Telescopic liquid taking device and semiconductor liquid changing equipment

Abstract

The utility model discloses a telescopic liquid taking device and semiconductor liquid changing equipment, and relates to the technical field of semiconductor production, and the telescopic liquid taking device comprises a plugging piece, a liquid taking pipe and an elastic telescopic assembly; a liquid taking channel and an exhaust channel which penetrate through the plugging piece are formed in the plugging piece; one end of the liquid taking pipe communicates with the liquid taking channel; the elastic telescopic assembly is connected between the plugging piece and the liquid taking pipe, so that the liquid taking pipe can do telescopic motion close to or away from the plugging piece in the axial direction of the liquid taking pipe; or the elastic telescopic assembly is installed on the liquid taking pipe, so that the liquid taking pipe can do telescopic motion in the axial direction of the liquid taking pipe. According to the design, the liquid taking pipe can be adaptively adjusted according to the heights of different reagent bottles, it is ensured that the pipe bottom can always make contact with the bottoms of inner cavities of the reagent bottles, meanwhile, the situation that the pipe body is folded is avoided, and therefore the thoroughness and efficiency of solution suction are improved.

Description

Technical Field

[0001] The present application relates to the technical field of semiconductor production, and particularly to a telescopic liquid extractor and a semiconductor liquid changing device. Background Art

[0002] In the field of semiconductor manufacturing, the wet process is a key step, which involves the use of various chemical reagents, including but not limited to cleaning agents, etching agents, deionized water, etc. During the use of these liquid reagents, their effective components will be consumed due to chemical reactions, resulting in a decrease in reagent concentration, thus affecting their cleaning and etching effects, and ultimately affecting the manufacturing quality of wafers. Therefore, in order to ensure the stability of the manufacturing process and the quality of products, it is necessary to regularly replace the consumed reagents.

[0003] Traditional liquid changing methods usually require manual intervention, which is not only time-consuming and laborious, but also increases production costs. With the development of automation technology, an automatic liquid changing system has emerged. For example, a reagent placement component, a wet bench, and an automatic liquid changing system disclosed in Chinese Patent with publication number CN222883508U disconnect the connection between the bottle cap with a liquid extraction tube and the reagent bottle to be replaced through a manipulator, and then transfer it to a new reagent bottle for connection to complete the liquid change. However, the liquid extraction tube connecting the bottle cap is designed with a fixed length. When facing reagent bottles of different heights, there will be problems such as the bottom of the tube not being able to contact the bottom of the inner cavity, resulting in incomplete solution extraction, or the tube body being folded, which affects the extraction efficiency or even makes it impossible to extract.

[0004] Therefore, there is an urgent need to provide a new design solution to solve the above problems. Summary of the Utility Model

[0005] In view of this, the purpose of the present application is to provide a telescopic liquid extractor and a semiconductor liquid changing device, which can adapt to reagent bottles of different heights, keep in contact with the bottom of the inner cavity of the reagent bottle to completely extract the solution, and will not be folded to affect the extraction efficiency.

[0006] To achieve the above technical purpose, the present application provides a telescopic liquid extractor, including a plugging member, a liquid extraction tube, and an elastic telescopic assembly;

[0007] The plugging member is provided with a liquid extraction channel and an exhaust channel penetrating through itself;

[0008] One end of the liquid extraction tube is communicated with the liquid extraction channel;

[0009] The elastic telescopic assembly is connected between the plugging member and the liquid extraction tube, so that the liquid extraction tube can move axially along itself closer to or away from the plugging member; or, the elastic telescopic assembly is installed on the liquid extraction tube, so that the liquid extraction tube can move axially along itself.

[0010] Further, the liquid extraction tube includes a first tube body and a second tube body coaxially arranged with the first tube body;

[0011] One end of the first tube body is connected and communicated with the liquid extraction channel;

[0012] The elastic telescopic assembly is connected between the first tube body and the second tube body, so that the second tube body can move away from or close to the first tube body.

[0013] Further, the elastic telescopic assembly includes a connecting tube and an elastic member;

[0014] The other end of the first tube body extends into the connecting tube and is restricted to move within the connecting tube;

[0015] One end of the second tube body extends into the connecting tube and is restricted to move within the connecting tube;

[0016] The elastic member is installed in the connecting tube, and one end thereof is in contact and abutted against the other end of the first tube body, and the other end is in contact and abutted against one end of the second tube body.

