Clamping plug cleaning device

Abstract

The utility model relates to the technical field of semiconductor processing, and discloses a clamping plug cleaning device which comprises a flushing box body, a flushing pipeline and an ultrasonic generator, the flushing box body is provided with a dehumidifying opening and a drying opening, the flushing pipeline and the ultrasonic generator are respectively installed in the flushing box body, and the flushing pipeline comprises a main pipeline, a first pipeline and a second pipeline. The first pipelines and the second pipelines are respectively communicated with the main pipeline, one end of each first pipeline and one end of each second pipeline are respectively connected to the outer side surface of the main pipeline, a clamping plug placing area for placing a clamping plug is formed between every two adjacent first pipelines, each first pipeline is provided with a first nozzle, each second pipeline extends into the corresponding clamping plug placing area, and each second pipeline is provided with a second nozzle. A discharge outlet is formed in the bottom of the flushing box body and connected with a drainage pipe, and the drainage pipe is connected with a drainage valve. According to the clamping plug cleaning device, new pollutants are prevented from being introduced in the airing process, the cleaning efficiency and the cleaning effect are improved, and the labor cost is reduced.

Description

Technical Field

[0001] The utility model relates to the technical field of semiconductor processing, in particular to a cassette cleaning device. Background Art

[0002] In the production and processing of semiconductor substrates, a cassette, as a medium for carrying and packaging semiconductor wafers, plays an irreplaceable role; after the substrate enters the clean room for cleaning after undergoing three processes of cutting, grinding, and polishing, there are very strict requirements for the cleanliness of the cassette for loading or packaging wafers. For non-packaging cassettes, they are usually recycled 1 - 2 times and then cleaned. Currently, the main method for cleaning cassettes in the workshop is to put some cassettes into an anti-corrosion iron cage, put the iron cage into an alcohol barrel for cleaning for 40 minutes to one hour, and after ultrasonic cleaning, manually hold a water spray head to rinse the cassettes in the iron cage. After the existing technology finishes cleaning the cassettes, it generally uses the natural drying method. During the placement process, a small amount of dust or other substances may fly onto the cleaned cassettes. The existing technology mainly has the following disadvantages:

[0003] 1. The cassettes are stacked in the iron cage, and incomplete cleaning may occur.

[0004] 2. After ultrasonic cleaning, manual flushing cannot ensure the consistency of cassette cleaning.

[0005] 3. Using the natural drying method after cleaning cannot ensure that no new pollutants will adhere during the drying process.

[0006] 4. It takes a long time. The existing cleaning process takes 4 - 5 hours from cleaning to drying. Summary of the Utility Model

[0007] Aiming to solve at least one of the technical problems existing in the prior art. The utility model provides a cassette cleaning device, which can avoid introducing new pollutants during the drying process, improve the cleaning efficiency and cleaning effect, and reduce the labor cost.

[0008] To achieve the above object, the present utility model provides a plug cleaning device, which includes a flushing box body, a flushing pipeline, and an ultrasonic generator. The flushing box body is provided with a dehumidifying port and a drying port. The dehumidifying port is used to communicate with a dehumidifying device, and the drying port is used to communicate with a nitrogen dryer. The flushing pipeline and the ultrasonic generator are respectively installed in the flushing box body. The flushing pipeline includes a main pipeline arranged along the height direction, a plurality of first pipelines and second pipelines arranged at intervals in the circumferential direction. The first pipelines and the second pipelines are respectively communicated with the main pipeline. One end of the first pipeline and one end of the second pipeline are respectively connected to the outer side surface of the main pipeline. A plug placement area for placing plugs is formed between adjacent first pipelines. The first pipeline is provided with a first spray port facing the plug placement area. The second pipeline extends into the plug placement area, and the second pipeline is provided with a second spray port facing the plug placement area. A discharge port is arranged at the bottom of the flushing box body, and the discharge port is connected to a drain pipe, and the drain pipe is connected with a drain valve.

[0009] As a preferred solution, the flushing box body is connected with a lifting driving member, and the lifting driving member is in transmission connection with the main pipeline.

[0010] As a preferred solution, the projections of the first pipeline and the second pipeline on the bottom surface of the flushing box body are arranged at intervals along the circumferential direction of the main pipeline.

