[0003] Since the interior of the electron microscope chamber is sealed and in a vacuum environment, samples need to be placed or removed in a vacuum environment. However, the current sample delivery procedures for scanning electron microscopes are cumbersome and complex to operate. Sample delivery needs to be completed manually, and the sample stage cannot be placed or removed quickly, making it inconvenient to use. Utility Model Content

[0004] In order to solve the above-mentioned deficiencies in the prior art, the purpose of the utility model is to provide a sample feeding mechanism for a scanning electron microscope, which can realize automatic placement or removal of samples, saves manual operation steps, and is more convenient to use.

[0005] The technical solution adopted by the utility model to solve its technical problems is:

[0006] The invention provides a sample feeding mechanism for a scanning electron microscope, comprising a main body and a sample stage, wherein an electron microscope chamber is arranged inside the main body, a transition chamber is fixedly penetrated on the top of the main body, a feeding port connected to the transition chamber is opened on the top of the electron microscope chamber, a vacuum tube is fixedly connected on one side of the transition chamber, an electric hatch is arranged at the feeding port, a lifting plate is slidably matched in the transition chamber, and a transmission box for controlling the vertical lifting of the lifting plate is fixedly connected on the side of the transition chamber, a top cover is fixedly arranged on the top of the lifting plate, an electric push rod is penetrated and fixed on the top cover, a fixed seat is fixedly arranged on the output end of the electric push rod, a back plate and a driving plate are fixedly arranged on one side of the fixed seat, two cross plates are fixedly arranged on one side of the back plate, two sliding rods are slidably penetrated on the cross plate, a lower pressure plate is fixedly arranged on the bottom end of the sliding rod, a spring is fixed between the cross plate and the lower pressure plate, and two pressure bearing plates are transmission-connected on one side of the driving plate;

[0007] A bottom plate is provided at the bottom of the sample stage, and a lifting plate is fixedly sleeved at the middle of the peripheral side of the sample stage, and both ends of the lifting plate are located between the lower pressure plate and the pressure bearing plate.

[0008] Further, two sliding grooves are formed on one side of the driving plate. One end of the bearing plate is slidably fitted in the sliding groove, and a threaded screw rod b is rotatably connected in the sliding groove. The two ends of the threaded screw rod b respectively penetrate through the two bearing plates and are threadedly connected to the two bearing plates.

[0009] Further, a micro motor is fixedly installed at one end of the driving plate through a bracket. The rotating shaft of the micro motor is fixedly connected to one end of the threaded screw rod b. The thread directions of the two ends of the threaded screw rod b are opposite, and the end face of the bearing plate is provided with a chamfer.

[0010] Further, the spring is wound around the circumferential side of the sliding rod. The cross-section of the lower pressing plate is an L-shaped structural surface, and the end face of the lower pressing plate is also provided with a chamfer.

[0011] Further, a vertical rod is fixed to the back surface of the fixed seat. The top of the vertical rod is fixed with a top plate. A group of guide rods are fixed between the top cover and the bottom of the lifting plate. The top plate is slidably sleeved on the guide rods.

[0012] Further, a threaded screw rod a is rotatably connected inside the transmission box. A servo motor is fixed to the top of the transmission box through a bracket. The output end of the servo motor is fixedly connected to the top of the threaded screw rod a. A lifting block is fixed to the bottom of the circumferential side of the lifting plate. The lifting block is slidably fitted inside the transmission box, and the threaded screw rod a penetrates through the lifting block and is threadedly connected to the lifting block.

[0013] Further, a slide rail and slide seat assembly for transmitting the sample stage is provided on the inner bottom surface of the electron microscope chamber, and a maintenance door is provided at a position corresponding to the electron microscope chamber on one side of the main body.