[0017] Further, a first connecting sleeve is detachably installed at one end of the connecting tube;

[0018] The other end of the first tube body extends into the connecting tube through the first connecting sleeve;

[0019] A first stop flange that can be in contact and abutted against the first connecting sleeve is provided at the other end of the first tube body;

[0020] A second connecting sleeve is detachably installed at the other end of the connecting tube;

[0021] One end of the second tube body extends into the connecting tube through the second connecting sleeve;

[0022] A second stop flange that can be in contact and abutted against the second connecting sleeve is provided at one end of the second tube body.

[0023] Further, a first sealing ring is installed between the first connecting sleeve and the first tube body;

[0024] A second sealing ring is installed between the second connecting sleeve and the second tube body.

[0025] Further, the first connecting sleeve includes a first sleeve head and a first socket part integrally connected to the first sleeve head;

[0026] The first socket part is provided with a first external thread;

[0027] One end of the connecting tube is provided with a first internal thread threadedly connected to the first external thread;

[0028] The first set of head can be in contact and abutted against one end of the connecting pipe;

[0029] The second connecting sleeve includes a second set of head and a second socket part integrally connected to the second set of head;

[0030] The second socket part is provided with a second external thread;

[0031] The other end of the connecting pipe is provided with a second internal thread threadedly connected to the second external thread;

[0032] The second set of head can be in contact and abutted against the other end of the connecting pipe.

[0033] Further, a third sealing ring is installed between the first set of head and the connecting pipe;

[0034] A fourth sealing ring is installed between the second set of head and the connecting pipe.

[0035] Further, the elastic member is a spring.

[0036] Further, one end of the liquid extraction pipe extends into the liquid extraction channel and is restricted to move within the liquid extraction channel;

[0037] A limiting protrusion is provided on the wall surface of the liquid extraction channel;

[0038] The elastic telescopic assembly is installed in the liquid extraction channel, and one end is in contact and abutted against the limiting protrusion, and the other end is in contact and abutted against one end of the liquid extraction pipe.

[0039] Further, the plugging member includes a plug head and a plunger integrally connected to the plug head;

[0040] A fifth sealing ring is provided around the plunger.

[0041] Further, it further includes a liquid extraction joint and an exhaust joint;

[0042] The liquid extraction joint is connected to the liquid extraction channel;

[0043] The exhaust joint is connected to the exhaust channel.

[0044] This application also discloses a semiconductor liquid changing device, including a manipulator and the telescopic liquid extractor as described above;

[0045] The manipulator is used to transfer the telescopic liquid extractor among different reagent bottles.

[0046] As can be seen from the above technical solutions, the telescopic liquid aspirator designed in this application realizes the telescopic adjustment of the length of the liquid extraction tube or in the length direction by adopting the design of a plugging member, a liquid extraction tube, and an elastic telescopic assembly, effectively solving the problems of incomplete solution extraction or affected extraction efficiency that occur when traditional fixed-length liquid extraction tubes face reagent bottles of different heights. This design enables the liquid extraction tube to adaptively adjust according to the height of different reagent bottles, ensuring that the bottom of the tube can always contact the bottom of the inner cavity of the reagent bottle, while avoiding the folding of the tube body, thereby improving the thoroughness and efficiency of solution extraction. BRIEF DESCRIPTION OF THE DRAWINGS

[0047] In order to more clearly illustrate the technical solutions in the embodiments of the present application or the prior art, the following will briefly introduce the drawings required for use in the description of the embodiments or the prior art. Obviously, the drawings in the following description are only some embodiments of the present application. For those of ordinary skill in the art, without creative efforts, other drawings can be obtained based on these drawings.