[0011] As a preferred solution, at least three first pipelines are provided, and at least two plug placement areas are formed in the flushing box body.

[0012] As a preferred solution, a positioning rod is connected to the bottom surface of the flushing box body. The positioning rod is located in the plug placement area and is used for detachably connecting with the plug. The positioning rod extends along the height direction.

[0013] As a preferred solution, a plurality of card slots arranged at intervals along the height direction are provided on one side of the positioning rod, and the card slots are used for plugging with the plug.

[0014] As a preferred solution, the positioning rod includes a first sub-rod body and a second sub-rod body. The first sub-rod body and the second sub-rod body are arranged at intervals in the circumferential direction. The opposite sides of the first sub-rod body and the second sub-rod body are respectively provided with the card slots, and the second pipeline is located between the first sub-rod body and the second sub-rod body.

[0015] As a preferred solution, the first pipeline and the second pipeline are respectively arranged at intervals along the height direction of the main pipeline.

[0016] As a preferred solution, the ultrasonic generator is installed at the bottom of the flushing box body.

[0017] As a preferred solution, the dehumidifying port and the drying port are respectively arranged at the upper part of the rinsing box body.

[0018] Compared with the prior art, the beneficial effects of the plug cleaning device according to the embodiment of the present invention are as follows: The rinsing pipeline and the ultrasonic generator are both arranged in the rinsing box body for cleaning the plug. Among them, the plug is placed in the plug placement area, ultrasonic liquid is put into the rinsing box body, so that the plug is immersed in the ultrasonic liquid, and the ultrasonic generator is turned on to clean the plug. After the ultrasonic generator cleans the plug, the first spray port and the second spray port are respectively oriented towards the plug placement area to rinse the plug in different directions, improving the rinsing cleanliness of the plug. By combining ultrasonic cleaning and rinsing of the plug, different cleaning methods are used to clean the plug, further improving the cleaning cleanliness of the plug. After rinsing the plug, it is communicated with a dehumidifying device through the dehumidifying port, and is communicated with a nitrogen dryer through the drying port to dehumidify and dry the plug. The cleaning, dehumidifying and drying of the plug are all completed in the rinsing box body, avoiding the introduction of new pollutants during the drying process and ensuring the cleanliness of the plug cleaning process. At the same time, there is no need to manually move the position of the plug, improving the convenience of plug cleaning, reducing the plug transfer time, and improving the plug cleaning efficiency. Description of the Drawings

[0019] Figure 1 is the overall structural schematic diagram of the embodiment of the present invention.

[0020] Figure 2 is the internal structural schematic diagram of the embodiment of the present invention.

[0021] Figure 3 is the assembled structural schematic diagram of the rinsing water pipe, the positioning rod and the plug of the embodiment of the present invention.

[0022] Figure 4 is the assembled structural schematic diagram of the plug and the positioning rod of the embodiment of the present invention.

[0023] Figure 5 is the embodiment of the present invention Figure 2 The enlarged structural schematic diagram of the A place in.

[0024] Figure 6 is the embodiment of the present invention Figure 2 The enlarged structural schematic diagram of the B place in.

[0025] In the figure:

[0026] 10. Rinsing box body; 11. Dehumidifying port; 12. Drying port; 13. Plug placement area; 14. Positioning rod; 15. Card slot; 16. First sub-rod body; 17. Second sub-rod body; 18. Discharge port;

[0027] 20. Flushing pipeline; 21. Main pipeline; 22. First pipeline; 23. First nozzle; 24. Second pipeline; 25. Second nozzle

[0028] 30. Ultrasonic generator; 31. Cassette Detailed implementation manners

[0029] The following will further describe in detail the specific implementation manners of the present utility model in conjunction with the accompanying drawings and embodiments. The following embodiments are used to illustrate the present utility model, but are not used to limit the scope of the present utility model.

[0030] In the description of the present utility model, it should be understood that the orientation or positional relationship indicated by the terms "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc. in the present utility model is based on the orientation or positional relationship shown in the accompanying drawings. It is only for the convenience of describing the present utility model and simplifying the description, rather than indicating or implying that the device or element referred to must have a specific orientation, be constructed and operated in a specific orientation, and therefore should not be construed as a limitation to the present utility model.

