Wafer box cover dismounting device

Abstract

The utility model relates to the technical field of semiconductors, in particular to a wafer box cover dismounting device which comprises a connecting seat, a box body is arranged at the upper end of the connecting seat, clamping plates are fixedly connected to the left portion and the right portion of the upper end of the box body, an installation frame is fixedly installed on the front portion of the upper end of the connecting seat, and a rear sealing plate is installed at the rear end of the installation frame. A front sealing plate is mounted at the front end of the mounting frame, a cover dismounting mechanism is mounted in the middle of the front end of a rear sealing plate, a control panel is arranged at the lower right corner of the front end of the rear sealing plate, and suction cups are arranged at the four corners of the rear end of the front sealing plate. Compared with traditional manual disassembly and assembly, the wafer box cover disassembly device achieves automatic disassembly and assembly, reduces labor cost, reduces secondary pollution caused after cleaning, ensures cleanliness of the internal environment of the cleaned wafer box, enables the whole wafer box cleaning technological process to be more optimized, and improves production efficiency. And redundant actions in the cleaning process are reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductors, and particularly relates to a wafer cassette lid removal device. Background Technique

[0002] A wafer cassette is an important container for storing and transporting wafers during the semiconductor manufacturing process. The wafer cassette needs to be opened and closed before and after cleaning.

[0003] During the process of opening and closing the existing wafer cassette, manual disassembly and assembly are generally carried out, which increases the labor cost, improves the pollution caused by the second time after cleaning, and it is difficult to ensure the cleanliness of the internal environment of the wafer cassette after cleaning. Therefore, we introduce a new wafer cassette lid removal device. Summary of the Utility Model

[0004] The main purpose of the utility model is to provide a wafer cassette lid removal device, which can effectively solve the problems in the background technique.

[0005] To achieve the above purpose, the technical solution adopted by the utility model is as follows:

[0006] A wafer cassette lid removal device includes a connecting seat. A cassette body is arranged at the upper end of the connecting seat. Clamping plates are fixedly connected to the left and right parts of the upper end of the cassette body respectively. An installation frame is fixedly installed at the front part of the upper end of the connecting seat. A rear closing plate is installed at the rear end of the installation frame. A front closing plate is installed at the front end of the installation frame. A lid removal mechanism is installed at the middle part of the front end of the rear closing plate. A control panel is arranged at the lower right corner of the front end of the rear closing plate. Suction cups are arranged at the four corners of the rear end of the front closing plate.

[0007] Preferably, the lid removal mechanism includes a cylinder. A connecting bar is fixedly connected to the output end of the cylinder. A moving plate is fixedly connected to the front end of the connecting bar. Through slots are formed at the left and right ends of the moving plate. Slide columns are slidably connected in the two slots respectively. Connecting blocks are fixedly connected to the rear ends of the two slide columns. Knobs are arranged at the rear ends of the two connecting blocks. Locking mechanisms are arranged at the rear ends of the two knobs.

[0008] Preferably, the cylinder is installed at the front end of the rear closing plate, and the front end of the moving plate does not contact the front closing plate.

[0009] Preferably, the two knobs are inserted through the rear closing plate, and both extend to the rear of the rear closing plate.

[0010] Preferably, the locking mechanism includes a rotating piece, a rotating block is fixedly connected to the middle of the front end of the rotating piece, a rotating groove is formed at the front end of the rotating block, sliding buckle grooves are formed in both the upper part and the lower part of the front end of the rotating piece, sliding buckle blocks are slidably connected in both the sliding buckle grooves, locking plates are fixedly connected to the front ends of both the sliding buckle blocks, T-shaped sliders are fixedly connected to the front ends of both the locking plates, fixing plates are inserted and slidably connected to the fronts of both the T-shaped sliders, and locking buckles are inserted and connected to one ends of both the locking plates away from the rotating piece.

[0011] Preferably, the rotating groove is in snap fit with the knob, and neither of the two locking plates contacts the rotating block.