[0048] Figure 1 It is a perspective view of the telescopic liquid aspirator provided in the present application;

[0049] Figure 2 It is a cross-sectional view of the telescopic liquid aspirator provided in the present application;

[0050] Figure 3 is Figure 2 an enlarged schematic view of position A of

[0051] Figure 4 is Figure 2 an enlarged schematic view of position B of

[0052] Figure 5 It is a cross-sectional view of the partial structure of the telescopic liquid aspirator provided in the present application;

[0053] In the figure: 1. Plugging member; 11. Liquid extraction channel; 12. Exhaust channel; 13. Plug; 14. Plunger; 15. Fifth sealing ring; 2. Liquid extraction tube; 21. First tube body; 211. First stop flange; 212. Limiting flange; 213. Sealing rubber ring; 22. Second tube body; 221. Second stop flange; 222. Conducting port; 3. Elastic telescopic assembly; 31. Connecting tube; 32. Elastic member; 33. First connecting sleeve; 331. First sleeve head; 332. First socket part; 34. First sealing ring; 35. Third sealing ring; 36. Second connecting sleeve; 361. Second sleeve head; 362. Second socket part; 37. Second sealing ring; 38. Fourth sealing ring; 4. Liquid extraction joint; 5. Exhaust joint. DETAILED DESCRIPTION OF THE EMBODIMENTS

[0054] The technical solutions of the embodiments of the present application will be clearly and completely described below with reference to the accompanying drawings. Obviously, the described embodiments are some, but not all, of the embodiments of the present application. All other embodiments obtained by those of ordinary skill in the art based on the embodiments in the present application without creative efforts shall fall within the protection scope of the embodiments of the present application.

[0055] In the description of the embodiments of the present application, it should be noted that the orientation or positional relationship indicated by the terms "center", "upper", "lower", "left", "right", "vertical", "horizontal", "inner", "outer", etc. is based on the orientation or positional relationship shown in the drawings. It is only for the convenience of describing the embodiments of the present application and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation on the embodiments of the present application. In addition, the terms "first", "second", and "third" are only used for descriptive purposes and should not be construed as indicating or implying relative importance.

[0056] In the description of the embodiments of the present application, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "connection", and "connection" should be understood in a broad sense. For example, it can be a fixed connection, a replaceable connection, or an integral connection. It can be a mechanical connection or an electrical connection. It can be directly connected or indirectly connected through an intermediate medium. It can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the embodiments of the present application can be understood according to specific situations.

[0057] The embodiments of the present application disclose a telescopic liquid extractor and a semiconductor liquid changing device.

[0058] Please refer to Figure 1 and Figure 2 , an embodiment of the telescopic liquid extractor provided in the embodiments of the present application includes:

[0059] A plugging member 1, a liquid extraction tube 2, and an elastic telescopic assembly 3.

[0060] The plugging member 1 is provided with a liquid extraction channel 11 and an exhaust channel 12 passing through itself, and one end of the liquid extraction tube 2 is communicated with the liquid extraction channel 11.

[0061] The elastic telescopic component 3 is connected between the plugging member 1 and the liquid extraction tube 2, so that the liquid extraction tube 2 can move telescopically along its own axis closer to or away from the plugging member 1; or, the elastic telescopic component 3 is installed on the liquid extraction tube 2, so that the liquid extraction tube 2 can move telescopically along its own axis. It can be understood that the elastic telescopic component 3 can be connected between the plugging member 1 and the liquid extraction tube 2, so that the liquid extraction tube 2 can move telescopically relative to the plugging member 1, so as to adapt to reagent bottles of different heights; the elastic telescopic component 3 can also be directly installed on the liquid extraction tube 2, so that the liquid extraction tube 2 itself has a telescopic function, so as to adapt to reagent bottles of different heights.

[0062] In the retractable pipette designed in this application, by adopting the design of the plugging member 1, the liquid extraction tube 2 and the elastic telescopic component 3, the length of the liquid extraction tube 2 or the telescopic adjustment in the length direction is realized, effectively solving the problem that the traditional fixed-length liquid extraction tube 2 has incomplete solution extraction or affected extraction efficiency when facing reagent bottles of different heights. This design enables the liquid extraction tube 2 to be adaptively adjusted according to the height of different reagent bottles, ensuring that the bottom of the tube can always contact the bottom of the inner cavity of the reagent bottle, and at the same time avoiding the situation of tube body folding, thereby improving the thoroughness and efficiency of solution extraction.

[0063] The above is the first embodiment of the retractable pipette provided by this application. The following is the second embodiment of the retractable pipette provided by this application. For details, please refer to Figures 1 to 5 .