[0031] In the description of the present utility model, it should be understood that the terms "connected", "joined", "fixed", etc. used in the present utility model should be understood in a broad sense. For example, it can be a fixed connection, a detachable connection, or integrated; it can be a mechanical connection, a welded connection; it can be directly connected, or indirectly connected through an intermediate medium. It can be the communication inside two elements or the interaction relationship between two elements, unless otherwise clearly defined. For those of ordinary skill in the art, the specific meanings of the above terms in the present utility model can be understood according to specific circumstances.

[0032] Such as Figures 1 to 6As shown in the figure, a cleaning device for a plug 31 according to a preferred embodiment of the present invention includes a flushing box body 10, a flushing pipeline 20, and an ultrasonic generator 30. The flushing box body 10 is provided with a dehumidifying port 11 and a drying port 12. The dehumidifying port 11 is used to communicate with a dehumidifying device, and the drying port 12 is used to communicate with a nitrogen dryer. The flushing pipeline 20 and the ultrasonic generator 30 are installed in the flushing box body 10. The flushing pipeline 20 includes a main pipeline 21 arranged in the height direction, a plurality of first pipelines 22 and second pipelines 24 arranged at intervals in the circumferential direction. The first pipelines 22 and the second pipelines 24 are respectively communicated with the main pipeline 21. One end of the first pipeline 22 and one end of the second pipeline 24 are respectively connected to the outer side surface of the main pipeline 21. A plug placing area 13 for placing the plug 31 is formed between adjacent first pipelines 22. The first pipeline 22 is provided with a first spray port 23 facing the plug placing area 13. The second pipeline 24 extends into the plug placing area 13, and the second pipeline 24 is provided with a second spray port 25 facing the plug placing area 13. The bottom of the flushing box body 10 is provided with a discharge port 18, and the discharge port 18 is connected to a drain pipe, and the drain pipe is connected with a drain valve.

[0033] For the plug cleaning device of the present invention, the flushing pipeline 20 and the ultrasonic generator 30 are both arranged in the flushing box body 10 for cleaning the plug 31. Among them, the plug 31 is placed in the plug placing area 13, ultrasonic liquid is put into the flushing box body 10, so that the plug 31 is immersed in the ultrasonic liquid, and the ultrasonic generator 30 is turned on to clean the plug 31. After the ultrasonic generator 30 cleans the plug 31, the first spray port 23 and the second spray port 25 respectively face the plug placing area 13 to flush the plug 31 in different directions, improving the flushing cleanliness of the plug 31. By combining ultrasonic cleaning and flushing of the plug 31 and cleaning the plug 31 with different cleaning methods, the cleaning cleanliness of the plug 31 is further improved. After flushing the plug 31, it is communicated with the dehumidifying device through the dehumidifying port 11 and with the nitrogen dryer through the drying port 12 to dehumidify and dry the plug 31. The cleaning, dehumidifying and drying of the plug 31 are all completed in the flushing box body 10, avoiding the introduction of new pollutants during the drying process and ensuring the cleanliness of the plug 31 cleaning process. At the same time, there is no need to manually move the position of the plug 31, improving the cleaning convenience of the plug 31, reducing the transfer time of the plug 31, and improving the cleaning efficiency of the plug 31.

[0034] As one embodiment, the main pipeline 21 is communicated with a flushing water source.

[0035] As one embodiment, a main pipe port is opened on the bottom surface or the top surface of the flushing box body 10, the main pipeline 21 is slidably connected to the main pipe port, and the flushing water source is communicated with the main pipeline 21.

[0036] As one embodiment, a plurality of first nozzles 23 are provided, and adjacent first nozzles 23 are arranged at intervals in the radial direction.