[0012] Preferably, the front ends of both the fixing plates are fixedly connected to the rear end of the rear closing plate, and the two locking buckles are respectively fixedly connected to the inner upper wall and the inner lower wall of the box body.

[0013] Compared with the prior art, the utility model has the following beneficial effects:

[0014] 1. By starting the cylinder, the output end of the cylinder pushes the moving plate to move leftward through the connecting bar. When the moving plate moves leftward, the two connecting blocks can rotate by sliding the two sliding columns in the two sliding grooves respectively, so that the two knobs can rotate. The two knobs are respectively in snap fit with the two rotating grooves, so that the rotating block can drive the rotating piece to rotate. When the rotating piece rotates, the two locking plates can move relatively through the cooperation between the sliding buckle blocks and the sliding buckle grooves, so that the end parts of the two locking plates are respectively disengaged from the two locking buckles. The two locking buckles are installed on the inner upper wall and the inner lower wall of the box body, so that the wafer box can be quickly unlatched;

[0015] 2. Compared with the traditional manual disassembly and assembly, it realizes automatic disassembly and assembly, reduces the labor cost, reduces the secondary pollution caused after cleaning, ensures the cleanliness of the internal environment of the wafer box after cleaning, and also optimizes the entire wafer box cleaning process flow, reducing the redundant actions in the cleaning process. Description of the Drawings

[0016] Figure 1 It is a schematic diagram of the overall structure of a wafer box unlatched device of the utility model;

[0017] Figure 2 It is a front view of a wafer box unlatched device of the utility model;

[0018] Figure 3 It is a front view of the installation frame of a wafer box unlatched device of the utility model;

[0019] Figure 4 It is a schematic diagram of the encapsulation structure of the installation frame of a wafer box unlatched device of the utility model.

[0020] Figure 5 This is a schematic diagram of the overall structure of the cover removal device for a wafer cassette of the present utility model.

[0021] Figure 6 This is a schematic diagram of the overall structure of the locking mechanism of the cover removal device for a wafer cassette of the present utility model.

[0022] In the figure: 1, connecting seat; 2, box body; 3, clamping plate; 4, mounting frame; 5, rear closing plate; 6, front closing plate; 7, cover removal mechanism; 71, cylinder; 72, connecting bar; 73, moving plate; 74, sliding groove; 75, sliding column; 76, connecting block; 77, knob; 78, locking mechanism; 781, rotating piece; 782, rotating block; 783, rotating groove; 784, sliding buckle groove; 785, sliding buckle block; 786, locking plate; 787, T-shaped slider; 788, fixing plate; 789, locking buckle; 8, control panel; 9, suction cup. Specific embodiments

[0023] To make the technical means, creative features, achieved purposes and effects of the present utility model easy to understand, the present utility model will be further elaborated below in conjunction with specific embodiments.

[0024] In the description of the present utility model, it should be noted that the orientation or positional relationship indicated by the terms "upper", "lower", "inner", "outer", "front end", "rear end", "both ends", "one end", "the other end", etc. is based on the orientation or positional relationship shown in the drawings, and is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation of the present utility model. In addition, the terms "first" and "second" are only used for descriptive purposes and cannot be construed as indicating or implying relative importance.

[0025] In the description of the present utility model, it should be noted that unless otherwise clearly specified and limited, the terms "installation", "provided with", "connection", etc. should be understood in a broad sense. For example, "connection" can be a fixed connection, a detachable connection, or an integral connection; it can be a mechanical connection or an electrical connection; it can be directly connected or indirectly connected through an intermediate medium, and it can be the communication inside two elements. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific situations.