[0064] Based on the solution of the above-mentioned first embodiment:

[0065] Further, as Figure 1 and Figure 2 shown, taking the elastic telescopic component 3 installed on the liquid extraction tube 2 as an example, specifically, the liquid extraction tube 2 may include a first tube body 21 and a second tube body 22 coaxially arranged with the first tube body 21.

[0066] One end of the first tube body 21 is connected and communicated with the liquid extraction channel 11. The connection method can be by means of threaded connection. This method allows two components to be screwed together through spiral threads, so as to achieve a tight combination; in order to avoid excessive screwing into the liquid extraction channel 11, a limiting flange 212 is provided on the first tube body 21, which can contact and abut against the plugging member 1. At the same time, a sealing rubber ring 213 (such as an O-ring) can be designed between the limiting flange 212 and the plugging member 1 for improving the sealing performance. In addition, the connection method can also be by means of interference plugging. This connection method involves inserting the end of a component (the first tube body 21) into the hole (the liquid extraction channel 11) of another component. Due to the slight dimensional difference, the inserted first tube body 21 will have an interference fit with the inner wall of the liquid extraction channel 11, so as to achieve the effect of fixation and sealing.

[0067] The elastic telescopic component 3 is connected between the first tube body 21 and the second tube body 22, so that the second tube body 22 can move away from or close to the first tube body 21. This design enables the self-length of the liquid extraction tube 2 to adaptively expand and contract elastically. Facing reagent bottles of different heights, it can keep the second tube body 22 in contact with the inner cavity bottom of the reagent bottle, thereby ensuring thorough solution extraction.

[0068] Further, as Figure 2 shown, for the design of the elastic telescopic component 3, it includes a connecting tube 31 and an elastic member 32; the other end of the first tube body 21 extends into the connecting tube 31 and is restricted to move within the connecting tube 31; one end of the second tube body 22 extends into the connecting tube 31 and is restricted to move within the connecting tube 31; the elastic member 32 is installed within the connecting tube 31, and one end is in contact and abuts against the other end of the first tube body 21, and the other end is in contact and abuts against one end of the second tube body 22.

[0069] This design enables the first tube body 21 and the second tube body 22 to move relatively within the connecting tube 31, while the elastic member 32 functions to provide a restoring force and maintain the relative position stability between the two. When the plugging member 1 continues to move downward after the second tube body 22 contacts the inner cavity bottom of the reagent bottle, at this time, the external force causes the second tube body 22 to squeeze the elastic member 32 within the connecting tube 31 and move relatively retracting into the connecting tube 31, thereby changing the total length of the liquid extraction tube 2 (becoming shorter). When the connection between the plugging member 1 and the reagent bottle is released and the liquid extraction tube 2 is taken out, the elastic member 32 will return to its original shape, pushing the second tube body 22 to move relatively out of the connecting tube 31, and at this time, the total length of the liquid extraction tube 2 becomes longer (restoring to the initial length).

[0070] The design of the connecting tube 31 not only provides a connection and conduction function, but also can limit and provide an installation space for the elastic member 32, enabling the elastic member 32 to more stably exert its elastic function.

[0071] Further, the elastic member 32 is a spring. The spring is a common elastic element, which has the advantages of simple structure, convenient manufacturing, low cost, etc., and is widely used in various machinery and instruments. In the telescopic liquid extractor of the present application, the spring serves as the elastic member 32, which can effectively provide a restoring force, enabling the second tube body 22 to quickly return to its original position after being subjected to an external force, thereby maintaining the stability and reliability of the liquid extraction tube 2.

[0072] Further, as Figure 3 shown, one end of the connecting tube 31 is detachably installed with a first connecting sleeve 33; the other end of the first tube body 21 extends into the connecting tube 31 through the first connecting sleeve 33; the other end of the first tube body 21 is provided with a first stop flange 211 that can contact and abut against the first connecting sleeve 33.

[0073] This design ensures the stable movement of the first tube body 21 within the connecting tube 31. At the same time, the contact between the first stop flange 211 and the first connecting sleeve 33 can limit the movement range of the first tube body 21, preventing it from moving out of the connecting tube 31 excessively (that is, realizing the design that one end of the first tube body 21 is restricted to move within the connecting tube 31). The detachable connection design of the first connecting sleeve 33 and the connecting tube 31 facilitates the assembly and maintenance of the first connecting sleeve 33, the first tube body 21, and the connecting tube 31.