[0014] Compared with the prior art, the beneficial effects of the present utility model are as follows: The sample feeding mechanism for the scanning electron microscope exemplified by the present utility model can automatically send the sample stage into the electron microscope chamber or take it out from the electron microscope chamber through the cooperation of the electric push rod, the lower pressing plate, the driving plate and the bearing plate. The cooperation of the transmission box and the lifting plate can realize the integrated operation of placing the sample stage and the airtight transition chamber. During the process of the sample stage entering the transition chamber, the airtight operation of the transition chamber is synchronously realized, so that the vacuum tube can pump the inside of the transition chamber into a vacuum state, ensuring that the inside of the transition chamber and the electron microscope chamber are both in a vacuum state. The automatic loading or unloading of the sample can be realized, saving the steps of manual operation and being more convenient to use. BRIEF DESCRIPTION OF THE DRAWINGS

[0015] By reading the detailed description of the non-restrictive embodiments with reference to the following drawings, other features, objects and advantages of the present application will become more apparent:

[0016] Figure 1 is a schematic structural diagram of the present utility model;

[0017] Figure 2It is a cross-sectional view of the main body of the present utility model;

[0018] Figure 3 It is a schematic diagram of the internal structure of the transition bin of the present utility model;

[0019] Figure 4 It is a schematic diagram of the structure of the lifting plate of the present utility model;

[0020] Figure 5 It is a schematic diagram of the structure when the fixed seat and the top plate of the present utility model are connected;

[0021] Figure 6 It is a schematic diagram of the structure of the sample stage of the present utility model;

[0022] Figure 7 It is a schematic diagram of the structure of the fixed seat of the present utility model;

[0023] Figure 8 It is a schematic diagram of the structure when the driving plate and the bearing plate of the present utility model are connected;

[0024] Figure 9 It is a schematic diagram of the structure when the sample stage is placed in the present utility model.

[0025] In the figure, 1. Main body, 2. Electron microscope chamber, 3. Slide rail and slide block assembly, 4. Maintenance door, 5. Transition bin, 6. Transmission box, 7. Lifting plate, 8. Top cover, 9. Electric push rod, 10. Fixed seat, 11. Sample stage, 12. Electric hatch door, 13. Threaded lead screw a, 14. Lifting block, 15. Servo motor, 16. Guide rod, 17. Vertical rod, 18. Top plate, 19. Pulling plate, 20. Back plate, 21. Cross plate, 22. Slide rod, 23. Lower pressing plate, 24. Spring, 25. Driving plate, 26. Bearing plate, 27. Chute, 28. Threaded lead screw b, 29. Micro motor, 30. Vacuum tube. Detailed implementation manners

[0026] Next, the technical solutions of the present utility model will be clearly and completely described in conjunction with the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present utility model.

[0027] Generally, the components of the embodiments of the present utility model described and shown in the drawings here can be arranged and designed in various different configurations. Therefore, the following detailed description of the embodiments of the present utility model provided in the drawings is not intended to limit the scope of the claimed present utility model, but merely represents the selected embodiments of the present utility model.

[0028] All other embodiments obtained by those of ordinary skill in the art based on the embodiments of the present utility model without creative efforts shall fall within the protection scope of the present utility model.

[0029] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model. In addition, the terms "first", "second", "third" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0030] In the description of the present utility model, it should be noted that unless otherwise clearly specified and defined, the terms "installation", "connection", "coupling" should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0031] It should be noted that, without conflict, the embodiments in the present application and the features in the embodiments can be combined with each other. Additionally, it should be further noted that for the convenience of description, only the parts related to the utility model are shown in the drawings.

[0032] Embodiment: Refer to Figures 1-9 A sample feeding mechanism for a scanning electron microscope as shown, which includes a main body 1 and a sample stage 11. An electron microscope chamber 2 is provided inside the main body 1. A transition chamber 5 is fixedly penetrated through the top of the main body 1. An inlet opening communicating with the transition chamber 5 is formed at the top inside the electron microscope chamber 2. A vacuum tube 30 is fixedly communicated with one side of the transition chamber 5. An electric hatch 12 is provided at the inlet opening. It is characterized in that a lifting plate 7 is slidably fitted inside the transition chamber 5, and a transmission box 6 for controlling the vertical lifting of the lifting plate 7 is fixedly communicated with the side of the transition chamber 5. A top cover 8 is fixed to the top end of the lifting plate 7. An electric push rod 9 is fixedly penetrated through the top cover 8. A fixed seat 10 is fixed to the output end of the electric push rod 9. A back plate 20 and a driving plate 25 are fixed to one side of the fixed seat 10. The driving plate 25 is located at the bottom of the back plate 20. Two cross plates 21 are fixed to one side of the back plate 20. Two sliding rods 22 are slidably penetrated through the cross plates 21. The bottom ends of the sliding rods 22 are fixed with a lower pressing plate 23. A spring 24 is fixed between the cross plates 21 and the lower pressing plate 23. Two bearing plates 26 are drivingly connected to one side of the driving plate 25;