[0026] Please refer to Figure 1-6 , the present utility model provides a technical solution:

[0027] A wafer cassette lid-opening device includes a connecting seat 1. A cassette body 2 is arranged at the upper end of the connecting seat 1. Clamping plates 3 are fixedly connected to the left and right parts of the upper end of the cassette body 2 respectively. An installation frame 4 is fixedly installed at the front part of the upper end of the connecting seat 1. A rear closing plate 5 is installed at the rear end of the installation frame 4. A front closing plate 6 is installed at the front end of the installation frame 4. A lid-opening mechanism 7 is installed at the middle part of the front end of the rear closing plate 5. A control panel 8 is arranged at the lower right corner of the front end of the rear closing plate 5. Suction cups 9 are arranged at the four corners of the rear end of the front closing plate 6.

[0028] In this embodiment, the lid-opening mechanism 7 includes a cylinder 71. The output end of the cylinder 71 is fixedly connected with a connecting bar 72. The front end of the connecting bar 72 is fixedly connected with a moving plate 73. Through holes 74 are formed in the left and right ends of the moving plate 73. Slide columns 75 are slidably connected in the two through holes 74 respectively. The rear ends of the two slide columns 75 are fixedly connected with connecting blocks 76. Knobs 77 are arranged at the rear ends of the two connecting blocks 76. Locking mechanisms 78 are arranged at the rear ends of the two knobs 77. The cylinder 71 is installed at the front end of the rear closing plate 5. The front end of the moving plate 73 does not contact the front closing plate 6. The two knobs 77 are inserted through the rear closing plate 5, and both extend to the rear of the rear closing plate 5.

[0029] Through the above scheme: the output end of the cylinder 71 pushes the moving plate 73 to move leftward through the connecting bar 72. When the moving plate 73 moves leftward, the two slide columns 75 slide in the two through holes 74 respectively, enabling the two connecting blocks 76 to rotate, and thus enabling the two knobs 77 to rotate.

[0030] In this embodiment, the locking mechanism 78 includes a rotating piece 781. A rotating block 782 is fixedly connected to the middle part of the front end of the rotating piece 781. A rotating groove 783 is formed in the front end of the rotating block 782. Sliding buckle grooves 784 are formed in the upper and lower parts of the front end of the rotating piece 781 respectively. Sliding buckle blocks 785 are slidably connected in the two sliding buckle grooves 784 respectively. Locking plates 786 are fixedly connected to the front ends of the two sliding buckle blocks 785. T-shaped sliders 787 are fixedly connected to the front ends of the two locking plates 786. Fixing plates 788 are inserted and slidably connected to the fronts of the two T-shaped sliders 787. Locking buckles 789 are inserted through the ends of the two locking plates 786 away from the rotating piece 781. The rotating groove 783 is engaged with the knob 77. The two locking plates 786 do not contact the rotating block 782. The front ends of the two fixing plates 788 are fixedly connected to the rear end of the rear closing plate 5. The two locking buckles 789 are fixedly connected to the upper inner wall and the lower inner wall of the cassette body 2 respectively.

[0031] Through the above solution: the two knobs 77 are respectively engaged with the two rotating grooves 783, so that the rotating block 782 can drive the rotating piece 781 to rotate. When the rotating piece 781 rotates, the cooperation between the sliding buckle 785 and the sliding buckle groove 784 enables the two locking plates 786 to move relative to each other, so that the end parts of the two locking plates 786 are respectively disengaged from the two locking buckles 789. The two locking buckles 789 are installed on the inner upper wall and the inner lower wall of the box body 2, so that the wafer box can be quickly opened.

[0032] It should be noted that the present utility model is a device for opening the cover of a wafer box. During use, by starting the cylinder 71, the power output end thereof drives the moving plate 73 to move leftward via the connecting bar 72. During this movement, the moving plate 73 smoothly slides along the two sliding columns 75 in the corresponding sliding grooves 74, thereby triggering the rotation of the connecting block 76. As the connecting block 76 rotates, the two knobs 77 also rotate accordingly. They are respectively tightly embedded in the rotating grooves 783 and serve as the driving points for the rotation of the rotating block 782. When the rotating block 782 drives the rotating piece 781 to rotate, due to the precise cooperation between the sliding buckle 785 and the sliding buckle groove 784, the two locking plates 786 can approach or separate from each other, realizing their relative movement. This movement causes the end parts of the locking plates 786 that were originally in close contact with the locking buckles 789 to gradually disengage. The two locking buckles 789 are fixedly installed on the inner upper and lower wall surfaces of the box body 2 of the wafer box. It not only realizes the automatic and rapid disassembly and installation of the cover of the wafer box, greatly reducing the labor cost compared with the traditional manual operation, but also effectively avoids the secondary pollution that may be introduced during the cleaning process, ensures the high cleanliness of the inside of the wafer box after cleaning, further optimizes the overall cleaning process, and eliminates unnecessary operation steps.