[0074] As Figure 4 shown, a second connecting sleeve 36 is detachably installed at the other end of the connecting tube 31; one end of the second tube body 22 extends into the connecting tube 31 through the second connecting sleeve 36; a second stop flange 221 that can contact and abut against the second connecting sleeve 36 is provided at one end of the second tube body 22. This design ensures the stable movement of the second tube body 22 within the connecting tube 31. At the same time, the contact between the second stop flange 221 and the second connecting sleeve 36 can limit the movement range of the second tube body 22, preventing it from detaching from the connecting tube 31 (that is, realizing the design that one end of the second tube body 22 is restricted to move within the connecting tube 31). The detachable connection design of the second connecting sleeve 36 and the connecting tube 31 not only facilitates the assembly and maintenance of the second connecting sleeve 36, the second tube body 22, and the connecting tube 31, but also improves the flexibility and practicality of the telescopic liquid extractor.

[0075] Furthermore, as Figure 3 and Figure 4 shown, a first sealing ring 34 is installed between the first connecting sleeve 33 and the first tube body 21; a second sealing ring 37 is installed between the second connecting sleeve 36 and the second tube body 22.

[0076] The design of the sealing ring can effectively prevent liquid from leaking through the gaps between the first tube body 21 and the first connecting sleeve 33 or between the second tube body 22 and the second connecting sleeve 36, ensuring the accuracy and safety of the liquid extraction process. At the same time, the sealing ring can also play a lubricating role, reducing the frictional resistance during the movement of the first tube body 21 and the second tube body 22, making the operation of the liquid extraction tube 2 smoother.

[0077] The first sealing ring 34 and the second sealing ring 37 are common O-rings and can be clamped on the inner walls of the first connecting sleeve 33 and the second connecting sleeve 36 without limitation.

[0078] Further, as shown in Figure 3, the first connecting sleeve 33 includes a first sleeve head 331 and a first socket part 332 integrally connected to the first sleeve head 331, forming a T-shaped sleeve structure as a whole. The first socket part 332 is provided with a first external thread; one end of the connecting pipe 31 is provided with a first internal thread threadedly connected to the first external thread; the first sleeve head 331 can contact and abut against one end of the connecting pipe 31. This design makes the connection between the first connecting sleeve 33 and the connecting pipe 31 more stable and not prone to loosening or falling off. The contact and abutment of the first sleeve head 331 and the connecting pipe 31 not only increase the connection stability but also prevent liquid from leaking from the connection, further ensuring the accuracy and safety of the liquid extraction process.

[0079] As Figure 4 shown, the second connecting sleeve 36 includes a second sleeve head 361 and a second socket part 362 integrally connected to the second sleeve head 361, forming a T-shaped sleeve structure as a whole. The second socket part 362 is provided with a second external thread; the other end of the connecting pipe 31 is provided with a second internal thread threadedly connected to the second external thread; the second sleeve head 361 can contact and abut against the other end of the connecting pipe 31. This design makes the connection between the second connecting sleeve 36 and the connecting pipe 31 equally stable and reliable, not prone to loosening or falling off. The contact and abutment of the second sleeve head 361 and the connecting pipe 31 can also prevent liquid from leaking from the connection, ensuring the stability and safety of the liquid extraction process.

[0080] Further, as Figure 3 and Figure 4 shown, a third sealing ring 35 is installed between the first sleeve head 331 and the connecting pipe 31; a fourth sealing ring 38 is installed between the second sleeve head 361 and the connecting pipe 31. The design of the third sealing ring 35 and the fourth sealing ring 38 further enhances the sealing performance of the telescopic liquid extractor. They are respectively located between the first sleeve head 331 and the connecting pipe 31 and between the second sleeve head 361 and the connecting pipe 31, and can effectively prevent liquid from leaking from the end of the connecting pipe 31, thus ensuring the absolute safety and accuracy of the liquid extraction process. These sealing rings can also be common O-rings, which are easy to install and maintain.