[0037] As one embodiment, the flushing box body 10 is connected with a drainage box, and a sealing plate is connected in the drainage box. The shape of the sealing plate corresponds to the shape of the bottom surface of the flushing box body 10. A plurality of discharge ports 18 are provided on the bottom surface of the flushing box body 10. A sealing driving member is arranged in the drainage box. The sealing driving member is in transmission connection with the sealing plate. The sealing driving member drives the sealing plate to move up and down. The sealing plate is connected with a sealing ring. The position of the sealing ring corresponds to the position of the discharge port 18. The sealing plate is provided with a drain port, and the position of the drain port is arranged in a dislocation manner with the position of the sealing ring. When the flushing box body 10 needs to store liquid, the sealing driving member drives the sealing plate and the sealing ring to rise to hermetically connect the discharge port 18. When the flushing box body 10 needs to drain water, the sealing driving member drives the sealing plate to move downward to open the discharge port 18, and the liquid is discharged through the drain port on the sealing plate. Through the arrangement of the plurality of discharge ports 18, the liquid discharge efficiency of the flushing box body 10 is improved.

[0038] Further, as Figures 1 to 6 shown, the flushing box body 10 is connected with a lifting driving member, and the lifting driving member is in transmission connection with the main pipeline 21. The main pipeline 21 is driven by the lifting driving member to move up and down in the height direction. The first pipeline 22 and the second pipeline 24 are driven by the main pipeline 21 to move up and down in the height direction, so as to increase the spraying cleaning range of the first pipeline 22 and the second pipeline 24 in the height direction, and improve the cleaning efficiency and cleaning cleanliness of the plug 31.

[0039] As one embodiment, the lifting driving member is connected to the top of the flushing box body 10, and the lifting driving member is fixedly connected to the upper end of the flushing pipeline 20.

[0040] As another embodiment, the lifting driving member is connected to the bottom of the flushing box body 10, and the lifting driving member is fixedly connected to the main pipeline 21.

[0041] Certainly, in order to improve the lifting stability of the flushing pipeline 20 in the height direction, a guide rail extending in the height direction can be connected in the flushing box body 10. A slider is connected to the outer periphery of the main pipeline 21, and the slider is slidably connected to the guide rail, so as to achieve the technical effect of improving the lifting stability of the flushing pipeline 20.

[0042] Further, as Figures 1 to 3As shown, the projections of the first pipe 22 and the second pipe 24 on the bottom surface of the flushing box body 10 are arranged at intervals along the circumferential direction of the main pipe 21. The projections of the first pipe 22 and the second pipe 24 on the bottom surface of the flushing box body 10 do not overlap and are arranged at intervals along the circumferential direction of the main pipe 21 to ensure that the second pipe 24 extends into the plug placement area 13, and the water flow sprayed by the second pipe 24 sprays outward from the plug placement area 13, while the spraying direction of the first pipe 22 sprays from the outer periphery of the plug placement area 13 to the inside of the plug placement area 13, flushing the plug 31 from different directions of the plug placement area 13, and improving the flushing cleanliness efficiency.

[0043] Further, as Figures 1 to 3 shown, at least three first pipes 22 are provided, and at least two plug placement areas 13 are formed in the flushing box body 10. A plurality of plug placement areas 13 are provided, increasing the placement positions of the plugs 31 and improving the cleaning efficiency of the plugs 31. The plugs 31 are placed in partitions to avoid overlapping placement of the plugs 31, reduce cleaning dead corners, and improve the cleaning cleanliness effect.

[0044] Further, as Figures 4 to 5 shown, a positioning rod 14 is connected to the bottom surface of the flushing box body 10. The positioning rod 14 is located in the plug placement area 13. The positioning rod 14 is used for detachably connecting with the plug 31, and the positioning rod 14 extends in the height direction. Through the arrangement of the positioning rod 14, the plug 31 is fixed to avoid the plug 31 moving during the flushing process, improving the position stability of the plug 31 during the flushing process and ensuring the flushing effect. The positioning rod 14 extends in the height direction, and the plugs 31 are stacked along the positioning rod 14 in the height direction, making the gaps that need to be cleaned of the plugs 31 more convenient for the cleaning liquid to pass through, avoiding the accumulation of the plugs 31 and generating cleaning dead corners, and improving the cleaning cleanliness effect and cleaning efficiency.

[0045] Further, as Figures 4 to 5 shown, a plurality of card slots 15 are provided at intervals in the height direction on one side of the positioning rod 14. The card slots 15 are used for plugging with the plug 31. The positions and shapes of the card slots 15 provided on the positioning rod 14 are correspondingly arranged with the side card strips of the plug 31, so that the side card strips of the plug 31 can be clamped with the card slots 15. Among them, when the plug 31 is assembled with the positioning rod 14, the side card strip of the plug 31 can be pushed into the card slot 15, which is convenient to operate and improves the cleaning operation efficiency.