[0033] The bottom of the sample stage 11 is provided with a bottom plate, and a lifting plate 19 is fixedly sleeved in the middle of the circumferential side of the sample stage 11. Both ends of the lifting plate 19 are located between the lower pressing plate 23 and the bearing pressing plate 26. A slide rail and slide seat assembly 3 for transporting the sample stage 11 is provided on the inner bottom surface of the electron microscope chamber 2. And a maintenance door 4 is provided at a position corresponding to the electron microscope chamber 2 on one side of the main body 1. The interior of the electron microscope chamber 2 can be maintained by opening the maintenance door 4. The slide rail and slide seat assembly 3 is composed of an electric slide rail and a slide seat. The upper surface of the slide seat is in contact with the bottom plate of the sample stage 11. The electric slide rail drives the slide seat to slide deep into the electron microscope chamber 2, so that the sample on the top of the sample stage 11 is placed in the electron microscope scanning area. After the sample scanning is completed, the electric slide rail drives the slide seat and the sample stage 11 to move back to the initial position.

[0034] When using this mechanism for sample feeding operation, a pipe for inflating the inside of the transition chamber 5 is fixedly connected to the side of the transition chamber 5 to balance the internal and external air pressures of the transition chamber 5. The sample is adhered to the top end of the sample stage 11, and then the inside of the transition chamber 5 is inflated. Then, the lifting plate 7 is controlled by the transmission box 6 to rise vertically to the highest position. Then, the fixing seat 10 is driven to rise by the contraction of the electric push rod 9 to ensure that the entire fixing seat 10 slides out of the transition chamber 5 completely. Subsequently, both ends of the lifting plate 19 are placed between the lower pressing plate 23 and the bearing pressing plate 26, and as much as possible, the lifting plate 19 is located in the middle position between the two lower pressing plates 23. The elastic force generated by the contraction deformation of the spring 24 causes the lower pressing plate 23 to press the lifting plate 19, and the lifting plate 19 is firmly clamped between the lower pressing plate 23 and the bearing pressing plate 26. After the placement of the sample stage 11 is completed, the transmission box 6 will control the lifting plate 7 to move vertically down to the bottom in the transition chamber 5, so that the top cover 8 fits tightly with the top end of the transition chamber 5. At this time, the inside of the transition chamber 5 is in a closed state, so that the vacuum tube 30 can evacuate the inside of the transition chamber 5 into a vacuum state. At this time, both the inside of the transition chamber 5 and the electron microscope chamber 2 are in a vacuum state. Therefore, the electric hatch 12 can be opened, and the transition chamber 5 and the electron microscope chamber 2 are connected. The electric push rod 9 pushes the fixing seat 10 to move vertically down to the preset range and then pauses, so that the bottom plate of the sample stage 11 is in contact with the slide seat of the slide rail and slide seat assembly 3. At this time, the lower pressing plate 23 will move up a certain distance under the action of the lifting plate 19, the slide rod 22 slides upward, and the spring 24 is compressed. And the upper surface of the bearing pressing plate 26 is separated from the lower surface of the lifting plate 19. Then, the driving plate 25 drives the two bearing pressing plates 26 to move horizontally and away from each other, so that the lifting plate 19 is no longer located between the lower pressing plate 23 and the bearing pressing plate 26. At this time, the electric push rod 9 drives the fixing seat 10 to move vertically up into the transition chamber 5 again, and the sample stage 11 and the sample remain on the slide seat of the slide rail and slide seat assembly 3. The electric hatch 12 is closed to separate the transition chamber 5 from the electron microscope chamber 2, and the sample feeding operation is completed.