[0081] Further, taking the elastic telescopic component 3 connecting the liquid extraction tube 2 and the plugging member 1 as an example, one end of the liquid extraction tube 2 extends into the liquid extraction channel 11 and is restricted to move within the liquid extraction channel 11; a limiting protrusion (not shown in the figure) is provided on the wall surface of the liquid extraction channel 11; the elastic telescopic component 3 is installed in the liquid extraction channel 11, with one end in contact and abutted against the limiting protrusion, and the other end in contact and abutted against one end of the liquid extraction tube 2; at this time, the elastic telescopic component 3 can directly be the elastic member 32. This design enables the liquid extraction tube 2 to perform telescopic movement relative to the plugging member 1, so as to adapt to reagent bottles of different heights. As a key component connecting the liquid extraction tube 2 and the plugging member 1, the elastic telescopic component 3 not only provides a restoring force, but also ensures the stability and reliability of the liquid extraction tube 2 during movement.

[0082] The way of restricting one end of the liquid extraction tube 2 to move within the liquid extraction channel 11 can be designed with reference to the aforementioned design method of restricting movement within the connecting tube 31, and will not be elaborated.

[0083] Further, as Figure 2 and Figure 5 shown, the plugging member 1 includes a plug 13 and a plunger 14 integrally connected to the plug 13; a fifth sealing ring 15 is provided around the plunger 14. The plugging method effectively realizes the sealing of the bottle mouth. Compared with the traditional screw cap sealing method, this sealing method not only has a simpler structure, but also has significant advantages in automatic installation and disassembly, greatly improving the operation convenience and efficiency. The fifth sealing ring 15 can also be an O-ring, and no specific limitation is made.

[0084] Further, as Figure 1 and Figure 2 shown, it further includes a liquid extraction joint 4 and an exhaust joint 5; the liquid extraction joint 4 is connected to the liquid extraction channel 11; the exhaust joint 5 is connected to the exhaust channel 12.

[0085] The design of the liquid extraction joint 4 facilitates the connection of a liquid extraction power source (such as a liquid extraction pump), while the design of the exhaust joint 5 facilitates the connection of an exhaust power source (such as a suction fan) or an exhaust gas tank. The liquid extraction structure and the exhaust joint 5 can be fixed by means of threaded connection, which is convenient for installation and disassembly.

[0086] In this application, in order to achieve a good sealing effect and have corrosion resistance at the same time, each sealing ring can be prepared from polytetrafluoroethylene. Polytetrafluoroethylene material has good corrosion resistance, high temperature resistance and sealing performance, and can effectively ensure the reliability and durability of the sealing member. In addition, polytetrafluoroethylene material also has good elasticity and wear resistance, and can adapt to the shapes and sizes of different bottle mouths, thus ensuring the sealing effect. Of course, the elastic member 32 can also be prepared from polytetrafluoroethylene, and no specific limitation is made.

[0087] It should be noted that in order to prevent the bottom of the second tube body 22 from coming into contact with the inner cavity bottom of the reagent bottle and thus being unable to suck up the liquid, the bottom of the second tube body 22 can be designed to be conical, or as Figure 2 shown, a conduction port 222 is opened, and specific details will not be elaborated here.

[0088] This application also discloses a semiconductor liquid-changing device, including a manipulator and a telescopic liquid extractor; the manipulator is used to transfer the telescopic liquid extractor among different reagent bottles. The specific liquid-changing process is as follows: the manipulator grabs the plugging member 1 and pulls it out from the bottle mouth position, then moves to the bottle mouth of a new reagent bottle, and then inserts it.

[0089] The above has introduced in detail the telescopic liquid extractor and the semiconductor liquid-changing device provided by this application. For those of ordinary skill in the art, according to the idea of the embodiments of this application, there will be changes in the specific implementation manners and application scopes. In summary, the content of this specification should not be construed as a limitation to this application.

Claims

1. A telescopic pipette, characterized in that, It includes a plugging member (1), a liquid extraction tube (2), and an elastic telescopic component (3); The plugging member (1) is provided with a liquid extraction channel (11) and an exhaust channel (12) that penetrate through itself; One end of the liquid extraction tube (2) is communicated with the liquid extraction channel (11); The elastic telescopic component (3) is connected between the plugging member (1) and the liquid extraction tube (2) so that the liquid extraction tube (2) can move axially along itself closer to or away from the plugging member (1); or, the elastic telescopic component (3) is installed on the liquid extraction tube (2) so that the liquid extraction tube (2) can move axially along itself.