[0033] The above shows and describes the basic principles, main features and advantages of the present utility model. Those skilled in the art should understand that the present utility model is not limited by the above embodiments. What is described in the above embodiments and the specification only illustrates the principle of the present utility model. Without departing from the spirit and scope of the present utility model, the present utility model will have various changes and improvements, and these changes and improvements all fall within the scope of the present utility model claimed. The scope of protection claimed by the present utility model is defined by the appended claims and their equivalents.

Claims

1. A wafer cassette lid-opening device, comprising a connecting seat (1), characterized in that: A box body (2) is provided at the upper end of the connection base (1). Clamping plates (3) are fixedly connected to the left and right parts of the upper end of the box body (2). An installation frame (4) is fixedly installed at the front part of the upper end of the connection base (1). A rear closing plate (5) is installed at the rear end of the installation frame (4), and a front closing plate (6) is installed at the front end of the installation frame (4). A cover removing mechanism (7) is installed at the middle part of the front end of the rear closing plate (5). A control panel (8) is arranged at the lower right corner of the front end of the rear closing plate (5). Suction cups (9) are arranged at the four corners of the rear end of the front closing plate (6). The cover removing mechanism (7) includes a cylinder (71). The output end of the cylinder (71) is fixedly connected to a connecting bar (72). A moving plate (73) is fixedly connected to the front end of the connecting bar (72). Through slots (74) are formed at the left and right ends of the moving plate (73). Slide columns (75) are slidably connected in the two slots (74). Connecting blocks (76) are fixedly connected to the rear ends of the two slide columns (75). Knobs (77) are arranged at the rear ends of the two connecting blocks (76). Locking mechanisms (78) are arranged at the rear ends of the two knobs (77).

2. The wafer cassette lid-opening device according to claim 1, characterized in that: The cylinder (71) is installed at the front end of the rear closing plate (5), and the front end of the moving plate (73) does not contact the front closing plate (6).

3. The wafer cassette lid-opening device according to claim 1, wherein: The two knobs (77) are inserted through the rear closing plate (5), and both extend to the rear of the rear closing plate (5).

4. A wafer cassette lid-opening device according to claim 1, characterized in that: The locking mechanism (78) includes a rotating plate (781). A rotating block (782) is fixedly connected to the middle part of the front end of the rotating plate (781). A rotating groove (783) is formed at the front end of the rotating block (782). Sliding buckle grooves (784) are formed at the upper and lower parts of the front end of the rotating plate (781). Sliding buckle blocks (785) are slidably connected in the two sliding buckle grooves (784). Locking plates (786) are fixedly connected to the front ends of the two sliding buckle blocks (785). T-shaped sliders (787) are fixedly connected to the front ends of the two locking plates (786). Fixing plates (788) are inserted and slidably connected to the fronts of the two T-shaped sliders (787). Locking buckles (789) are inserted through the ends of the two locking plates (786) away from the rotating plate (781).

5. The wafer cassette lid opening device according to claim 4, characterized in that: The rotating groove (783) is engaged with the knob (77), and the two locking plates (786) do not contact the rotating block (782).

6. The wafer cassette lid opening device according to claim 4, wherein: The front ends of the two fixing plates (788) are fixedly connected to the rear end of the rear closing plate (5), and the two locking buckles (789) are fixedly connected to the upper inner wall and the lower inner wall of the box body (2) respectively.

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