[0035] When the sample scanning is completed and the sample stage 11 needs to be taken out, the electric hatch 12 opens, and the electric push rod 9 controls the fixed seat 10 to move vertically downward. The lower surface of the lower pressing plate 23 first contacts and is squeezed by the upper surface of the lifting plate 19 and slides upward, and the spring 24 is compressed. Subsequently, the driving plate 25 controls the two bearing plates 26 to approach each other. At this time, the lifting plate 19 is located between the lower pressing plate 23 and the bearing plates 26. Then, the electric push rod 9 drives the fixed seat 10 to rise vertically. During the rising process of the fixed seat 10, due to the elastic force of the spring 24, the lower surface of the lower pressing plate 23 always contacts the upper surface of the lifting plate 19, and the bearing plates 26 gradually contact the lower surface of the lifting plate 19, so that the lifting plate 19 is fixed between the lower pressing plate 23 and the bearing plates 26 again. When the fixed seat 10 and the sample stage 11 are lifted into the transition bin 5, the electric hatch 12 closes again, and the transition bin 5 is inflated. After inflation, the lifting plate 7 is controlled by the transmission box 6 to rise vertically to the highest position, and then the electric push rod 9 contracts to drive the fixed seat 10 to rise, ensuring that the fixed seat 10 completely slides out of the transition bin 5, that is, the sampling operation of the sample is completed.

[0036] In order to enable the driving plate 25 to control the two bearing plates 26 to move towards or away from each other, in this embodiment, two sliding grooves 27 are provided on one side of the driving plate 25. One end of the bearing plate 26 is slidably fitted in the sliding groove 27, and a threaded lead screw b28 is rotatably connected in the sliding groove 27. Both ends of the threaded lead screw b28 respectively penetrate through the two bearing plates 26 and are threadedly connected to the two bearing plates 26. One end of the driving plate 25 is fixedly installed with a micro motor 29 through a bracket. The rotating shaft of the micro motor 29 is fixedly connected to one end of the threaded lead screw b28. The thread directions at both ends of the threaded lead screw b28 are opposite. The end face of the bearing plate 26 is provided with a chamfer. The spring 24 is wound around the circumferential side of the sliding rod 22. The cross-section of the lower pressing plate 23 is an L-shaped structural surface. The design of this structure provides a reference range for the placement of the lifting plate 19, so that the lifting plate 19 is placed as much as possible at the middle position between the two lower pressing plates 23, and the end face of the lower pressing plate 23 is also provided with a chamfer. The design of the chamfer is to facilitate the lifting plate 19 to be placed between the lower pressing plate 23 and the bearing plates 26. After the micro motor 29 is started, it drives the threaded lead screw b28 to rotate. Since the thread directions at both ends of the threaded lead screw b28 are opposite, the two ends of the threaded lead screw b28 will synchronously drive the two bearing plates 26 to approach or move away from each other.

[0037] In order to enable the fixed seat 10 to move stably in the vertical direction, in this embodiment, a vertical rod 17 is fixed on the back of the fixed seat 10, and a top plate 18 is fixed at the top of the vertical rod 17. A group of guide rods 16 are fixed between the top cover 8 and the bottom of the lifting plate 7. The top plate 18 is slidably sleeved on the guide rods 16.

[0038] In order to enable the transmission box 6 to drive the lifting plate 7 to vertically lift and lower, in this embodiment, a threaded lead screw a13 is rotatably connected inside the transmission box 6, and a servo motor 15 is fixed to the top of the transmission box 6 through a bracket. The output end of the servo motor 15 is fixedly connected to the top end of the threaded lead screw a13. A lifting block 14 is fixedly connected to the bottom of the circumferential side of the lifting plate 7. The lifting block 14 is slidably engaged inside the transmission box 6, and the threaded lead screw a13 passes through the lifting block 14 and is threadedly connected to the lifting block 14. By starting the servo motor 15 to drive the threaded lead screw a13 to rotate, under the drive of the threaded lead screw a13, the lifting block 14 vertically slides inside the transmission box 6, thereby driving the lifting plate 7 to slide up and down inside the transition bin 5. The outer wall of the lifting plate 7 is in sliding contact with the inner wall of the transition bin 5, making the vertical sliding of the lifting plate 7 inside the transition bin 5 more stable.

[0039] The above description is only the preferred embodiment of the present application and the explanation of the applied technical principles. Those skilled in the art should understand that the scope of the utility model involved in the present application is not limited to the technical solution formed by the specific combination of the above technical features, but should also cover other technical solutions formed by any combination of the above technical features or their equivalent features without departing from the inventive concept of the utility model. For example, the technical solutions formed by mutually replacing the above features with the (but not limited to) technical features with similar functions disclosed in the present application.