2. The telescopic pipettor according to claim 1, wherein The liquid extraction tube (2) includes a first tube body (21) and a second tube body (22) coaxially arranged with the first tube body (21); One end of the first tube body (21) is connected and communicated with the liquid extraction channel (11); The elastic telescopic component (3) is connected between the first tube body (21) and the second tube body (22) so that the second tube body (22) can move away from or close to the first tube body (21).

3. The telescopic liquid extractor according to claim 2, wherein The elastic telescopic component (3) includes a connecting tube (31) and an elastic member (32); The other end of the first tube body (21) extends into the connecting tube (31) and is restricted to move within the connecting tube (31); One end of the second tube body (22) extends into the connecting tube (31) and is restricted to move within the connecting tube (31); The elastic member (32) is installed within the connecting tube (31), and one end thereof is in contact and abuts against the other end of the first tube body (21), and the other end is in contact and abuts against one end of the second tube body (22).

4. The telescopic liquid extractor according to claim 3, characterized in that, One end of the connecting tube (31) is detachably installed with a first connecting sleeve (33); The other end of the first tube body (21) extends into the connecting tube (31) through the first connecting sleeve (33); The other end of the first tube body (21) is provided with a first stop flange (211) that can be in contact and abut against the first connecting sleeve (33); The other end of the connecting tube (31) is detachably installed with a second connecting sleeve (36); One end of the second tube body (22) extends into the connecting tube (31) through the second connecting sleeve (36); One end of the second tube body (22) is provided with a second stop flange (221) that can be in contact and abut against the second connecting sleeve (36).

5. The telescopic liquid extractor according to claim 4, wherein, A first sealing ring (34) is installed between the first connecting sleeve (33) and the first tube body (21); A second sealing ring (37) is installed between the second connecting sleeve (36) and the second tube body (22).

6. The telescopic liquid extractor according to claim 4, wherein, The first connecting sleeve (33) includes a first sleeve head (331) and a first socket part (332) integrally connected to the first sleeve head (331); The first socket part (332) is provided with a first external thread; One end of the connecting tube (31) is provided with a first internal thread threadedly connected to the first external thread; The first sleeve head (331) can be in contact and abut against one end of the connecting tube (31); The second connecting sleeve (36) includes a second sleeve head (361) and a second socket portion (362) integrally connected to the second sleeve head (361); The second socket portion (362) is provided with a second external thread; The other end of the connecting pipe (31) is provided with a second internal thread threadedly connected to the second external thread; The second sleeve head (361) can be in contact and abutted against the other end of the connecting pipe (31).

7. The telescopic liquid extractor according to claim 6, characterized in that, A third sealing ring (35) is installed between the first sleeve head (331) and the connecting pipe (31); A fourth sealing ring (38) is installed between the second sleeve head (361) and the connecting pipe (31).

8. The telescopic liquid extractor according to claim 3, wherein The elastic member (32) is a spring.

9. The telescopic liquid extractor according to claim 1, wherein One end of the liquid extraction pipe (2) extends into the liquid extraction channel (11) and is restricted to move within the liquid extraction channel (11); The wall surface of the liquid extraction channel (11) is provided with a limiting protrusion; The elastic telescopic assembly (3) is installed in the liquid extraction channel (11), and one end is in contact and abutted against the limiting protrusion, and the other end is in contact and abutted against one end of the liquid extraction pipe (2).

10. The telescopic liquid extractor according to claim 1, characterized in that, The plugging member (1) includes a plug (13) and a plunger (14) integrally connected to the plug (13); A fifth sealing ring (15) is provided around the plunger (14).

11. The telescopic liquid extractor according to claim 1, wherein, It further includes a liquid extraction joint (4) and an exhaust joint (5); The liquid extraction joint (4) is connected to the liquid extraction channel (11); The exhaust joint (5) is connected to the exhaust channel (12).

12. A semiconductor liquid changing device, characterized in that, It includes a manipulator and the telescopic liquid extractor according to any one of claims 1 to 11; The manipulator is used to transfer the telescopic liquid extractor among different reagent bottles.

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