[0046] Further, as Figures 4 to 5As shown, the positioning rod 14 includes a first sub-rod body 16 and a second sub-rod body 17. The first sub-rod body 16 and the second sub-rod body 17 are arranged at intervals in the circumferential direction. The opposite sides of the first sub-rod body 16 and the second sub-rod body 17 are respectively provided with the card slots 15. The second pipe 24 is located between the first sub-rod body 16 and the second sub-rod body 17. Both sides of the plug 31 are inserted into the card slots 15 of the first sub-rod body 16 and the second sub-rod body 17 respectively. By limiting both sides of the plug 31 by the first sub-rod body 16 and the second sub-rod body 17, the placement stability of the plug 31 is improved. The second pipe 24 is located between the first sub-rod body 16 and the second sub-rod body 17, and the second nozzle 25 is arranged facing the plug 31, ensuring that the cleaning liquid from the second nozzle 25 is sprayed from the inside to the outside of the plug 31 to clean the plug 31.

[0047] Further, as Figures 1 to 3 shown, the first pipe 22 and the second pipe 24 are respectively arranged at intervals along the height direction of the main pipe 21 to ensure that the plugs 31 placed along the height direction can be rinsed by the first pipe 22 and the second pipe 24 respectively, ensuring the rinsing cleanliness.

[0048] Further, as Figure 1 shown, the ultrasonic generator 30 is installed at the bottom of the rinsing box body 10, so that there is less cleaning liquid covering the ultrasonic generator 30 in the rinsing box body 10, and the cleaning of a small number of plugs 31 can be realized.

[0049] Further, as Figure 1 shown, the dehumidification port 11 and the drying port 12 are respectively arranged at the upper part of the rinsing box body 10. When ultrasonic cleaning is carried out by putting cleaning liquid into the rinsing box body 10, it is avoided that the cleaning liquid enters the corresponding equipment from the dehumidification port 11 and the drying port 12, resulting in equipment damage, and the use safety is improved.

[0050] The use process of this plug 31 cleaning device:

[0051] 1. Place the plug 31 to be cleaned along the positioning rod 14 from bottom to top. After introducing a certain amount of ultrasonic liquid into the rinsing box body 10, cover the top cover of the rinsing box body 10, turn on the switch of the ultrasonic generator 30, and start ultrasonic cleaning of the plug 31. The ultrasonic cleaning time is 60 min.

[0052] 2. After the ultrasonic cleaning is completed, open the drain valve at the bottom of the rinsing box body 10, and the waste liquid after ultrasonic cleaning is discharged through the discharge port 18;

[0053] 3. Rinse the plug 31 with deionized water through the flushing pipe 20, and flush the gap of the plug 31 through the second pipe 24. The shape of the second nozzle 25 fits the position of the gap of the plug 31, and the second nozzle 25 flushes the gap of the plug 31 from the inside to the outside. The first nozzle 23 of the first pipe 22 flushes the gap of the plug 31 from the outside to the inside. During the flushing process, the lifting drive member drives the main pipe 21 to move up and down, thereby driving the first pipe 22 and the second pipe 24 to move up and down. The deionized water generated by the above flushing is discharged through the discharge port 18 at the bottom. The entire flushing process lasts for 10-15 minutes.

[0054] 4. After flushing is completed, turn on the drying button. The dehumidifier and nitrogen dryer are both installed outside the flushing box body 10; the dehumidifier is connected to the dehumidification port 11, and the nitrogen dryer is connected to the drying port 12. After turning on the switch, the dehumidifier will first dehumidify the moisture generated in the flushing box body 10 during the cleaning process, and then the nitrogen in the nitrogen dryer will rush into the interior of the flushing box body 10 to start room temperature drying. The whole process lasts for 60 minutes to ensure that the jam 31 is completely dried.

[0055] 5. After the plug 31 is cleaned, nitrogen will be continuously flushed into the nitrogen dryer before removing the plug 31 to ensure the cleanliness of the plug 31.