[0040] Except for the technical features described in the specification, the remaining technical features are well-known technologies to those skilled in the art. To highlight the innovative features of the present utility model, the remaining technical features are not described in detail herein.

Claims

1. A sample feeding mechanism for a scanning electron microscope, comprising a main body (1) and a sample stage (11). An electron microscope chamber (2) is provided inside the main body (1). A transition chamber (5) is fixedly penetrated through the top of the main body (1). A feed inlet communicating with the transition chamber (5) is opened at the inner top of the electron microscope chamber (2). A vacuum tube (30) is fixedly communicated with one side of the transition chamber (5). An electric hatch (12) is provided at the feed inlet. It is characterized in that, A lifting plate (7) is slidably fitted inside the transition bin (5), and a transmission box (6) for controlling the vertical lifting of the lifting plate (7) is fixedly communicated with the side of the transition bin (5). A top cover (8) is fixed to the top end of the lifting plate (7). An electric push rod (9) is fixedly penetrated through the top cover (8). A fixed seat (10) is fixed to the output end of the electric push rod (9). A back plate (20) and a driving plate (25) are fixed to one side of the fixed seat (10). Two cross plates (21) are fixed to one side of the back plate (20). Two sliding rods (22) slidably penetrate through the cross plates (21). A lower pressing plate (23) is fixed to the bottom ends of the sliding rods (22). A spring (24) is fixed between the cross plates (21) and the lower pressing plate (23). Two bearing plates (26) are drivingly connected to one side of the driving plate (25); A bottom plate is provided at the bottom of the sample stage (11), and a lifting plate (19) is fixedly sleeved in the middle of the circumferential side of the sample stage (11). Both ends of the lifting plate (19) are located between the lower pressing plate (23) and the bearing plate (26).

2. The sample feeding mechanism for a scanning electron microscope according to claim 1, wherein, Two sliding grooves (27) are formed on one side of the driving plate (25). One end of the bearing plate (26) is slidably fitted in the sliding groove (27), and a threaded lead screw b (28) is rotatably connected in the sliding groove (27). Both ends of the threaded lead screw b (28) respectively penetrate through the two bearing plates (26) and are respectively threadedly connected to the two bearing plates (26).

3. The sample feeding mechanism for a scanning electron microscope according to claim 2, characterized in that, A micro motor (29) is fixedly installed at one end of the driving plate (25) through a bracket. The rotating shaft of the micro motor (29) is fixedly connected to one end of the threaded lead screw b (28). The thread directions of both ends of the threaded lead screw b (28) are opposite. A chamfer is provided on the end face of the bearing plate (26).

4. The sample feeding mechanism for a scanning electron microscope according to claim 3, characterized in that, The spring (24) is wound around the circumferential side of the sliding rod (22). The cross-sectional view of the lower pressing plate (23) is an L-shaped structural surface, and a chamfer is also provided on the end face of the lower pressing plate (23).

5. The sample feeding mechanism for a scanning electron microscope according to claim 1, characterized in that, A vertical rod (17) is fixed to the back of the fixed seat (10). A top plate (18) is fixed to the top end of the vertical rod (17). A group of guide rods (16) are fixed between the top cover (8) and the bottom of the lifting plate (7). The top plate (18) is slidably sleeved on the guide rods (16).

6. The sample feeding mechanism for a scanning electron microscope according to claim 1, characterized in that, A threaded lead screw a (13) is rotatably connected inside the transmission box (6). A servo motor (15) is fixedly installed at the top of the transmission box (6) through a bracket. The output end of the servo motor (15) is fixedly connected to the top end of the threaded lead screw a (13). A lifting block (14) is fixed to the bottom of the circumferential side of the lifting plate (7). The lifting block (14) is slidably fitted inside the transmission box (6), and the threaded lead screw a (13) penetrates through the lifting block (14) and is threadedly connected to the lifting block (14).

7. The sample feeding mechanism for a scanning electron microscope according to any one of claims 1-6, characterized in that, A slide rail and slide seat assembly (3) for transmitting the sample stage (11) is provided on the inner bottom surface of the electron microscope chamber (2), and a maintenance door (4) is provided at a position corresponding to the electron microscope chamber (2) on one side of the main body (1).

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