[0056] In summary, the present invention provides a jam cleaning device, wherein a flushing pipe 20 and an ultrasonic generator 30 are both disposed within a flushing box 10 for cleaning a jam 31. The jam 31 is placed in the jam placement area 13, an ultrasonic liquid is placed within the flushing box 10, and the jam 31 is immersed in the ultrasonic liquid. The ultrasonic generator 30 is then turned on to clean the jam 31. After the ultrasonic generator 30 cleans the jam 31, the first nozzle 23 and the second nozzle 25 are directed toward the jam placement area 13, flushing the jam 31 from different directions, thereby improving the flushing cleanliness of the jam 31. Combining ultrasonic cleaning and flushing, the jam 31 is cleaned using different cleaning methods, further improving the cleanliness of the jam 31. After flushing, the jam 31 is connected to the dehumidification device via the dehumidification port 11, and the drying port 12 is connected to the nitrogen dryer to dehumidify and dry the jam 31. The cleaning, dehumidification, and drying of the plug 31 are all completed within the rinsing box 10, preventing the introduction of new contaminants during the drying process and ensuring the cleanliness of the plug 31. Furthermore, there is no need to manually move the plug 31, making it easier to clean the plug 31, reducing the time required to move the plug 31 and improving its cleaning efficiency.

[0057] The above are only the preferred embodiments of the present utility model. It should be pointed out that for those of ordinary skill in the art, without departing from the technical principle of the present utility model, several improvements and substitutions can still be made, and these improvements and substitutions should also be regarded as the protection scope of the present utility model.

Claims

1. A cassette cleaning device, characterized in that: The invention comprises a flushing box body, a flushing pipe and an ultrasonic generator, the flushing box body is provided with a dehumidification port and a drying port, the dehumidification port is used to communicate with the dehumidification device, the drying port is used to communicate with the nitrogen dryer, the flushing pipe and the ultrasonic generator are respectively installed in the flushing box body, the flushing pipe comprises a main pipe arranged along the height direction, a plurality of first pipes and second pipes arranged at intervals along the circumferential direction, the first pipe and the second pipe are respectively communicated with the main pipe, one end of the first pipe and one end of the second pipe are respectively connected to the outer side surface of the main pipe, a plug placement area for placing a plug is formed between adjacent first pipes, the first pipe is provided with a first nozzle facing the plug placement area, the second pipe extends into the plug placement area, the second pipe is provided with a second nozzle facing the plug placement area, a discharge port is provided at the bottom of the flushing box body, the discharge port is connected to a drain pipe, and the drain pipe is connected to a drain valve.

2. The cassette cleaning device according to claim 1, characterized in that: The flushing box body is connected to a lifting drive member, and the lifting drive member is in driving connection with the main pipeline.

3. The cassette cleaning device according to claim 1, wherein: Projections of the first pipe and the second pipe on the bottom surface of the flushing box body are arranged at intervals along the circumference of the main pipe.

4. The cassette cleaning device according to claim 1, wherein: At least three first pipes are provided, and at least two plug placement areas are formed in the flushing box body.

5. The cassette cleaning device according to claim 1, wherein: The bottom surface of the flushing box body is connected with a positioning rod, the positioning rod is located in the plug placement area, the positioning rod is used to be detachably connected to the plug, and the positioning rod extends along the height direction.

6. The cassette cleaning device according to claim 5, wherein: One side of the positioning rod is provided with a plurality of card slots spaced apart along the height direction, and the card slots are used for plugging with the card plug.

7. The cassette cleaning device according to claim 6, wherein: The positioning rod includes a first sub-rod body and a second sub-rod body, the first sub-rod body and the second sub-rod body are arranged at intervals along the circumferential direction, the card slots are respectively provided on the opposite sides of the first sub-rod body and the second sub-rod body, and the second pipe is located between the first sub-rod body and the second sub-rod body.

8. The cassette cleaning device according to claim 1, wherein: The first pipeline and the second pipeline are respectively arranged at intervals along the height direction of the main pipeline.

9. The cassette cleaning device according to claim 1, wherein: The ultrasonic generator is installed at the bottom of the flushing box body.

10. The cassette cleaning device according to claim 1, characterized in that: The dehumidification port and the drying port are respectively arranged on the upper part of the flushing box body.

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